JPWO2020039952A1 - Drawing device and drawing method - Google Patents

Abstract

The drawing apparatus (1) according to the embodiment includes a plurality of support units (51), a moving unit (53), an adjusting unit (30, 31), and a drawing unit (32). The plurality of support portions (51) support the work from below. The moving portion (53) moves the supporting portion (51) along the horizontal direction. The adjusting portions (30, 31) adjust the floating height of the work by blowing air from below onto the work supported by the supporting portion (51). The drawing unit (32) draws on a work whose levitation height is adjusted by the adjusting unit (30, 31) and is supported by the support unit (51) and moves. The adjusting units (21, 30, 31, 40) are of the first adjusting unit (30) and the drawing unit (32) provided on the upstream side of the drawing unit (32) in the moving direction of the support unit (51). It is provided below and includes a second adjusting unit (31) that adjusts the floating height of the work with higher accuracy than the first adjusting unit (30).

Description

The present disclosure relates to a drawing apparatus and a drawing method.

Patent Document 1 discloses that droplets of a coating liquid are applied to a conveyed substrate by an inkjet method.

JP-A-2018-49805

The present disclosure provides techniques for improving productivity.

The drawing apparatus according to one aspect of the present disclosure includes a plurality of support portions, a moving portion, an adjusting portion, and a drawing portion. The plurality of support portions support the work from below. The moving portion moves the supporting portion along the horizontal direction. The adjusting portion adjusts the floating height of the work by blowing air from below onto the work supported by the supporting portion. The levitation height of the drawing unit is adjusted by the adjusting unit, and the drawing unit draws on the moving work supported by the support unit. The adjusting unit is provided below the drawing unit and the first adjusting unit provided on the upstream side of the drawing unit in the moving direction of the supporting unit, and adjusts the floating height of the work with higher accuracy than the first adjusting unit. It is provided with a second adjustment unit.

According to the present disclosure, productivity can be improved.

FIG. 1A is a plan view showing a schematic configuration of a drawing apparatus according to the first embodiment. FIG. 1B is a side view showing a schematic configuration of a drawing apparatus according to the first embodiment. FIG. 2 is a plan view showing a schematic configuration of a part of the drawing unit according to the first embodiment. FIG. 3A is a schematic diagram (No. 1) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 3B is a schematic diagram (No. 1) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 4A is a schematic diagram (No. 2) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 4B is a schematic diagram (No. 2) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 5A is a schematic diagram (No. 3) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 5B is a schematic diagram (No. 3) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 6A is a schematic diagram (No. 4) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 6B is a schematic diagram (No. 4) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 7A is a schematic diagram (No. 5) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 7B is a schematic diagram (No. 5) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 8A is a schematic diagram (No. 6) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 8B is a schematic diagram (No. 6) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 9A is a schematic diagram (No. 7) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 9B is a schematic diagram (No. 7) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 10A is a schematic diagram (No. 8) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 10B is a schematic diagram (No. 8) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 11A is a schematic diagram (No. 9) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 11B is a schematic diagram (No. 9) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 12A is a schematic diagram (No. 10) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 12B is a schematic diagram (No. 10) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 13A is a schematic diagram (No. 11) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 13B is a schematic diagram (No. 11) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 14A is a schematic diagram (No. 12) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 14B is a schematic diagram (No. 12) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 15A is a schematic diagram (No. 13) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 15B is a schematic diagram (No. 13) showing a drawing procedure of the drawing apparatus according to the first embodiment. FIG. 16 is a flowchart illustrating the drawing process according to the first embodiment. FIG. 17A is a plan view showing a schematic configuration of the drawing apparatus according to the second embodiment. FIG. 17B is a side view showing a schematic configuration of the drawing apparatus according to the second embodiment. FIG. 18A is a plan view illustrating a schematic configuration of the weight measuring device according to the second embodiment. FIG. 18B is a side view illustrating a schematic configuration of the weight measuring device according to the second embodiment. FIG. 19A is a schematic diagram (No. 1) showing a weight measurement procedure of the drawing apparatus according to the second embodiment. FIG. 19B is a schematic diagram (No. 2) showing a weight measurement procedure of the drawing apparatus according to the second embodiment. FIG. 19C is a schematic diagram (No. 3) showing a weight measurement procedure of the drawing apparatus according to the second embodiment. FIG. 19D is a schematic diagram (No. 4) showing a weight measurement procedure of the drawing apparatus according to the second embodiment. FIG. 20 is a flowchart illustrating the weight measurement process according to the second embodiment. FIG. 21 is a plan view showing a schematic configuration of a part of the drawing apparatus according to the modified example.

Hereinafter, embodiments of the drawing apparatus and drawing method disclosed in the present application will be described in detail with reference to the accompanying drawings. The drawing apparatus and drawing method disclosed by the following embodiments are not limited.

(First Embodiment)
<Overall configuration>
The drawing apparatus 1 according to the first embodiment will be described with reference to FIGS. 1A and 1B. FIG. 1A is a plan view showing a schematic configuration of the drawing apparatus 1 according to the first embodiment. FIG. 1B is a side view showing a schematic configuration of the drawing apparatus 1 according to the first embodiment. In FIG. 1A, some configurations such as the control device 9 are omitted.

The drawing device 1 is a substrate processing device that draws on the substrate S by an inkjet method while conveying the substrate S, which is a work, in the horizontal direction. The substrate S is, for example, a substrate used for a flat panel display.

The drawing device 1 includes a carry-in stage 2, a drawing stage 3, a carry-out stage 4, a moving device 5, an air adjusting device 6, a drawing state detecting device 7, a flushing unit 8, and a control device 9.

In each drawing referred to below, in order to make the explanation easy to understand, an orthogonal coordinate system in which the X-axis direction, the Y-axis direction, and the Z-axis direction orthogonal to each other are defined and the Z-axis positive direction is the vertically upward direction is shown. The horizontal direction including the X-axis direction and the Y-axis direction coincides with the surface direction of the substrate S.

In the drawing device 1, the carry-in stage 2, the drawing stage 3, and the carry-out stage 4 are arranged in the order of the carry-in stage 2, the drawing stage 3, and the carry-out stage 4 along the Y-axis direction. The drawing device 1 draws while transporting the board S carried into the carry-in stage 2 by the carry-in arm (not shown) along the Y-axis direction, and draws the drawn board S from the carry-out stage 4 (not shown). ) To carry it out.

It should be noted that the direction from the carry-in stage 2 to the carry-out stage 4 in the Y-axis direction may be described as the movement direction, the carry-in stage 2 side as the upstream side, and the carry-out stage 4 side as the downstream side in the movement direction. Further, in the Cartesian coordinate system, the X-axis direction is a direction orthogonal to the moving direction, and may be referred to as a width direction (an example of an orthogonal direction) here.

Further, FIGS. 1A and 1B show a state in which the substrates S are arranged on the stages 2 to 4 for the sake of explanation.

The substrate S is carried into the carry-in stage 2 by the carry-in arm. In the carry-in stage 2, the substrate S is delivered from the carry-in arm to the first sorter 50. The substrate S carried into the carry-in stage 2 is supported from below by the first sorter 50 of the moving device 5.

The carry-in stage 2 includes a plurality of first floating upper portions 20, a plurality of second floating upper portions 21, and an deposit detecting device 22.

The first floating upper portion 20 is extended along the moving direction. The first floating upper portions 20 are provided side by side along the width direction. The first floating upper portion 20 blows air toward the substrate S from below the substrate S supported by the first sorter 50, and exerts a force acting upward on the substrate S (hereinafter, referred to as a levitation force). give. The levitation force is a force that stabilizes the levitation height of the substrate S and is a force that reduces the gravity acting on the substrate S. The first levitation portion 20 adjusts the levitation height of the substrate S supported by the first sorter 50 by applying a levitation force. Specifically, the first floating upper portion 20 adjusts the floating height of the substrate S so as to be stable within the range of 200 to 2000 μm. The blowing of air toward the substrate S by the first floating upper portion 20 also has an action of correcting the deflection of the substrate S.

A groove 20a is formed between the adjacent first floating upper portions 20. The first sorter 50 is arranged in the groove 20a. The groove 20a is formed along the moving direction so that the first sorter 50 can move along the moving direction.

The second floating upper portion 21 is downstream of the first floating upper portion 20, and is provided upstream of the first floating upper portion 30 of the drawing stage 3, which will be described later. The second floating upper portions 21 are provided side by side along the width direction.

The second floating upper portion 21 blows air toward the substrate S from below the substrate S supported by the first sorter 50 to give a levitation force to the substrate S. Further, the second floating upper portion 21 sucks the air existing between the second floating upper portion 21 and the substrate S. As a result, the second floating upper portion 21 adjusts the floating height of the substrate S supported by the first sorter 50. That is, the second floating upper portion 21 (an example of the adjusting portion and the third adjusting portion) is provided on the upstream side of the first floating upper portion 30 (an example of the first adjusting portion) in the moving direction, and the substrate S (workpiece) is provided. The levitation height of one example) is adjusted with high accuracy.

