JPWO2021090542A1 - - Google Patents
Info
- Publication number
- JPWO2021090542A1 JPWO2021090542A1 JP2021554819A JP2021554819A JPWO2021090542A1 JP WO2021090542 A1 JPWO2021090542 A1 JP WO2021090542A1 JP 2021554819 A JP2021554819 A JP 2021554819A JP 2021554819 A JP2021554819 A JP 2021554819A JP WO2021090542 A1 JPWO2021090542 A1 JP WO2021090542A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019200737 | 2019-11-05 | ||
JP2019200737 | 2019-11-05 | ||
PCT/JP2020/028768 WO2021090542A1 (ja) | 2019-11-05 | 2020-07-27 | 搬送車システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021090542A1 true JPWO2021090542A1 (ja) | 2021-05-14 |
JP7188615B2 JP7188615B2 (ja) | 2022-12-13 |
Family
ID=75848329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021554819A Active JP7188615B2 (ja) | 2019-11-05 | 2020-07-27 | 搬送車システム |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220375774A1 (ja) |
EP (1) | EP4057325A4 (ja) |
JP (1) | JP7188615B2 (ja) |
KR (1) | KR102627684B1 (ja) |
CN (1) | CN114365271A (ja) |
WO (1) | WO2021090542A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61196856A (ja) * | 1985-02-27 | 1986-09-01 | 株式会社ダイフク | 搬送車 |
JPH05310323A (ja) * | 1991-03-15 | 1993-11-22 | Shinko Electric Co Ltd | クリーンルーム用の無人搬送装置 |
JP2015533026A (ja) * | 2012-10-31 | 2015-11-16 | 株式会社ダイフク | ウェハパージ可能な天井保管装置(apparatusforstockingandpurgingwaferatceiling) |
JP2016096192A (ja) * | 2014-11-12 | 2016-05-26 | 株式会社ダイフク | 物品搬送設備 |
JP2017159975A (ja) * | 2016-03-07 | 2017-09-14 | 株式会社ダイフク | 容器搬送設備 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5700119B2 (ja) * | 2011-05-25 | 2015-04-15 | 村田機械株式会社 | ロードポート装置、搬送システム、及びコンテナ搬出方法 |
KR101822009B1 (ko) * | 2014-02-07 | 2018-03-08 | 무라다기카이가부시끼가이샤 | 퍼지 장치 및 퍼지 방법 |
KR20170058393A (ko) * | 2014-09-25 | 2017-05-26 | 무라다기카이가부시끼가이샤 | 퍼지 장치 및 퍼지 방법 |
KR101691607B1 (ko) * | 2015-08-26 | 2016-12-30 | (주)젠스엠 | 퍼지 기능을 갖는 웨이퍼 용기 이송 장치 |
US10643877B2 (en) * | 2015-08-27 | 2020-05-05 | Murata Machinery, Ltd. | Retrieving device and storing device |
WO2017212841A1 (ja) * | 2016-06-08 | 2017-12-14 | 村田機械株式会社 | 容器保管装置及び容器保管方法 |
KR101841925B1 (ko) | 2017-07-28 | 2018-03-26 | 크린팩토메이션 주식회사 | 웨이퍼 내장 풉에 대한 지상 퍼지 스테이션 |
KR102391970B1 (ko) * | 2017-09-08 | 2022-04-28 | 무라다기카이가부시끼가이샤 | 보관 시스템과 보관 시스템에서의 퍼지 방법 |
-
2020
- 2020-07-27 JP JP2021554819A patent/JP7188615B2/ja active Active
- 2020-07-27 EP EP20883714.6A patent/EP4057325A4/en active Pending
- 2020-07-27 WO PCT/JP2020/028768 patent/WO2021090542A1/ja unknown
- 2020-07-27 US US17/769,853 patent/US20220375774A1/en active Pending
- 2020-07-27 CN CN202080063388.3A patent/CN114365271A/zh active Pending
- 2020-07-27 KR KR1020227009720A patent/KR102627684B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61196856A (ja) * | 1985-02-27 | 1986-09-01 | 株式会社ダイフク | 搬送車 |
JPH05310323A (ja) * | 1991-03-15 | 1993-11-22 | Shinko Electric Co Ltd | クリーンルーム用の無人搬送装置 |
JP2015533026A (ja) * | 2012-10-31 | 2015-11-16 | 株式会社ダイフク | ウェハパージ可能な天井保管装置(apparatusforstockingandpurgingwaferatceiling) |
JP2016096192A (ja) * | 2014-11-12 | 2016-05-26 | 株式会社ダイフク | 物品搬送設備 |
JP2017159975A (ja) * | 2016-03-07 | 2017-09-14 | 株式会社ダイフク | 容器搬送設備 |
Also Published As
Publication number | Publication date |
---|---|
CN114365271A (zh) | 2022-04-15 |
EP4057325A1 (en) | 2022-09-14 |
US20220375774A1 (en) | 2022-11-24 |
JP7188615B2 (ja) | 2022-12-13 |
WO2021090542A1 (ja) | 2021-05-14 |
EP4057325A4 (en) | 2023-11-22 |
TW202120415A (zh) | 2021-06-01 |
KR20220050211A (ko) | 2022-04-22 |
KR102627684B1 (ko) | 2024-01-23 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220304 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20221101 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221114 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7188615 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |