JPWO2020172186A5 - - Google Patents
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- JPWO2020172186A5 JPWO2020172186A5 JP2021547158A JP2021547158A JPWO2020172186A5 JP WO2020172186 A5 JPWO2020172186 A5 JP WO2020172186A5 JP 2021547158 A JP2021547158 A JP 2021547158A JP 2021547158 A JP2021547158 A JP 2021547158A JP WO2020172186 A5 JPWO2020172186 A5 JP WO2020172186A5
- Authority
- JP
- Japan
- Prior art keywords
- data
- sensor
- identifier
- sets
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000005259 measurement Methods 0.000 claims 43
- 238000004519 manufacturing process Methods 0.000 claims 14
- 238000010801 machine learning Methods 0.000 claims 10
- 238000000034 method Methods 0.000 claims 6
- 230000001052 transient effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024015763A JP2024059663A (ja) | 2019-02-19 | 2024-02-05 | センサ計測データ統合 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962807619P | 2019-02-19 | 2019-02-19 | |
| US62/807,619 | 2019-02-19 | ||
| US16/791,081 | 2020-02-14 | ||
| US16/791,081 US11592812B2 (en) | 2019-02-19 | 2020-02-14 | Sensor metrology data integration |
| PCT/US2020/018673 WO2020172186A1 (en) | 2019-02-19 | 2020-02-18 | Sensor metrology data integration |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024015763A Division JP2024059663A (ja) | 2019-02-19 | 2024-02-05 | センサ計測データ統合 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022520247A JP2022520247A (ja) | 2022-03-29 |
| JPWO2020172186A5 true JPWO2020172186A5 (ru) | 2023-03-01 |
| JP7471312B2 JP7471312B2 (ja) | 2024-04-19 |
Family
ID=72043419
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021547158A Active JP7471312B2 (ja) | 2019-02-19 | 2020-02-18 | センサ計測データ統合 |
| JP2024015763A Pending JP2024059663A (ja) | 2019-02-19 | 2024-02-05 | センサ計測データ統合 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024015763A Pending JP2024059663A (ja) | 2019-02-19 | 2024-02-05 | センサ計測データ統合 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US11592812B2 (ru) |
| JP (2) | JP7471312B2 (ru) |
| KR (2) | KR20230169475A (ru) |
| CN (1) | CN113454552B (ru) |
| SG (1) | SG11202108577UA (ru) |
| TW (2) | TW202403658A (ru) |
| WO (1) | WO2020172186A1 (ru) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9606519B2 (en) * | 2013-10-14 | 2017-03-28 | Applied Materials, Inc. | Matching process controllers for improved matching of process |
| US11940488B2 (en) | 2017-01-05 | 2024-03-26 | Xcalipr Corporation | Systems and methods for high precision optical characterization of carrier transport properties in semiconductor manufacturing |
| US11592812B2 (en) | 2019-02-19 | 2023-02-28 | Applied Materials, Inc. | Sensor metrology data integration |
| US11375582B2 (en) * | 2020-10-16 | 2022-06-28 | Verizon Patent And Licensing Inc. | Systems and methods for scalable edge-based microcontrollers |
| CN112364561B (zh) * | 2020-10-26 | 2022-07-26 | 上海感探号信息科技有限公司 | 控车动作修正方法、装置、电子设备和存储介质 |
| TWI777317B (zh) * | 2020-11-30 | 2022-09-11 | 智慧貼紙股份有限公司 | 多點量測系統及其方法 |
| US11853042B2 (en) | 2021-02-17 | 2023-12-26 | Applied Materials, Inc. | Part, sensor, and metrology data integration |
| US11961030B2 (en) * | 2022-01-27 | 2024-04-16 | Applied Materials, Inc. | Diagnostic tool to tool matching methods for manufacturing equipment |
| US20240012399A1 (en) * | 2022-07-08 | 2024-01-11 | The Boeing Company | Property Prediction For Unconsolidated Composite Materials |