Specifically, the second floating upper portion 21 adjusts the floating height of the substrate S with high accuracy so as to be stable within a range of 30 to 60 μm, and the deposit detecting device 22 can detect the deposits adhering to the substrate S. To. The second floating upper portion 21 can adjust the flow rate of the air blown to the substrate S. The second floating upper portion 21 can adjust the flow rate of air blown toward the lower surface of the substrate S according to the size and thickness of the substrate S. As a result, the second floating upper portion 21 can adjust the floating height of the substrate S with high accuracy. The blowing of air toward the substrate S by the second floating upper portion 21 also has an action of correcting the deflection of the substrate S.

A groove 21a is formed between the adjacent second floating upper portions 21 so that the first sorter 50 can move along the moving direction.

The deposit detection device 22 detects the presence or absence of deposits on the substrate S (an example of the work) to which the air is blown by the second floating upper portion 21 (an example of the third adjusting unit). The deposit detection device 22 includes a laser unit 22a and a light receiving unit 22b.

The laser unit 22a is provided at one end of the carry-in stage 2 in the width direction. The light receiving portion 22b is provided at the other end of the carry-in stage 2 in the width direction. That is, the deposit detection device 22 arranges the laser unit 22a and the light receiving unit 22b so as to face each other with the substrate S in between. The deposit detection device 22 detects the amount of light of the laser emitted from the laser unit 22a by the light receiving unit 22b, and detects the presence or absence of deposits on the substrate S.

The substrate S is conveyed to the drawing stage 3 from the carry-in stage 2 by the first sorter 50. In the drawing stage 3, the substrate S is delivered from the first sorter 50 to the second sorter 51. The substrate S conveyed to the drawing stage 3 is supported from below by the second sorter 51 of the moving device 5.

The drawing stage 3 includes a plurality of first floating upper portions 30, a second floating upper portion 31, and a drawing unit 32.

The first floating upper portion 30 is extended along the moving direction. The first floating upper portions 30 are provided side by side along the width direction.

A groove 30a is formed between the adjacent first floating upper portions 30. The groove 30a is formed along the moving direction so that the first sorter 50 can move along the moving direction.

Further, a groove 30b different from the groove 30a is formed between the adjacent first floating upper portions 30. A second sorter 51 is arranged in the groove 30b. The groove 30b is formed along the moving direction so that the second sorter 51 can move along the moving direction.

The groove 30b is formed so that the second sorter 51 can move along the moving direction even when the second sorter 51 moves in the width direction. The length of the groove 30b in the width direction is set based on the amount of movement of the second sorter 51 in the width direction. For example, the length of the groove 30b in the width direction is more than twice as long as the length of the second sorter 51 in the width direction.

The first floating upper portion 30 is provided on the upstream side of the drawing portion 32 in the moving direction of the second sorter 51 (an example of the support portion).

The first floating upper portion 30 blows air toward the substrate S from below the substrate S supported by the first sorter 50 or the second sorter 51 to give a levitation force to the substrate S. That is, the first floating upper portion 30 (an example of the adjusting portion and the first adjusting portion) is attached to the first sorter 50 or the substrate S (an example of the work) supported by the second sorter (an example of the supporting portion). Air is blown from below to adjust the floating height of the substrate S. Specifically, the first floating upper portion 30 adjusts the floating height of the substrate S so as to be stable within the range of 200 to 2000 μm. The blowing of air toward the substrate S by the first floating upper portion 30 also has an action of correcting the deflection of the substrate S.

The second floating upper portion 31 is provided downstream of the first floating upper portion 30, and is provided below the drawing unit 32. The second floating upper portion 31 extends in the width direction.

The second floating upper portion 31 blows air toward the substrate S from below the substrate S supported by the second sorter 51 to give a levitation force to the substrate S. Further, the second floating upper portion 31 sucks the air existing between the second floating upper portion 31 and the substrate S. As a result, the second floating upper portion 31 adjusts the floating height of the substrate S supported by the second sorter 51. That is, the second floating upper portion 31 (an example of the adjusting portion and the second adjusting portion) is provided below the drawing portion 32, and the substrate S is floated more than the first floating upper portion 30 and the substrate S (an example of the work). Adjust high with high precision.

Specifically, the second floating upper portion 31 holds the substrate S horizontally, adjusts the floating height of the substrate S with high accuracy so as to be stable within a range of 30 to 60 μm, and the drawing unit 32 accurately adjusts the substrate S. Make it drawable. The second floating upper portion 31 can adjust the flow rate of the air blown to the substrate S in the same manner as the second floating upper portion 21 of the carry-in stage 2. The blowing of air toward the substrate S by the second floating upper portion 31 also has an action of correcting the deflection of the substrate S.

The second floating upper portion 31 is movable in the width direction, and moves in the width direction as the second sorter 51 moves in the width direction.

A groove 31a into which the second sorter 51 (an example of a support portion) can move is formed in the second floating upper portion 31. The length of the groove 31a in the width direction is a length that allows the second sorter 51 to move, and is shorter than the length of the groove 30b of the first floating upper portion 30 in the width direction.

The drawing unit 32 is an inkjet type, and discharges a functional liquid such as ink to the substrate S to draw on the substrate S. The drawing unit 32 is horizontally held by the second sorter 51 and the second floating upper portion 31, and discharges the functional liquid to the substrate S to be conveyed, and draws on the substrate S. That is, the drawing unit 32 has the levitation height adjusted with high accuracy by the second floating upper portion 31 (an example of the adjusting unit), and is supported and conveyed by the second sorter 51 (an example of the supporting portion) of the substrate S (workpiece). Draw in (1 example).

The drawing unit 32 draws on the substrate S twice. Specifically, the drawing unit 32 finishes the first drawing and draws the second drawing on the substrate S moved in the width direction. That is, the drawing unit 32 draws again on the substrate S (an example of the work) moved in the width direction (an example of the orthogonal direction).

The drawing unit 32 includes a plurality of carriages 32a for discharging the functional liquid. As shown in FIG. 2, the carriages 32a are provided side by side in the width direction. FIG. 2 is a plan view showing a schematic configuration of a part of the drawing unit 32 according to the first embodiment. That is, the drawing unit 32 includes a plurality of carriages 32a arranged along the width direction (an example of an orthogonal direction orthogonal to the moving direction). Further, the carriages 32a are provided in two rows in the moving direction. The carriages 32a may be provided in one row in the moving direction, or may be provided in a plurality of rows of three or more rows. The carriage 32a includes a plurality of heads 32b for discharging the functional liquid. The heads 32b are provided in two rows in the width direction with respect to one carriage 32a. The heads 32b may be provided in a single row in the width direction, or may be provided in a plurality of rows of three or more rows.

Further, the heads 32b are provided side by side in the moving direction. For example, the heads 32b are provided in six rows in the moving direction. Further, the heads 32b may be provided in a single row in the moving direction, or may be provided in a plurality of rows such as eight rows. As described above, the drawing unit 32 includes a plurality of carriages 32a having a plurality of heads 32b for ejecting droplets. The drawing unit 32 draws on the substrate S by discharging the functional liquid from the plurality of heads.

The position of the drawing unit 32 in the moving direction is fixed. Further, when the drawing state is detected by the drawing state detecting device 7, the drawing unit 32 moves along the vertical direction.

Returning to FIGS. 1A and 1B, the substrate S is conveyed from the drawing stage 3 to the carry-out stage 4 by the second sorter 51. In the carry-out stage 4, when the substrate S on which the first drawing is performed by the drawing unit 32 is conveyed by the second sorter 51, the second sorter 51 and the substrate S are moved in the width direction.

Further, in the carry-out stage 4, when the substrate S on which the second drawing is performed by the drawing unit 32 is conveyed by the second sorter 51, the substrate S is transferred from the second sorter 51 to the third sorter 52 of the moving device 5. Delivered. The substrate S is supported from below by the third sorter 52.

Further, in the unloading stage 4, the substrate S conveyed to the downstream side by the third sorter 52 is delivered from the third sorter 52 to the unloading arm.

The unloading stage 4 includes a plurality of floating tops 40. The floating upper portion 40 is extended along the moving direction. The floating portions 40 are provided side by side along the width direction.

A groove 40a is formed between the adjacent floating portions 40. The groove 40a is a groove at the end in the positive direction of the X-axis, and is formed along the moving direction so that the second sorter 51 can move in the moving direction and the width direction. The length of the groove 40a in the width direction is set based on the amount of movement of the second sorter 51 in the width direction. For example, the length of the groove 40a in the width direction is the same as the length of the groove 30b of the first floating upper portion 30 of the drawing stage 3.

Further, a groove 40b different from the groove 40a is formed between the adjacent floating upper parts 40. The groove 40b is formed on the negative side of the X-axis with respect to the groove 40a. A third sorter 52 is arranged in the groove 40b. The groove 40b is formed along the moving direction so that the third sorter 52 can move along the moving direction.

The levitation portion 40 blows air toward the substrate S from below the substrate S supported by the second sorter 51 or the third sorter 52 to give a levitation force to the substrate S. As a result, the floating upper portion 40 adjusts the floating height of the substrate S supported by the second sorter 51 or the third sorter 52 so as to be stable within a range of 200 to 2000 μm. The blowing of air toward the substrate S by the floating upper portion 40 also has an action of correcting the deflection of the substrate S.

