JPWO2020261355A5 - - Google Patents
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- Publication number
- JPWO2020261355A5 JPWO2020261355A5 JP2021528677A JP2021528677A JPWO2020261355A5 JP WO2020261355 A5 JPWO2020261355 A5 JP WO2020261355A5 JP 2021528677 A JP2021528677 A JP 2021528677A JP 2021528677 A JP2021528677 A JP 2021528677A JP WO2020261355 A5 JPWO2020261355 A5 JP WO2020261355A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- plan
- points
- view
- thicknesses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 5
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 230000005484 gravity Effects 0.000 claims 1
- 239000006104 solid solution Substances 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/025042 WO2020261355A1 (ja) | 2019-06-25 | 2019-06-25 | 半導体膜 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2020261355A1 JPWO2020261355A1 (https=) | 2020-12-30 |
| JPWO2020261355A5 true JPWO2020261355A5 (https=) | 2022-03-24 |
| JP7301966B2 JP7301966B2 (ja) | 2023-07-03 |
Family
ID=74060792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021528677A Active JP7301966B2 (ja) | 2019-06-25 | 2019-06-25 | 半導体膜 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7301966B2 (https=) |
| WO (1) | WO2020261355A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW202235664A (zh) * | 2021-03-12 | 2022-09-16 | 日商信越化學工業股份有限公司 | 氧化物半導體膜及其成膜方法、半導體裝置 |
| EP4417732A1 (en) | 2021-10-14 | 2024-08-21 | Shin-Etsu Chemical Co., Ltd. | Film deposition device and manufacturing method |
| US20240425982A1 (en) | 2021-11-02 | 2024-12-26 | Shin-Etsu Chemical Co., Ltd. | Film forming apparatus and film forming method, and oxide semiconductor film and laminate |
| JPWO2024122463A1 (https=) * | 2022-12-06 | 2024-06-13 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6867637B2 (ja) * | 2014-06-27 | 2021-04-28 | 株式会社Flosfia | サセプタ |
| JP6478103B2 (ja) * | 2015-01-29 | 2019-03-06 | 株式会社Flosfia | 成膜装置および成膜方法 |
| JP6904517B2 (ja) * | 2016-06-30 | 2021-07-14 | 株式会社Flosfia | 結晶性酸化物半導体膜およびその製造方法 |
-
2019
- 2019-06-25 JP JP2021528677A patent/JP7301966B2/ja active Active
- 2019-06-25 WO PCT/JP2019/025042 patent/WO2020261355A1/ja not_active Ceased
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