| US11731317B1 (en) * | 2022-07-08 | 2023-08-22 | The Boeing Company | System and method for material manufacturing based on predicted properties of unconsolidated composite material |
| CN115314995B (zh) * | 2022-08-08 | 2023-08-04 | 深圳市海曼科技股份有限公司 | 一种无线级联消防定位方法、装置、电子设备及存储介质 |
| JP7274655B1 (ja) | 2022-09-09 | 2023-05-16 | Dmg森精機株式会社 | 携帯端末および計測管理プログラム |
| CN117234170B (zh) * | 2023-11-16 | 2024-01-12 | 中钢集团武汉安全环保研究院有限公司 | 一种钢铁关键工艺参数监测管理方法和装置 |
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| JPH06301690A (ja) * | 1993-04-13 | 1994-10-28 | Hitachi Ltd | 製造ライン及び該製造ラインにおける条件設定方法 |
| IT1272036B (it) * | 1993-11-05 | 1997-06-11 | Marelli Autronica | Sistema di registraziome per una linea di produzione. |
| US7401066B2 (en) | 2002-03-21 | 2008-07-15 | Applied Materials, Inc. | Correlation of end-of-line data mining with process tool data mining |
| US6751518B1 (en) | 2002-04-29 | 2004-06-15 | Advanced Micro Devices, Inc. | Dynamic process state adjustment of a processing tool to reduce non-uniformity |
| US6773931B2 (en) | 2002-07-29 | 2004-08-10 | Advanced Micro Devices, Inc. | Dynamic targeting for a process control system |
| US7359759B2 (en) | 2005-10-31 | 2008-04-15 | Taiwan Semiconductor Manufacturing Company | Method and system for virtual metrology in semiconductor manufacturing |
| US7765020B2 (en) | 2007-05-04 | 2010-07-27 | Applied Materials, Inc. | Graphical user interface for presenting multivariate fault contributions |
| CN101621016B (zh) | 2008-07-02 | 2011-10-05 | 中芯国际集成电路制造(上海)有限公司 | 在制造集成电路中用于缺陷检测的方法和系统 |
| US9915940B2 (en) | 2011-10-31 | 2018-03-13 | Applied Materials, Llc | Bi-directional association and graphical acquisition of time-based equipment sensor data and material-based metrology statistical process control data |
| KR101754721B1 (ko) * | 2012-03-18 | 2017-07-06 | 매뉴팩추링 시스템 인사이츠 (인디아) 피브이티. 엘티디. | 제조 시스템 성능을 개선시키기 위해 자동화 기술 감독 동작들을 실행하는 반-자동화된 제조 셋업(manufacturing set-up)에서의 각각의 운영자에게 트라이벌 지식을 확인하고, 획득하고, 분류하며, 전달하는 시스템 및 장치와 그 방법 |
| US20140149296A1 (en) | 2012-11-29 | 2014-05-29 | Applied Materials, Inc. | Enhanced preventative maintenance utilizing direct part marking |
| US9372922B2 (en) * | 2013-07-11 | 2016-06-21 | Neura, Inc. | Data consolidation mechanisms for internet of things integration platform |
| US10284651B2 (en) * | 2014-02-27 | 2019-05-07 | Harman International Industries, Incorporated | Data aggregation and delivery |
| US9881072B2 (en) * | 2014-08-14 | 2018-01-30 | McAFEE, LLC. | Dynamic feature set management |
| US20160342147A1 (en) | 2015-05-19 | 2016-11-24 | Applied Materials, Inc. | Methods and systems for applying run-to-run control and virtual metrology to reduce equipment recovery time |
| NL2017123A (en) | 2015-07-24 | 2017-01-24 | Asml Netherlands Bv | Inspection apparatus, inspection method, lithographic apparatus and manufacturing method |
| CN106663169B (zh) | 2015-07-24 | 2021-03-09 | 策安保安有限公司 | 使用无监督式机器学习和优先权算法的高速威胁情报管理的系统及方法 |
| WO2017044082A1 (en) * | 2015-09-09 | 2017-03-16 | Intel Corporation | Separated application security management |
| US20170090866A1 (en) * | 2015-09-25 | 2017-03-30 | Robert L. Vaughn | Universal sensor and/or sensor cluster to provide a detection pattern |
| US10289949B2 (en) * | 2015-09-29 | 2019-05-14 | International Business Machines Corporation | Incident prediction and response using deep learning techniques and multimodal data |
| JP6059375B1 (ja) | 2016-02-09 | 2017-01-11 | ファナック株式会社 | 生産制御システムおよび統合生産制御システム |