The moving device 5 includes a plurality of first sorters 50, a plurality of second sorters 51, a plurality of third sorters 52, and a drive unit 53.

The first sorter 50 is moved by the drive unit 53 in the vertical direction and along the moving direction. The first sorter 50 supports the substrate S (an example of the work) from below. Specifically, the first sorter 50 is attracted to the lower surface of the substrate S carried in by the carry-in arm, and supports the substrate S from below. The first sorter 50 conveys the substrate S from the carry-in stage 2 to the drawing stage 3 while supporting the substrate S from below, and delivers the substrate S to the second sorter 51.

The first sorter 50 is provided in the groove 20a of the carry-in stage 2. Specifically, the four first sorters 50 are provided separately in the two grooves 20a. Two first sorters 50 are provided in one groove 20a. The two first sorters 50 provided in one groove 20a are arranged at predetermined intervals in the moving direction. The predetermined interval is, for example, an interval in which both end sides of the substrate S in the moving direction are supported by the two first sorters 50. The number of the first sorters 50 is not limited to four, and may be six, for example. Further, the number of grooves 20a in which the first sorter 50 is provided is not limited to two, and may be, for example, three. Further, the number of the first sorters 50 may be two. The two first sorters 50 are arranged on the upstream side in the carry-in stage 2, and are provided separately in the two grooves 20a. That is, the two first sorters 50 are attracted to the lower surface of the upstream end of the substrate S and support the substrate S in a cantilevered state.

The second sorter 51 is moved by the drive unit 53 along the vertical direction, the moving direction, and the width direction. The second sorter 51 supports the substrate S (an example of the work) from below. Specifically, the second sorter 51 is attracted to the lower surface of the substrate S conveyed by the first sorter 50, and supports the substrate S from below. The second sorter 51 conveys the substrate S between the drawing stage 3 and the carry-in stage 2 while supporting the substrate S from below, and delivers the substrate S to the third sorter 52.

A part of the second sorter 51 is provided in the groove 30b of the drawing stage 3. Specifically, four second sorters 51 are provided on the drawing stage 3, and of the four second sorters 51, two second sorters 51 are provided in the groove 30b. Further, of the four second sorters 51, the other two second sorters 51 are provided at the ends of the drawing stage 3 in the width direction. The other two second sorters 51 are provided outside the first floating upper portion 30 and the second floating upper portion 31 of the drawing stage 3 in the width direction.

The two second sorters 51 provided in the groove 30b, the first floating upper portion 30 of the drawing stage 3, and the other two second sorters 51 provided outside the second floating upper portion 31 in the width direction are They are arranged at predetermined intervals in the moving direction. The second sorter 51 is arranged so as to support the four corners of the substrate S. The number of the second sorters 51 is not limited to four, and may be six, for example. Further, the number of grooves 30b provided with the second sorter 51 is not limited to one, and may be two, for example. Further, the number of the second sorters 51 may be two. The two second sorters 51 are arranged at predetermined intervals in the moving direction. That is, the two second sorters 51 are attracted to the lower surface of one end of the substrate S in the width direction to support the substrate S in a cantilevered state.

The third sorter 52 is moved by the drive unit 53 in the vertical direction and along the moving direction. The third sorter 52 supports the substrate S (an example of the work) from below. Specifically, the third sorter 52 is attracted to the lower surface of the substrate S conveyed by the second sorter 51, and supports the substrate S from below. The third sorter 52 moves in the moving direction while supporting the substrate S from below, and delivers the substrate S to the carry-out arm.

The third sorter 52 is provided in the groove 40b of the carry-out stage 4. Specifically, the four third sorters 52 are provided separately in the two grooves 40b. The two third sorters 52 are provided in one groove 40b. The two third sorters 52 provided in one groove 40b are arranged at predetermined intervals in the moving direction. The number of the third sorters 52 is not limited to four, and may be six, for example. Further, the number of grooves 40b provided with the third sorter 52 is not limited to two, and may be, for example, three. Further, the number of the third sorters 52 may be two. The two third sorters 52 are arranged on the downstream side in the carry-out stage 4, and are provided separately in the two grooves 40b. That is, the two third sorters 52 are attracted to the lower surface of the end on the downstream side with respect to the substrate S, and support the substrate S in a cantilevered state.

The drive unit 53 has, for example, an electric motor, a chain device, a belt device, and the like, and moves the first sorter 50, the second sorter 51, and the third sorter 52, respectively. The drive unit 53 moves the first sorter 50, the second sorter 51, and the third sorter 52 (an example of the support portion) along the moving direction (an example of the horizontal direction).

The drive unit 53 moves the second sorter 51 between the drawing stage 3 and the unloading stage 4 a plurality of times when the substrate S is drawn a plurality of times, for example, twice.

When the second sorter 51 supporting the substrate S for which the first drawing is completed is moved to the carry-out stage 4, the drive unit 53 moves the second sorter 51 in the width direction. Further, the drive unit 53 moves the second floating upper portion 31 of the drawing stage 3 in the width direction. Specifically, the drive unit 53 (an example of the adjustment movement unit) has a second floating upper portion 31 (an example of a support unit) in accordance with the movement of the second sorter (an example of the support unit) in the width direction (an example in the orthogonal direction). Move the adjustment unit) in the width direction.

Next, the drive unit 53 moves the second sorter 51 moved in the width direction from the carry-out stage 4 to the drawing stage 3. Then, the drive unit 53 moves the second sorter 51 that supports the substrate S for which the second drawing is completed from the drawing stage 3 to the carry-out stage 4 again.

That is, the drive unit 53 moves the second sorter 51 (an example of the support unit) that supports the substrate S (an example of the work) drawn by the drawing unit 32 in the width direction (the plane direction of the substrate S). Move in the orthogonal direction (an example) orthogonal to the direction.

Further, the drive unit 53 moves the roll paper 71 of the drawing state detection device 7 and the flushing unit 8 along the moving direction. Further, the drive unit 53 moves the drawing unit 32 along the vertical direction when detecting the drawing state or performing flushing. A plurality of drive units 53 may be provided corresponding to the sorters 51 to 52 and the like. That is, the sorters 51 to 52, the roll paper 71, the flushing unit 8, and the like may be driven by different drive units 53.

The air adjusting device 6 includes a pump 60, a supply line 61, a vacuum 62, and a suction line 63. The pump 60 blows compressed air from the floating portions 20, 21, 30, 31, and 40 via the supply line 61. The supply line 61 is provided with an adjusting valve (not shown) for adjusting the flow rate of the air blown from each of the floating upper portions 20, 21, 30, 31, and 40.

Further, the vacuum 62 sucks the air existing between the vacuum board S and the substrate S by the second floating upper portion 21 of the carry-in stage 2 and the second floating upper portion 31 of the drawing stage 3 via the suction line 63. The suction line 63 is provided with an adjusting valve (not shown) for adjusting the amount of air sucked.

The drawing state detection device 7 is provided above the first floating upper portion 30 (an example of the adjusting unit) of the drawing stage 3 and detects the drawing state of the drawing unit 32. The drawing state detection device 7 includes an image pickup device 70 and a roll paper 71. The drawing state detection device 7 photographs the functional liquid discharged on the roll paper 71 by the image pickup device 70. The shooting result is output to the control device 9, and the control device 9 determines whether or not the drawing state in the drawing unit 32 is normal.

The roll paper 71 may be provided in two rows in the moving direction. For example, the roll paper 71 is provided in two rows corresponding to the carriages 32a provided in the two rows. As a result, the functional liquid can be discharged to a different roll paper 71 for each carriage 32a. Therefore, when determining the drawing state of the two carriages 32a, the time required for the determination can be shortened.

Further, when determining the drawing state for one carriage 32a, the drawing state can be determined using one roll paper 71 out of the two roll papers 71. That is, the drawing state can be determined without using the other roll paper 71. Therefore, the number of roll papers 71 used when determining the drawing state for one carriage 32a can be reduced.

In the drawing state detection device 7, drawing on the substrate S (an example of the work) is completed by the drawing unit 32, and the next substrate S is conveyed to the first floating upper portion 30 (an example of the first adjusting unit) of the drawing stage 3. The drawing state is detected when the screen is displayed.

The flushing unit 8 is provided above the floating upper portion 40 (an example of the adjusting unit) of the carry-out stage 4, and the drawing unit 32 is flushed. In the flushing unit 8, the functional liquid is discharged from the drawing unit 32 based on a predetermined flushing period. The flushing unit 8 collects the discharged functional liquid. That is, the flushing unit 8 collects the functional liquid discharged by flushing. The functional liquid collected by the flushing unit 8 is drained through a waste pipe (not shown).

The control device 9 is, for example, a computer, and includes a control unit 90 and a storage unit 91. The storage unit 91 stores programs that control various processes executed by the drawing device 1. The control unit 90 controls the operation of the drawing device 1 by reading and executing the program stored in the storage unit 91.

The program may be recorded on a storage medium readable by a computer, and may be installed from the storage medium in the storage unit 91 of the control device 9. Examples of storage media that can be read by a computer include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnet optical disk (MO), and a memory card.

