JPWO2021044505A1 - - Google Patents

Info

Publication number
JPWO2021044505A1
JPWO2021044505A1 JP2021543829A JP2021543829A JPWO2021044505A1 JP WO2021044505 A1 JPWO2021044505 A1 JP WO2021044505A1 JP 2021543829 A JP2021543829 A JP 2021543829A JP 2021543829 A JP2021543829 A JP 2021543829A JP WO2021044505 A1 JPWO2021044505 A1 JP WO2021044505A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021543829A
Other versions
JPWO2021044505A5 (ja
JP7435613B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021044505A1 publication Critical patent/JPWO2021044505A1/ja
Publication of JPWO2021044505A5 publication Critical patent/JPWO2021044505A5/ja
Application granted granted Critical
Publication of JP7435613B2 publication Critical patent/JP7435613B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
JP2021543829A 2019-09-03 2019-09-03 移動体装置及び加工システム Active JP7435613B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/034507 WO2021044505A1 (ja) 2019-09-03 2019-09-03 移動体装置及び加工システム

Publications (3)

Publication Number Publication Date
JPWO2021044505A1 true JPWO2021044505A1 (ja) 2021-03-11
JPWO2021044505A5 JPWO2021044505A5 (ja) 2022-05-10
JP7435613B2 JP7435613B2 (ja) 2024-02-21

Family

ID=74851984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021543829A Active JP7435613B2 (ja) 2019-09-03 2019-09-03 移動体装置及び加工システム

Country Status (2)

Country Link
JP (1) JP7435613B2 (ja)
WO (1) WO2021044505A1 (ja)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266585A (ja) * 2006-03-02 2007-10-11 Sumitomo Heavy Ind Ltd ステージ装置
JP2015196222A (ja) * 2014-04-01 2015-11-09 日本精工株式会社 テーブル装置、及び搬送装置
JP2015204317A (ja) * 2014-04-11 2015-11-16 株式会社ニコン 移動体装置及び露光装置、並びにデバイス製造方法
JP2015232718A (ja) * 2009-08-20 2015-12-24 株式会社ニコン 物体処理装置、露光装置及び露光方法、並びにデバイス製造方法
JP2016002610A (ja) * 2014-06-16 2016-01-12 トヨタ自動車株式会社 ステージ装置
JP2016026881A (ja) * 2014-06-23 2016-02-18 三菱電機株式会社 レーザ加工装置
JP2016166924A (ja) * 2015-03-09 2016-09-15 株式会社ニューフレアテクノロジー ステージ装置
WO2017099087A1 (ja) * 2015-12-07 2017-06-15 株式会社ニコン 露光装置及び露光装置の制御方法、並びにデバイス製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266585A (ja) * 2006-03-02 2007-10-11 Sumitomo Heavy Ind Ltd ステージ装置
JP2015232718A (ja) * 2009-08-20 2015-12-24 株式会社ニコン 物体処理装置、露光装置及び露光方法、並びにデバイス製造方法
JP2015196222A (ja) * 2014-04-01 2015-11-09 日本精工株式会社 テーブル装置、及び搬送装置
JP2015204317A (ja) * 2014-04-11 2015-11-16 株式会社ニコン 移動体装置及び露光装置、並びにデバイス製造方法
JP2016002610A (ja) * 2014-06-16 2016-01-12 トヨタ自動車株式会社 ステージ装置
JP2016026881A (ja) * 2014-06-23 2016-02-18 三菱電機株式会社 レーザ加工装置
JP2016166924A (ja) * 2015-03-09 2016-09-15 株式会社ニューフレアテクノロジー ステージ装置
WO2017099087A1 (ja) * 2015-12-07 2017-06-15 株式会社ニコン 露光装置及び露光装置の制御方法、並びにデバイス製造方法

Also Published As

Publication number Publication date
WO2021044505A1 (ja) 2021-03-11
JP7435613B2 (ja) 2024-02-21

Similar Documents

Publication Publication Date Title
BR112019017762A2 (ja)
BR112021017339A2 (ja)
BR112021018450A2 (ja)
BR112021013854A2 (ja)
BR112021017939A2 (ja)
BR112021017738A2 (ja)
BR112021017892A2 (ja)
BR112019016141A2 (ja)
BR112021017782A2 (ja)
BR112021008711A2 (ja)
BR112019016142A2 (ja)
BR112019016138A2 (ja)
BR112021018168A2 (ja)
BR112021017728A2 (ja)
BR112021018452A2 (ja)
BR112021017234A2 (ja)
BR112021017355A2 (ja)
BR112021017703A2 (ja)
BR112021017173A2 (ja)
BR112021018102A2 (ja)
BR112021018584A2 (ja)
BR112021017083A2 (ja)
BR112021017637A2 (ja)
BR112021015080A2 (ja)
BR112021012348A2 (ja)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220225

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220225

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230328

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20230526

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230713

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20231003

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231206

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20231218

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240109

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240122

R150 Certificate of patent or registration of utility model

Ref document number: 7435613

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150