JPWO2020067192A1 - Ultrasonic bonding device - Google Patents

Abstract

Provided is an ultrasonic bonding apparatus capable of reliably bonding regardless of the type of work. The ultrasonic bonding device 1 is composed of a plate member 21a and a coil spring 21b, and has an upper pressurizing portion 21 for moving the plate member 21a and applying pressure in a direction of pushing down a box B which is one of the workpieces, and a plate member. A lower pressurizing portion 22 composed of 22a and a coil spring 22b and applying pressure in a direction of moving a plate member 22a to push up an anvil 7, and a pressurizing device 10 for applying pressure to workpieces stacked via a horn tip 6. And have.

Description

The present invention relates to an ultrasonic bonding device that bonds a work such as metal or plastic by ultrasonic vibration.

Conventionally, ultrasonic bonding (ultrasonic welding) has been used to bond metals such as plastics and battery parts used for food packs and the like. In a general ultrasonic bonding device, the tip of a bonding tip is ultrasonically vibrated and repeatedly applied pressure to the object to be bonded for bonding.

For example, in the ultrasonic compound vibration processing apparatus of the following patent document, the sample is processed and deformed by ultrasonic vibration during welding, and the static pressure is reduced. Therefore, in order to keep the applied static pressure during welding almost constant, more stable welding is realized by using an actuator with a fast response speed using a metal spring or the like.

Patent Document 1: Japanese Unexamined Patent Publication No. 2017-064779)

However, in the above-mentioned ultrasonic compound vibration processing apparatus, since the spring pressure of the metal spring is constant, there is a problem that the pressing force is too strong depending on the work and the metal spring is damaged.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide an ultrasonic bonding apparatus capable of reliably bonding regardless of the type of work.

In the first invention, a plurality of workpieces stacked between a first member and a second member arranged at a position facing the first member are pressed, and the work is pressed in a first direction perpendicular to the pressing direction. An ultrasonic joining device that joins a plurality of workpieces by vibrating the first member by ultrasonic vibration in which a vibration component and a vibration component in a second direction orthogonal to the first direction are combined. It is composed of a first support member and a first elastic member located between the first support member and one of the plurality of works, and the first support member is moved to apply pressure to the work. It is composed of a first pressurizing portion, a second support member, and a second elastic member located between the second support member and the second member, and the second support member is moved to move the second member. It is characterized by including a second pressurizing portion for applying pressure to the plurality of workpieces and a third pressurizing portion for applying pressure to the plurality of workpieces via the first member.

In the ultrasonic bonding device of the present invention, a plurality of workpieces to be bonded are pressed by the first member by the third pressurizing portion regardless of the arrangement direction (horizontal direction, inclination direction) of the first member and the second member. The first member is vibrated by a composite vibration in which a vibration component in the first direction perpendicular to the pressing direction and a vibration component in the second direction perpendicular to the first direction are combined.

Pressure is applied to one of the workpieces to be joined by the first pressurizing portion (first support member and first elastic member), and the second pressurizing portion (second support member and second elastic member) presses the second member. Pressure is applied. Therefore, the work in contact with the second member (the other work to be joined) is sandwiched and supported by the urging of the first pressure portion and the second pressure portion. Although the support direction of the work is fixed, the direction perpendicular to the support direction is in a state where displacement is allowed to some extent. Therefore, at the time of joining, that is, when receiving ultrasonic vibration (composite vibration) from the joining tip, the work is displaced in the vertical direction to release a slight pressure, but most of the static pressure is the joining of the work. Used for. Therefore, even a work having a weak structural strength can be joined.

In the ultrasonic bonding apparatus of the present invention, it is preferable to provide a stopper between the first elastic member and the one work, except for the bonding portion of the work, which comes into contact with the work.

By providing a stopper between the first elastic member and one of the workpieces that comes into contact with the workpiece except for the joint portion, the first pressurizing portion urges the first elastic member to squeeze most of the workpiece. The joints can be joined while being pushed down and supported.

Further, in the ultrasonic bonding apparatus of the present invention, the first elastic member is a plurality of springs provided at positions separated from each other, and the plurality of springs are located between the plurality of springs and the one work. It is preferable to provide a stopper that comes into contact with the work corresponding to each of the above.