<Drawing procedure>
Next, the drawing procedure of the drawing apparatus 1 according to the first embodiment will be described with reference to FIGS. 3A to 15B. 3A to 15B are schematic views (No. 1 to No. 13) showing a drawing procedure of the drawing apparatus 1 according to the first embodiment.

Note that in FIGS. 3A to 15B, some configurations such as the control device 9 are omitted. Further, in FIGS. 3A to 15B, the figure with "A" is a plan view showing an outline of the drawing apparatus 1 according to the first embodiment, and the figure with "B" is the first. It is a side view which shows the outline of the drawing apparatus 1 which concerns on embodiment.

The drawing device 1 carries the substrate S into the carry-in stage 2 by a carry-in arm (not shown). At this time, the substrate S may be delivered from the carry-in arm to the carry-in stage 2 via a lift pin (not shown) that can support the board S from below and move up and down. After the substrate S is carried into the carry-in stage 2, as shown in FIGS. 3A and 3B, the first sorter 50 is raised from the initial position and the first sorter 50 is attracted to the lower surface of the substrate S. As a result, the substrate S is delivered from the carry-in arm to the first sorter 50, and is supported from below by the first sorter 50.

Further, air is blown from the first floating upper portion 20 of the carry-in stage 2 toward the lower surface of the substrate S. As a result, a levitation force is generated on the substrate S, and the levitation height of the substrate S is adjusted to be stable within the range of 200 to 2000 μm.

In the carry-in stage 2, when the board S is carried in by the carry-in arm, alignment for adjusting the position of the board S is executed.

When the substrate S is supported by the first sorter 50, the drawing apparatus 1 moves the first sorter 50 downstream along the moving direction, that is, toward the drawing stage 3, as shown in FIGS. 4A and 4B. .. At this time, in the carry-in stage 2, air is blown from the second floating upper portion 21 toward the lower surface of the substrate S, and the air existing between the second floating upper portion 21 and the substrate S is sucked. As a result, the presence or absence of deposits adhering to the substrate S is detected by the deposit detection device 22 in a state where the floating height of the substrate S is adjusted with high accuracy so as to be stable within the range of 30 to 60 μm.

When the drawing device 1 conveys the substrate S to the drawing stage 3 by the first sorter 50, the drawing device 1 raises the second sorter 51 from the initial position and raises the second sorter 51 from the substrate S as shown in FIGS. 5A and 5B. Adsorb to the bottom surface. Further, the drawing device 1 releases the adsorption of the first sorter 50 to the substrate S and lowers the first sorter 50. As a result, the substrate S is handed over from the first sorter 50 to the second sorter 51, and is supported from below by the second sorter 51.

Further, air is blown from the first floating upper portion 30 of the drawing stage 3 toward the lower surface of the substrate S. As a result, a levitation force is generated on the substrate S, and the levitation height of the substrate S is adjusted to be stable within the range of 200 to 2000 μm.

In the drawing stage 3, when the substrate S is conveyed by the first sorter 50, alignment for adjusting the position of the substrate S is executed.

When the substrate S is supported by the second sorter 51, the drawing apparatus 1 moves the second sorter 51 downstream along the moving direction, that is, to the unloading stage 4 side, as shown in FIGS. 6A and 6B. .. Further, the drawing device 1 discharges the functional liquid onto the substrate S by the drawing unit 32, and draws the functional liquid on the substrate S for the first time.

At this time, in the drawing stage 3, air is blown from the second floating upper portion 31 toward the lower surface of the substrate S, and the air existing between the drawing stage 3 and the substrate S is sucked. As a result, the floating height of the substrate S is adjusted with high accuracy so as to be stable within the range of 30 to 60 μm. The four corners of the substrate S are supported by the second sorter 51, and the floating height is held in a state of being adjusted with high accuracy by the second floating upper portion 31 extending in the width direction. Therefore, the drawing device 1 can draw on the substrate S with high accuracy by the drawing unit 32.

The drawing device 1 moves the first sorter 50 toward the carry-in stage 2 and returns the first sorter 50 to the carry-in stage 2.

When the drawing device 1 conveys the substrate S on which the first drawing has been performed to the carry-out stage 4, the drawing device 1 moves the second sorter 51 in the width direction as shown in FIGS. 7A and 7B. For example, the drawing device 1 moves the second sorter 51 in the positive direction of the X-axis in the width direction. As a result, the substrate S moves in the width direction in accordance with the movement of the second sorter 51 in the width direction.

Further, the drawing device 1 moves the second floating upper portion 31 of the drawing stage 3 in the same direction as the second sorter 51 in accordance with the movement of the second sorter 51. In the carry-out stage 4, air is blown from the floating upper portion 40 toward the lower surface of the substrate S. As a result, the floating height of the substrate S is adjusted to be stable within the range of 200 to 2000 μm. Further, the next substrate S is carried into the carry-in stage 2. The next substrate S is delivered from the carry-in arm to the first sorter 50.

When the drawing device 1 completes the movement of the second sorter 51 in the width direction, the drawing device 1 moves the second sorter 51 toward the drawing stage 3 as shown in FIGS. 8A and 8B, and the drawing unit 32 moves the second sorter 51 toward the drawing stage 3. The functional liquid is discharged to the substrate S, and the second drawing is performed on the substrate S.

In the drawing stage 3, air is blown from the second floating upper portion 31 toward the lower surface of the substrate S, and the air existing between the drawing stage 3 and the substrate S is sucked. Therefore, the floating height of the substrate S is adjusted with high accuracy so as to be stable within the range of 30 to 60 μm. Therefore, the drawing apparatus 1 can draw on the substrate S with high accuracy as in the first drawing.

Further, since the second floating upper portion 31 moves in the width direction in accordance with the movement of the second sorter 51, the movement of the second sorter 51 is not hindered, and the drawing apparatus 1 moves the second sorter 51. It can be moved to the drawing stage 3.

When the drawing device 1 conveys the substrate S on which the second drawing has been performed to the drawing stage 3 as shown in FIGS. 9A and 9B, the drawing device 1 carries out the second sorter 51 as shown in FIGS. 10A and 10B. Move to stage 4. Since drawing is not performed here, the moving speed of the second sorter 51 is higher than the moving speed when drawing is performed. As a result, the drawing apparatus 1 can shorten the time for drawing processing on the substrate S, and can improve the productivity.

When the drawing device 1 conveys the substrate S to the unloading stage 4 by the second sorter 51, the drawing device 1 raises the third sorter 52 from the initial position and raises the third sorter 52 from the initial position as shown in FIGS. 11A and 11B. Adsorb to the underside of. Further, the drawing device 1 releases the adsorption of the second sorter 51 to the substrate S and lowers the second sorter 51. As a result, the substrate S is handed over from the second sorter 51 to the third sorter 52, and is supported from below by the third sorter 52.

In the carry-out stage 4, air is blown from the floating upper portion 40 toward the lower surface of the substrate S, and the floating height of the substrate S is adjusted to be stable within a range of 200 to 2000 μm.

Further, the drawing device 1 raises the drawing unit 32 to move the roll paper 71 above the carry-out stage 4 along the moving direction.

When the delivery of the substrate S to the third sorter 52 is completed, the drawing apparatus 1 moves the third sorter 52 toward a predetermined carry-out position in the carry-out stage 4, as shown in FIGS. 12A and 12B. Further, the drawing device 1 moves the second sorter 51 and the second floating upper portion 31 of the drawing stage 3 in the width direction. For example, the drawing apparatus 1 moves the second sorter 51 and the second floating upper portion 31 in the negative direction of the X-axis in the width direction.

Here, the drawing device 1 is a second sorter when the second sorter 51 and the second floating upper portion 31 of the drawing stage 3 are not moved in the width direction and the second sorter is drawn on the next substrate S. The 51 and the second floating upper portion 31 of the drawing stage 3 may be moved in the width direction.

When the drawing device 1 conveys the substrate S to a predetermined carry-out position by the third sorter 52, the drawing device 1 moves the second sorter 51 toward the drawing stage 3 as shown in FIGS. 13A and 13B, and the second sorter 51 Is returned to the drawing stage 3. Further, the drawing device 1 moves the first sorter 50 to the drawing stage 3 and conveys the new substrate S to the drawing stage 3.

As shown in FIGS. 14A and 14B, the drawing apparatus 1 moves the roll paper 71 toward the drawing stage 3 and discharges the functional liquid from the drawing unit 32 toward the roll paper 71. Then, the drawing device 1 photographs the roll paper 71 by the imaging device 70 and detects the drawing state. Further, when the carry-out arm comes into contact with the lower surface of the substrate S, the drawing device 1 releases the suction of the third sorter 52 and lowers the third sorter 52 to the initial position. As a result, the substrate S is delivered from the third sorter 52 to the carry-out arm. Then, the substrate S is carried out from the carry-out stage 4 by the carry-out arm. At this time, the substrate S may be delivered to the carry-out arm via a lift pin (not shown) as in the case of carry-in.

As shown in FIGS. 15A and 15B, the drawing apparatus 1 moves the third sorter 52 upstream in the carry-out stage 4. Further, the drawing device 1 lowers the drawing unit 32. Further, the drawing apparatus 1 passes the next substrate S from the first sorter 50 to the second sorter 51.

