JPWO2019138888A1 - Heat treatment furnace and its manufacturing method - Google Patents

Heat treatment furnace and its manufacturing method Download PDF

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JPWO2019138888A1
JPWO2019138888A1 JP2019564629A JP2019564629A JPWO2019138888A1 JP WO2019138888 A1 JPWO2019138888 A1 JP WO2019138888A1 JP 2019564629 A JP2019564629 A JP 2019564629A JP 2019564629 A JP2019564629 A JP 2019564629A JP WO2019138888 A1 JPWO2019138888 A1 JP WO2019138888A1
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heat treatment
transport
processed
transfer
roller
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JP7265996B2 (en
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山田 豊
山田  豊
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NGK Insulators Ltd
NGK Kilntech Corp
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NGK Kilntech Corp
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/40Arrangements of controlling or monitoring devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00Electrodes
    • H01M4/02Electrodes composed of, or comprising, active material
    • H01M4/36Selection of substances as active materials, active masses, active liquids
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Tunnel Furnaces (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)

Abstract

熱処理炉は、被処理物を熱処理する。熱処理炉は、被処理物を熱処理する空間を備える熱処理部と、熱処理部に配置され、被処理物を搬送する複数の搬送ローラと、を備えている。熱処理部の所定範囲に設置される複数の搬送ローラは、当該搬送ローラを軸方向に沿って見たときの当該搬送ローラの反りが最も大きくなる部位の反り方向が周期的に変化している。The heat treatment furnace heat-treats the object to be treated. The heat treatment furnace includes a heat treatment section provided with a space for heat-treating the object to be processed, and a plurality of transfer rollers arranged in the heat treatment section to convey the object to be processed. In the plurality of transport rollers installed in a predetermined range of the heat treatment section, the warp direction of the portion where the warp of the transport roller is the largest when the transport roller is viewed along the axial direction is periodically changed.

Description

本明細書に開示する技術は、被処理物を熱処理する熱処理炉及びその製造方法に関する。 The technique disclosed in the present specification relates to a heat treatment furnace for heat-treating an object to be treated and a method for producing the same.

熱処理炉(例えば、ローラーハースキルン等)を用いて、被処理物を熱処理することがある。この種の熱処理炉は、複数の搬送ローラを備えており、搬送ローラに被処理物を載置した状態で搬送ローラを回転させることによって被処理物を搬送する。例えば、特開2015−64189号公報には、熱処理炉の一例が開示されている。 The object to be treated may be heat-treated using a heat treatment furnace (for example, a roller hers kiln). This type of heat treatment furnace is provided with a plurality of transfer rollers, and conveys the object to be processed by rotating the transfer roller with the object to be processed placed on the transfer rollers. For example, Japanese Patent Application Laid-Open No. 2015-64189 discloses an example of a heat treatment furnace.

この種の熱処理炉では、生産性を高くするため、搬送ローラ上に搬送方向(以下、第1方向ともいう)と垂直かつ水平な方向(以下、第2方向ともいう)に複数の被処理物を並べて載置し、これら複数の被処理物を同時に搬送することがある。このような場合には、複数の被処理物は第2方向に並んだ状態で同時に熱処理炉内に搬入される。そして、複数の被処理物は、搬送ローラによって熱処理炉内を搬送され、熱処理炉から搬出される。第2方向に並べて配置された複数の被処理物は、同一の搬送ローラを用いて搬送されるため、理想的には熱処理炉から同時に搬出されるはずである。しかしながら、被処理物の重量によって生じる撓み等によって、搬送ローラ内のどの位置に被処理物を載置したかによって搬送速度に差が生じる。これにより、第2方向に並べて載置された複数の被処理物が熱処理炉から同時に搬出されないという問題が生じ得る。この問題は、特に被処理物の搬送距離が長い熱処理炉において顕著となる。 In this type of heat treatment furnace, in order to increase productivity, a plurality of objects to be processed are placed on the transfer roller in a direction perpendicular to and horizontal to the transfer direction (hereinafter, also referred to as the first direction) (hereinafter, also referred to as the second direction). Are placed side by side, and these multiple objects to be processed may be transported at the same time. In such a case, the plurality of objects to be processed are simultaneously carried into the heat treatment furnace in a state of being arranged in the second direction. Then, the plurality of objects to be processed are conveyed in the heat treatment furnace by the transfer roller and carried out from the heat treatment furnace. Since the plurality of objects to be processed arranged side by side in the second direction are conveyed using the same transfer roller, they should ideally be carried out from the heat treatment furnace at the same time. However, due to the bending caused by the weight of the object to be processed, the transfer speed differs depending on the position in the transfer roller on which the object to be processed is placed. As a result, there may be a problem that a plurality of objects to be processed arranged side by side in the second direction are not simultaneously carried out from the heat treatment furnace. This problem becomes remarkable especially in a heat treatment furnace in which the transport distance of the object to be processed is long.

本明細書は、水平かつ搬送方向と垂直な方向(第2方向)に並べて載置される複数の被処理物の搬送速度の差を小さくする技術を開示する。 The present specification discloses a technique for reducing the difference in transport speed of a plurality of objects to be processed that are placed side by side in a direction (second direction) that is horizontal and perpendicular to the transport direction.

本明細書に開示する熱処理炉は、被処理物を熱処理する。熱処理炉は、被処理物を熱処理する空間を備える熱処理部と、熱処理部に配置され、被処理物を搬送する複数の搬送ローラと、を備えている。熱処理部の所定範囲に設置される複数の搬送ローラは、当該搬送ローラを軸方向に沿って見たときの当該搬送ローラの反りが最も大きくなる部位の反り方向が周期的に変化している。 The heat treatment furnace disclosed in the present specification heat-treats the object to be treated. The heat treatment furnace includes a heat treatment section provided with a space for heat-treating the object to be processed, and a plurality of transfer rollers arranged in the heat treatment section to convey the object to be processed. In the plurality of transport rollers installed in a predetermined range of the heat treatment section, the warp direction of the portion where the warp of the transport roller is the largest when the transport roller is viewed along the axial direction is periodically changed.

上記の熱処理炉は、熱処理部の所定範囲において搬送ローラの反り方向を周期的に変化させることによって、水平かつ搬送方向と垂直な方向(第2方向)に並べて載置される複数の被処理物の搬送速度を調整することができる。このため、被処理物を搬送ローラのどの位置(第2方向の位置)に載置したかによって生じる搬送速度の差を小さくすることができる。 In the above heat treatment furnace, a plurality of objects to be processed are placed side by side in a horizontal direction and a direction perpendicular to the transport direction (second direction) by periodically changing the warp direction of the transport roller within a predetermined range of the heat treatment section. The transport speed of the can be adjusted. Therefore, it is possible to reduce the difference in transport speed caused by the position (position in the second direction) of the transport roller on which the object to be processed is placed.

また、本明細書に開示する熱処理炉の製造方法では、被処理物を熱処理する空間を備える熱処理部と、熱処理部に配置され、被処理物を搬送する複数の搬送ローラと、を備える熱処理炉を製造する。当該熱処理炉の製造方法は、熱処理部の所定範囲に設置される複数の搬送ローラのそれぞれについて、当該搬送ローラを軸方向に沿って見たときに当該搬送ローラの反りが最も大きくなる部位の反り方向を測定する測定工程と、熱処理部の所定範囲については、測定した反り方向が周期的に変化するように搬送ローラを設置する設置工程と、を備える。 Further, in the method for manufacturing a heat treatment furnace disclosed in the present specification, a heat treatment furnace including a heat treatment section provided with a space for heat-treating the object to be processed and a plurality of transfer rollers arranged in the heat treatment section to convey the object to be processed. To manufacture. In the method for manufacturing the heat treatment furnace, for each of a plurality of transport rollers installed in a predetermined range of the heat treatment section, the warp of the portion where the warp of the transport roller is the largest when the transport roller is viewed along the axial direction is obtained. A measurement step of measuring the direction and an installation step of installing a transport roller so that the measured warp direction changes periodically for a predetermined range of the heat treatment unit are provided.

上記の熱処理炉の製造方法では、熱処理部の所定範囲において、測定した反り方向が周期的に変化するように搬送ローラを設置する。このため、第2方向に並べて載置される複数の被処理物の搬送速度を調整することができ、被処理物を搬送ローラのどの位置に載置したかによって生じる搬送速度の差を小さくすることができる。 In the above-mentioned method for manufacturing a heat treatment furnace, a transfer roller is installed so that the measured warp direction changes periodically in a predetermined range of the heat treatment section. Therefore, it is possible to adjust the transport speed of a plurality of objects to be processed arranged side by side in the second direction, and reduce the difference in transport speed caused by the position of the transfer roller on which the objects to be processed are placed. be able to.

