JPWO2020129299A1 - 積層シート及びその使用方法 - Google Patents
積層シート及びその使用方法 Download PDFInfo
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- JPWO2020129299A1 JPWO2020129299A1 JP2020561146A JP2020561146A JPWO2020129299A1 JP WO2020129299 A1 JPWO2020129299 A1 JP WO2020129299A1 JP 2020561146 A JP2020561146 A JP 2020561146A JP 2020561146 A JP2020561146 A JP 2020561146A JP WO2020129299 A1 JPWO2020129299 A1 JP WO2020129299A1
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- 238000007689 inspection Methods 0.000 claims abstract description 32
- 239000003990 capacitor Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 88
- 239000011347 resin Substances 0.000 claims description 42
- 229920005989 resin Polymers 0.000 claims description 42
- 229910052751 metal Inorganic materials 0.000 claims description 38
- 239000002184 metal Substances 0.000 claims description 38
- 229910052802 copper Inorganic materials 0.000 claims description 34
- 229910052719 titanium Inorganic materials 0.000 claims description 22
- 229910052759 nickel Inorganic materials 0.000 claims description 19
- 229910052782 aluminium Inorganic materials 0.000 claims description 18
- 229910052804 chromium Inorganic materials 0.000 claims description 17
- 229920000642 polymer Polymers 0.000 claims description 14
- 229910052718 tin Inorganic materials 0.000 claims description 14
- 229910052738 indium Inorganic materials 0.000 claims description 12
- 229910052715 tantalum Inorganic materials 0.000 claims description 12
- 229910052748 manganese Inorganic materials 0.000 claims description 11
- 229910052709 silver Inorganic materials 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 229920001721 polyimide Polymers 0.000 claims description 10
- 239000009719 polyimide resin Substances 0.000 claims description 10
- 229910052742 iron Inorganic materials 0.000 claims description 9
- 150000004767 nitrides Chemical class 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 9
- 229910052725 zinc Inorganic materials 0.000 claims description 9
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 claims description 8
- 239000003822 epoxy resin Substances 0.000 claims description 8
- 229920000647 polyepoxide Polymers 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 6
- 239000005977 Ethylene Substances 0.000 claims description 6
- 239000005011 phenolic resin Substances 0.000 claims description 6
- 239000004677 Nylon Substances 0.000 claims description 5
- 229920001778 nylon Polymers 0.000 claims description 5
- 229920000123 polythiophene Polymers 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 4
- 229920001940 conductive polymer Polymers 0.000 claims description 4
- 229920001197 polyacetylene Polymers 0.000 claims description 4
- 229920000767 polyaniline Polymers 0.000 claims description 3
- 229920000128 polypyrrole Polymers 0.000 claims description 2
- 239000010408 film Substances 0.000 description 327
- 239000010410 layer Substances 0.000 description 212
- 230000015572 biosynthetic process Effects 0.000 description 39
- 238000004544 sputter deposition Methods 0.000 description 36
- 239000010949 copper Substances 0.000 description 35
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 28
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 27
- 239000010936 titanium Substances 0.000 description 19
- 239000011521 glass Substances 0.000 description 18
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 17