According to this configuration, the first pressurizing portion has a plurality of springs as the first elastic member, and pressurizes in the direction of pushing down one work through the stopper. As a result, the number of springs and stoppers can be changed according to the shape of the work, and it is possible to facilitate joining as compared with a stopper having an opening corresponding to the joining portion.

Further, it is preferable that the ultrasonic bonding apparatus of the present invention includes a control unit that controls the positions of the first support member and the second support member in the vertical direction.

According to this configuration, the control unit can control the vertical positions of the first support member of the first pressurizing unit and the second support member of the second pressurizing unit, so that the size of the workpiece to be joined or the size of the workpiece to be joined or The spring pressure can be adjusted according to the shape, and an appropriate pressure can be applied to one of the workpieces.

Further, in the ultrasonic bonding apparatus of the present invention, it is preferable that the first member is a bonding chip and the second member is an anvil.

According to this configuration, the second member is an anvil, the first pressurizing portion applies pressure to one work to be joined, and the second pressurizing portion applies pressure to the anvil. As a result, the work in contact with the anvil is sandwiched between the first pressurizing portion and the second pressurizing portion, and the work can be joined by the joining tip of the first member.

In the second invention, the tip of the bonding tip presses a plurality of stacked workpieces, and a vibration component in the first direction perpendicular to the pressing direction and a vibration component in the second direction orthogonal to the first direction. It is an ultrasonic bonding device that bonds a plurality of workpieces by vibrating the bonding tip by a composite ultrasonic vibration of the support member and one of the support member and the plurality of workpieces. It consists of an elastic member located between the work and a pressurizing portion that moves the support member to apply pressure to the work, and moves the pressing member to apply pressure to the other work among the plurality of works. It is characterized by including an air cylinder to be applied and a pressurizing device for applying pressure to the plurality of workpieces via the bonding tip.

In the ultrasonic bonding apparatus of the present invention, pressure is applied to one work to be bonded by a support member of a pressure portion, and pressure is applied to the other work to be bonded by a pressing member of an air cylinder. Therefore, the workpiece to be joined is held and supported by the urging of the air cylinder and the pressurizing portion. Since the air cylinder is equipped with a pressurizing mechanism and a vertical mechanism, the workpiece can be sandwiched and fixed with a simple structure, and even a workpiece having a weak structural strength can be reliably joined.

The figure explaining the whole structure of the ultrasonic bonding apparatus which concerns on embodiment of this invention. The figure explaining the sectional view of the anvil of an ultrasonic bonding apparatus and the members above and below it. The figure explaining the modification example (air cylinder) of an ultrasonic bonding apparatus. The figure explaining the modified form of the upper pressurizing part. The view which looked at the work (box) of FIG. 3A from above.

Hereinafter, embodiments of the ultrasonic bonding apparatus of the present invention will be described with reference to the drawings.

First, the overall configuration of the ultrasonic bonding device 1 according to the embodiment of the present invention will be described with reference to FIG. The ultrasonic bonding device 1 is a device for bonding (welding) an object (work) such as a metal plate to be bonded by using ultrasonic composite vibration described later. The ultrasonic bonding device 1 is mainly used for bonding lithium ion batteries, electrodes of semiconductor elements and the like, and metals of the same type or different types, but in the following description, a box-shaped work having a relatively weak structural strength is used.

The ultrasonic bonding device 1 is composed of an ultrasonic transducer 2, an ultrasonic magnifying horn 3, an ultrasonic LT (Langevin Type) horn 4, a horn tip 6, and an anvil 7. Further, the oscillator 8, the pressurizing device 10, the sensor 12, the control device 13, and the display device 14 are also a part of the ultrasonic bonding device 1.

When a power supply voltage is applied to the oscillating device 8 from a power source (not shown), a voltage signal is transmitted to the + and-electrodes of the ultrasonic vibrator 2, the ultrasonic vibrator 2 vibrates, and ultrasonic vibration (about 20 KHz). Occurs. The ultrasonic vibration generated by the ultrasonic vibrator 2 is transmitted to the cylindrical ultrasonic magnifying horn 3 attached to one end of the ultrasonic vibrator 2, and the vibration amplitude is magnified. Further, the ultrasonic vibration is transmitted to the cylindrical ultrasonic LT horn 4 attached to one end of the ultrasonic magnifying horn 3 (the end on the side other than the ultrasonic transducer 2).