実施例に係る熱処理炉の概略構成を示す図であり、被処理物の搬送方向に平行な平面で熱処理炉を切断したときの縦断面図。It is a figure which shows the schematic structure of the heat treatment furnace which concerns on Example, and is the vertical sectional view when the heat treatment furnace is cut in the plane parallel to the transport direction of the object to be processed. 図1のII−II線における断面図。FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 搬送ローラの反りの大きさ及び反り方向を測定する部位を示す図。The figure which shows the part which measures the warp magnitude and the warp direction of a transport roller. 搬送ローラの反り方向を調整した状態を模式的に示す図であって、(a)は隣接する搬送ローラの反り方向を90°ずつずらした状態を示し、(b)は隣接する搬送ローラの反り方向を180°ずつずらした状態を示す。It is a figure which shows the state which adjusted the warp direction of a transfer roller schematically, (a) shows the state which the warp direction of the adjacent transfer roller is shifted by 90 °, (b) is the state which the warp direction of the adjacent transfer roller is shifted by 90 ° The state where the direction is shifted by 180 ° is shown. 搬送ローラの撓みが大きい場合の被処理物の搬送を説明するための図であって、(a)は搬送ローラの中央に載置される被処理物の載置状態を示しており、(b)は搬送ローラの端部に載置される被処理物の載置状態を示している。It is a figure for demonstrating the transfer of the object to be processed when the bending of the transfer roller is large, (a) shows the placement state of the object to be processed to be placed in the center of the transfer roller, and (b). ) Indicates the mounting state of the object to be mounted on the end of the transport roller. 搬送ローラの撓みが大きい場合に、隣接する搬送ローラの反り方向を90°ずつずらした状態の搬送ローラと搬送ローラの端部に載置される被処理物を模式的に示す図であって、(a)〜(d)は搬送ローラを90°ずつ回転させた状態を示す。It is a figure which shows typically the transport roller in a state where the warp direction of the adjacent transport roller is shifted by 90 ° when the deflection of the transport roller is large, and the object to be placed on the end of the transport roller. (A) to (d) show a state in which the transport roller is rotated by 90 °. 搬送ローラの撓みが大きい場合に、隣接する搬送ローラの反り方向を180°ずつずらした状態の搬送ローラと搬送ローラの端部に載置される被処理物を模式的に示す図であって、(a)〜(d)は搬送ローラを90°ずつ回転させた状態を示す。It is a figure which shows typically the transport roller in a state where the warp direction of an adjacent transport roller is shifted by 180 ° when the deflection of the transport roller is large, and the object to be placed on the end of the transport roller. (A) to (d) show a state in which the transport roller is rotated by 90 °.

以下に説明する実施例の主要な特徴を列記しておく。なお、以下に記載する技術要素は、それぞれ独立した技術要素であって、単独であるいは各種の組合せによって技術的有用性を発揮するものであり、出願時請求項記載の組合せに限定されるものではない。 The main features of the examples described below are listed. It should be noted that the technical elements described below are independent technical elements and exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. Absent.

(特徴1)本明細書が開示する熱処理炉では、熱処理部の所定範囲に設置される複数の搬送ローラは、所定数の搬送ローラによって1周期が構成されていてもよい。1周期を構成する各搬送ローラの反り方向は、当該搬送ローラと隣接する搬送ローラの反り方向に対して所定角度ずれていてもよい。このような構成によると、水平かつ搬送方向と垂直な方向(第2方向)に並べて載置される複数の被処理物の搬送速度を好適に調整することができる。特に、搬送ローラの端部側に載置される被処理物の搬送速度が中央付近に載置される被処理物より速い場合に、第2方向に並べて載置される複数の被処理物の搬送速度の差を小さくすることができる。 (Characteristic 1) In the heat treatment furnace disclosed in the present specification, a plurality of transfer rollers installed in a predetermined range of the heat treatment section may be configured in one cycle by a predetermined number of transfer rollers. The warp direction of each transport roller constituting one cycle may be deviated by a predetermined angle with respect to the warp direction of the transport roller adjacent to the transport roller. According to such a configuration, it is possible to suitably adjust the transport speed of a plurality of objects to be processed that are placed side by side in a direction (second direction) that is horizontal and perpendicular to the transport direction. In particular, when the transport speed of the object to be processed placed on the end side of the transfer roller is faster than the object to be processed placed near the center, a plurality of objects to be processed arranged side by side in the second direction. The difference in transport speed can be reduced.

(特徴2)本明細書が開示する熱処理炉は、所定範囲に設置される複数の搬送ローラを同時に駆動可能な駆動装置をさらに備えていてもよい。駆動装置は、搬送ローラの反り方向が隣接する搬送ローラの反り方向と所定角度ずれた状態を維持して、所定範囲に設置される複数の搬送ローラを駆動してもよい。このような構成によると、駆動装置によって所定範囲に設置される複数の搬送ローラを同時に駆動することによって、所定範囲に設置される複数の搬送ローラの反り角度が隣接する搬送ローラの反り角度と所定角度ずれた状態を維持することができる。このため、第2方向に並べて載置される複数の被処理物の搬送速度を調整した状態を維持することができる。 (Feature 2) The heat treatment furnace disclosed in the present specification may further include a drive device capable of simultaneously driving a plurality of transfer rollers installed in a predetermined range. The drive device may drive a plurality of transfer rollers installed in a predetermined range while maintaining a state in which the warp direction of the transfer rollers deviates from the warp direction of the adjacent transfer rollers by a predetermined angle. According to such a configuration, by simultaneously driving a plurality of transport rollers installed in a predetermined range by a driving device, the warp angles of the plurality of transport rollers installed in a predetermined range are predetermined with the warp angles of adjacent transport rollers. It is possible to maintain the state where the angle is deviated. Therefore, it is possible to maintain a state in which the transport speeds of a plurality of objects to be processed arranged side by side in the second direction are adjusted.

(特徴3)本明細書が開示する熱処理炉では、所定角度は90度であってもよい。このような構成によると、搬送ローラの撓み量に合わせて、第2方向に並べて搬送される複数の被処理物の搬送速度を好適に調整することができる。特に、搬送ローラに被処理物を載置したときの搬送ローラの撓み量が小さい場合に、第2方向に並べて載置される複数の被処理物の搬送速度の差を小さくすることができる。 (Feature 3) In the heat treatment furnace disclosed in the present specification, the predetermined angle may be 90 degrees. According to such a configuration, the transport speed of a plurality of objects to be transported arranged side by side in the second direction can be suitably adjusted according to the amount of deflection of the transport roller. In particular, when the amount of deflection of the transport roller when the object to be processed is placed on the transfer roller is small, the difference in the transfer speeds of a plurality of objects to be processed arranged side by side in the second direction can be reduced.

(特徴4)本明細書が開示する熱処理炉では、所定角度は180度であってもよい。このような構成によると、搬送ローラの撓み量に合わせて、第2方向に並べて搬送される複数の被処理物の搬送速度を好適に調整することができる。特に、搬送ローラに被処理物を載置したときの搬送ローラの撓み量が大きい場合に、第2方向に並べて載置される複数の被処理物の搬送速度の差を小さくすることができる。 (Feature 4) In the heat treatment furnace disclosed in the present specification, the predetermined angle may be 180 degrees. According to such a configuration, the transport speed of a plurality of objects to be transported arranged side by side in the second direction can be suitably adjusted according to the amount of deflection of the transport roller. In particular, when the amount of deflection of the transport roller when the object to be processed is placed on the transfer roller is large, it is possible to reduce the difference in the transfer speeds of the plurality of objects to be processed arranged side by side in the second direction.

以下、実施例に係る熱処理炉10について説明する。図1に示すように、熱処理炉10は、熱処理部20と、搬入部34と、搬出部40と、搬送装置50を備えている。熱処理炉10は、搬送装置50によって被処理物12が熱処理部20内を搬送される間に、被処理物12を熱処理する。 Hereinafter, the heat treatment furnace 10 according to the embodiment will be described. As shown in FIG. 1, the heat treatment furnace 10 includes a heat treatment section 20, a carry-in section 34, a carry-out section 40, and a transfer device 50. The heat treatment furnace 10 heat-treats the object to be processed 12 while the object to be processed 12 is conveyed in the heat treatment section 20 by the transfer device 50.

被処理物12としては、例えば、セラミックス製の誘電体(基材)と電極とを積層した積層体や、リチウムイオン電池の正極材や負極材等が挙げられる。熱処理炉10を用いてセラミック製の積層体を熱処理する場合には、これらを平板状のセッタに載置して炉内を搬送することができる。また、熱処理炉10を用いてリチウムイオン電池の正極材や負極材を熱処理する場合には、これらを箱状の匣鉢に収容して炉内を搬送することができる。本実施例の熱処理炉10では、搬送ローラ52(後述)上に複数のセッタや匣鉢を搬送方向に並んだ状態で載置して搬送することができる。以下、本実施例においては、熱処理する物質と、その熱処理する物質を載置したセッタや収容した匣鉢を合わせた全体を「被処理物12」という。また、以下の説明では、被処理物12を搬送する方向(図1のYZ平面に垂直な方向)を「搬送方向」又は「第1方向」と称することがあり、水平かつ第1方向に垂直な方向(図1のXZ平面に垂直な方向)を「第2方向」と称することがある。 Examples of the object 12 to be treated include a laminate in which a ceramic dielectric (base material) and an electrode are laminated, a positive electrode material and a negative electrode material of a lithium ion battery, and the like. When the ceramic laminates are heat-treated using the heat treatment furnace 10, they can be placed on a flat plate-shaped setter and conveyed in the furnace. Further, when the positive electrode material and the negative electrode material of the lithium ion battery are heat-treated using the heat treatment furnace 10, they can be housed in a box-shaped saggar and transported in the furnace. In the heat treatment furnace 10 of the present embodiment, a plurality of setters and sags can be placed and transported in a state of being arranged in the transport direction on the transport roller 52 (described later). Hereinafter, in the present embodiment, the entire combination of the substance to be heat-treated, the setter on which the substance to be heat-treated is placed, and the container containing the heat-treated substance is referred to as "object 12 to be treated". Further, in the following description, the direction in which the object to be processed 12 is conveyed (the direction perpendicular to the YZ plane in FIG. 1) may be referred to as a "transportation direction" or a "first direction", and is horizontal and perpendicular to the first direction. (Direction perpendicular to the XZ plane in FIG. 1) may be referred to as a "second direction".

