JPWO2020246150A1 - - Google Patents
Info
- Publication number
- JPWO2020246150A1 JPWO2020246150A1 JP2021524695A JP2021524695A JPWO2020246150A1 JP WO2020246150 A1 JPWO2020246150 A1 JP WO2020246150A1 JP 2021524695 A JP2021524695 A JP 2021524695A JP 2021524695 A JP2021524695 A JP 2021524695A JP WO2020246150 A1 JPWO2020246150 A1 JP WO2020246150A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
- G06N3/045—Combinations of networks
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
- G06N3/0464—Convolutional networks [CNN, ConvNet]
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/08—Learning methods
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/08—Learning methods
- G06N3/09—Supervised learning
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T3/00—Geometric image transformations in the plane of the image
- G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
- G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/30—Determination of transform parameters for the alignment of images, i.e. image registration
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/30—Circuit design
- G06F30/39—Circuit design at the physical level
- G06F30/392—Floor-planning or layout, e.g. partitioning or placement
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20081—Training; Learning
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20084—Artificial neural networks [ANN]
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Evolutionary Computation (AREA)
- General Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Biophysics (AREA)
- Software Systems (AREA)
- Computational Linguistics (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Computing Systems (AREA)
- Biomedical Technology (AREA)
- Artificial Intelligence (AREA)
- Mathematical Physics (AREA)
- Data Mining & Analysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Quality & Reliability (AREA)
- Computer Hardware Design (AREA)
- Architecture (AREA)
- Geometry (AREA)
- Image Analysis (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019103831 | 2019-06-03 | ||
| JP2019103831 | 2019-06-03 | ||
| PCT/JP2020/016753 WO2020246150A1 (ja) | 2019-06-03 | 2020-04-16 | 半導体検査方法及び半導体検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2020246150A1 true JPWO2020246150A1 (https=) | 2020-12-10 |
| JPWO2020246150A5 JPWO2020246150A5 (https=) | 2023-03-10 |
| JP7413376B2 JP7413376B2 (ja) | 2024-01-15 |
Family
ID=73652093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021524695A Active JP7413376B2 (ja) | 2019-06-03 | 2020-04-16 | 半導体検査方法及び半導体検査装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US12211199B2 (https=) |
| EP (1) | EP3958210B1 (https=) |
| JP (1) | JP7413376B2 (https=) |
| KR (1) | KR20220016030A (https=) |
| CN (1) | CN113966524A (https=) |
| SG (1) | SG11202111977XA (https=) |
| TW (1) | TWI863993B (https=) |
| WO (1) | WO2020246150A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12340504B2 (en) * | 2020-06-08 | 2025-06-24 | Hamamatsu Photonics K.K. | Semiconductor inspecting method and semiconductor inspecting device |
| US20220067525A1 (en) * | 2020-08-25 | 2022-03-03 | Nvidia Corporation | Techniques for pruning neural networks |
| JP2022135215A (ja) | 2021-03-05 | 2022-09-15 | 株式会社日立ハイテク | 学習器の学習方法、及び画像生成システム |
| KR20250107055A (ko) * | 2024-01-04 | 2025-07-11 | 삼성전자주식회사 | 반도체 패턴의 생성 방법 및 장치 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080298719A1 (en) * | 2001-05-30 | 2008-12-04 | Dcg Systems, Inc. | Sub-resolution alignment of images |
| JP2009162718A (ja) * | 2008-01-10 | 2009-07-23 | Olympus Corp | 基板検査装置および検査領域設定方法 |