Up to this point, the ultrasonic vibration generated by the ultrasonic vibrator 2 has been transmitted in the long axis direction of the ultrasonic magnifying horn 3 and the ultrasonic LT horn 4 (longitudinal vibration of the ultrasonic wave). The plurality of oblique slits 4a generate vibration components converted from longitudinal vibration to lateral vibration. Then, the ultrasonic vibration (composite vibration) is the horn tip 6 screwed to one end of the ultrasonic LT horn 4 (the end on the side other than the ultrasonic magnifying horn 3) (the "bonding tip" and "joining tip" of the present invention. It is transmitted to "the first member").

The horn tip 6 includes a truncated cone-shaped base portion 6a and a tip portion 6b that comes into contact with the work at the time of joining. That is, by adjusting the phase of the ultrasonic vibration with the oscillating device 8, compound vibration (for example, elliptical vibration) is generated at one end of the ultrasonic LT horn 4, and the tip 6b of the horn tip 6 makes an elliptical orbit on the work surface. Draw and vibrate. This vibration eliminates impurities on the work surface and further promotes plastic deformation of the work surface. The horn tip 6 can be replaced depending on the type of work, but this time, a columnar horn tip having a long tip portion 6b is used.

To supplement the combined vibration, this is the vibration component in the first direction perpendicular to the pressing direction and the second direction orthogonal to the first direction when the tip portion 6b (end surface 6c) of the horn tip 6 presses the work. It is a vibration that is a combination of the vibration components of. If the vibration component in the first direction and the vibration component in the second direction are 1: 1, it is a circular vibration, and if it is 2: 1, it is an elliptical vibration.

Further, a highly rigid pressurizing block (not shown) is in contact with the flange portion 3a of the ultrasonic magnifying horn 3. Therefore, the pressurizing device 10 (corresponding to the "third pressurizing unit" of the present invention) is controlled by the control device 13 (corresponding to the "control unit" of the present invention), and is super-controlled via a pressurizing block that moves up and down. The ultrasonic bonding device 1 can be moved in the vertical direction.

Then, by placing the work (box B, cap C) on the anvil 7 (an example of the "second member" of the present invention) which is a pedestal, the tip portion 6b of the horn tip 6 becomes a work (here, here). , A static pressure (200 to 800 N at the time of joining) is applied in contact with the cap C) located on the upper side.

Although the details will be described later, a lower pressurizing portion 22 for applying pressure in a direction of pushing up the anvil 7 is provided below the anvil 7. Further, although not shown here, there is also an upper pressurizing portion 21 that applies pressure in a direction of pushing down the box B, and the box B is in a state of being sandwiched by the urging of both pressurizing portions in the vertical direction. Be supported. The control device 13 controls the vertical operation of the upper pressurizing unit 21 and the lower pressurizing unit 22.

Further, there is a sensor (stroke sensor) 12 for detecting the displacement of the pressurizing block, and the pushing amount of the work of the horn tip 6 is acquired. The sensor 12 feeds back the change in the coordinates of the horn tip 6 in the vertical direction at the time of joining to the control device 13 (the broken line is the feedback signal), so that the pushing amount is kept constant. Therefore, an actuator having a high response speed is used for the pressurizing device 10.

The pushing amount can be set by the operator from the display device 14. Further, a pressure sensor may be provided in addition to the sensor 12 to control the static pressure to be kept constant. In this way, when joining the workpieces, the joining (solid phase joining) is surely promoted by applying the combined vibration while adjusting the pushing amount or the static pressure.

Here, supplementing the solid phase bonding, for example, the surface of a metal atom is covered with an oil, an oxide film, or the like, and the atoms are prevented from approaching each other. In ultrasonic bonding, ultrasonic vibration is applied to the metal to generate a strong frictional force on the metal surface. As a result, the oxide film on the metal surface is removed, and clean and activated metal atoms appear on the joint surface.

In this state, by further applying ultrasonic vibration to the metal surface, the movement of atoms becomes active due to the temperature rise due to frictional heat, mutual attractive force between atoms is generated, and a state of solid-phase bonding is generated.

Next, FIG. 2A shows a cross-sectional view of the anvil 7 of the ultrasonic bonding device 1 and its upper and lower members.

