JPWO2020151932A5 - - Google Patents
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- Publication number
- JPWO2020151932A5 JPWO2020151932A5 JP2021542331A JP2021542331A JPWO2020151932A5 JP WO2020151932 A5 JPWO2020151932 A5 JP WO2020151932A5 JP 2021542331 A JP2021542331 A JP 2021542331A JP 2021542331 A JP2021542331 A JP 2021542331A JP WO2020151932 A5 JPWO2020151932 A5 JP WO2020151932A5
- Authority
- JP
- Japan
- Prior art keywords
- heating elements
- array
- luminescent
- light
- light emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 40
- 230000003287 optical Effects 0.000 claims description 14
- 235000012431 wafers Nutrition 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB1900912.5A GB201900912D0 (en) | 2019-01-23 | 2019-01-23 | Apparatus for processing a wafer, and method of controlling such an apparatus |
| GB1900912.5 | 2019-01-23 | ||
| PCT/EP2020/050076 WO2020151932A1 (en) | 2019-01-23 | 2020-01-03 | Apparatus for processing a wafer, and method of controlling such an apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022518490A JP2022518490A (ja) | 2022-03-15 |
| JPWO2020151932A5 true JPWO2020151932A5 (de) | 2023-01-11 |
Family
ID=65655937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021542331A Pending JP2022518490A (ja) | 2019-01-23 | 2020-01-03 | ウエハを処理するための装置およびかかる装置を制御する方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20220084848A1 (de) |
| EP (1) | EP3915141A1 (de) |
| JP (1) | JP2022518490A (de) |
| KR (1) | KR20210112387A (de) |
| CN (1) | CN113330546A (de) |
| GB (1) | GB201900912D0 (de) |
| TW (1) | TWI835975B (de) |
| WO (1) | WO2020151932A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210103956A (ko) * | 2020-02-13 | 2021-08-24 | 에이에스엠 아이피 홀딩 비.브이. | 수광 장치를 포함하는 기판 처리 장치 및 수광 장치의 교정 방법 |
| KR102406087B1 (ko) * | 2020-03-23 | 2022-06-10 | 엘에스이 주식회사 | 회전 척에 내장된 광원을 이용한 기판 처리 장치 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7543981B2 (en) * | 2006-06-29 | 2009-06-09 | Mattson Technology, Inc. | Methods for determining wafer temperature |
| US8404499B2 (en) * | 2009-04-20 | 2013-03-26 | Applied Materials, Inc. | LED substrate processing |
| JP5964626B2 (ja) * | 2012-03-22 | 2016-08-03 | 株式会社Ｓｃｒｅｅｎホールディングス | 熱処理装置 |
| KR102257567B1 (ko) * | 2013-09-30 | 2021-05-31 | 어플라이드 머티어리얼스, 인코포레이티드 | 캡슐화된 광 배리어를 갖는 지지체 링 |
| US20170316963A1 (en) * | 2016-04-28 | 2017-11-02 | Applied Materials, Inc. | Direct optical heating of substrates |
| US10720343B2 (en) | 2016-05-31 | 2020-07-21 | Lam Research Ag | Method and apparatus for processing wafer-shaped articles |
| JP6984228B2 (ja) * | 2016-11-17 | 2021-12-17 | 東京エレクトロン株式会社 | 露光装置、露光装置の調整方法及び記憶媒体 |
-
2019
- 2019-01-23 GB GBGB1900912.5A patent/GB201900912D0/en not_active Ceased
-
2020
- 2020-01-03 EP EP20700548.9A patent/EP3915141A1/de active Pending
- 2020-01-03 US US17/424,994 patent/US20220084848A1/en active Pending
- 2020-01-03 KR KR1020217026130A patent/KR20210112387A/ko active Search and Examination
- 2020-01-03 CN CN202080010780.1A patent/CN113330546A/zh active Pending
- 2020-01-03 WO PCT/EP2020/050076 patent/WO2020151932A1/en unknown
- 2020-01-03 JP JP2021542331A patent/JP2022518490A/ja active Pending
- 2020-01-20 TW TW109101915A patent/TWI835975B/zh active
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