JPWO2021066156A1 - - Google Patents
Info
- Publication number
- JPWO2021066156A1 JPWO2021066156A1 JP2021551489A JP2021551489A JPWO2021066156A1 JP WO2021066156 A1 JPWO2021066156 A1 JP WO2021066156A1 JP 2021551489 A JP2021551489 A JP 2021551489A JP 2021551489 A JP2021551489 A JP 2021551489A JP WO2021066156 A1 JPWO2021066156 A1 JP WO2021066156A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/04—Pattern deposit, e.g. by using masks
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019183939 | 2019-10-04 | ||
| JP2019183940 | 2019-10-04 | ||
| PCT/JP2020/037577 WO2021066156A1 (ja) | 2019-10-04 | 2020-10-02 | 結晶性積層構造体および半導体装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2021066156A1 true JPWO2021066156A1 (https=) | 2021-04-08 |
Family
ID=75338098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021551489A Pending JPWO2021066156A1 (https=) | 2019-10-04 | 2020-10-02 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2021066156A1 (https=) |
| WO (1) | WO2021066156A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023071085A (ja) * | 2021-11-10 | 2023-05-22 | 信越化学工業株式会社 | 下地基板及び単結晶ダイヤモンド積層基板並びにそれらの製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS645999A (en) * | 1987-06-29 | 1989-01-10 | Nippon Telegraph & Telephone | Production of thin film of ferroelectric single crystal |
| JP2016025256A (ja) * | 2014-07-22 | 2016-02-08 | 株式会社Flosfia | 半導体装置 |
| JP2018002544A (ja) * | 2016-06-30 | 2018-01-11 | 株式会社Flosfia | 結晶性酸化物半導体膜およびその製造方法 |
-
2020
- 2020-10-02 JP JP2021551489A patent/JPWO2021066156A1/ja active Pending
- 2020-10-02 WO PCT/JP2020/037577 patent/WO2021066156A1/ja not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS645999A (en) * | 1987-06-29 | 1989-01-10 | Nippon Telegraph & Telephone | Production of thin film of ferroelectric single crystal |
| JP2016025256A (ja) * | 2014-07-22 | 2016-02-08 | 株式会社Flosfia | 半導体装置 |
| JP2018002544A (ja) * | 2016-06-30 | 2018-01-11 | 株式会社Flosfia | 結晶性酸化物半導体膜およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021066156A1 (ja) | 2021-04-08 |
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