JPWO2021065884A1 - - Google Patents

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Publication number
JPWO2021065884A1
JPWO2021065884A1 JP2021551299A JP2021551299A JPWO2021065884A1 JP WO2021065884 A1 JPWO2021065884 A1 JP WO2021065884A1 JP 2021551299 A JP2021551299 A JP 2021551299A JP 2021551299 A JP2021551299 A JP 2021551299A JP WO2021065884 A1 JPWO2021065884 A1 JP WO2021065884A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021551299A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021065884A1 publication Critical patent/JPWO2021065884A1/ja
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/107Integrated devices having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/16Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • H10F77/331Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H10F77/334Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers or cold shields for infrared detectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/122Active materials comprising only Group IV materials
JP2021551299A 2019-09-30 2020-09-29 Pending JPWO2021065884A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019178844 2019-09-30
PCT/JP2020/036834 WO2021065884A1 (ja) 2019-09-30 2020-09-29 グラフェン受光素子、及びその作製方法

Publications (1)

Publication Number Publication Date
JPWO2021065884A1 true JPWO2021065884A1 (https=) 2021-04-08

Family

ID=75338341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021551299A Pending JPWO2021065884A1 (https=) 2019-09-30 2020-09-29

Country Status (3)

Country Link
US (1) US20220399466A1 (https=)
JP (1) JPWO2021065884A1 (https=)
WO (1) WO2021065884A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115101608B (zh) * 2022-06-16 2024-10-18 中国科学院半导体研究所 石墨烯红外探测器
JP2024018113A (ja) * 2022-07-29 2024-02-08 富士通株式会社 光センサ、及び光センサアレイ
JP2024032579A (ja) * 2022-08-29 2024-03-12 富士通株式会社 グラフェン光センサの製造方法
CN119836113B (zh) * 2025-01-02 2025-12-05 浙江大学 一种自驱动透明紫外柔性光电探测器及图像传感阵列
CN120264870A (zh) * 2025-06-06 2025-07-04 中山大学 一种石墨烯柔性太赫兹波探测器及其制备方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013502735A (ja) * 2009-08-24 2013-01-24 インターナショナル・ビジネス・マシーンズ・コーポレーション 単一またはいくつかの層のグラフェン・ベースの光検出デバイスおよびその形成方法
CN104766902A (zh) * 2014-06-16 2015-07-08 南京大学 基于石墨烯碳纳米管复合吸收层的红外光探测晶体管
WO2016121408A1 (ja) * 2015-01-28 2016-08-04 三菱電機株式会社 電磁波検出器および電磁波検出器アレイ
CN106159003A (zh) * 2015-04-09 2016-11-23 中国科学院物理研究所 一种光伏装置和一种产生光伏效应的方法
CN106653892A (zh) * 2015-11-03 2017-05-10 中国科学院物理研究所 一种光伏装置以及一种产生光伏效应的方法
WO2018173347A1 (ja) * 2017-03-22 2018-09-27 三菱電機株式会社 電磁波検出器、電磁波検出器アレイおよび電磁波検出方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8507890B1 (en) * 2012-01-26 2013-08-13 Fundacio Institut De Ciencies Fotoniques Photoconversion device with enhanced photon absorption
CN110392933B (zh) * 2017-03-10 2022-12-06 三菱电机株式会社 电磁波检测器、电磁波检测器阵列以及电磁波检测方法
EP3635752B1 (en) * 2017-06-01 2023-12-27 The Regents of The University of California Metallo-graphene nanocomposites and methods for using metallo-graphene nanocomposites for electromagnetic energy conversion
TWI669556B (zh) * 2018-06-29 2019-08-21 友達光電股份有限公司 顯示面板

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013502735A (ja) * 2009-08-24 2013-01-24 インターナショナル・ビジネス・マシーンズ・コーポレーション 単一またはいくつかの層のグラフェン・ベースの光検出デバイスおよびその形成方法
CN104766902A (zh) * 2014-06-16 2015-07-08 南京大学 基于石墨烯碳纳米管复合吸收层的红外光探测晶体管
WO2016121408A1 (ja) * 2015-01-28 2016-08-04 三菱電機株式会社 電磁波検出器および電磁波検出器アレイ
CN106159003A (zh) * 2015-04-09 2016-11-23 中国科学院物理研究所 一种光伏装置和一种产生光伏效应的方法
CN106653892A (zh) * 2015-11-03 2017-05-10 中国科学院物理研究所 一种光伏装置以及一种产生光伏效应的方法
WO2018173347A1 (ja) * 2017-03-22 2018-09-27 三菱電機株式会社 電磁波検出器、電磁波検出器アレイおよび電磁波検出方法

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
CHUANTONG CHENG ET AL.: ""Frequency conversion with nonlinear graphene photodetectors"", NANOSCALE, vol. 9, JPN6025015685, 2017, pages 4082 - 4089, ISSN: 0005576911 *
CHUANTONG CHENG ET AL.: ""Performance Enhancement of Graphene Photodetectors via In Situ Preparation of TiO2 on Graphene Chan", ADVANCED MATERIALS TECHNOLOGIES, vol. Vol.4, Article Number 1800548, JPN6024053540, 4 December 2018 (2018-12-04), pages 1 - 8, ISSN: 0005576910 *
YUN GAO ET AL.: ""A silicon nitride waveguide-integrated chemical vapor deposited graphene photodetector with 38 GHz", NANOSCALE, vol. 10, JPN6024053541, 2018, pages 21851 - 21856, ISSN: 0005576913 *

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Publication number Publication date
US20220399466A1 (en) 2022-12-15
WO2021065884A1 (ja) 2021-04-08

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