As shown in the figure, the box B, which is one of the workpieces, is placed on the anvil 7, and the cap C, which is the other of the workpieces, is placed on the upper surface side (center) of the box B. Further, a plate-shaped stopper 20 is provided on the upper surface side of the box B, and an upper pressurizing portion 21 (corresponding to the "first pressurizing portion" of the present invention) is further provided above the plate-shaped stopper 20. The stopper 20 is not limited to a plate shape, and may have a structure that has the effect of contacting and suppressing a work such as a cube or a sphere.

The upper pressurizing portion 21 is a coil spring 21b (corresponding to the “first support member” or “support member” of the present invention) located between the plate member 21a (corresponding to the “first support member” or “support member” of the present invention) and the plate member 21a and the stopper 20 (“first support member” or “support member” of the present invention). It is composed of "first elastic member" or "corresponding to" elastic member "). Then, the plate member 21a is moved in the vertical direction by the control device 13 to adjust the spring pressure, and the pressure is applied in the direction of pushing down the box B via the stopper 20. The plate member 21a has an opening 21a'larger than the diameter of the tip portion 6b of the horn tip 6.

A plurality of coil springs 21b are preferably provided so that pressure is uniformly applied to the stopper 20, but a large coil spring 21b in which the tip portion 6b of the horn tip 6 is inserted in the center may be configured. When a plurality of coil springs are arranged as shown in FIG. 2, a leaf spring may be used instead of the coil spring.

The stopper 20 also has an opening 20 ′ through which the tip portion 6b of the horn tip 6 passes for joining. Except for the opening 20', the stopper 20 and the box B located on the lower side of the stacked workpieces are in contact with each other. Therefore, when the plate member 21a moves downward, most of the box B is pushed down. be able to.

The stopper 20 is not an essential configuration for the ultrasonic bonding device 1. When the stopper 20 is not used, it is necessary to arrange the coil spring 21b so that the coil spring 21b directly pushes down the upper surface side of the box B.

Further, a lower pressurizing portion 22 (corresponding to the "second pressurizing portion" of the present invention) is provided on the lower surface side of the anvil 7. The lower pressurizing portion 22 is a plate member 22a (corresponding to the “second support member” of the present invention) and a coil spring 22b (corresponding to the “second elastic member” of the present invention) located between the plate member 22a and the anvil 7. Equivalent to) and. Then, the plate member 22a is moved in the vertical direction by the control device 13 to adjust the spring pressure, and the pressure is applied in the direction of pushing up the box B through the anvil 7.

The coil spring 22b can also be composed of one large coil spring. In this case, the center of the anvil 7 and the lower pressurizing portion 22 may be aligned with the center of the diameter of the coil spring.

The box B has an opening on the upper surface side thereof, a cap C is arranged on the upper surface of the opening, and the horn tip 6 is sealed by ultrasonic vibration (composite vibration). Further, since the structural strength of the box B is relatively weak, it is necessary to set the static pressure received from the horn tip 6 to be equal to or less than the structural strength. The maximum static pressure is controlled by moving the plate members 21a and 22a up and down by the control device 13.

In this way, the box B placed on the anvil 7 is in a state of being sandwiched by the urging of the upper pressurizing portion 21 and the lower pressurizing portion 22, and is supported in the vertical direction. At this time, although the box B is fixed to some extent by the support in the vertical direction, the displacement in the horizontal direction is allowed (floating state).

At the time of joining, that is, when receiving ultrasonic vibration from the horn tip 6, the box B is displaced in the horizontal direction to release a small amount of static pressure, but most of the static pressure is used for joining the workpieces. Therefore, joining can be performed even when the structural strength of the work is weak.

The upper pressurizing portion 21 may be composed of four or more coil springs 21b symmetrically with respect to the central axis in the vertical direction of the plate member 21a. The lower pressurizing portion 22 may also be composed of four or more coil springs 22b symmetrically with respect to the central axis in the vertical direction of the anvil 7. As a result, the box B can be supported with a uniform force on the upper surface and the lower surface.

In the case of a box-shaped work such as box B, the height may differ depending on the part. Therefore, by individually pressurizing each portion with the spring mechanism (coil spring 22b) of the lower pressurizing portion 22, the pressing force of each portion can be kept constant.

Comparing the coil spring 21b of the upper pressurizing section 21 and the coil spring 22b of the lower pressurizing section 22, the actual elastic force is almost the same, but the elastic force of the coil spring 22b of the lower pressurizing section 22 is larger. It is preferable to increase.