In this way, the drawing apparatus 1 conveys the substrate S by the first sorter 50 to the third sorter 52, and draws on the substrate S. The drawing procedure in the drawing device 1 is not limited to the above procedure. For example, the drawing apparatus 1 may detect the drawing state before the new substrate S is conveyed to the drawing stage 3.

<Drawing process>
Next, the drawing process according to the first embodiment will be described with reference to FIG. FIG. 16 is a flowchart illustrating the drawing process according to the first embodiment. In addition, here, the process from the time when one board S is carried in and the drawing is performed until it is carried out will be described.

The drawing device 1 performs a carry-in process (S10). Specifically, the drawing device 1 carries the substrate S into the carry-in stage 2 by the carry-in arm.

The drawing device 1 performs the first support process (S11). Specifically, the drawing apparatus 1 supports the substrate S carried into the carry-in stage 2 by the carry-in arm by the first sorter 50 from below. Further, the drawing device 1 blows air toward the lower surface of the substrate S by the first floating upper portion 20 of the carry-in stage 2 to adjust the floating height of the substrate S.

The drawing apparatus 1 performs a deposit detection process (S12). Specifically, the drawing apparatus 1 blows air from the second floating upper portion 21 of the carry-in stage 2 toward the lower surface of the substrate S, sucks the air existing between the drawing device S and the substrate S, and raises the floating height of the substrate S. Is adjusted with high precision. Then, the drawing device 1 detects the foreign matter adhering to the substrate S by the adhering matter detecting device 22.

The drawing device 1 performs the second support process (S13). Specifically, the drawing apparatus 1 supports the substrate S conveyed to the drawing stage 3 by the first sorter 50 by the second sorter 51 from below. Further, the drawing device 1 blows air toward the lower surface of the substrate S by the first floating upper portion 30 of the drawing stage 3 to adjust the floating height of the substrate S.

The drawing device 1 performs drawing processing (S14). Specifically, the drawing device 1 blows air from the second floating upper portion 31 of the drawing stage 3 toward the lower surface of the substrate S, sucks the air existing between the drawing device S and the substrate S, and raises the floating height of the substrate S. Is adjusted with high precision. Then, the drawing device 1 draws the substrate S on the substrate S for the first time by the drawing unit 32 while transporting the substrate S toward the carry-out stage 4 by the second sorter 51. When the first drawing is completed, the drawing device 1 moves the second sorter 51 and the second floating upper portion 31 of the drawing stage 3 in the width direction, and the second sorter 51 conveys the substrate S toward the drawing stage 3. While doing so, the drawing unit 32 draws on the substrate S for the second time.

The drawing device 1 performs a third support process (S15). Specifically, the drawing apparatus 1 supports the substrate S, which has been conveyed to the unloading stage 4 by the second sorter 51, from below by the third sorter 52. Further, the drawing apparatus 1 blows air onto the lower surface of the substrate S by the floating upper portion 40 of the carry-out stage 4 to adjust the floating height of the substrate S. Further, the drawing device 1 conveys the substrate S to a predetermined carry-out position by the third sorter 52.

The drawing device 1 performs the carry-out process (S16). Specifically, the drawing device 1 carries out the substrate S supported by the third sorter 52 by the carry-out arm.

<Effect>
Conventionally, in a drawing apparatus according to a comparative example in which drawing is performed while transporting a substrate, for example, the substrate is placed on a mounting table and the mounting table is moved to perform drawing.

In the drawing apparatus according to the comparative example, for example, as the size of the substrate increases, the mounting table becomes large and the weight becomes heavy. Therefore, in the drawing device according to the comparative example, the moving device for moving the mounting table becomes large and the cost increases.

Further, in the drawing apparatus according to the comparative example, since the large moving device is moved, the mobility of the mounting table is lowered, and it is difficult to improve the moving accuracy. Further, since the drawing device according to the comparative example moves a large moving device, the moving speed cannot be increased. Therefore, the drawing apparatus according to the comparative example has room for improvement in terms of improving productivity.

The drawing apparatus 1 according to the first embodiment includes a plurality of second sorters 51 (an example of a plurality of support portions), a drive unit 53 (an example of a moving unit), and a first floating upper portion 30 (adjustment unit) of the drawing stage 3. , And an example of the first adjustment unit), a second floating upper portion 31 (an example of the adjustment unit and the second adjustment unit) of the drawing stage 3, and a drawing unit 32. The plurality of second sorters 51 support the substrate S (an example of the work) from below. The drive unit 53 moves the second sorter 51 along the horizontal direction. The first floating upper portion 30 and the second floating upper portion 31 adjust the floating height of the substrate S by blowing air from below onto the substrate S supported by the second sorter 51. The drawing unit 32 draws on the substrate S, whose levitation height is adjusted with high accuracy by the first levitation upper portion 30 and the second levitation upper portion 31, and is supported and conveyed by the second sorter 51. The first floating upper portion 30 is provided on the upstream side of the drawing portion 32 in the moving direction of the second sorter 51. The second floating upper portion 31 is provided below the drawing portion 32, and adjusts the floating height of the substrate S with higher accuracy than the first floating upper portion 30.

In other words, as a drawing method, the drawing apparatus 1 includes a step of supporting the substrate S (an example of a work) from below by a plurality of second sorters 51 (an example of a plurality of supporting portions), and a second sorter 51 in the horizontal direction. It includes a step of moving along the substrate S and a step of drawing on the substrate S supported and conveyed by the second sorter 51. Further, as a drawing method, the drawing device 1 blows air from below onto the substrate S supported by the second sorter 51 on the upstream side of the portion where drawing is performed on the substrate S in the moving direction of the second sorter 51. In the process of adjusting the first levitation height on the substrate S and below the portion where drawing is performed on the substrate S, air is blown from below onto the substrate S supported by the second sorter 51 to adjust the levitation height of the substrate S. It has a step of adjusting and performing a second levitation height adjustment for adjusting the levitation height of the substrate S with higher accuracy than the first levitation height adjustment.

As a result, the drawing apparatus 1 can reduce the size of the second sorter 51 that supports and conveys the substrate S, and the substrate S can be easily conveyed by the small drive unit 53. Further, the drawing apparatus 1 easily conveys the second sorter 51 and the substrate S by the small drive unit 53 by applying a levitation force to the substrate S by the first levitation upper portion 30 and the second levitation upper portion 31. Can be done. Therefore, the drawing device 1 can be miniaturized and the cost can be reduced. In addition, the range of movement of the substrate S with high accuracy can be shortened.

Further, the drawing apparatus 1 can reduce the size and weight of the second sorter 51 and the like that convey the substrate S, and improve the moving accuracy of the second sorter 51 while increasing the moving speed of the second sorter 51 and the like. Can be made to. Therefore, the drawing apparatus 1 can shorten the drawing time for one substrate S while performing drawing with high accuracy, and can increase the throughput. Therefore, the drawing device 1 can improve the productivity.

Further, in the second floating upper portion 31 (an example of the second adjusting portion) of the drawing stage 3, a groove 31a into which the second sorter 51 (an example of the supporting portion) can move is formed.

As a result, in the drawing device 1, the second floating upper portions 31 are provided on both sides of the groove 31a. Therefore, the drawing apparatus 1 can accurately determine the levitation height of the substrate S even when the substrate S is supported by the second sorter 51 in a state of projecting outward from the second sorter 51 in the width direction. Can be adjusted. For example, the drawing apparatus 1 adjusts the levitation height of the substrate S with high accuracy even when drawing the substrate S in which the orientation of the substrate S shown in FIG. 1A or the like is rotated by 90 degrees or the substrate S having different sizes. And it can be drawn with high accuracy.

Further, the drive unit 53 (an example of the moving unit) makes the second sorter 51 (an example of the support unit) supporting the substrate S (an example of the work) drawn by the drawing unit 32 in the width direction (the surface of the work). It is a direction, and it is moved in an orthogonal direction (an example) orthogonal to the moving direction. Further, the drawing unit 32 draws again on the substrate S moved in the width direction.

As a result, the drawing apparatus 1 can draw on the substrate S a plurality of times, for example, twice. Therefore, the drawing device 1 can draw densely by the drawing unit 32. Further, the drawing apparatus 1 can draw on the same portion of the substrate S with different carriages 32a, and the film thickness of the functional liquid can be made uniform.

Further, the drawing device 1 is aligned with the movement of the second sorter 51 (an example of the support portion) in the width direction (an example of the orthogonal direction), and the second floating upper portion 31 of the drawing stage 3 (an example of the second adjusting portion). Is provided with a drive unit 53 (an example of an adjustment movement unit) for moving the vehicle in the width direction.

As a result, the drawing apparatus 1 can shorten the length of the groove 31a through which the second sorter 51 passes in the second floating upper portion 31 in the width direction. That is, the drawing apparatus 1 can arrange a portion of the second floating upper portion 31 for blowing air on the lower surface of the substrate S or sucking air existing between the drawing device S and the substrate S for a long time in the width direction. Therefore, the drawing device 1 can adjust the levitation height of the substrate S with high accuracy by the second floating upper portion 31, and can draw on the substrate S with high accuracy.

