JPWO2021130837A5 - - Google Patents

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JPWO2021130837A5
JPWO2021130837A5 JP2021566413A JP2021566413A JPWO2021130837A5 JP WO2021130837 A5 JPWO2021130837 A5 JP WO2021130837A5 JP 2021566413 A JP2021566413 A JP 2021566413A JP 2021566413 A JP2021566413 A JP 2021566413A JP WO2021130837 A5 JPWO2021130837 A5 JP WO2021130837A5
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patent document
international publication
international
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JP2021566413A
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Japanese (ja)
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JP7295974B2 (ja
JPWO2021130837A1 (https=
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Priority claimed from PCT/JP2019/050481 external-priority patent/WO2021130837A1/ja
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JP2021566413A 2019-12-24 2019-12-24 電子源、電子線装置および電子源の製造方法 Active JP7295974B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/050481 WO2021130837A1 (ja) 2019-12-24 2019-12-24 電子源、電子線装置および電子源の製造方法

Publications (3)

Publication Number Publication Date
JPWO2021130837A1 JPWO2021130837A1 (https=) 2021-07-01
JPWO2021130837A5 true JPWO2021130837A5 (https=) 2022-08-25
JP7295974B2 JP7295974B2 (ja) 2023-06-21

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ID=76575750

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JP2021566413A Active JP7295974B2 (ja) 2019-12-24 2019-12-24 電子源、電子線装置および電子源の製造方法

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US (1) US12494338B2 (https=)
JP (1) JP7295974B2 (https=)
WO (1) WO2021130837A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11651924B1 (en) * 2022-06-22 2023-05-16 Fei Company Method of producing microrods for electron emitters, and associated microrods and electron emitters

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147038A (ja) * 1984-07-02 1986-03-07 ジエイソン　ジヨン　キム 熱電子陰極とその製造方法
JP2000173900A (ja) 1998-12-08 2000-06-23 Canon Inc 電子ビーム照明装置、および該照明装置を用いた電子ビーム露光装置
WO2008120341A1 (ja) 2007-03-29 2008-10-09 Advantest Corporation 電子銃及び電子ビーム露光装置
JP4939565B2 (ja) 2009-04-06 2012-05-30 キヤノン株式会社 電子ビーム露光装置
JP2011146250A (ja) 2010-01-14 2011-07-28 Nuflare Technology Inc 電子銃用のエミッタ使用方法
JP5595199B2 (ja) 2010-09-23 2014-09-24 株式会社ニューフレアテクノロジー 電子銃および電子銃を用いた電子ビーム描画装置
US8952605B2 (en) 2012-07-03 2015-02-10 National Institute For Materials Science Metal hexaboride cold field emitter, method of fabricating same, and electron gun
US9165737B2 (en) * 2012-10-04 2015-10-20 Nuflare Technology, Inc. High-brightness, long life thermionic cathode and methods of its fabrication
US9984846B2 (en) 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment
WO2018016286A1 (ja) * 2016-07-19 2018-01-25 デンカ株式会社 電子源およびその製造方法
CN109804450B (zh) 2016-10-13 2020-12-01 株式会社日立高新技术 电子束装置
JP6636472B2 (ja) 2017-02-28 2020-01-29 株式会社日立ハイテクノロジーズ 電子源およびそれを用いた電子線装置

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