When the work is ultrasonically vibrated for joining, a slight gap of about several microns is formed between the horn tip 6 and the work (cap C), and pressure may be released. That is, in the ultrasonic bonding device 1, in order to keep the pressure at the time of bonding constant, the horn tip 6 is track-controlled to fill the gap, but the horn tip 6 may be left behind against the sinking of the work. .. Therefore, the elastic force of the coil spring 22b is increased to constantly strongly press the work upward to prevent the occurrence of the interval.

The elastic force of the coil spring 21b of the upper pressurizing section 21 may be larger than the elastic force of the coil spring 22b of the lower pressurizing section 22, and in this case as well, there is an effect of reliably suppressing the work.

As shown in FIG. 2B, the lower pressurizing unit 22 can be replaced with an air cylinder 25. A structure in which the upper surface plate portion 25a (corresponding to the "pressing member" of the present invention) of the air cylinder 25 is moved, a work (here, box B) is sandwiched between the upper pressurizing portion 21 and pressure is applied to fix the air cylinder 25. do. When fixing the work, the structure of FIG. 2A requires an additional mechanism for raising and lowering the lower pressurizing portion 22, but the air cylinder 25 is provided with a pressurizing mechanism (pressurizing portion 25b) and a vertical mechanism. Therefore, the work can be fixed with a simple structure.

The air cylinder has a slow vertical movement speed, and when the work is ultrasonically vibrated, the horn tip cannot follow the sinking speed of the work. That is, the pressing force is lowered, and the joining of the workpieces becomes insufficient. In particular, when ultrasonic bonding is performed with a weak pressing force, the speed of vertical operation may be significantly reduced due to frictional resistance inside the air cylinder.

However, if the structure is such that the work is sandwiched and fixed by the combination of the air cylinder 25 (upper surface plate portion 25a) and the upper pressurizing portion 21, the pressing force of the air cylinder 25 increases by the pressurizing amount of the upper pressurizing portion 21. .. Therefore, the operating speed of the air cylinder 25 is increased, an appropriate pressing force is maintained, and a sufficient joining force can be obtained.

Next, with reference to FIGS. 3A and 3B, a modified form of the above-mentioned upper pressurizing unit 21 will be described.

As shown in FIG. 3A, the box B to be joined is placed on the anvil 7, and the upper pressurizing portion 31 is provided via the stoppers 30A and 30B on the upper surface side of the box B.

The upper pressurizing portion 31 is composed of a plate member 31a and coil springs 31b located between the plate member 22a and the stoppers 30A and 30B, respectively. Then, the plate member 31a is moved in the vertical direction by the control device 13 to adjust the spring pressure, and the pressure is applied in the direction of pushing down the box B via the stoppers 30A and 30B. The plate member 31a has an opening 31a'larger than the diameter of the tip portion 6b of the horn tip 6.

Here, the stoppers 30A and 30B are members corresponding to the respective coil springs 31b, and independently push down the upper surface side of the box B. When one stopper 20 as shown in FIG. 2 is used, when the upper surface of the box B is not flat, a gap is generated between the stopper 20 and the box B, and a portion where the support is insufficient is generated.

In this respect, the stoppers 30A and 30B, which are independent of each other, can change the number of coil springs and stoppers according to the size or shape of the work. Therefore, as compared with the case of using one stopper having an opening, it can be reliably supported in the vertical direction. It should be noted that the point that the displacement in the horizontal direction is allowed is the same.

Finally, FIG. 3B shows a view of the box B of FIG. 3A as viewed from above. Here, for the sake of explanation, the upper pressurizing section 31 is omitted.

The tip portion 6b of the horn tip 6 joins the cap C to the box B (opening) while vibrating elliptical vibration (broken line) as shown. At this time, the upper surface side of the box B is pressed at three places including the stopper 30C (not shown in FIG. 3A). As a result, it is possible to prevent the box B and the cap C from being misaligned at the time of joining.

Here, the upper surface side of the box B is pressed by using the stoppers 30A to 30C, but the set of the stopper and the coil spring may be increased to press four or more places. Further, as shown in FIG. 2, a lower pressurizing portion may be provided below the anvil 7 so that the box B is sandwiched by the urging of the two pressurizing portions.