- 239000007789 gas Substances 0.000 description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 15
- 229910052786 argon Inorganic materials 0.000 description 14
- 229910052799 carbon Inorganic materials 0.000 description 14
- 229910052750 molybdenum Inorganic materials 0.000 description 12
- 239000002346 layers by function Substances 0.000 description 11
- 229910045601 alloy Inorganic materials 0.000 description 10
- 239000000956 alloy Substances 0.000 description 10
- 239000011889 copper foil Substances 0.000 description 10
- 238000005240 physical vapour deposition Methods 0.000 description 10
- -1 plates Substances 0.000 description 9
- 239000012808 vapor phase Substances 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000001755 magnetron sputter deposition Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000010944 silver (metal) Substances 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 229920001707 polybutylene terephthalate Polymers 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 3
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- QHSJIZLJUFMIFP-UHFFFAOYSA-N ethene;1,1,2,2-tetrafluoroethene Chemical compound C=C.FC(F)=C(F)F QHSJIZLJUFMIFP-UHFFFAOYSA-N 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 238000002847 impedance measurement Methods 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/162—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/1227—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
- G01R31/1263—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation
- G01R31/129—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation of components or parts made of semiconducting materials; of LV components or parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/007—Manufacture or processing of a substrate for a printed circuit board supported by a temporary or sacrificial carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68345—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during the manufacture of self supporting substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68359—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during manufacture of interconnect decals or build up layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Laminated Bodies (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Abstract
Description
剥離機能付キャリアと、
前記剥離機能付キャリア上に設けられる第1導電膜と、
前記第1導電膜上に設けられる絶縁膜と、
前記絶縁膜上に設けられる第2導電膜と、
を備えた積層シートであって、
前記第2導電膜が再配線層の形成に用いられ、かつ、前記第1導電膜、前記絶縁膜及び前記第2導電膜が前記再配線層の電気検査を行うためのキャパシタとして機能する、積層シートが提供される。
前記積層シートの前記第2導電膜を加工して再配線層を形成する、又は前記第2導電膜上に再配線層を形成する工程と、
前記再配線層に対して電気検査を行う工程と、
を含み、前記電気検査が、前記再配線層と前記第1導電膜との間に電圧を加えて、前記第1導電膜、前記絶縁膜及び前記第2導電膜をキャパシタとして機能させ、電気特性(主としてインピーダンス又は静電容量)を測定することにより行われる、積層シートの使用方法が提供される。
本発明の積層シートが図1に模式的に示される。図1に示されるように、本発明の積層シート10は、剥離機能付キャリア12と、第1導電膜14と、絶縁膜16と、第2導電膜18とをこの順に備えたものである。第1導電膜14は、剥離機能付キャリア12上に設けられる。絶縁膜16は、第1導電膜14上に設けられる。第2導電膜18は絶縁膜16上に設けられ、再配線層20の形成に用いられる。そして、第1導電膜14、絶縁膜16及び第2導電膜18が再配線層20の電気検査を行うためのキャパシタとして機能する。所望により、積層シート10は、剥離機能付キャリア12と第1導電膜14との間に機能層13を有していてもよい。上述の各種層はそれぞれ単層であってもよいし、複数の層からなるものであってもよい。また、剥離機能付キャリア12の両面に上下対称となるように上述の各種層を順に備えてなる構成としてもよい。このように、剥離機能付キャリア12上に第1導電膜14及び第2導電膜18間に絶縁膜16が介在する層構成を設けることで、再配線層20の形成に有用な積層シートの形態でありながら、第1導電膜14、絶縁膜16及び第2導電膜18がキャパシタとして機能し、それにより、第2導電膜18を用いて形成された再配線層20の電気検査を効率良く行うことが可能となる。