Further, the drawing device 1 includes a second floating upper portion 21 (an example of a third adjusting unit) of the carry-in stage 2 and an deposit detecting device 22. The second floating upper portion 21 is provided on the upstream side of the first floating upper portion 30 (an example of the first adjusting unit) of the drawing stage 3 in the moving direction, and is located on the substrate S more than the first floating upper portion 30 of the drawing stage 3. Adjust the levitation height with high accuracy. The deposit detection device 22 detects the presence or absence of deposits on the substrate S to which air is blown by the second floating upper portion 21.

As a result, the drawing device 1 detects the presence or absence of deposits adhering to the substrate S by the deposit detecting device 22 in a state where the floating height of the substrate S is adjusted with high accuracy by the second floating upper portion 21 of the carry-in stage 2. be able to. Therefore, the drawing apparatus 1 can accurately determine the presence or absence of deposits on the substrate S.

Further, the drawing device 1 is provided above the first floating upper portion 30 (an example of the adjusting unit) of the drawing stage 3, and includes a drawing state detecting device 7 for detecting the drawing state of the drawing unit 32.

As a result, the drawing device 1 can shorten the length of the drawing device 1 in the moving direction.

In the drawing state detection device 7, drawing on the substrate S (an example of the work) is completed by the drawing unit 32, and the next substrate S is conveyed to the first floating upper portion 30 (an example of the first adjusting unit) of the drawing stage 3. The drawing state is detected when the screen is displayed.

As a result, the drawing apparatus 1 can detect the drawing state in the drawing unit 32 while carrying out the next substrate S, can increase the throughput, and improve the productivity.

Further, the drawing device 1 is provided above the floating upper portion 40 (an example of the adjusting unit) of the carry-out stage 4, and includes a flushing unit 8 in which the drawing unit 32 is flushed.

As a result, the drawing device 1 can shorten the length of the drawing device 1 in the moving direction.

(Second Embodiment)
Next, the drawing apparatus 1 according to the second embodiment will be described with reference to FIGS. 17A and 17B. FIG. 17A is a plan view showing a schematic configuration of the drawing apparatus 1 according to the second embodiment. FIG. 17B is a side view showing a schematic configuration of the drawing apparatus 1 according to the second embodiment. In FIG. 17A, some configurations such as the control device 9 are omitted. Here, the parts different from those of the first embodiment will be mainly described. The same configurations as those in the first embodiment are designated by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted.

The drawing device 1 according to the second embodiment controls the carry-in stage 2, the drawing stage 3, the carry-out stage 4, the moving device 5, the air adjusting device 6, the drawing state detecting device 7, the flushing unit 8, and the flushing unit 8. In addition to the device 9, the weight measuring device 100 is provided. In FIG. 17B, the air adjusting device 6 shown in FIG. 1B is omitted.

The drawing unit 32 provided on the drawing stage 3 can move between the drawing area A for drawing on the substrate S and the maintenance area B provided at a position deviated from the drawing area A in the width direction. The drawing area A is an area in which the substrate S is conveyed along the moving direction, and is an area included in the line in which the substrate S is conveyed. The maintenance area B is an area where the maintenance work of the drawing unit 32 is performed. The drawing unit 32 can be moved along the width direction for each carriage 32a. That is, the drawing unit 32 can move between the drawing area A and the maintenance area B for each carriage 32a.

The drive unit 53 of the moving device 5 moves the drawing unit 32 between the drawing area A and the maintenance area B. That is, the drive unit 53 moves the drawing unit 32 along the width direction. Further, the drive unit 53 moves the measurement unit 101 and the bus unit 103 of the weight measuring device 100 along the moving direction. Further, the drive unit 53 moves the windshield unit 102 and the suction unit 105 of the weight measuring device 100 along the vertical direction.

A plurality of drive units 53 may be provided corresponding to the sorters 51 to 52, the measurement unit 101, the windshield unit 102, and the like. That is, the sorters 51 to 52, the measuring unit 101, the windshield unit 102, and the like may be driven by different driving units 53.

Here, the weight measuring device 100 will be described with reference to FIGS. 18A and 18B. FIG. 18A is a plan view illustrating a schematic configuration of the weight measuring device 100 according to the second embodiment. FIG. 18B is a side view illustrating a schematic configuration of the weight measuring device 100 according to the embodiment. The weight measuring device 100 is provided outside the drawing area A, specifically, between the drawing area A and the maintenance area B.

The weight measuring device 100 includes a measuring unit 101, a windshield unit 102, and a bus unit 103. The measuring unit 101, the windshield unit 102, and the bus unit 103 are provided according to the row of the carriages 32a in the moving direction. Therefore, for example, when two rows of carriages 32a are provided in the moving direction, the measuring unit 101, the windshield unit 102, and the bus unit 103 are provided in two rows in the moving direction.

The measuring unit 101 can move along the moving direction. The measuring unit 101 can move between the ejection position where the droplets of the functional liquid are ejected from the head 32b of the drawing unit 32 and the measuring position where the weight of the ejected droplets is measured. The measurement position is provided, for example, downstream of the discharge position.

The measuring unit 101 is provided outside the drawing area A in the width direction, and measures the weight of the droplets of the functional liquid discharged from the head 32b. That is, the measurement unit 101 is provided at a position separated from the drawing area A (an example of the area) on which the substrate S (an example of the work) is conveyed in the width direction (an example of the horizontal direction orthogonal to the moving direction of the support portion). , The weight of the droplets ejected from the drawing unit 32 is measured. The measuring unit 101 measures the weight of the droplet for each carriage.

The measuring unit 101 includes a plurality of balance units 104. The balance unit 104 is provided according to the number of heads 32b of the drawing unit 32. For example, when the heads 32b are provided in 6 rows in the moving direction and 2 rows in the width direction, the balance units 104 are provided in 6 rows in the moving direction and 2 rows in the width direction. That is, the measuring unit 101 is provided according to the number of heads 32b, and includes a plurality of balance units 104 for measuring the weight of the discharged droplets.

A storage portion 104a having an open upper portion is formed in the balance portion 104. Droplets of the functional liquid discharged from the head 32b are stored in the storage unit 104a. The balance unit 104 measures the weight of the functional liquid in the storage unit 104a. The measuring unit 101 can individually measure the weight of the droplets of the functional liquid discharged from each head 32b by each balance unit 104.

When the droplet of the functional liquid is ejected from the head 32b at the ejection position, the measuring unit 101 moves to the measurement position and measures the weight of the droplet of the functional liquid.

The windshield portion 102 is provided above the measurement position. The windshield portion 102 can move in the vertical direction. The windshield unit 102 covers the upper part of the bus unit 103 when the measurement unit 101 is in the discharge position, and covers the upper part of the measurement unit 101 when the measurement unit 101 is in the measurement position. Specifically, the windshield unit 102 (an example of the shielding unit) shields the opening of the balance unit 104 when the measuring unit 101 measures the weight of the droplets of the functional liquid. As a result, when the windshield unit 102 measures the weight of the droplets of the functional liquid by the measuring unit 101, the windshield unit 102 prevents a measurement error from occurring due to the influence of the surrounding wind.

The windshield portion 102 is provided with a plurality of suction portions 105. The suction unit 105 moves along the vertical direction with respect to the windshield unit 102. The suction unit 105 is, for example, a suction nozzle, and when the measurement of the weight of the functional liquid is completed, the suction unit 105 is inserted into the storage unit 104a, sucks the functional liquid in the storage unit 104a, and discharges the functional liquid from the storage unit 104a. .. That is, the windshield portion 102 (an example of the shielding portion) includes a suction portion 105 that sucks and discharges the measured droplets.

A plurality of suction units 105 are provided according to the number of balance units 104, and droplets are sucked from the plurality of balance units 104. That is, the suction unit 105 is provided according to the number of heads 32b of the drawing unit 32. For example, when the heads 32b are provided in 6 rows in the moving direction and 2 rows in the width direction, the suction units 105 are provided in 6 rows in the moving direction and 2 rows in the width direction.

The bus unit 103 can move along the moving direction together with the measuring unit 101. The bus unit 103 is in the measurement position when the measurement unit 101 is in the discharge position. When the measurement unit 101 moves from the discharge position to the measurement position, the bus unit 103 moves from the measurement position to the evacuation position on the downstream side in the moving direction from the measurement position. The bath portion 103 is a tank in which a solvent for preventing drying is stored. The bus unit 103 prevents the suction unit 105 provided on the windshield unit 102 from drying when the weight of the functional liquid is not measured by the weight measuring device 100, for example, when drawing is performed on the substrate S.

The drawing device 1 includes a wipe (not shown) between the maintenance area B and the drawing area A to wipe off the droplets adhering to the head 32b of the drawing unit 32. For example, the drawing device 1 wipes off the droplets adhering to the head 32b of the drawing unit 32 whose maintenance has been completed by wiping. For example, the wipes are provided side by side in the moving direction with respect to the weight measuring device 100. Further, the wipes may be provided side by side in the width direction with respect to the weight measuring device 100.