The above description is a part of the embodiment of the present invention, and various other embodiments can be considered. This time, the work was box-shaped (box-shaped), but it is not limited to this.

For example, the work may be a plate-shaped member. In this case, the stopper comes into contact with one of the stacked works located on the upper side. Further, in the form without a stopper, pressure is applied in a direction in which the upper pressurizing portion pushes down the work located on the upper side.

In FIGS. 2A and 2B, the work is placed on an anvil (or air cylinder) and the horn tip is located above the work (vertical direction), but the present invention is not limited to this. That is, the horn tip and the anvil may be arranged in the horizontal direction or in the inclined direction. Then, the work is located between the horn tip and the anvil (or air cylinder) regardless of the direction, and is arranged in contact with the anvil. Even in such an embodiment, the work can be sandwiched and fixed, and even a work having a weak structural strength can be reliably joined.

The above-mentioned horn tip 6 is attached to the base portion 6a by screwing the tip portion 6b, but in this case, care is taken so that the attachment position of the tip portion does not become a vibration node.

The pushing amount of the horn tip 6 may be detected by any method. For example, there is a method in which an encoder is attached to an actuator (servomotor) that drives a pressurizing block, and the pushing amount is detected by displacement from a reference position.

1 ... ultrasonic bonding device, 2 ... ultrasonic transducer, 3 ... ultrasonic magnifying horn, 3a ... flange part, 4 ... ultrasonic LT horn, 4a ... diagonal slit, 6 ... horn tip, 6a ... base part, 6b ... Tip, 6c ... End face, 7 ... Anvil, 8 ... Oscillator, 10 ... Pressurizing device, 12 ... Sensor, 13 ... Control device, 14 ... Display device, 20, 30A to 30C ... Stopper, 21, 31 ... Upper addition Pressing part, 22 ... Downward pressurizing part, 21a, 22a, 31a ... Plate member, 21b, 22b, 31b ... Coil spring, 20a', 21a', 31a' ... Opening, 25 ... Air cylinder, 25a ... Top plate part, 25b ... Pressurized part, B ... Box, C ... Cap.

Claims (6)

A plurality of workpieces stacked between the first member and the second member arranged at a position facing the first member are subjected to a vibration component in the first direction perpendicular to the direction in which the first member presses. An ultrasonic bonding device that bonds a plurality of workpieces by vibrating the first member by ultrasonic vibration that combines a vibration component in a second direction orthogonal to the first direction.
It is composed of a first support member and a first elastic member located between the first support member and one of the plurality of works, and the first support member is moved to apply pressure to the work. The first pressurizing part and
The second support member is composed of a second support member and a second elastic member located between the second support member and the second member, and the second support member is moved to apply pressure to the second member. Pressure part and
An ultrasonic bonding apparatus including a third pressurizing portion that applies pressure to the plurality of workpieces via the first member. In the ultrasonic bonding apparatus according to claim 1,
An ultrasonic bonding apparatus characterized in that a stopper is provided between the first elastic member and one of the workpieces so as to be in contact with the workpiece except for a bonding portion of the workpiece. In the ultrasonic bonding apparatus according to claim 1,
The first elastic member is a plurality of springs provided at positions separated from each other.
An ultrasonic bonding apparatus comprising between the plurality of springs and the one work, a stopper corresponding to each of the plurality of springs and in contact with the work. In the ultrasonic bonding apparatus according to any one of claims 1 to 3,
An ultrasonic bonding apparatus including a control unit that controls the positions of the first support member and the second support member in a vertical direction. In the ultrasonic bonding apparatus according to any one of claims 1 to 4.
The first member is a bonding tip, and is
The second member is an ultrasonic bonding device characterized by being anvil. The tip of the bonding tip presses on a plurality of stacked workpieces, and the vibration component in the first direction perpendicular to the pressing direction and the vibration component in the second direction orthogonal to the first direction are combined. An ultrasonic bonding device that bonds a plurality of workpieces by vibrating the bonding tip by ultrasonic vibration.
A pressurizing portion composed of a support member and an elastic member located between the support member and one of the plurality of works, and moving the support member to apply pressure to the work.
An air cylinder that moves a pressing member to apply pressure to the other work among the plurality of works,
An ultrasonic bonding device including a pressurizing device that applies pressure to the plurality of workpieces via the bonding tip.

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