JPWO2019145819A5 - - Google Patents

Download PDF

Info

Publication number
JPWO2019145819A5
JPWO2019145819A5 JP2019567415A JP2019567415A JPWO2019145819A5 JP WO2019145819 A5 JPWO2019145819 A5 JP WO2019145819A5 JP 2019567415 A JP2019567415 A JP 2019567415A JP 2019567415 A JP2019567415 A JP 2019567415A JP WO2019145819 A5 JPWO2019145819 A5 JP WO2019145819A5
Authority
JP
Japan
Prior art keywords
oxide
conductive layer
insulating layer
layer
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2019567415A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2019145819A1 (ja
JP7221224B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/IB2019/050285 external-priority patent/WO2019145819A1/ja
Publication of JPWO2019145819A1 publication Critical patent/JPWO2019145819A1/ja
Publication of JPWO2019145819A5 publication Critical patent/JPWO2019145819A5/ja
Priority to JP2023014126A priority Critical patent/JP2023052830A/ja
Application granted granted Critical
Publication of JP7221224B2 publication Critical patent/JP7221224B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2019567415A 2018-01-25 2019-01-15 半導体装置 Active JP7221224B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023014126A JP2023052830A (ja) 2018-01-25 2023-02-01 半導体装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2018010166 2018-01-25
JP2018010166 2018-01-25
JP2018030372 2018-02-23
JP2018030372 2018-02-23
PCT/IB2019/050285 WO2019145819A1 (ja) 2018-01-25 2019-01-15 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023014126A Division JP2023052830A (ja) 2018-01-25 2023-02-01 半導体装置

Publications (3)

Publication Number Publication Date
JPWO2019145819A1 JPWO2019145819A1 (ja) 2021-01-14
JPWO2019145819A5 true JPWO2019145819A5 (https=) 2022-01-18
JP7221224B2 JP7221224B2 (ja) 2023-02-13

Family

ID=67395292

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2019567415A Active JP7221224B2 (ja) 2018-01-25 2019-01-15 半導体装置
JP2023014126A Withdrawn JP2023052830A (ja) 2018-01-25 2023-02-01 半導体装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023014126A Withdrawn JP2023052830A (ja) 2018-01-25 2023-02-01 半導体装置

Country Status (5)

Country Link
US (1) US11239237B2 (https=)
JP (2) JP7221224B2 (https=)
KR (1) KR102662909B1 (https=)
CN (1) CN111954932B (https=)
WO (1) WO2019145819A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7354138B2 (ja) * 2018-04-02 2023-10-02 ラム リサーチ コーポレーション 酸化ハフニウム系強誘電材料のためのキャップ層
US11031490B2 (en) * 2019-06-27 2021-06-08 Taiwan Semiconductor Manufacturing Co., Ltd Fabrication of field effect transistors with ferroelectric materials
US11588036B2 (en) * 2020-11-11 2023-02-21 Vanguard International Semiconductor Corporation High-efficiency packaged chip structure and electronic device including the same
CN115206994A (zh) * 2021-04-09 2022-10-18 株式会社日本显示器 显示装置
CN114339313B (zh) * 2021-12-28 2024-09-13 维沃移动通信有限公司 插帧方法、装置及电子设备
KR20240141735A (ko) * 2021-12-29 2024-09-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 기억 장치
US20240395934A1 (en) * 2023-05-24 2024-11-28 The Boeing Company Semiconductor devices for use in high-pressure environments
US12444455B2 (en) * 2023-06-06 2025-10-14 Fujian Jinhua Integrated Circuit Co., Ltd. Memory structure

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014181785A1 (en) * 2013-05-09 2014-11-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
DE102014019794B4 (de) 2013-05-20 2024-10-24 Semiconductor Energy Laboratory Co., Ltd. Halbleitervorrichtung
JP6400336B2 (ja) 2013-06-05 2018-10-03 株式会社半導体エネルギー研究所 半導体装置
JP6322503B2 (ja) * 2013-07-16 2018-05-09 株式会社半導体エネルギー研究所 半導体装置
JP2015053477A (ja) * 2013-08-05 2015-03-19 株式会社半導体エネルギー研究所 半導体装置および半導体装置の作製方法
JP6444714B2 (ja) * 2013-12-20 2018-12-26 株式会社半導体エネルギー研究所 半導体装置の作製方法
WO2015145292A1 (en) * 2014-03-28 2015-10-01 Semiconductor Energy Laboratory Co., Ltd. Transistor and semiconductor device
TWI663726B (zh) * 2014-05-30 2019-06-21 Semiconductor Energy Laboratory Co., Ltd. 半導體裝置、模組及電子裝置
US9768317B2 (en) 2014-12-08 2017-09-19 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, manufacturing method of semiconductor device, and electronic device
US10056497B2 (en) 2015-04-15 2018-08-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof

Similar Documents

Publication Publication Date Title
JPWO2019145819A5 (https=)
JP2021114625A5 (https=)
JP2022043102A5 (https=)
JP2021168394A5 (ja) 表示装置
JP2024112807A5 (ja) 半導体装置
JP2025075083A5 (https=)
JP2020167423A5 (https=)
JP2023029617A5 (https=)
JP2025175013A5 (ja) 半導体装置
JP2017175129A5 (ja) 半導体装置
JP2013115433A5 (ja) 半導体素子
JP2016139800A5 (ja) 半導体装置
JP2011049540A5 (https=)
JP2015181151A5 (ja) 半導体装置
JP2012015500A5 (https=)
JP2011171721A5 (https=)
JP2018061001A5 (ja) トランジスタ
JP2024012439A5 (https=)
JP2011181917A5 (https=)
JP2014017477A5 (https=)
JP2016028423A5 (ja) トランジスタ
JP2020120107A5 (ja) 半導体装置
JP2012018161A5 (ja) 半導体装置
JP2012199528A5 (https=)
JP2012253330A5 (ja) 半導体装置