| US10747768B2 (en) * | 2016-06-14 | 2020-08-18 | Fuji Xerox Co., Ltd. | Data processing system and data processing method |
| US10571899B2 (en) | 2016-08-18 | 2020-02-25 | i Smart Technologies Corporation | Operating state acquisition apparatus, production management system, and production management method for manufacturing line |
| JP6382911B2 (ja) | 2016-11-01 | 2018-08-29 | ファナック株式会社 | ワイヤ放電加工機 |
| WO2018123116A1 (ja) | 2016-12-26 | 2018-07-05 | 三菱電機株式会社 | 加工工程生成装置、加工工程生成方法およびプログラム |
| WO2018204410A1 (en) * | 2017-05-04 | 2018-11-08 | Minds Mechanical, Llc | Metrology system for machine learning-based manufacturing error predictions |
| TWI644190B (zh) | 2017-06-29 | 2018-12-11 | 台灣積體電路製造股份有限公司 | 製程系統與製程方法 |
| JP7194184B2 (ja) * | 2017-07-27 | 2022-12-21 | アップストリーム セキュリティー リミテッド | コネクテッド車両サイバー・セキュリティのためのシステム及び方法 |
| TWI647564B (zh) | 2017-11-07 | 2019-01-11 | 先智雲端數據股份有限公司 | 用於診斷資料中心儲存設備之剩餘壽命的方法與系統 |
| JP7323541B2 (ja) | 2018-03-13 | 2023-08-08 | アプライド マテリアルズ インコーポレイテッド | 半導体処理のモニタリングのための機械学習システム |
| US11037573B2 (en) * | 2018-09-05 | 2021-06-15 | Hitachi, Ltd. | Management and execution of equipment maintenance |
| US20200104639A1 (en) * | 2018-09-28 | 2020-04-02 | Applied Materials, Inc. | Long short-term memory anomaly detection for multi-sensor equipment monitoring |
| US11263737B2 (en) | 2019-01-10 | 2022-03-01 | Lam Research Corporation | Defect classification and source analysis for semiconductor equipment |
| US11592812B2 (en) | 2019-02-19 | 2023-02-28 | Applied Materials, Inc. | Sensor metrology data integration |
| JP2022523870A (ja) | 2019-03-29 | 2022-04-26 | ラム リサーチ コーポレーション | 基板処理システムのためのモデルベースのスケジュール設定 |
| US11279032B2 (en) * | 2019-04-11 | 2022-03-22 | Applied Materials, Inc. | Apparatus, systems, and methods for improved joint coordinate teaching accuracy of robots |
| US11610076B2 (en) * | 2019-08-07 | 2023-03-21 | Applied Materials, Inc. | Automatic and adaptive fault detection and classification limits |
| US20210088867A1 (en) * | 2019-09-20 | 2021-03-25 | Kinestral Technologies, Inc. | Quality control of an electrochromic device |
| US11513504B2 (en) * | 2019-10-18 | 2022-11-29 | Applied Materials, Inc. | Characterizing and monitoring electrical components of manufacturing equipment |
| US11749543B2 (en) * | 2020-07-06 | 2023-09-05 | Applied Materials, Inc. | Chamber matching and calibration |
| US11371148B2 (en) * | 2020-08-24 | 2022-06-28 | Applied Materials, Inc. | Fabricating a recursive flow gas distribution stack using multiple layers |
| US11853042B2 (en) | 2021-02-17 | 2023-12-26 | Applied Materials, Inc. | Part, sensor, and metrology data integration |
-
2020
- 2020-02-14 US US16/791,081 patent/US11592812B2/en active Active
- 2020-02-18 SG SG11202108577UA patent/SG11202108577UA/en unknown
- 2020-02-18 CN CN202080015312.3A patent/CN113454552B/zh active Active
- 2020-02-18 KR KR1020237041852A patent/KR20230169475A/ko active Application Filing
- 2020-02-18 JP JP2021547158A patent/JP7471312B2/ja active Active
- 2020-02-18 KR KR1020217030045A patent/KR102611824B1/ko active IP Right Grant
- 2020-02-18 WO PCT/US2020/018673 patent/WO2020172186A1/en active Application Filing
- 2020-02-19 TW TW112135587A patent/TW202403658A/zh unknown
- 2020-02-19 TW TW109105293A patent/TWI818153B/zh active
-
2023
- 2023-02-27 US US18/114,915 patent/US20230205196A1/en active Pending
-
2024
- 2024-02-05 JP JP2024015763A patent/JP2024059663A/ja active Pending
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