熱処理部20は、略直方形の箱型の炉体を備えており、炉体の内部には周囲を外壁22で囲まれた空間24が設けられている。外壁22の前端面(図1の−X側の端面)には、開口26が形成されており、外壁22の後端面(図1の+X側の端面)には、開口28が形成されている。被処理物12は、搬送装置50によって開口26から熱処理部20内に搬送され、開口28から熱処理部20外へ搬送される。すなわち、開口26は熱処理部20の搬入口として用いられ、開口28は熱処理部20の搬出口として用いられる。 The heat treatment section 20 includes a substantially rectangular box-shaped furnace body, and a space 24 surrounded by an outer wall 22 is provided inside the furnace body. An opening 26 is formed in the front end surface of the outer wall 22 (the end surface on the −X side in FIG. 1), and an opening 28 is formed in the rear end surface (the end surface on the + X side in FIG. 1) of the outer wall 22. .. The object 12 to be processed is conveyed from the opening 26 into the heat treatment section 20 by the transfer device 50, and is conveyed from the opening 28 to the outside of the heat treatment section 20. That is, the opening 26 is used as a carry-in port of the heat treatment section 20, and the opening 28 is used as a carry-out port of the heat treatment section 20.

空間24には、複数の搬送ローラ52と、複数のヒータ30、32が配置されている。ヒータ30は、搬送ローラ52の上方の位置に搬送方向に等間隔で配置され、ヒータ32は搬送ローラ52の下方の位置に搬送方向に等間隔で配置されている。ヒータ30,32が発熱することで、空間24内が加熱される。なお、本実施例では、ヒータ30、32はそれぞれ搬送方向に等間隔で配置されているが、このような構成に限定されない。ヒータは、例えば、被処理物12の種類や熱処理部20の熱処理の条件等に合わせて、所望の位置に適宜変更して配置してもよい。また、本実施例では、空間24内にヒータ30、32を配置しているが、このような構成に限定されない。空間24内を加熱できればよく、例えば、空間24内にガスバーナー等を設置してもよい。 A plurality of transfer rollers 52 and a plurality of heaters 30 and 32 are arranged in the space 24. The heaters 30 are arranged at positions above the transport roller 52 at equal intervals in the transport direction, and the heaters 32 are arranged at positions below the transport roller 52 at equal intervals in the transport direction. The heat generated by the heaters 30 and 32 heats the space 24. In this embodiment, the heaters 30 and 32 are arranged at equal intervals in the transport direction, but the configuration is not limited to this. The heater may be appropriately changed and arranged at a desired position according to, for example, the type of the object 12 to be processed, the heat treatment conditions of the heat treatment unit 20, and the like. Further, in this embodiment, the heaters 30 and 32 are arranged in the space 24, but the present invention is not limited to such a configuration. It suffices if the space 24 can be heated, and for example, a gas burner or the like may be installed in the space 24.

図2に示すように、熱処理部20では、被処理物12は第2方向に複数並べて搬送される。本実施例では、熱処理部20(すなわち、熱処理炉10全体)において、3つの被処理物12を第2方向に並べて搬送する。このため、本実施例では、熱処理部20の第2方向の寸法は、被処理物12を第2方向に3つ並べた寸法より大きくされているが、熱処理部20の第2方向の寸法は、特に限定されない。熱処理部20の第2方向の寸法は、被処理物12を第2方向に3つより多く並べて搬送可能な大きさであってもよい。また、熱処理部20の搬送方向の寸法は、約100mと比較的大きくなっているが、熱処理部20の搬送方向の寸法は、特に限定されない。例えば、熱処理部20の搬送方向の寸法は、100mより小さくてもよく、30m〜100mであってもよいし、100mより大きくてもよい。なお、以下の説明では、被処理物12が第2方向に複数並んでいる場合の第2方向の中央側を「内側」と称し、第2方向の中央に対して端部側(+Y方向及び−Y方向)を「外側」と称することがある。なお、被処理物12は、所定の間隔を空けて熱処理部20に連続して搬入される。このため、被処理物12は、第2方向だけでなく搬送方向にも並んで配置されていることになる。 As shown in FIG. 2, in the heat treatment unit 20, a plurality of objects 12 to be processed are conveyed side by side in the second direction. In this embodiment, in the heat treatment section 20 (that is, the entire heat treatment furnace 10), the three objects to be processed 12 are transported side by side in the second direction. Therefore, in this embodiment, the dimension of the heat treatment section 20 in the second direction is larger than the dimension in which three objects 12 to be processed are arranged in the second direction, but the dimension of the heat treatment section 20 in the second direction is larger. , Not particularly limited. The size of the heat treatment unit 20 in the second direction may be such that more than three objects 12 to be processed can be arranged and conveyed in the second direction. Further, the dimension of the heat treatment unit 20 in the transport direction is relatively large, about 100 m, but the dimension of the heat treatment unit 20 in the transport direction is not particularly limited. For example, the size of the heat treatment unit 20 in the transport direction may be smaller than 100 m, 30 m to 100 m, or larger than 100 m. In the following description, when a plurality of objects 12 to be processed are lined up in the second direction, the center side in the second direction is referred to as "inside", and the end side (+ Y direction and) with respect to the center in the second direction. -Y direction) may be referred to as "outside". The object to be processed 12 is continuously carried into the heat treatment unit 20 at predetermined intervals. Therefore, the objects to be processed 12 are arranged side by side not only in the second direction but also in the transport direction.

なお、図2に示すように、本実施例では、第2方向に並べて載置する3つの被処理物12のうち、第2方向の+Y方向側に載置されるものを被処理物12aとし、第2方向の中央(内側)に載置されるものを被処理物12bとし、第2方向の−Y方向側に載置されるものを被処理物12cとして区別している。以下、他の構成要素についても、その構成要素を区別する必要があるときは沿字のアルファベットを用いて記載し、その構成要素を区別する必要がないときは沿字のアルファベットを省略して単に数字で記載することがある。 As shown in FIG. 2, in this embodiment, of the three objects to be processed 12 placed side by side in the second direction, the object to be processed 12a is placed on the + Y direction side of the second direction. , The object placed in the center (inside) of the second direction is referred to as the object to be processed 12b, and the object placed on the −Y direction side in the second direction is distinguished as the object to be processed 12c. Hereinafter, for other components as well, when it is necessary to distinguish the components, the alphabet of the characters is used, and when it is not necessary to distinguish the components, the alphabet of the characters is omitted. It may be described in numbers.

搬入部34は、熱処理部20の上流側(すなわち、搬送方向の上流側であり、図1では熱処理部20の−X方向)に位置している。搬入部34は、熱処理炉10の外部から運ばれる被処理物12を受け取り、受け取った被処理物12を熱処理部20の空間24内に搬入する。搬入部34には、搬送ローラ52が設置されており、熱処理炉10の外部から運ばれた被処理物12を搬送ローラ52によって搬送する。 The carry-in unit 34 is located on the upstream side of the heat treatment unit 20 (that is, on the upstream side in the transport direction, and in FIG. 1, in the −X direction of the heat treatment unit 20). The carry-in unit 34 receives the object to be processed 12 carried from the outside of the heat treatment furnace 10 and carries the received object 12 into the space 24 of the heat treatment unit 20. A transfer roller 52 is installed in the carry-in unit 34, and the object 12 to be processed carried from the outside of the heat treatment furnace 10 is conveyed by the transfer roller 52.

搬出部40は、熱処理部20の下流側(すなわち、搬送方向の下流側であり、図1では熱処理部20の+X方向)に位置している。搬出部40は、熱処理部20の空間24から被処理物12を搬出し、搬出された被処理物12を熱処理炉10の外部に受け渡す。搬出部40には、搬送ローラ52が設置されており、被処理物12を搬送ローラ52によって空間24外に搬送する。 The carry-out section 40 is located on the downstream side of the heat treatment section 20 (that is, on the downstream side in the transport direction, and in FIG. 1, in the + X direction of the heat treatment section 20). The carry-out unit 40 carries out the object to be processed 12 from the space 24 of the heat treatment unit 20, and delivers the carried-out object 12 to the outside of the heat treatment furnace 10. A transport roller 52 is installed in the carry-out portion 40, and the object 12 to be processed is transported to the outside of the space 24 by the transport roller 52.

搬送装置50は、複数の搬送ローラ52と、駆動装置60と、制御装置62を備えている。搬送装置50は、搬入部34に運ばれた被処理物12を、搬入部34から開口26を通って熱処理部20の空間24内に搬送する。さらに、搬送装置50は、空間24内において、開口26から開口28まで被処理物12を搬送する。そして、搬送装置50は、空間24から開口28を通って搬出部40まで被処理物12を搬送する。被処理物12は、搬送ローラ52によって搬入部34から搬出部40まで搬送される。 The transfer device 50 includes a plurality of transfer rollers 52, a drive device 60, and a control device 62. The transport device 50 transports the object to be processed 12 carried to the carry-in section 34 from the carry-in section 34 through the opening 26 into the space 24 of the heat treatment section 20. Further, the transport device 50 transports the object 12 to be processed from the opening 26 to the opening 28 in the space 24. Then, the transport device 50 transports the object 12 to be processed from the space 24 through the opening 28 to the carry-out portion 40. The object 12 to be processed is conveyed from the carry-in portion 34 to the carry-out portion 40 by the transfer roller 52.

