JPWO2021130837A1 - - Google Patents
Info
- Publication number
- JPWO2021130837A1 JPWO2021130837A1 JP2021566413A JP2021566413A JPWO2021130837A1 JP WO2021130837 A1 JPWO2021130837 A1 JP WO2021130837A1 JP 2021566413 A JP2021566413 A JP 2021566413A JP 2021566413 A JP2021566413 A JP 2021566413A JP WO2021130837 A1 JPWO2021130837 A1 JP WO2021130837A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/20—Sources of radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/418—Imaging electron microscope
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/061—Construction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/050481 WO2021130837A1 (ja) | 2019-12-24 | 2019-12-24 | 電子源、電子線装置および電子源の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021130837A1 true JPWO2021130837A1 (https=) | 2021-07-01 |
| JPWO2021130837A5 JPWO2021130837A5 (https=) | 2022-08-25 |
| JP7295974B2 JP7295974B2 (ja) | 2023-06-21 |
Family
ID=76575750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021566413A Active JP7295974B2 (ja) | 2019-12-24 | 2019-12-24 | 電子源、電子線装置および電子源の製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US12494338B2 (https=) |
| JP (1) | JP7295974B2 (https=) |
| WO (1) | WO2021130837A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11651924B1 (en) * | 2022-06-22 | 2023-05-16 | Fei Company | Method of producing microrods for electron emitters, and associated microrods and electron emitters |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6147038A (ja) * | 1984-07-02 | 1986-03-07 | ジエイソン ジヨン キム | 熱電子陰極とその製造方法 |
| WO2008120412A1 (ja) * | 2007-03-29 | 2008-10-09 | Advantest Corporation | 電子銃及び電子ビーム露光装置 |
| JP2009152645A (ja) * | 2009-04-06 | 2009-07-09 | Canon Inc | 電子ビーム照明装置、および該照明装置を用いた電子ビーム露光装置 |
| JP2011146250A (ja) * | 2010-01-14 | 2011-07-28 | Nuflare Technology Inc | 電子銃用のエミッタ使用方法 |
| JP2012069364A (ja) * | 2010-09-23 | 2012-04-05 | Nuflare Technology Inc | 電子銃および電子銃を用いた電子ビーム描画装置 |
| JP2018142453A (ja) * | 2017-02-28 | 2018-09-13 | 株式会社日立ハイテクノロジーズ | 電子源およびそれを用いた電子線装置 |
| JP2019525401A (ja) * | 2016-06-30 | 2019-09-05 | ケーエルエー コーポレイション | 高輝度でホウ素を含有する真空環境用電子ビームエミッタ |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000173900A (ja) | 1998-12-08 | 2000-06-23 | Canon Inc | 電子ビーム照明装置、および該照明装置を用いた電子ビーム露光装置 |
| US8952605B2 (en) | 2012-07-03 | 2015-02-10 | National Institute For Materials Science | Metal hexaboride cold field emitter, method of fabricating same, and electron gun |
| US9165737B2 (en) * | 2012-10-04 | 2015-10-20 | Nuflare Technology, Inc. | High-brightness, long life thermionic cathode and methods of its fabrication |
| WO2018016286A1 (ja) * | 2016-07-19 | 2018-01-25 | デンカ株式会社 | 電子源およびその製造方法 |
| CN109804450B (zh) | 2016-10-13 | 2020-12-01 | 株式会社日立高新技术 | 电子束装置 |
-
2019
- 2019-12-24 JP JP2021566413A patent/JP7295974B2/ja active Active
- 2019-12-24 WO PCT/JP2019/050481 patent/WO2021130837A1/ja not_active Ceased
- 2019-12-24 US US17/781,267 patent/US12494338B2/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6147038A (ja) * | 1984-07-02 | 1986-03-07 | ジエイソン ジヨン キム | 熱電子陰極とその製造方法 |
| WO2008120412A1 (ja) * | 2007-03-29 | 2008-10-09 | Advantest Corporation | 電子銃及び電子ビーム露光装置 |
| JP2009152645A (ja) * | 2009-04-06 | 2009-07-09 | Canon Inc | 電子ビーム照明装置、および該照明装置を用いた電子ビーム露光装置 |
| JP2011146250A (ja) * | 2010-01-14 | 2011-07-28 | Nuflare Technology Inc | 電子銃用のエミッタ使用方法 |
| JP2012069364A (ja) * | 2010-09-23 | 2012-04-05 | Nuflare Technology Inc | 電子銃および電子銃を用いた電子ビーム描画装置 |
| JP2019525401A (ja) * | 2016-06-30 | 2019-09-05 | ケーエルエー コーポレイション | 高輝度でホウ素を含有する真空環境用電子ビームエミッタ |
| JP2018142453A (ja) * | 2017-02-28 | 2018-09-13 | 株式会社日立ハイテクノロジーズ | 電子源およびそれを用いた電子線装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7295974B2 (ja) | 2023-06-21 |
| US12494338B2 (en) | 2025-12-09 |
| WO2021130837A1 (ja) | 2021-07-01 |
| US20220415603A1 (en) | 2022-12-29 |
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