JPWO2019146276A1 - 搬送車 - Google Patents
搬送車 Download PDFInfo
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- JPWO2019146276A1 JPWO2019146276A1 JP2019567892A JP2019567892A JPWO2019146276A1 JP WO2019146276 A1 JPWO2019146276 A1 JP WO2019146276A1 JP 2019567892 A JP2019567892 A JP 2019567892A JP 2019567892 A JP2019567892 A JP 2019567892A JP WO2019146276 A1 JPWO2019146276 A1 JP WO2019146276A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
- B66C13/06—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for minimising or preventing longitudinal or transverse swinging of loads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/40—Safety features of loads, equipment or persons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
- B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Arrangement Or Mounting Of Propulsion Units For Vehicles (AREA)
Abstract
Description
Claims (8)
- 走行方向の前後から被搬送物に接触する一対の揺れ抑え部を備える搬送車であって、
駆動部の駆動によって、前記被搬送物に接触する第一位置と、前記被搬送物から離反する第二位置との間で、前記揺れ抑え部を前記走行方向に移動させる移動機構と、
前記駆動部の駆動によって前記第一位置に移動された前記揺れ抑え部の、前記駆動部の駆動が停止した後における前記走行方向への移動を許容する緩衝機構と、を備え、
前記緩衝機構は、
前記揺れ抑え部に接続されると共に前記揺れ抑え部の前記第二位置方向への移動量に応じた動作量の動きをする作動部と、
前記揺れ抑え部が前記被搬送物を押圧するように前記作動部を付勢する第一付勢部と、
前記作動部の動作量が所定量以上になると前記作動部に作用して、前記揺れ抑え部が前記被搬送物を押圧するように前記作動部を付勢する第二付勢部と、を有する、搬送車。 - 前記移動機構は、
回転軸を中心に双方向に回転自在に設けられると共に前記揺れ抑え部を支持する支持部と、
前記駆動部の駆動によって回転する駆動軸と、
前記駆動軸の回転によって双方向に回転するクランク部と、
一端が前記クランク部の前記駆動軸と偏心した位置に双方向に回転可能に接続され、他端が前記支持部の前記回転軸と偏心した位置に双方向に回転可能に接続される連接部と、を有する、請求項1記載の搬送車。 - 前記揺れ抑え部が前記第一位置に位置するとき、前記駆動軸と、前記クランク部と前記連接部との接続位置と、前記連接部と前記支持部との接続位置とが前記連接部の延在方向に一直線上に位置する、請求項2記載の搬送車。
- 前記緩衝機構は、前記連接部に設けられており、
前記作動部は、前記支持部に接続された第一接続部と、一端が前記第一接続部に接続された棒状の棒状部と、を有し、
前記緩衝機構は、前記クランク部に接続された第一本体部と、前記棒状部が挿通される挿通孔を有すると共に前記第一本体部と間隔をあけて配置された第二本体部と、を含む、第二接続部を更に有し、
前記第一付勢部は、前記第一接続部と前記第二本体部とに接触するように配置され、前記第二付勢部は、前記第一本体部に配置されるか又は前記棒状部の他端に固定され、
前記作動部の動作量が所定量以上になると前記棒状部と前記第一本体部とが前記第二付勢部を介して接触する、請求項2又は3記載の搬送車。 - 前記移動機構は、前記駆動軸に固定される第一リンク部と、前記回転軸を中心に双方向に回転可能に設けられる第二リンク部と、前記第一リンク部及び前記第二リンク部の両方に双方向に回転可能に接続されている第三リンク部と、を有し、
前記第三リンク部は、前記被搬送物の下方に配置される進出位置と、前記被搬送物の下方から退避した位置に配置される退避位置との間で移動可能に設けられており、
前記第三リンク部における前記進出位置への移動は、前記揺れ抑え部の前記第一位置への移動と連動し、前記第三リンク部における前記退避位置への移動は、前記揺れ抑え部の前記第二位置への移動と連動する、請求項2〜4の何れか一項記載の搬送車。 - 前記第二付勢部の弾性係数は、前記第一付勢部の弾性係数より大きい、請求項1〜5の何れか一項記載の搬送車。
- 前記第二付勢部は、粘弾性を有している、請求項1〜6の何れか一項記載の搬送車。
- 前記第一付勢部はバネ部材であり、前記第二付勢部はゴム部材である、請求項1〜7の何れか一項記載の搬送車。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018009964 | 2018-01-24 | ||
JP2018009964 | 2018-01-24 | ||
PCT/JP2018/045132 WO2019146276A1 (ja) | 2018-01-24 | 2018-12-07 | 搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019146276A1 true JPWO2019146276A1 (ja) | 2021-01-28 |
JP6958639B2 JP6958639B2 (ja) | 2021-11-02 |
Family
ID=67395859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019567892A Active JP6958639B2 (ja) | 2018-01-24 | 2018-12-07 | 搬送車 |
Country Status (7)
Country | Link |
---|---|
US (1) | US11858539B2 (ja) |
JP (1) | JP6958639B2 (ja) |
KR (1) | KR102392495B1 (ja) |
CN (1) | CN111565993B (ja) |
SG (1) | SG11202006544TA (ja) |
TW (1) | TWI772592B (ja) |
WO (1) | WO2019146276A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11084505B2 (en) * | 2017-02-06 | 2021-08-10 | Murata Machinery, Ltd. | Overhead conveyance vehicle |
JP6881486B2 (ja) * | 2019-02-27 | 2021-06-02 | 村田機械株式会社 | 搬送車 |
US20230134312A1 (en) * | 2020-03-13 | 2023-05-04 | Murata Machinery, Ltd. | Gripper device, conveyance vehicle, and conveyance method |
JP7447743B2 (ja) | 2020-09-04 | 2024-03-12 | 村田機械株式会社 | 搬送装置 |
US20240002148A1 (en) * | 2020-11-10 | 2024-01-04 | Murata Machinery, Ltd. | Overhead transport vehicle |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009040563A (ja) * | 2007-08-09 | 2009-02-26 | Asyst Technologies Japan Inc | 押さえ機構及び搬送装置 |
JP2017088332A (ja) * | 2015-11-11 | 2017-05-25 | 村田機械株式会社 | 天井搬送車 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3981885B2 (ja) * | 2003-05-20 | 2007-09-26 | 株式会社ダイフク | 搬送装置 |
JP2005302214A (ja) * | 2004-04-14 | 2005-10-27 | Tokyo Pigeon Co Ltd | ディスク搬送装置 |
JP5273118B2 (ja) | 2010-10-04 | 2013-08-28 | 村田機械株式会社 | 搬送車及び搬送システム |
JP5750926B2 (ja) | 2011-02-15 | 2015-07-22 | 村田機械株式会社 | 天井搬送車 |
JP5561432B2 (ja) * | 2011-05-17 | 2014-07-30 | 村田機械株式会社 | 天井搬送車 |
JP6109866B2 (ja) * | 2015-03-02 | 2017-04-05 | 株式会社京三製作所 | 転落防止装置 |
JP6269535B2 (ja) * | 2015-03-04 | 2018-01-31 | 株式会社ダイフク | 物品搬送設備 |
JP6344410B2 (ja) * | 2016-02-19 | 2018-06-20 | 村田機械株式会社 | 天井搬送車 |
US11084505B2 (en) * | 2017-02-06 | 2021-08-10 | Murata Machinery, Ltd. | Overhead conveyance vehicle |
-
2018
- 2018-12-07 SG SG11202006544TA patent/SG11202006544TA/en unknown
- 2018-12-07 CN CN201880085642.2A patent/CN111565993B/zh active Active
- 2018-12-07 JP JP2019567892A patent/JP6958639B2/ja active Active
- 2018-12-07 KR KR1020207023727A patent/KR102392495B1/ko active IP Right Grant
- 2018-12-07 US US16/960,977 patent/US11858539B2/en active Active
- 2018-12-07 WO PCT/JP2018/045132 patent/WO2019146276A1/ja active Application Filing
-
2019
- 2019-01-08 TW TW108100726A patent/TWI772592B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009040563A (ja) * | 2007-08-09 | 2009-02-26 | Asyst Technologies Japan Inc | 押さえ機構及び搬送装置 |
JP2017088332A (ja) * | 2015-11-11 | 2017-05-25 | 村田機械株式会社 | 天井搬送車 |
Also Published As
Publication number | Publication date |
---|---|
TW201934442A (zh) | 2019-09-01 |
KR20200106958A (ko) | 2020-09-15 |
KR102392495B1 (ko) | 2022-04-29 |
US11858539B2 (en) | 2024-01-02 |
US20200331503A1 (en) | 2020-10-22 |
JP6958639B2 (ja) | 2021-11-02 |
SG11202006544TA (en) | 2020-08-28 |
CN111565993B (zh) | 2023-02-17 |
CN111565993A (zh) | 2020-08-21 |
WO2019146276A1 (ja) | 2019-08-01 |
TWI772592B (zh) | 2022-08-01 |
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