搬送ローラ52は円筒状であり、その軸線は搬送方向と直交する方向に伸びている。複数の搬送ローラ52は、全て同じ直径を有しており、搬送方向に一定のピッチで等間隔に配置されている。なお、熱処理部20に設置される搬送ローラの直径は、搬入部34及び搬出部40に設置される搬送ローラと異なる直径であってもよい。また、熱処理部20に設置される搬送ローラ52は、搬入部34及び搬出部40に設置される搬送ローラ52と異なるピッチで配置されてもよい。搬送ローラ52は、その軸線回りに回転可能に支持されており、駆動装置60の駆動力が伝達されることによって回転する。搬送ローラ52は、熱処理部20、搬入部34及び搬出部40に複数配置されている。搬送ローラ52の軸線方向の寸法は、熱処理部20の第2方向の寸法より大きい(図2参照)。 The transport roller 52 has a cylindrical shape, and its axis extends in a direction orthogonal to the transport direction. The plurality of transfer rollers 52 all have the same diameter, and are arranged at equal intervals at a constant pitch in the transfer direction. The diameter of the transport roller installed in the heat treatment section 20 may be different from the diameter of the transport roller installed in the carry-in section 34 and the carry-out section 40. Further, the transport rollers 52 installed in the heat treatment section 20 may be arranged at a pitch different from that of the transport rollers 52 installed in the carry-in section 34 and the carry-out section 40. The transport roller 52 is rotatably supported around its axis, and rotates by transmitting the driving force of the driving device 60. A plurality of transfer rollers 52 are arranged in the heat treatment section 20, the carry-in section 34, and the carry-out section 40. The axial dimension of the transport roller 52 is larger than the second direction dimension of the heat treatment section 20 (see FIG. 2).

熱処理部20に配置される複数の搬送ローラ52は、各搬送ローラ52を軸方向(すなわち、第2方向又はY方向)に沿って見たときに、搬送ローラ52の軸方向の複数の部位のうち反りが最も大きくなる部位の反り方向(以下、搬送ローラ52の反り方向ともいう)を調整して設置されている。搬送ローラ52の軸方向の複数の部位としては、例えば、搬送ローラ52の中心付近の部位と、搬送ローラ52に複数の被処理物12を第2方向に並べて載置するときに、各被処理物12の第2方向の端部と搬送ローラ52が接触する部位の近傍の部位を採用することができる。本実施例では、図3に示すように、搬送ローラ52に3つの被処理物12a〜12cを第2方向に並べて載置するため、被処理物12aの端部側(+Y方向側)の端部付近を部位Aとし、被処理物12aと被処理物12bの境界付近を部位Bとし、搬送ローラ52の軸方向の中央付近を部位Cとし、被処理物12bと被処理物12cの境界付近を部位Dとし、被処理物12cの端部側(−Y方向側)の端部付近を部位Eとしている。このため、本実施例では、搬送ローラ52の軸方向の5つの部位A〜Eのうち、反りが最も大きい部位の反り方向を、搬送ローラ52の反り方向としている。なお、本実施例では、搬送ローラ52の軸方向の5つの部位A〜Eの反り方向から搬送ローラ52の反り方向を設定しているが、このような構成に限定されない。搬送ローラ52の反り方向は、搬送ローラ52の軸方向の5つより多くの部位の反り方向に基づいて設定してもよいし、5つより少ない部位の反り方向に基づいて設定してもよい。また、搬送ローラ52に載置される被処理物12の位置とは無関係に軸方向の複数の部位を設定してもよい。 The plurality of transport rollers 52 arranged in the heat treatment unit 20 are located on a plurality of axially portion of the transport rollers 52 when the transport rollers 52 are viewed along the axial direction (that is, the second direction or the Y direction). It is installed by adjusting the warp direction of the portion where the warp is the largest (hereinafter, also referred to as the warp direction of the transport roller 52). As the plurality of parts in the axial direction of the transport roller 52, for example, when a portion near the center of the transport roller 52 and a plurality of objects 12 to be processed are placed side by side in the second direction on the transport roller 52, each portion to be processed is to be processed. A portion near the portion where the end portion of the object 12 in the second direction and the transport roller 52 come into contact with each other can be adopted. In this embodiment, as shown in FIG. 3, since the three objects to be processed 12a to 12c are placed side by side in the second direction on the transport roller 52, the end side (+ Y direction side) end of the object to be processed 12a is placed. The vicinity of the portion is designated as the portion A, the vicinity of the boundary between the object to be processed 12a and the object to be processed 12b is designated as the portion B, the vicinity of the axial center of the transport roller 52 is designated as the portion C, and the vicinity of the boundary between the object to be processed 12b and the object to be processed 12c Is designated as a portion D, and the vicinity of the end portion on the end portion side (−Y direction side) of the object to be processed 12c is designated as a portion E. Therefore, in this embodiment, the warp direction of the portion having the largest warp is defined as the warp direction of the transport roller 52 among the five portions A to E in the axial direction of the transport roller 52. In this embodiment, the warp direction of the transport roller 52 is set from the warp direction of the five parts A to E in the axial direction of the transport roller 52, but the configuration is not limited to this. The warp direction of the transport roller 52 may be set based on the warp direction of more than five parts in the axial direction of the transport roller 52, or may be set based on the warp direction of less than five parts. .. Further, a plurality of parts in the axial direction may be set regardless of the position of the object to be processed 12 placed on the transport roller 52.

本実施例では、熱処理部20に配置される搬送ローラ52の反り方向は、搬送ローラ52に被処理物12を載置した際に生じる搬送ローラ52の撓み量に基づいて異なる態様で調整される。詳細には、搬送ローラ52の反り方向が周期的に変化するように設置される。すなわち、搬送ローラ52は、隣接する搬送ローラ52の反り方向に対して所定角度ずれた状態で配置される。具体的には、搬送ローラ52の撓み量が大きい場合には、隣接する搬送ローラ52の反り方向を180°ずらして配置される。また、搬送ローラ52の撓み量が比較的小さい場合には、隣接する搬送ローラ52の反り方向を90°ずらして配置される。このように配置することによって、第2方向に並べて載置した複数の被処理物12a〜12cの熱処理部20での搬送速度の差を小さくすることができる。 In this embodiment, the warp direction of the transport roller 52 arranged in the heat treatment unit 20 is adjusted in a different manner based on the amount of deflection of the transport roller 52 that occurs when the object 12 to be processed is placed on the transport roller 52. .. Specifically, the transport roller 52 is installed so that the warp direction changes periodically. That is, the transfer rollers 52 are arranged in a state of being displaced by a predetermined angle with respect to the warp direction of the adjacent transfer rollers 52. Specifically, when the amount of deflection of the transfer roller 52 is large, the adjacent transfer rollers 52 are arranged so as to be displaced by 180 ° in the warp direction. When the amount of deflection of the transfer roller 52 is relatively small, the adjacent transfer rollers 52 are arranged so as to be offset by 90 ° in the warp direction. By arranging in this way, it is possible to reduce the difference in the transport speeds of the plurality of objects 12a to 12c to be processed arranged side by side in the second direction in the heat treatment section 20.

駆動装置60(図1参照)は、搬送ローラ52を駆動する駆動装置(例えば、モータ)である。駆動装置60は、動力伝達機構を介して、搬送ローラ52に接続されている。駆動装置60の駆動力が動力伝達機構を介して搬送ローラ52に伝達されると、搬送ローラ52は回転するようになっている。動力伝達機構としては、公知のものを用いることができ、例えば、スプロケットとチェーンによる機構が用いられている。駆動装置60は、搬送ローラ52が略同一の速度で回転するように、搬送ローラ52のそれぞれを駆動する。駆動装置60は、制御装置62によって制御されている。 The drive device 60 (see FIG. 1) is a drive device (for example, a motor) that drives the transfer roller 52. The drive device 60 is connected to the transfer roller 52 via a power transmission mechanism. When the driving force of the drive device 60 is transmitted to the transfer roller 52 via the power transmission mechanism, the transfer roller 52 rotates. As the power transmission mechanism, a known one can be used, and for example, a mechanism using a sprocket and a chain is used. The drive device 60 drives each of the transfer rollers 52 so that the transfer rollers 52 rotate at substantially the same speed. The drive device 60 is controlled by the control device 62.