<Weight measurement procedure>
Next, the weight measurement procedure of the drawing apparatus 1 according to the second embodiment will be described with reference to FIGS. 19A to 19D. FIG. 19A is a schematic diagram (No. 1) showing a weight measurement procedure of the drawing apparatus 1 according to the second embodiment. FIG. 19B is a schematic diagram (No. 2) showing a weight measurement procedure of the drawing apparatus 1 according to the second embodiment. FIG. 19C is a schematic diagram (No. 3) showing a weight measurement procedure of the drawing apparatus 1 according to the second embodiment. FIG. 19D is a schematic diagram (No. 4) showing a weight measurement procedure of the drawing apparatus 1 according to the second embodiment.

The drawing device 1 is, for example, the weight of droplets of the functional liquid discharged from the head 32b at a predetermined timing when the carriage 32a is moved from the maintenance area B (see FIG. 17A) to the drawing area A (see FIG. 17A). Make a measurement. The predetermined timing is a preset timing, for example, every week. The drawing device 1 may measure the weight of the droplets of the functional liquid based on the operation of the operator.

In the drawing device 1, as shown in FIG. 19A, as an initial state, the measurement unit 101 is arranged at the discharge position, and the bus unit 103 is arranged below the measurement position, that is, the windshield unit 102. The windshield portion 102 is provided so as to cover the upper part of the bath portion 103 in which the solvent is stored, and the drying of the suction portion 105 is suppressed.

When measuring the weight of the droplets of the functional liquid discharged from the head 32b of the drawing unit 32, the drawing device 1 conveys the carriage 32a above the discharge position as shown in FIG. 19B. Specifically, the drawing apparatus 1 conveys the carriage 32a so that the head 32b of the carriage 32a is above the storage unit 104a of the balance unit 104 of the measuring unit 101.

Then, the drawing device 1 ejects droplets of the functional liquid from the head 32b a predetermined number of times. The predetermined number of times is a preset number of times. As a result, the functional liquid discharged from the head 32b is accumulated in the storage unit 104a of the measurement unit 101. The windshield portion 102 is held so as to cover the upper part of the bus portion 103.

When the drawing device 1 finishes ejecting the droplets of the functional liquid from the head 32b a predetermined number of times, the windshield unit 102 is raised to separate the windshield unit 102 from the bus unit 103, and the measurement unit 101 and the bus unit 103 are separated from each other. Is moved along the moving direction. The drawing device 1 conveys the measurement unit 101 to the measurement position, that is, below the windshield unit 102. Specifically, the drawing device 1 conveys the measurement unit 101 so that the suction unit 105 of the windshield unit 102 is above the storage unit 104a of the balance unit 104 of the measurement unit 101.

Further, the drawing device 1 lowers the windshield portion 102, covers the upper part of the balance portion 104, and shields the opening of the storage portion 104a of the balance portion 104, as shown in FIG. 19C. Then, the drawing device 1 measures the weight of the functional liquid in the storage unit 104a by the balance unit 104, and transmits a signal regarding the measured weight to the control device 9.

In this way, the drawing device 1 measures the weight of the droplets of the functional liquid discharged from the head 32b for each carriage 32a.

When the weight measurement of the droplets of the functional liquid is completed, the drawing device 1 lowers the suction unit 105 and inserts the suction unit 105 into the storage unit 104a of the balance unit 104, as shown in FIG. 19D. Then, the drawing device 1 sucks the functional liquid in the storage unit 104a by the suction unit 105, and discharges the functional liquid from the storage unit 104a.

<Weight measurement processing>
Next, the weight measurement process according to the second embodiment will be described with reference to FIG. FIG. 20 is a flowchart illustrating the weight measurement process according to the second embodiment.

The drawing device 1 conveys the carriage 32a to the upper part of the measuring unit 101 at the discharge position (S20).

The drawing apparatus 1 ejects a droplet of the functional liquid from the head 32b toward the measuring unit 101 at the ejection position (S21). Specifically, the drawing device 1 ejects droplets of the functional liquid from the head 32b of the carriage 32a toward the storage unit 104a of the balance unit 104 a predetermined number of times.

The drawing device 1 conveys the measuring unit 101 on which the droplets of the functional liquid are discharged to the measuring position (S22). Specifically, the drawing device 1 moves the windshield unit 102 upward, then moves the measurement unit 101 and the bus unit 103 along the moving direction, and conveys the measurement unit 101 to the measurement position.

When the measurement unit 101 is conveyed to the measurement position, the drawing device 1 measures the weight of the droplets of the discharged functional liquid (S23). Specifically, when the drawing device 1 conveys the measuring unit 101 to the measuring position, the windshield unit 102 is lowered to cover the upper part of the measuring unit 101 and shield the opening of the storage unit 104a of the balance unit 104. Then, the drawing device 1 measures the weight of the droplets of the discharged functional liquid by the measuring unit 101.

When the measurement is completed, the drawing device 1 sucks the functional liquid in the storage unit 104a by the suction unit 105 and discharges it (S24). Specifically, the drawing device 1 inserts the suction unit 105 into the storage unit 104a of the balance unit 104, and discharges the functional liquid by the suction unit 105.

<Effect>
The drawing device 1 includes a second sorter 51 and the like (an example of a support unit), a driving unit 53 (an example of a moving unit), a drawing unit 32, and a measuring unit 101. The second sorter 51 or the like supports the substrate S (an example of the work) from below. The drive unit 53 moves the second sorter 51 and the like along the horizontal direction. The drawing unit 32 ejects droplets and draws on the substrate S. The measuring unit 101 is provided at a position separated from the drawing area A (an example of the area) on which the substrate S is conveyed in the width direction (horizontal direction orthogonal to the moving direction of the support unit), and the liquid discharged from the drawing unit 32. Weigh the drops.

In other words, as a drawing method, the drawing device 1 supports a substrate S (an example of a work) from below by a second sorter 51 or the like (an example of a support portion), and the second sorter 51 or the like along the horizontal direction. The step of moving, the step of ejecting droplets from the drawing unit 32 to draw on the substrate S, and the width direction (perpendicular to the moving direction of the support portion) from the drawing area A (an example of the area) to which the substrate S is conveyed. It has a step of measuring the weight of the droplets ejected from the drawing unit 32 at positions separated in the horizontal direction).

As a result, the drawing apparatus 1 can simplify the configuration of the line on which the substrate S is conveyed. Further, the drawing device 1 can shorten the length of the drawing device 1 in the moving direction.

Further, the drawing unit 32 includes a plurality of carriages 32a having a plurality of heads 32b for ejecting droplets. The measuring unit 101 measures the weight of the droplet for each carriage 32a.

As a result, the drawing apparatus 1 can reduce the weight measurement time of the droplets for one carriage 32a by measuring the weight of the droplets for each carriage 32a. Therefore, the drawing device 1 can shorten the weight measurement time in the drawing unit 32, start drawing on the substrate S at an early stage, and improve the productivity.

Further, the measuring unit 101 is provided according to the number of heads 32b, and includes a plurality of balance units 104 for measuring the weight of the discharged droplets.

As a result, the drawing device 1 can measure the weight of the droplet for each head 32b. Therefore, the drawing apparatus 1 can measure the ejection amount of the droplets of each head 32b and can detect the ejection state of each head 32b.

Further, the drawing device 1 includes a windshield portion 102 (an example of a shielding portion) that shields the opening of the balance portion 104 when measuring the weight of the droplet.

As a result, the drawing device 1 can suppress the influence of the surrounding wind and accurately measure the weight of the droplet.

Further, the windshield unit 102 (an example of the shielding unit) includes a suction unit 105 that sucks and discharges the droplet whose weight has been measured.

Thereby, for example, the drawing apparatus 1 can discharge the functional liquid accumulated in the storage unit 104a of the balance unit 104 from the balance unit 104 without moving the windshield unit 102, and the workability can be improved. ..

Further, a plurality of suction units 105 are provided according to the number of balance units 104, and droplets are sucked from the plurality of balance units 104.

As a result, the drawing device 1 can collectively discharge the functional liquid from the storage units 104a of the plurality of balance units 104, and the workability can be improved.

(Modification example)
The drawing apparatus 1 according to the modified example may complete the drawing on the substrate S by one drawing. Further, the drawing apparatus 1 according to the modified example may complete the drawing on the substrate S by drawing three times or more. Further, the drawing apparatus 1 according to the modified example may perform, for example, when the second drawing is carried out from the drawing stage 3 to the carry-out stage 4.

Further, in the drawing device 1 according to the modified example, the length in the width direction of the groove 31a formed in the second floating upper portion 31 of the drawing stage 3 is set to be equal to or longer than the length in the width direction of the groove 30b of the first floating upper portion 30. May be good. As a result, the drawing apparatus 1 according to the modified example can perform, for example, a second drawing without moving the second floating upper portion 31 of the drawing stage 3 in the width direction.

Further, the drawing apparatus 1 according to the modified example may move the second sorter 51 in the width direction while moving the second sorter 51 in the width direction when the second sorter 51 is moved in the width direction in the carry-out stage 4. That is, the drawing apparatus 1 according to the modified example may move the second sorter 51 in the width direction by moving the second sorter 51 diagonally with respect to the moving direction.

Further, the drawing apparatus 1 according to the modified example may be capable of changing a predetermined interval between two first sorters 50 provided in one groove 20a, for example. As a result, the drawing apparatus 1 according to the modified example can convey the substrates S having different lengths in the moving direction and draw on the substrate S.

