JPWO2019235647A1 - 金属板の巻回体、巻回体を備える梱包体、巻回体の梱包方法、巻回体の保管方法、巻回体の金属板を用いた蒸着マスクの製造方法及び金属板 - Google Patents
金属板の巻回体、巻回体を備える梱包体、巻回体の梱包方法、巻回体の保管方法、巻回体の金属板を用いた蒸着マスクの製造方法及び金属板 Download PDFInfo
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- JPWO2019235647A1 JPWO2019235647A1 JP2020523221A JP2020523221A JPWO2019235647A1 JP WO2019235647 A1 JPWO2019235647 A1 JP WO2019235647A1 JP 2020523221 A JP2020523221 A JP 2020523221A JP 2020523221 A JP2020523221 A JP 2020523221A JP WO2019235647 A1 JPWO2019235647 A1 JP WO2019235647A1
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- Prior art keywords
- metal plate
- shaft member
- less
- winding body
- vapor deposition
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
- B21B1/40—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling foils which present special problems, e.g. because of thinness
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- B21B3/02—Rolling special iron alloys, e.g. stainless steel
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- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C37/00—Manufacture of metal sheets, bars, wire, tubes or like semi-manufactured products, not otherwise provided for; Manufacture of tubes of special shape
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- B21C47/00—Winding-up, coiling or winding-off metal wire, metal band or other flexible metal material characterised by features relevant to metal processing only
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D6/00—Heat treatment of ferrous alloys
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- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/02—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips
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- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/02—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips
- C21D8/0221—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips characterised by the working steps
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
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- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/0081—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for slabs; for billets
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- C—CHEMISTRY; METALLURGY
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- C22C—ALLOYS
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- C22C19/03—Alloys based on nickel or cobalt based on nickel
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- C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
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- C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
- C22C38/105—Ferrous alloys, e.g. steel alloys containing cobalt containing Co and Ni
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/10—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of nickel or cobalt or alloys based thereon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C—CHEMISTRY; METALLURGY
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Abstract
Description
なお厚みTは、周囲領域23の厚み、すなわち蒸着マスク20のうち第1凹部30および第2凹部35が形成されていない部分の厚みである。従って厚みTは、金属板51の厚みであると言うこともできる。
蒸着マスク20に反りが生じていると、蒸着マスク20の検査工程において蒸着マスク20の寸法を測定する際の精度が低下したり、測定が不可能になったりすることがある。また、蒸着マスク20に反りが生じていると、平面視における蒸着マスク20の寸法の精度が低下してしまうことも考えられる。このような課題を考慮し、軸部材52の外径R2は、例えば、125mm以上であってもよく、150mm以上であってもよく、180mm以上であってもよく、200mm以上であってもよい。
また、金属板51の厚みTが15μm以下であり、且つ軸部材52の外径R2が125mm以上300mm以下であった場合、隙間S1が15mm以下であり、且つ巻回体50の重量が70kg以下であった。
また、金属板51の厚みTが25μm以下であり、且つ軸部材52の外径R2が125mm以上280mm以下であった場合、隙間S1が15mm以下であり、且つ巻回体50の重量が70kg以下であった。
また、金属板51の厚みTが30μm以下であり、且つ軸部材52の外径R2が125mm以上250mm以下であった場合、隙間S1が15mm以下であり、且つ巻回体50の重量が70kg以下であった。
また、金属板51の厚みTが35μm以下であり、且つ軸部材52の外径R2が150mm以上250mm以下であった場合、隙間S1が15mm以下であり、且つ巻回体50の重量が70kg以下であった。
また、金属板51の厚みTが50μm以下であり、且つ軸部材52の外径R2が150mm以上200mm以下であった場合、隙間S1が15mm以下であり、且つ巻回体50の重量が70kg以下であった。
Claims (20)
- 蒸着マスクを製造するために用いられる金属板の巻回体であって、
150mm以上且つ550mm以下の外径を有する軸部材と、
前記軸部材に巻き付けられ、50μm以下の厚みを有する前記金属板と、を備える、巻回体。 - 前記金属板は、30質量%以上且つ54質量%以下のニッケルを含む鉄合金を有する、請求項1に記載の巻回体。
- 前記軸部材の外径が300mm以下であり、
前記金属板の厚みが30μm以下である、請求項1又は2に記載の巻回体。 - 前記巻回体の重量が70kg以下である、請求項3に記載の巻回体。
- 前記軸部材がフェノール樹脂を含む、請求項3又は4に記載の巻回体。
- 前記軸部材は、100mm以上の内径を有する中空状部材である、請求項3乃至5のいずれか一項に記載の巻回体。
- 前記軸部材の外径と内径の差が5mm以上である、請求項6に記載の巻回体。
- 前記軸部材の外径が300mm以上且つ550mm以下であり、
前記金属板の厚みが50μm以下である、請求項1又は2に記載の巻回体。 - 前記巻回体の重量が100kg以下である、請求項8に記載の巻回体。
- 蒸着マスクを製造するために用いられる金属板の巻回体と、
前記巻回体を収容する容器と、を備え、
前記巻回体は、
150mm以上且つ550mm以下の外径を有する軸部材と、
前記軸部材に巻き付けられ、50μm以下の厚みを有する前記金属板と、を備える、梱包体。 - 前記容器は、前記軸部材を支持する側部を備え、
前記側部は、前記巻回体の前記金属板が前記側部の下端よりも上方に位置するように前記軸部材を支持する、請求項10に記載の梱包体。 - 前記容器は、
前記巻回体の下方に位置する下部と、
前記巻回体の前記金属板が前記下部に接しないよう前記軸部材を支持する前記側部と、を備える、請求項11に記載の梱包体。 - 前記容器は、前記巻回体を上方から覆う上部を備える、請求項12に記載の梱包体。
- 前記容器の内部に位置する脱酸素剤又は乾燥剤を備える、請求項10乃至13のいずれか一項に記載の梱包体。
- 蒸着マスクを製造するために用いられる金属板の巻回体を準備する準備工程と、
前記巻回体を容器に収容する収容工程と、を備え、
前記巻回体は、
150mm以上且つ550mm以下の外径を有する軸部材と、
前記軸部材に巻き付けられ、50μm以下の厚みを有する前記金属板と、を備える、梱包方法。 - 前記容器は、前記軸部材を支持する側部を備え、
前記側部は、前記巻回体の前記金属板が前記側部の下端よりも上方に位置するように前記軸部材を支持する、請求項15に記載の梱包方法。 - 前記容器は、前記巻回体の下方に位置する下部と、
前記巻回体の前記金属板が前記下部に接しないよう前記軸部材を支持する前記側部と、
前記巻回体を上方から覆う上部と、を備える、請求項16に記載の梱包方法。 - 蒸着マスクを製造するために用いられる金属板の巻回体を保管する保管方法であって、
軸部材に巻き付けられる前記金属板のうち最も前記軸部材側に位置する部分の内径が150mm以上且つ550mm以下になるように前記巻回体を保管する、保管方法。 - 複数の貫通孔が形成された蒸着マスクを製造する方法であって、
金属板の巻回体から前記金属板を巻き出す工程と、
前記金属板をエッチングして前記金属板に前記貫通孔を形成する加工工程と、を備え、
前記巻回体は、
150mm以上且つ550mm以下の外径を有する軸部材と、
前記軸部材に巻き付けられ、50μm以下の厚みを有する前記金属板と、を備える、蒸着マスクの製造方法。 - 150mm以上且つ550mm以下の外径を有する軸部材に巻き付けられた、蒸着マスクを製造するために用いられる金属板であって、
50μm以下の厚みを有する、金属板。
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