JPWO2020131394A5 - - Google Patents

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Publication number
JPWO2020131394A5
JPWO2020131394A5 JP2021533308A JP2021533308A JPWO2020131394A5 JP WO2020131394 A5 JPWO2020131394 A5 JP WO2020131394A5 JP 2021533308 A JP2021533308 A JP 2021533308A JP 2021533308 A JP2021533308 A JP 2021533308A JP WO2020131394 A5 JPWO2020131394 A5 JP WO2020131394A5
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JP
Japan
Prior art keywords
ion beam
fins
angle
substrate
forming
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JP2021533308A
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English (en)
Japanese (ja)
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JP2022512366A (ja
JP7494179B2 (ja
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Priority claimed from PCT/US2019/064592 external-priority patent/WO2020131394A1/en
Publication of JP2022512366A publication Critical patent/JP2022512366A/ja
Publication of JPWO2020131394A5 publication Critical patent/JPWO2020131394A5/ja
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Publication of JP7494179B2 publication Critical patent/JP7494179B2/ja
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JP2021533308A 2018-12-17 2019-12-05 傾斜回折格子のローリングｋベクトルの調整 Active JP7494179B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862780815P 2018-12-17 2018-12-17
US62/780,815 2018-12-17
PCT/US2019/064592 WO2020131394A1 (en) 2018-12-17 2019-12-05 Modulation of rolling k vectors of angled gratings

Publications (3)

Publication Number Publication Date
JP2022512366A JP2022512366A (ja) 2022-02-03
JPWO2020131394A5 true JPWO2020131394A5 (zh) 2022-12-13
JP7494179B2 JP7494179B2 (ja) 2024-06-03

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Family Applications (2)

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JP2021533308A Active JP7494179B2 (ja) 2018-12-17 2019-12-05 傾斜回折格子のローリングｋベクトルの調整
JP2021533784A Active JP7417611B2 (ja) 2018-12-17 2019-12-05 傾斜回折格子のローリングｋベクトルの調整

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JP2021533784A Active JP7417611B2 (ja) 2018-12-17 2019-12-05 傾斜回折格子のローリングｋベクトルの調整

Country Status (6)

Country Link
US (4) US11367589B2 (zh)
EP (2) EP3899607A4 (zh)
JP (2) JP7494179B2 (zh)
KR (2) KR20210094104A (zh)
CN (2) CN113167948A (zh)
WO (2) WO2020131394A1 (zh)

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US20230375774A1 (en) * 2022-04-20 2023-11-23 Applied Materials, Inc. Method for roughness reduction in manufacturing optical device structures

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