| US20170148226A1 (en) * | 2015-11-19 | 2017-05-25 | Kla-Tencor Corporation | Generating simulated images from design information |
| US20170193680A1 (en) * | 2016-01-04 | 2017-07-06 | Kla-Tencor Corporation | Generating high resolution images from low resolution images for semiconductor applications |
| US20170345140A1 (en) * | 2016-05-25 | 2017-11-30 | Kla-Tencor Corporation | Generating simulated images from input images for semiconductor applications |
| JP2019129169A (ja) * | 2018-01-22 | 2019-08-01 | 株式会社日立ハイテクノロジーズ | 画像評価方法及び画像評価装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104000655B (zh) * | 2013-02-25 | 2018-02-16 | 西门子公司 | 用于腹腔镜外科手术的组合的表面重构和配准 |
| JP2015098342A (ja) | 2013-11-19 | 2015-05-28 | 株式会社エンプラス | 密閉容器および密閉容器セット |
| CN105849882B (zh) | 2013-12-26 | 2019-04-30 | 浜松光子学株式会社 | 图像处理方法、图像处理装置、图像处理程序及存储有图像处理程序的存储介质 |
| DE112015006619T5 (de) * | 2015-07-24 | 2018-05-09 | Olympus Corporation | Bildverarbeitungsgerät, Bildverarbeitungsverfahren und Programm |
| US10282833B2 (en) | 2015-11-30 | 2019-05-07 | Trustees Of Boston University | Gate-level mapping of integrated circuits using multi-spectral imaging |
| TWI737659B (zh) * | 2015-12-22 | 2021-09-01 | 以色列商應用材料以色列公司 | 半導體試樣的基於深度學習之檢查的方法及其系統 |
| TWI751233B (zh) | 2016-11-28 | 2022-01-01 | 美商克萊譚克公司 | 用於從低解析度檢測影像重建高解析度點擴散函數之系統及方法 |
| US10282510B2 (en) | 2017-04-07 | 2019-05-07 | Fei Company | Alignment of CAD data to images in high resolution optical fault analysis |
| US10733744B2 (en) * | 2017-05-11 | 2020-08-04 | Kla-Tencor Corp. | Learning based approach for aligning images acquired with different modalities |
| JP6957197B2 (ja) * | 2017-05-17 | 2021-11-02 | キヤノン株式会社 | 画像処理装置および画像処理方法 |
| CN107481188A (zh) * | 2017-06-23 | 2017-12-15 | 珠海经济特区远宏科技有限公司 | 一种图像超分辨率重构方法 |
-
2020
- 2020-04-16 KR KR1020217030941A patent/KR20220016030A/ko not_active Ceased
- 2020-04-16 WO PCT/JP2020/016753 patent/WO2020246150A1/ja not_active Ceased
- 2020-04-16 CN CN202080041089.XA patent/CN113966524A/zh active Pending
- 2020-04-16 SG SG11202111977XA patent/SG11202111977XA/en unknown
- 2020-04-16 JP JP2021524695A patent/JP7413376B2/ja active Active
- 2020-04-16 US US17/608,857 patent/US12211199B2/en active Active
- 2020-04-16 EP EP20818826.8A patent/EP3958210B1/en active Active
- 2020-05-15 TW TW109116147A patent/TWI863993B/zh active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080298719A1 (en) * | 2001-05-30 | 2008-12-04 | Dcg Systems, Inc. | Sub-resolution alignment of images |
| JP2009162718A (ja) * | 2008-01-10 | 2009-07-23 | Olympus Corp | 基板検査装置および検査領域設定方法 |
| US20170148226A1 (en) * | 2015-11-19 | 2017-05-25 | Kla-Tencor Corporation | Generating simulated images from design information |
| US20170193680A1 (en) * | 2016-01-04 | 2017-07-06 | Kla-Tencor Corporation | Generating high resolution images from low resolution images for semiconductor applications |
| US20170345140A1 (en) * | 2016-05-25 | 2017-11-30 | Kla-Tencor Corporation | Generating simulated images from input images for semiconductor applications |
| JP2019129169A (ja) * | 2018-01-22 | 2019-08-01 | 株式会社日立ハイテクノロジーズ | 画像評価方法及び画像評価装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3958210A1 (en) | 2022-02-23 |
| EP3958210A4 (en) | 2023-05-03 |
| JP7413376B2 (ja) | 2024-01-15 |
| US12211199B2 (en) | 2025-01-28 |
| WO2020246150A1 (ja) | 2020-12-10 |
| KR20220016030A (ko) | 2022-02-08 |
| CN113966524A (zh) | 2022-01-21 |
| TWI863993B (zh) | 2024-12-01 |
| EP3958210B1 (en) | 2025-05-28 |
| TW202101292A (zh) | 2021-01-01 |
| SG11202111977XA (en) | 2021-11-29 |
| US20220301135A1 (en) | 2022-09-22 |
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