複数の搬送ローラ52は、駆動装置60の駆動力が伝達されることによって回転する。本実施例では、同一の駆動装置60に接続される複数の搬送ローラ52は、同時かつ同一の速度で回転する。したがって、上述したように搬送ローラ52の反り方向が調整された複数の搬送ローラ52は、調整された反り方向を維持した状態で回転する。なお、熱処理部20に設置された搬送ローラ52は、同時かつ同一の速度で回転することが好ましいため、1つの駆動装置60に接続されていると好ましい。しかしながら、本実施例の熱処理炉10のように、熱処理部20の搬送方向の距離が比較的長いと、1つの駆動装置60によって熱処理部20に設置される全ての搬送ローラ52を回転させることが難しい。このような場合は、接続される各搬送ローラ52に同一の駆動力を発生させる複数の駆動装置60を設置し、熱処理部20に設置される全ての搬送ローラ52が同一の駆動力で駆動されるように、熱処理部20に設置される搬送ローラ52を分割して複数の駆動装置60に接続する。これにより、熱処理部20に設置される全ての搬送ローラ52は、同一の駆動力及び同一の速度で回転させることができる。このとき、異なる駆動装置60に接続される搬送ローラ52は、回転のタイミングがずれることがあり、異なる駆動装置60に接続される搬送ローラ52間(すなわち、境界における搬送ローラ52間)においては、調整された反り方向を維持できない場合がある。このような場合であっても、同一の駆動装置60に接続される搬送ローラ52は調整された反り方向を維持することができるため、第2方向に並べて載置した複数の被処理物12a〜12cの熱処理部20での搬送速度の差を小さくすることができる。なお、搬入部34及び搬出部40に設置される搬送ローラ52は、熱処理部20に設置される搬送ローラ52を駆動する駆動装置60と異なる駆動力を発生させる駆動装置に接続されていてもよく、熱処理部20に設置される搬送ローラ52と異なる速度で回転するように構成されていてもよい。 The plurality of transfer rollers 52 rotate by transmitting the driving force of the driving device 60. In this embodiment, the plurality of transfer rollers 52 connected to the same drive device 60 rotate at the same time and at the same speed. Therefore, the plurality of transport rollers 52 whose warp directions of the transport rollers 52 are adjusted as described above rotate while maintaining the adjusted warp directions. Since the transfer roller 52 installed in the heat treatment unit 20 preferably rotates at the same time and at the same speed, it is preferable that the transfer roller 52 is connected to one drive device 60. However, if the distance in the transport direction of the heat treatment section 20 is relatively long as in the heat treatment furnace 10 of the present embodiment, one drive device 60 can rotate all the transfer rollers 52 installed in the heat treatment section 20. difficult. In such a case, a plurality of drive devices 60 that generate the same driving force are installed in each of the connected transfer rollers 52, and all the transfer rollers 52 installed in the heat treatment unit 20 are driven by the same driving force. As described above, the transport roller 52 installed in the heat treatment unit 20 is divided and connected to the plurality of drive devices 60. As a result, all the transport rollers 52 installed in the heat treatment unit 20 can be rotated at the same driving force and the same speed. At this time, the transfer rollers 52 connected to the different drive devices 60 may be rotated at different timings, and between the transfer rollers 52 connected to the different drive devices 60 (that is, between the transfer rollers 52 at the boundary). It may not be possible to maintain the adjusted warpage direction. Even in such a case, since the transport roller 52 connected to the same drive device 60 can maintain the adjusted warp direction, a plurality of objects to be processed 12a to be placed side by side in the second direction. The difference in transport speed in the heat treatment section 20 of 12c can be reduced. The transfer roller 52 installed in the carry-in unit 34 and the carry-out unit 40 may be connected to a drive device that generates a different driving force from the drive device 60 that drives the transfer roller 52 installed in the heat treatment unit 20. , It may be configured to rotate at a speed different from that of the transport roller 52 installed in the heat treatment unit 20.

次に、図3及び図4を参照して、熱処理炉10の製造方法について説明する。なお、本実施例では、搬送ローラ52の反り方向を測定する工程と、熱処理部20に搬送ローラ52を配置する工程に特徴があり、その他の工程については従来公知の工程を用いることができる。このため、以下では、本実施例の特徴部分のみを説明し、その他の工程については説明を省略する。 Next, a method for manufacturing the heat treatment furnace 10 will be described with reference to FIGS. 3 and 4. In this embodiment, the step of measuring the warp direction of the transport roller 52 and the step of arranging the transport roller 52 in the heat treatment unit 20 are characteristic, and conventionally known steps can be used for the other steps. Therefore, in the following, only the characteristic portion of this embodiment will be described, and the description of other steps will be omitted.

本実施例の熱処理炉10の製造方法は、搬送ローラ52を軸方向に沿って見たときに搬送ローラ52の反りが最も大きくなる部位の反り方向を測定する測定工程と、測定した反り方向が周期的に変化するように搬送ローラ52を設置する設置工程を備えている。 The method for manufacturing the heat treatment furnace 10 of this embodiment includes a measurement step of measuring the warp direction of the portion where the warp of the transport roller 52 is the largest when the transport roller 52 is viewed along the axial direction, and the measured warp direction. It is provided with an installation process for installing the transport roller 52 so as to change periodically.

まず、測定工程によって、複数の搬送ローラ52のそれぞれについて、搬送ローラ52の反りが最も大きくなる部位の反り方向が測定される。測定工程は、以下の手順で実施される。まず、搬送ローラ52の両端を回転可能に支持する。例えば、搬送ローラ52の両端を2つのV字ブロックを用いて支持する。 First, by the measuring step, the warp direction of the portion where the warp of the transport roller 52 is the largest is measured for each of the plurality of transport rollers 52. The measurement step is carried out in the following procedure. First, both ends of the transport roller 52 are rotatably supported. For example, both ends of the transport roller 52 are supported by using two V-shaped blocks.

次いで、搬送ローラ52の軸方向の各部位A〜Eの反りの大きさを、測定器、例えば、ダイヤルゲージを用いて測定する。具体的には、部位Aにダイヤルゲージを設置し、搬送ローラ52を軸線周り一回転させ、搬送ローラ52が最も上方に位置するときと搬送ローラ52に反りがない状態との差(以下、反りの大きさともいう)を測定する。部位B〜Eについても、これと同様の測定を行う。各部位A〜Eの反りの大きさを測定したら、5つの部位A〜Eの測定結果を比較し、反りの大きさが最も大きい部位を判定する。そして、反りの大きさが最も大きい部位の反り方向を示すマーク54(図4参照)を、搬送ローラ52の軸方向の端面に付す。同様にして、熱処理部20に設置される全ての搬送ローラ52の反り方向を測定し、各搬送ローラ52の軸方向の端面に搬送ローラ52の反り方向を示すマーク54を付す。 Next, the magnitude of the warp of each portion A to E in the axial direction of the transport roller 52 is measured using a measuring device, for example, a dial gauge. Specifically, a dial gauge is installed at the portion A, the transport roller 52 is rotated once around the axis, and the difference between when the transport roller 52 is located at the uppermost position and when the transport roller 52 is not warped (hereinafter, warpage). (Also called the size of) is measured. The same measurement is performed for the parts B to E. After measuring the amount of warpage of each part A to E, the measurement results of the five parts A to E are compared to determine the part having the largest amount of warpage. Then, a mark 54 (see FIG. 4) indicating the warp direction of the portion having the largest warp is attached to the end face in the axial direction of the transport roller 52. Similarly, the warp directions of all the transport rollers 52 installed in the heat treatment section 20 are measured, and marks 54 indicating the warp directions of the transport rollers 52 are attached to the axial end faces of the transport rollers 52.

マーク54が付された搬送ローラ52は、設置工程によって熱処理部20に設置される。搬送ローラ52を熱処理炉10に設置する際には、上記の測定工程において各搬送ローラ52に付されたマーク54に基づいて、各搬送ローラ52の反り方向を調整しながら設置する。なお、本実施例では、各搬送ローラ52の反り方向を調整しながら設置する点に特徴があり、設置工程のその他の手順については、従来公知の方法を用いることができるため、設置工程のその他の手順についての詳細な説明は省略する。 The transport roller 52 with the mark 54 is installed in the heat treatment unit 20 by the installation process. When the transfer roller 52 is installed in the heat treatment furnace 10, the transfer roller 52 is installed while adjusting the warp direction of each transfer roller 52 based on the mark 54 attached to each transfer roller 52 in the above measurement step. The present embodiment is characterized in that each transport roller 52 is installed while adjusting the warp direction, and a conventionally known method can be used for other procedures in the installation process. The detailed description of the procedure of is omitted.

上述したように、熱処理部20に設置される搬送ローラ52は反り方向に基づいて設置されるが、その設置態様は搬送ローラ52に被処理物12を載置した際に生じる搬送ローラ52の撓み量によって異なる。このため、熱処理される被処理物12の重量によって、各搬送ローラ52を設置する際に調整される搬送ローラ52の反り方向が異なる。具体的には、撓み量が大きい場合には、搬送ローラ52の反り方向を、隣接する搬送ローラ52の反り方向と180°ずらして各搬送ローラ52を設置する(図4(b))。また、撓み量が小さい場合には、搬送ローラ52の反り方向を、隣接する搬送ローラ52の反り方向と90°ずらして各搬送ローラ52を設置する(図4(a))。 As described above, the transport roller 52 installed in the heat treatment unit 20 is installed based on the warp direction, but the installation mode is the deflection of the transport roller 52 that occurs when the object 12 to be processed is placed on the transport roller 52. It depends on the amount. Therefore, the warp direction of the transport roller 52 adjusted when each transport roller 52 is installed differs depending on the weight of the object to be heat-treated 12. Specifically, when the amount of bending is large, each transport roller 52 is installed by shifting the warp direction of the transport rollers 52 by 180 ° from the warp direction of the adjacent transport rollers 52 (FIG. 4B). When the amount of bending is small, each transport roller 52 is installed by shifting the warp direction of the transport rollers 52 by 90 ° from the warp direction of the adjacent transport rollers 52 (FIG. 4A).