本発明による積層シート10は、上述したキャリア12aを用意し、キャリア12a上に、所望により中間層(例えば第1中間層及び第2中間層)、所望により剥離機能膜12b、所望により機能層13、第1導電膜14、絶縁膜16、及び第2導電膜18を形成することにより製造することができる。中間層(存在する場合)、剥離機能膜12b(存在する場合)、機能層13(存在する場合)、第1導電膜14及び第2導電膜18の各層の形成は、極薄化によるファインピッチ化に対応しやすい観点から、物理気相堆積(PVD)法により行われるのが好ましい。物理気相堆積(PVD)法の例としては、スパッタリング法、真空蒸着法、及びイオンプレーティング法が挙げられるが、0.05nmから5000nmまでといった幅広い範囲で膜厚制御できる点、広い幅ないし面積にわたって膜厚均一性を確保できる点等から、最も好ましくはスパッタリング法である。物理気相堆積(PVD)法による成膜は公知の気相成膜装置を用いて公知の条件に従って行えばよく特に限定されない。例えば、スパッタリング法を採用する場合、スパッタリング方式は、マグネトロンスパッタリング、2極スパッタリング法、対向ターゲットスパッタリング法等、公知の種々の方法であってよいが、マグネトロンスパッタリングが、成膜速度が速く生産性が高い点で好ましい。スパッタリングはDC(直流)及びRF(高周波)のいずれの電源で行ってもよい。また、ターゲット形状も広く知られているプレート型ターゲットを使用することができるが、ターゲット使用効率の観点から円筒形ターゲットを用いることが望ましい。一方、絶縁膜16の形成は、化学気相堆積(CVD)法、スパッタリング法、蒸着法、スリットコーター法、スピンコーター法、スプレー法、又はそれらの組合せにより行うのが好ましい。この点、中間層(存在する場合)、剥離機能膜12b(存在する場合)、機能層13(存在する場合)、第1導電膜14、絶縁膜16及び第2導電膜18の全ての層をスパッタリング法により形成することで、製造効率が格段に高くなる。以下、中間層(存在する場合)、剥離機能膜12b(存在する場合)、機能層13(存在する場合)、第1導電膜14、及び第2導電膜18の各層の気相法(好ましくはスパッタリング法)による成膜、並びに絶縁膜16の上記方法による成膜について説明する。
本発明の積層シート10を用いて再配線層20を製造することができる。そして、第1導電膜14、絶縁膜16及び第2導電膜18がキャパシタとして機能することで、製造した再配線層20の電気検査を効率良く行うことができる。以下、本発明の積層シート10の好ましい使用方法について説明する。この積層シート10の使用方法は、(1)再配線層の形成工程と、(2)再配線層の電気検査工程とを含む。
本発明の積層シート10を用いて再配線層20を形成する。再配線層20の形成は、第2導電膜18を加工することにより行うことができる。この場合、第2導電膜18は再配線層20の一部に含まれる。あるいは、第2導電膜18自体には加工を施さず、第2導電膜18上に再配線層20’を形成してもよい。この点、例えば第2導電膜18上にさらなる金属層(例えば銅層)を積層して、当該金属層を加工することにより再配線層20’を形成することができる。この場合、第2導電膜18自体は再配線層20’を構成しないため、剥離機能付キャリア12を剥離した後に、フラッシュエッチング等により第2導電膜18を除去するのが好ましい。
第2導電膜18を用いて形成した再配線層20に対して、電気検査を行う。この電気検査は、図2に示されるように、再配線層20と第1導電膜14との間に電圧を加えて、第1導電膜14、絶縁膜16及び第2導電膜18をキャパシタとして機能させ、電気特性(主としてインピーダンス又は静電容量)を測定することにより行えばよい。より具体的には、例えば特許文献5に示されるような公知の手法に基づいて、二つ以上の異なる周波数の電力を用いて配線間のインピーダンスを測定し、算出された二つ以上のインピーダンスの周波数に応じた変位量によって当該配線間の絶縁状態の良否を判定することができる。また、第1導電膜14に電気検査用プローブを当接する等して電気特性(主としてインピーダンス又は静電容量)を測定する場合には、第1導電膜14を露出させるために、必要に応じて再配線層20から剥離機能付キャリア12を予め剥離除去してもよい。
Claims (17)
- 剥離機能付キャリアと、
前記剥離機能付キャリア上に設けられる第1導電膜と、
前記第1導電膜上に設けられる絶縁膜と、
前記絶縁膜上に設けられる第2導電膜と、
を備えた積層シートであって、
前記第2導電膜が再配線層の形成に用いられ、かつ、前記第1導電膜、前記絶縁膜及び前記第2導電膜が前記再配線層の電気検査を行うためのキャパシタとして機能する、積層シート。 - 前記剥離機能付キャリアが、キャリアと、前記キャリアの前記第1導電膜側に設けられ、前記第1導電膜から前記キャリアを剥離可能とする剥離機能膜とを備えた、請求項1に記載の積層シート。
- 前記第1導電膜が金属膜又は導電性ポリマー膜である、請求項1又は2に記載の積層シート。
- 前記第1導電膜が、Al、Ag、Cu、Ni、Ti、Ta、Fe、Co、Mo、Mg、Mn、Zn、Cr、In及びSnからなる群から選択される少なくとも1種の金属を含む金属膜である、請求項3に記載の積層シート。
- 前記第1導電膜が、ポリチオフェン系ポリマー、ポリアセチレン系ポリマー、ポリアニリン系ポリマー及びポリピロール系ポリマーからなる群から選択される少なくとも1種を含む導電性ポリマー膜である、請求項3に記載の積層シート。
- 前記第1導電膜の厚さが5nm以上1000nm以下である、請求項1〜5のいずれか一項に記載の積層シート。
- 前記第2導電膜が前記再配線層を形成するためのシード層である、請求項1〜6のいずれか一項に記載の積層シート。
- 前記第2導電膜が金属膜である、請求項1〜7のいずれか一項に記載の積層シート。
- 前記第2導電膜が、Al、Ag、Cu、Ni、Ti、Ta、Fe、Co、Mo、Mg、Mn、Zn、Cr、In及びSnからなる群から選択される少なくとも1種の金属を含む金属膜である、請求項1〜8のいずれか一項に記載の積層シート。
- 前記第2導電膜の厚さが10nm以上1000nm以下である、請求項1〜9のいずれか一項に記載の積層シート。
- 前記絶縁膜の誘電率が周波数1MHzにおいて2以上である、請求項1〜10のいずれか一項に記載の積層シート。
- 前記絶縁膜の厚さが0.1μm以上10μm以下である、請求項1〜11のいずれか一項に記載の積層シート。
- 前記絶縁膜の耐電圧強度が1.0×104V/cm以上である、請求項1〜12のいずれか一項に記載の積層シート。
- 前記絶縁膜が、酸化膜、窒化膜、炭化膜、フッ化膜、エポキシ樹脂膜、ポリイミド樹脂膜、エチレン樹脂膜、フェノール樹脂膜、PPT樹脂膜、ABS樹脂膜、ナイロン樹脂膜及びPBT樹脂膜からなる群から選択される少なくとも1種である、請求項1〜13のいずれか一項に記載の積層シート。
- 前記第1導電膜及び前記第2導電膜の各々が、Al、Ag、Cu、Ni、Ti、Ta、Fe、Co、Mo、Mg、Mn、Zn、Cr、In及びSnからなる群から選択される少なくとも1種の金属であり、かつ、前記絶縁膜が酸化膜、窒化膜、エポキシ樹脂膜及びポリイミド樹脂膜からなる群から選択される少なくとも1種である、請求項1〜14のいずれか一項に記載の積層シート。
- 請求項1〜15のいずれか一項に記載の積層シートの前記第2導電膜を加工して再配線層を形成する、又は前記第2導電膜上に再配線層を形成する工程と、
前記再配線層に対して電気検査を行う工程と、
を含み、前記電気検査が、前記再配線層と前記第1導電膜との間に電圧を加えて、前記第1導電膜、前記絶縁膜及び前記第2導電膜をキャパシタとして機能させ、電気特性を測定することにより行われる、積層シートの使用方法。 - 請求項16に記載の工程を含む、半導体パッケージの製造方法。
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