Further, as shown in FIG. 21, the drawing apparatus 1 according to the modified example may be provided with the alignment camera 120 on the carriages 32a arranged side by side in the width direction. FIG. 21 is a plan view showing a schematic configuration of a part of the drawing apparatus 1 according to the modified example. The alignment camera 120 is, for example, a CCD camera.

Each carriage 32a can move in the width direction. That is, the position of each carriage 32a in the Y-axis direction (an example in the orthogonal direction) can be adjusted. The position of each carriage 32a in the Y-axis direction can be adjusted by a motor or the like.

Further, the position of the second sorter 51 can be adjusted in the moving direction (X-axis direction) and the width direction (Y-axis direction). For example, the position of the second sorter 51 can be adjusted by the motor in the moving direction (X-axis direction) and the width direction (Y-axis direction). Further, the second sorter 51 is rotatable about an axis along the Z-axis direction. For example, the second sorter 51 can rotate about an axis along the Z-axis direction by a driving force transmitted from a motor via a transmission mechanism. The second sorter 51 can adjust the position of the substrate S in the moving direction and the width direction while supporting the substrate S. Further, the second sorter 51 is rotatable with respect to an axis along the Z-axis direction of the substrate S while supporting the substrate S.

Here, the alignment of each carriage 32a on the drawing stage 3 of the drawing apparatus 1 according to the modified example will be described. The alignment of each carriage 32a is performed by the control device 9.

First, the control device 9 adjusts the position of the substrate S by the second sorter 51 so that the alignment marks 121 provided at the front ends of the substrate S are imaged by the alignment cameras 120 provided at both ends in the width direction. Further, the control device 9 adjusts the positions of the carriages 32a provided at both ends in the width direction. That is, the alignment of the substrate S is executed, and the positions of the carriages 32a provided at both ends in the width direction are adjusted.

The position of the substrate S and the position of the carriage 32a may be adjusted by using an alignment camera 120 different from both ends in the width direction.

Then, the control device 9 adjusts the position of the carriage 32a provided between the carriages 32a at both ends in the width direction. Specifically, the control device 9 adjusts the position of the carriage 32a so that the alignment marks 121 provided on the substrate S are imaged by the alignment cameras 120 provided between the alignment cameras 120 at both ends. ..

After the alignment of each carriage 32a is completed, the reference position for moving the substrate S in the moving direction when drawing is performed is initialized. For example, a laser interferometer capable of detecting the position in the moving direction with respect to the carriage 32a is reset. When drawing, the amount of movement from the reference position is adjusted based on the measurement result by the laser interferometer, and the substrate S is conveyed in the movement direction.

As described above, the drawing apparatus 1 according to the modified example can adjust the position of the carriage 32a in the width direction for each carriage 32a. Therefore, when the position of each carriage 32a shifts due to a temperature change or the like, the drawing device 1 according to the modified example can adjust the position of the carriage 32a in the width direction for each carriage 32a, and the drawing can be performed with high accuracy. Can be done.

Further, the drawing apparatus 1 according to the modified example may be capable of adjusting the discharge timing of the functional liquid in each carriage 32a. That is, each of the plurality of carriages 32a can adjust the discharge timing of the functional liquid. When the alignment mark 121 imaged by the alignment camera 120 is deviated in the moving direction, the drawing apparatus 1 according to the modified example adjusts the ejection timing in the carriage 32a in which the alignment mark 121 is deviated in the moving direction.

The drawing apparatus 1 according to the modified example can perform drawing with high accuracy by adjusting the discharge timing of the functional liquid in the moving direction for each carriage 32a.

The drawing apparatus 1 according to the modified example may measure the weight of the droplets of the functional liquid discharged by some of the heads 32b. The drawing device 1 according to the modification is, for example, from only the head 32b that ejects blue ink when one carriage 32a includes a plurality of heads 32b that eject inks such as blue, red, and green as functional liquids. The weight of the ejected droplets may be measured. That is, measuring the weight of the droplets of the functional liquid for each carriage 32a includes discharging the droplets of the functional liquid from a part of the heads 32b and measuring the weight.

As a result, the drawing apparatus 1 according to the modified example can measure the weight of the droplets of the functional liquid on a part of the heads 32b with respect to the carriage 32a.

In the drawing apparatus 1 according to the modified example, the substrate S may be placed on the mounting table and the mounting table may be conveyed.

It should be noted that the embodiments disclosed this time are exemplary in all respects and are not considered to be restrictive. Indeed, the above embodiments can be embodied in a variety of forms. Further, the above-described embodiment may be omitted, replaced or changed in various forms without departing from the scope of the appended claims and the purpose thereof.

1 Drawing device 2 Carry-in stage 3 Drawing stage 4 Carry-out stage 5 Moving device 6 Air adjustment device 7 Drawing state detection device 8 Flushing unit 9 Control device 20 1st floating upper part 21 2nd floating upper part (adjusting part, 3rd adjusting part)
22 Adhesion detection device 30 1st floating upper part (adjustment part, 1st adjustment part)
31 Second floating upper part (adjustment part, second adjustment part)
31a Groove 32 Drawing part 40 Floating upper part (adjusting part)
50 1st sorter (support part)
51 Second sorter (support part)
52 Third sorter (support part)
53 Drive unit (moving unit, adjustment moving unit)
100 Weight measuring device 101 Measuring unit 102 Windshield unit (shielding unit)
103 Bus section 104 Balance section 105 Suction section

Claims (17)

Multiple support parts that support the work from below,
A moving part that moves the support part along the horizontal direction,
An adjusting unit that adjusts the floating height of the work by blowing air from below onto the work supported by the supporting portion.
The levitation height is adjusted by the adjusting portion, and the work is supported by the supporting portion and moves.
The adjusting part
A first adjusting unit provided on the upstream side of the drawing unit in the moving direction of the support unit, and
A drawing device provided below the drawing unit and provided with a second adjusting unit that adjusts the floating height of the work with higher accuracy than the first adjusting unit. The second adjustment unit
The drawing apparatus according to claim 1, wherein a groove in which the support portion can move is formed. The moving part
The support portion that supports the work drawn by the drawing portion is moved in an orthogonal direction that is the plane direction of the work and is orthogonal to the moving direction.
The drawing unit
The drawing apparatus according to claim 1 or 2, wherein drawing is performed again on the work moved in the orthogonal direction. The drawing apparatus according to claim 3, further comprising an adjustment moving unit that moves the second adjusting unit in the orthogonal direction in accordance with the movement of the supporting portion in the orthogonal direction. The adjusting part
A third adjusting unit provided on the upstream side of the first adjusting unit in the moving direction and adjusting the floating height of the work with higher accuracy than the first adjusting unit.
The drawing device according to any one of claims 1 to 4, further comprising a deposit detection device that detects the presence or absence of deposits on the work to which the air is blown by the third adjusting unit. The drawing device according to any one of claims 1 to 5, which is provided above the adjusting unit and includes a drawing state detecting device for detecting the drawing state of the drawing unit. The drawing state detection device is
The drawing apparatus according to claim 6, wherein the drawing unit detects the drawing state when the drawing on the work is completed and the next work is conveyed to the first adjusting unit. The drawing apparatus according to any one of claims 1 to 7, further comprising a flushing section provided above the adjusting section and flushing of the drawing section. The drawing unit includes a plurality of carriages arranged along orthogonal directions orthogonal to the moving direction.
The plurality of carriages
The drawing apparatus according to any one of claims 1 to 8, wherein the positions in the orthogonal directions can be adjusted respectively. The plurality of carriages
The drawing apparatus according to claim 9, wherein the discharge timing of the functional liquid can be adjusted. Claims 1 to 10 include a measuring unit provided at a position separated in a horizontal direction orthogonal to the moving direction of the support portion from the area where the work is conveyed and measuring the weight of droplets ejected from the drawing unit. The drawing device according to any one of the above. The drawing unit
A plurality of carriages having a plurality of heads for ejecting the droplets.
The measuring unit
The drawing apparatus according to claim 11, wherein the weight of the droplet is measured for each carriage. The measuring unit
The drawing apparatus according to claim 12, which is provided according to the number of heads and includes a plurality of balance units for measuring the weight of the droplets to be ejected. The drawing apparatus according to claim 13, further comprising a shielding portion that shields the opening of the balance portion when measuring the weight of the droplet. The shielding part is
The drawing apparatus according to claim 14, further comprising a suction unit for sucking and discharging the weighted droplet. The suction part is
The drawing apparatus according to claim 15, which is provided in plurality corresponding to the number of the balance units and sucks the droplets from the plurality of balance units. The process of supporting the work from below by multiple support parts,
The step of moving the support portion in the horizontal direction and
A step of drawing on the work that moves while being supported by the support portion, and
A step of adjusting the first levitation height of the work by blowing air from below onto the work supported by the support portion on the upstream side of the portion where drawing is performed on the work in the moving direction of the support portion. Air is blown from below to the work supported by the support portion to adjust the levitation height of the work below the portion where drawing is performed on the work, and the levitation of the work is adjusted rather than the first levitation height adjustment. The process of adjusting the second levitation height to adjust the height with high accuracy, and
Drawing method with.

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