次に、被処理物12を熱処理する際の熱処理炉10の動作について説明する。被処理物12を熱処理するためには、まず、ヒータ30、32を作動させて、空間24の雰囲気温度を設定した温度とする。次いで、3つの被処理物12を、熱処理炉10の外部から搬入部34に設置される搬送ローラ52上にそれぞれ移動させる。このとき、被処理物12は第2方向に3つ並べて載置される。次いで、駆動装置60を作動させて、搬入部34から開口26を通って、第2方向に並べた3つの被処理物12を熱処理部20の空間24内に搬送する。空間24内に搬送された被処理物12は、空間24内を開口26から開口28まで搬送される。これによって、被処理物12は熱処理される。そして、熱処理された被処理物12は、開口28を通って搬出部40に搬送され、搬出部40から運び出される。 Next, the operation of the heat treatment furnace 10 when the object 12 to be treated is heat-treated will be described. In order to heat-treat the object 12 to be processed, first, the heaters 30 and 32 are operated to set the ambient temperature of the space 24 to a set temperature. Next, the three objects to be processed 12 are moved from the outside of the heat treatment furnace 10 onto the transfer rollers 52 installed in the carry-in section 34, respectively. At this time, three objects 12 to be processed are placed side by side in the second direction. Next, the drive device 60 is operated to convey the three objects 12 to be processed arranged in the second direction from the carry-in portion 34 through the opening 26 into the space 24 of the heat treatment portion 20. The object 12 to be transported in the space 24 is transported in the space 24 from the opening 26 to the opening 28. As a result, the object 12 to be treated is heat-treated. Then, the heat-treated object 12 is conveyed to the carry-out section 40 through the opening 28, and is carried out from the carry-out section 40.

被処理物12は、搬入部34から熱処理部20を通って搬出部40まで、第2方向に複数(本実施例では3つ)並べた状態で搬送される。しかしながら、熱処理部20の入口において複数の被処理物12を搬送方向に揃えた状態で搬入しても、熱処理部20を搬送される間に複数の被処理物12のそれぞれの搬送速度にずれが生じ、熱処理部20から搬出される際には、複数の被処理物12が搬送方向にずれた状態となる。このずれは、搬送ローラ52の製造時に生じる反り等の歪みや、被処理物12の重量によって搬送ローラ52に被処理物12を載置した際に搬送ローラ52に生じる撓みによって生じる。経験的に、特に、搬送ローラ52の「撓み」が搬送ローラ52の「反り」より大きい場合、搬送ローラ52の外側(端部側)に載置される被処理物12の搬送速度が、搬送ローラ52の内側(中央)に載置される被処理物12の搬送速度より速くなり易いことがわかっている。これは、以下のような理由によって生じると考えられる。 The object 12 to be processed is transported from the carry-in section 34 through the heat treatment section 20 to the carry-out section 40 in a state where a plurality (three in this embodiment) are arranged side by side in the second direction. However, even if the plurality of objects 12 to be processed are carried in at the inlet of the heat treatment unit 20 in a state of being aligned in the transport direction, the transfer speeds of the plurality of objects 12 to be processed are deviated while being transported by the heat treatment unit 20. When it is generated and carried out from the heat treatment unit 20, the plurality of objects 12 to be processed are in a state of being displaced in the transport direction. This deviation is caused by distortion such as warpage that occurs during the manufacture of the transfer roller 52, and bending that occurs in the transfer roller 52 when the object to be processed 12 is placed on the transfer roller 52 due to the weight of the object to be processed 12. Empirically, in particular, when the "deflection" of the transfer roller 52 is larger than the "warp" of the transfer roller 52, the transfer speed of the object to be processed 12 placed on the outside (end side) of the transfer roller 52 is transfer. It is known that the transfer speed of the object to be processed 12 placed on the inside (center) of the roller 52 is likely to be higher. This is thought to occur for the following reasons.

搬送ローラ52は、製造時に反りや歪みが生じるため、熱処理炉10に設置される全ての搬送ローラ52を完全に同一の形状にすることができない。搬送ローラ52の「撓み」が搬送ローラ52の「反り」より大きい場合、搬送ローラ52の「撓み」によって「反り」の影響はキャンセルされるが、搬送ローラ52の径寸法のバラツキの影響により、搬送ローラ52の外側(端部側)に載置される被処理物12の搬送速度が、搬送ローラ52の内側(中央)に載置される被処理物12の搬送速度より速くなり易い。 Since the transfer roller 52 is warped or distorted during manufacturing, all the transfer rollers 52 installed in the heat treatment furnace 10 cannot have exactly the same shape. When the "deflection" of the transfer roller 52 is larger than the "warp" of the transfer roller 52, the effect of the "warp" is canceled by the "deflection" of the transfer roller 52, but due to the influence of the variation in the diameter dimension of the transfer roller 52, The transport speed of the object to be processed 12 placed on the outside (end side) of the transfer roller 52 tends to be faster than the transfer speed of the object to be processed 12 placed on the inside (center) of the transfer roller 52.

図5を用いて説明する。図5は、6本の搬送ローラ52に載置される被処理物12を模式的に示している。6本の搬送ローラ52は、搬送方向の上流から下流に(+X方向に)搬送ローラ52a〜52fの順に並んでいる。また、6本の搬送ローラ52a〜52fは、搬送ローラ52a、52c、52eの径寸法が大きく、搬送ローラ52b、52d、52fの径寸法が小さくなっている。なお、図5では径寸法の相違を明確にするため、搬送ローラ52a、52c、52eと搬送ローラ52b、52d、52fの径寸法の相違を強調して表示している。 This will be described with reference to FIG. FIG. 5 schematically shows an object 12 to be processed, which is placed on the six transfer rollers 52. The six transfer rollers 52 are arranged in the order of transfer rollers 52a to 52f from upstream to downstream (in the + X direction) in the transfer direction. Further, in the six transport rollers 52a to 52f, the diameter dimensions of the transport rollers 52a, 52c and 52e are large, and the diameter dimensions of the transport rollers 52b, 52d and 52f are small. In FIG. 5, in order to clarify the difference in diameter, the difference in diameter between the transport rollers 52a, 52c, 52e and the transport rollers 52b, 52d, 52f is emphasized.

ここで、搬送ローラ52は両端支持されているため、その「撓み」は中央で大きく、端部で小さくなる。搬送ローラ52の「撓み」が小さければ、被処理物12は径寸法の大きな搬送ローラ52のみに接触することになる。一方、搬送ローラ52の「撓み」が大きければ、被処理物12は径寸法の大きな搬送ローラ52を大きく撓ませ、その結果、径寸法の小さな搬送ローラ52にも接触することになる。 Here, since the transport roller 52 is supported at both ends, its "deflection" is large at the center and small at the ends. If the "deflection" of the transfer roller 52 is small, the object to be processed 12 will come into contact with only the transfer roller 52 having a large diameter. On the other hand, if the "deflection" of the transfer roller 52 is large, the object 12 to be processed greatly bends the transfer roller 52 having a large diameter, and as a result, comes into contact with the transfer roller 52 having a small diameter.

図5(a)に示すように、搬送ローラ52の中央付近では搬送ローラ52a、52c、52eの撓みが大きいため、被処理物12bが他の搬送ローラ52b、52d、52fにも接触した状態となる。すなわち、被処理物12bは全ての搬送ローラ52a〜52fと接触することになる。一方、図5(b)に示すように、搬送ローラ52の端部では搬送ローラ52a、52c、52eの撓みが小さいため、被処理物12a、12cが搬送ローラ52b、52d、52fとは接触しない状態が生じる。したがって、搬送ローラ52の端部では、回転半径の大きな搬送ローラ52a、52c、52eのみによって被処理物12a,12cが搬送される状態となり、その結果、被処理物12a,12cの搬送速度が速くなる。一方、図5(a)に示す状態では、搬送ローラ52a、52c、52eの撓みが大きいため、被処理物12bが全ての搬送ローラ52a〜52fに接触し、搬送ローラ52a〜52fの径寸法の影響を低減する。その結果、搬送ローラ52の内側に載置される被処理物12の搬送速度は、外側(端部側)に載置される被処理物12の搬送速度より遅くなる。 As shown in FIG. 5A, since the deflection of the transfer rollers 52a, 52c, 52e is large near the center of the transfer roller 52, the object to be processed 12b is in contact with the other transfer rollers 52b, 52d, 52f. Become. That is, the object to be processed 12b comes into contact with all the transport rollers 52a to 52f. On the other hand, as shown in FIG. 5B, since the deflection of the transfer rollers 52a, 52c, 52e is small at the end of the transfer roller 52, the objects to be processed 12a, 12c do not come into contact with the transfer rollers 52b, 52d, 52f. A condition arises. Therefore, at the end of the transfer roller 52, the objects to be processed 12a, 12c are conveyed only by the transfer rollers 52a, 52c, 52e having a large turning radius, and as a result, the transfer speed of the objects to be processed 12a, 12c is high. Become. On the other hand, in the state shown in FIG. 5A, since the transfer rollers 52a, 52c, and 52e are greatly bent, the object to be processed 12b comes into contact with all the transfer rollers 52a to 52f, and the diameter dimensions of the transfer rollers 52a to 52f are large. Reduce the impact. As a result, the transport speed of the object to be processed 12 placed inside the transport roller 52 is slower than the transport speed of the object 12 to be processed placed on the outside (end side).

このように、被処理物12は、搬送ローラ52の反り、撓み、径寸法のバラツキによって搬送速度が変わる。このため、第2方向に並べた複数の被処理物12は、被処理物12が熱処理部20を搬送される間に搬送方向にずれることがある。特に、上述したように、本実施例の熱処理炉10は熱処理部20の搬送方向の寸法が比較的長いため、第2方向に並べて搬送される複数の被処理物12は搬送方向にずれ易い。搬出部40で複数の被処理物12が第2方向に揃っていないと、熱処理炉10の外部へ複数の被処理物12を運び出し難くなる。そこで、第2方向に並べて載置した複数の被処理物12a〜12cの熱処理部20での搬送速度の差が小さくなるように、搬送ローラ52の反り方向を調整する。以下に、熱処理部20に設置される搬送ローラ52の反り方向の調整について、さらに詳細に説明する。 In this way, the transport speed of the object 12 to be processed changes depending on the warp, deflection, and variation in diameter of the transport roller 52. Therefore, the plurality of objects to be processed 12 arranged in the second direction may be displaced in the conveying direction while the objects to be processed 12 are conveyed through the heat treatment unit 20. In particular, as described above, since the heat treatment furnace 10 of this embodiment has a relatively long dimension in the transport direction of the heat treatment section 20, the plurality of objects 12 to be transported side by side in the second direction are likely to shift in the transport direction. If the plurality of objects 12 to be processed are not aligned in the second direction in the carry-out section 40, it becomes difficult to carry the plurality of objects 12 to be processed to the outside of the heat treatment furnace 10. Therefore, the warp direction of the transport roller 52 is adjusted so that the difference in transport speed between the heat-treated portions 20 of the plurality of objects 12a to 12c placed side by side in the second direction becomes small. The adjustment of the warp direction of the transport roller 52 installed in the heat treatment unit 20 will be described in more detail below.

上述したように、搬送ローラ52の「撓み」が搬送ローラ52の「反り」より大きい場合、搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度が、搬送ローラ52の内側に載置される被処理物12bの搬送速度より速くなり易い。これは、図5を参照して既に説明したように、搬送ローラ52の内側に載置される被処理物12bは、搬送ローラ52の反りの影響も搬送ローラ52の径寸法のバラツキの影響も受け難い一方で、搬送ローラ52の外側に載置される被処理物12a、12cは、搬送ローラ52の径寸法のバラツキの影響を受け易いためと考えられる。 As described above, when the "deflection" of the transfer roller 52 is larger than the "warp" of the transfer roller 52, the transfer speed of the objects to be processed 12a and 12c placed on the outside of the transfer roller 52 is the inside of the transfer roller 52. It tends to be faster than the transport speed of the object to be processed 12b placed on the surface. This is because, as already described with reference to FIG. 5, the object to be processed 12b placed inside the transport roller 52 is affected by the warp of the transport roller 52 and the influence of the variation in the diameter dimension of the transport roller 52. On the other hand, it is considered that the objects to be processed 12a and 12c placed on the outside of the transport roller 52 are easily affected by the variation in the diameter dimension of the transport roller 52.

被処理物12の重量が重い場合には、搬送ローラ52の中央付近において搬送ローラ52の撓みが大きくなるため、搬送ローラ52の内側に載置される被処理物12bは6本の搬送ローラ52の全てと接触する。このため、被処理物12bは、搬送ローラ52の反り方向に関わらず、常に図5(a)に示すような状態となる。したがって、被処理物12bは、搬送ローラ52の反りの影響も搬送ローラ52の径寸法のバラツキの影響も受け難くなり、被処理物12bの搬送速度を調整することは難しい。このため、搬送ローラ52の内側に載置される被処理物12bの搬送速度と、搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度の差を小さくするためには、搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度を調整する必要がある。すなわち、被処理物12a、12cの搬送速度が速くなることを抑制する必要がある。 When the weight of the object to be processed 12 is heavy, the deflection of the transfer roller 52 becomes large near the center of the transfer roller 52, so that the object to be processed 12b placed inside the transfer roller 52 has six transfer rollers 52. Contact all of. Therefore, the object to be processed 12b is always in the state shown in FIG. 5A regardless of the warp direction of the transport roller 52. Therefore, the object to be processed 12b is less susceptible to the influence of the warp of the transfer roller 52 and the variation in the diameter dimension of the transfer roller 52, and it is difficult to adjust the transfer speed of the object to be processed 12b. Therefore, in order to reduce the difference between the transfer speed of the object to be processed 12b placed inside the transfer roller 52 and the transfer speed of the objects 12a and 12c to be processed placed outside the transfer roller 52, it is necessary to reduce the difference. It is necessary to adjust the transport speed of the objects to be processed 12a and 12c placed on the outside of the transport roller 52. That is, it is necessary to suppress the increase in the transport speed of the objects to be processed 12a and 12c.

搬送ローラ52の端部では搬送ローラ52の撓みが小さくなるため、被処理物12a、12cは、6本の搬送ローラ52の全てとは接触しない状態になり易い。例えば、図6に示すように、反りによって最も上方に位置する搬送ローラ52(図6では仮想線で示す搬送ローラ52)は撓みによって下方に押し付けられるが、反りによって最も下方に位置する搬送ローラ52の位置まで搬送ローラ52が撓むことはほとんどない。このため、反りによって最も下方に位置する搬送ローラ52には被処理物12が接触し難い。しかしながら、図6(a)〜図6(d)に示すように、隣接する搬送ローラ52の反り方向を90°ずつずらして配置した場合には、搬送ローラ52を90°ずつ回転させた4つのいずれの場合においても、被処理物12a、12cは、6本の搬送ローラ52のうち比較的多くの搬送ローラ52(図6の例では、4本又は5本の搬送ローラ52)と接触する。このため、被処理物12が比較的に多くの搬送ローラ52と接触すると、搬送ローラ52の径寸法のバラツキの影響が強くなる。その結果、隣接する搬送ローラ52の反り方向を90°ずつずらして配置した場合は、搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度は速くなり易くなる。 Since the deflection of the transport roller 52 is small at the end of the transport roller 52, the objects 12a and 12c to be processed tend not to come into contact with all of the six transport rollers 52. For example, as shown in FIG. 6, the transport roller 52 located at the uppermost position due to the warp (the transport roller 52 shown by the virtual line in FIG. 6) is pressed downward by the deflection, but the transport roller 52 located at the lowermost position due to the warp. The transport roller 52 hardly bends to the position of. Therefore, it is difficult for the object to be processed 12 to come into contact with the transport roller 52 located at the lowermost position due to the warp. However, as shown in FIGS. 6A to 6D, when the adjacent transport rollers 52 are arranged with the warp directions shifted by 90 °, the four transport rollers 52 are rotated by 90 °. In any case, the objects to be processed 12a and 12c come into contact with a relatively large number of the transport rollers 52 (4 or 5 transport rollers 52 in the example of FIG. 6) among the 6 transport rollers 52. Therefore, when the object 12 to be processed comes into contact with a relatively large number of transport rollers 52, the influence of the variation in the diameter dimension of the transport rollers 52 becomes strong. As a result, when the warp directions of the adjacent transport rollers 52 are shifted by 90 °, the transport speeds of the objects to be processed 12a and 12c placed on the outside of the transport rollers 52 tend to increase.

一方、図7(a)〜図7(d)に示すように、隣接する搬送ローラ52の反り方向を180°ずつずらして配置した場合には、搬送ローラ52を90°ずつ回転させた4つの場合のうちの半分(図7(a)と図7(c)のとき)では、被処理物12a、12cは、6本の搬送ローラ52のうち比較的に少ない数の搬送ローラ52(図7では3本の搬送ローラ52)と接触する。このため、図7(a)と図7(c)のときには、被処理物12a、12cが接触する搬送ローラ52の数が比較的少なくなり、搬送態様が変化する。本発明者の実験によると、図6に示す場合と比較して図7に示す場合のほうが、搬送ローラ52の外側に載置される被処理物12a、12cが速く搬送されることが抑制され、搬送ローラ52の内側に載置される被処理物12の搬送速度と、搬送ローラ52の外側に載置される被処理物12の搬送速度の差を小さくできることが確認されている。 On the other hand, as shown in FIGS. 7 (a) to 7 (d), when the warp directions of the adjacent transport rollers 52 are shifted by 180 °, the four transport rollers 52 are rotated by 90 °. In half of the cases (in the case of FIGS. 7 (a) and 7 (c)), the objects to be processed 12a and 12c have a relatively small number of transfer rollers 52 (FIG. 7) out of the six transfer rollers 52. Then, it comes into contact with the three transport rollers 52). Therefore, in FIGS. 7 (a) and 7 (c), the number of transport rollers 52 that the objects to be processed 12a and 12c come into contact with is relatively small, and the transport mode changes. According to the experiment of the present inventor, it is suppressed that the objects to be processed 12a and 12c placed on the outside of the transport roller 52 are transported faster in the case shown in FIG. 7 than in the case shown in FIG. It has been confirmed that the difference between the transfer speed of the object to be processed 12 placed inside the transfer roller 52 and the transfer speed of the object to be processed 12 placed outside the transfer roller 52 can be reduced.

また、隣接する搬送ローラ52の反り方向を一致させると、6本全ての搬送ローラ52に接触し易くなる。このため、図6に示す場合と同様に、搬送ローラ52の径寸法のバラツキの影響を受け易くなり、搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度は速くなり易くなる。 Further, if the warp directions of the adjacent transport rollers 52 are matched, it becomes easy to contact all six transport rollers 52. Therefore, as in the case shown in FIG. 6, it is easily affected by the variation in the diameter dimension of the transport roller 52, and the transport speed of the objects to be processed 12a and 12c placed on the outside of the transport roller 52 tends to be high. Become.

上記のような理由により、搬送ローラ52の「撓み」が搬送ローラ52の「反り」より大きく、かつ、搬送ローラ52の撓み量が大きい場合、隣接する搬送ローラ52の反り方向を180°ずつずらして配置することによって、第2方向に並べて載置した複数の被処理物12a〜12cの搬送速度の差を小さくすることができると考えられる。 For the above reasons, when the "deflection" of the transfer roller 52 is larger than the "warp" of the transfer roller 52 and the amount of deflection of the transfer roller 52 is large, the warp direction of the adjacent transfer rollers 52 is shifted by 180 °. It is considered that the difference in transport speed between the plurality of objects to be processed 12a to 12c placed side by side in the second direction can be reduced by arranging them.

さらに、搬送ローラ52の「撓み」が搬送ローラ52の「反り」より大きいものの、被処理物12の重量が比較的軽い場合の搬送ローラ52の反り方向の調整について説明する。被処理物12の重量が比較的軽い場合には、搬送ローラ52の撓み量が小さくなるため、搬送ローラ52の中央に配置された被処理物12bは比較的に多くの本数の搬送ローラ52と接触するが、搬送ローラ52の端部に配置された被処理物12a、12cは比較的に少ない本数の搬送ローラ52と接触することとなる。このため、搬送ローラ52の中央に配置された被処理物12bは、搬送ローラ52の「反り」及び「径寸法のバラツキ」の影響が共に低減され、その搬送速度を調整することは難しくなる。一方、搬送ローラ52の端部側に配置された被処理物12a、12cは、径寸法のバラツキの影響が強く出ることとなる。このため、搬送ローラ52の反り方向を調整しない場合、搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度は、搬送ローラ52の内側に載置される被処理物12bの搬送速度よりも速くなる傾向を有することとなる。したがって、被処理物12a〜12cの搬送速度の差を小さくするためには、被処理物12bの搬送速度を速くする必要がある。 Further, the adjustment of the warp direction of the transport roller 52 when the "deflection" of the transport roller 52 is larger than the "warp" of the transport roller 52 but the weight of the object to be processed 12 is relatively light will be described. When the weight of the object to be processed 12 is relatively light, the amount of deflection of the transfer roller 52 is small, so that the object to be processed 12b arranged at the center of the transfer roller 52 has a relatively large number of transfer rollers 52. Although they come into contact with each other, the objects to be processed 12a and 12c arranged at the ends of the transport rollers 52 come into contact with a relatively small number of transport rollers 52. Therefore, the object 12b to be processed, which is arranged in the center of the transport roller 52, is less affected by both the “warp” and the “variation in diameter dimension” of the transport roller 52, and it becomes difficult to adjust the transport speed. On the other hand, the objects to be processed 12a and 12c arranged on the end side of the transport roller 52 are strongly affected by the variation in diameter and dimension. Therefore, when the warp direction of the transfer roller 52 is not adjusted, the transfer speed of the objects to be processed 12a and 12c placed on the outside of the transfer rollers 52 is the transfer speed of the objects to be processed 12b placed on the inside of the transfer rollers 52. It tends to be faster than the transport speed. Therefore, in order to reduce the difference in the transport speeds of the objects to be processed 12a to 12c, it is necessary to increase the transport speed of the objects to be processed 12b.

例えば、隣接する搬送ローラ52の反り方向を90°ずつずらして配置した場合、反りによって搬送ローラ52が最も下方に位置するときには、その搬送ローラ52は中央の被処理物12bに接触し難くなる。すなわち、図6に示す状態と同様の状態となり、全ての搬送ローラ52が被処理物12と接触する場合と比較して、搬送ローラ52の回転半径が大きくなる頻度が高くなる。したがって、隣接する搬送ローラ52の反り方向を90°ずつずらして配置すると、被処理物12bの搬送速度は速くなり易くなる。同様に、隣接する搬送ローラ52の反り方向を180°ずつずらして配置すると、図7に示す状態と同様の状態となる。このため、図6に示す状態と比較して、被処理物12bが速く搬送されることが抑制される。 For example, when the warp directions of the adjacent transport rollers 52 are shifted by 90 ° and the transport rollers 52 are positioned at the lowermost position due to the warp, the transport rollers 52 are less likely to come into contact with the central object to be processed 12b. That is, the state is similar to that shown in FIG. 6, and the frequency of increase in the radius of gyration of the transfer roller 52 increases as compared with the case where all the transfer rollers 52 come into contact with the object 12 to be processed. Therefore, if the warp directions of the adjacent transport rollers 52 are shifted by 90 °, the transport speed of the object to be processed 12b tends to increase. Similarly, when the warp directions of the adjacent transport rollers 52 are shifted by 180 °, the state similar to that shown in FIG. 7 is obtained. Therefore, it is suppressed that the object to be processed 12b is conveyed faster than the state shown in FIG.

なお、隣接する搬送ローラ52の反り方向を一致させた場合、隣接する搬送ローラ52の反り方向を180°ずつずらして配置した場合と比較して、搬送ローラ52の径寸法のバラツキの影響を受け易くなるため、被処理物12bの搬送速度は速くなり易くなる。しかしながら、搬送ローラ52の撓みがあるため、搬送ローラ52の反り方向を90°ずつずらして配置した場合と比較して、被処理物12bはより多くの本数の搬送ローラ52と接触し易くなる。したがって、隣接する搬送ローラ52の反り方向を一致させた場合より隣接する搬送ローラ52の反り方向を90°ずつずらして配置した場合のほうが、搬送ローラ52の内側に載置される被処理物12bの搬送速度は速くなり易くなる。 When the warp directions of the adjacent transport rollers 52 are matched, the warp directions of the adjacent transport rollers 52 are affected by the variation in the diameter dimension of the transport rollers 52 as compared with the case where the warp directions are shifted by 180 °. Therefore, the transport speed of the object to be processed 12b tends to be high. However, since the transport rollers 52 are bent, the object to be processed 12b is more likely to come into contact with a larger number of transport rollers 52 as compared with the case where the transport rollers 52 are arranged with the warp directions shifted by 90 °. Therefore, the object to be processed 12b placed inside the transport roller 52 is arranged with the warp directions of the adjacent transport rollers 52 shifted by 90 ° as compared with the case where the warp directions of the adjacent transport rollers 52 are matched. The transport speed of the is likely to increase.

上記のような理由により、搬送ローラ52の「撓み」が搬送ローラ52の「反り」より大きく、かつ、搬送ローラ52の撓み量が小さい場合には、隣接する搬送ローラ52の反り方向を90°ずつずらして配置することによって、第2方向に並べて載置した複数の被処理物12a〜12cの搬送速度の差を小さくすることができると考えられる。 For the above reasons, when the "deflection" of the transfer roller 52 is larger than the "warp" of the transfer roller 52 and the amount of deflection of the transfer roller 52 is small, the warp direction of the adjacent transfer rollers 52 is 90 °. It is considered that the difference in the transport speeds of the plurality of objects to be processed 12a to 12c placed side by side in the second direction can be reduced by arranging them so as to be staggered.

本実施例では、搬送ローラ52に被処理物12を載置した際に生じる搬送ローラ52の撓み量に基づいて、搬送ローラ52の反り方向が調整される。これによって、搬送ローラ52の内側に載置される被処理物12bの搬送速度と、搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度の差を小さくすることができる。このため、熱処理炉10内に第2方向に並べて運び込んだ複数の被処理物12が搬出部40に搬出される際の搬送方向のずれを小さくすることができ、熱処理炉10から運び出し易くすることができる。 In this embodiment, the warp direction of the transport roller 52 is adjusted based on the amount of deflection of the transport roller 52 that occurs when the object 12 to be processed is placed on the transport roller 52. As a result, the difference between the transfer speed of the object to be processed 12b placed inside the transfer roller 52 and the transfer speed of the objects 12a and 12c to be processed placed outside the transfer roller 52 can be reduced. Therefore, it is possible to reduce the deviation in the transport direction when the plurality of objects 12 to be processed, which are carried in the heat treatment furnace 10 side by side in the second direction, are carried out to the carry-out portion 40, and can be easily carried out from the heat treatment furnace 10. Can be done.

なお、本実施例では、搬送ローラ52の「撓み」が搬送ローラ52の「反り」より大きい場合に、隣接する搬送ローラ52の反り方向をずらして配置しているが、このような構成に限定されない。搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度が搬送ローラ52の内側に載置される被処理物12bの搬送速度に対して速くなることを抑制できればよく、複数の搬送ローラ52の反り方向が周期的に変化していればよい。例えば、隣接する2本の搬送ローラ52を一単位として、その反り方向を周期的に変化させてもよい。すなわち、隣接する2本の搬送ローラ52の反り方向が一致しており、かつ、その反り方向が一致する2本の搬送ローラ52と隣接する2本の搬送ローラ52の反り方向が90°又は180°ずれていてもよい。また、1つの被処理物12を載置するための搬送ローラ52の数が多い場合には、隣接する3本以上の搬送ローラ52の反り方向が一致しており、かつ、反り方向が一致する3本以上の搬送ローラ52と隣接する3本以上の搬送ローラ52の反り方向が90°又は180°ずれていてもよい。 In this embodiment, when the "deflection" of the transfer roller 52 is larger than the "warp" of the transfer roller 52, the adjacent transfer rollers 52 are arranged by shifting the warp direction, but the configuration is limited to this. Not done. It suffices if it is possible to prevent the transfer speed of the objects to be processed 12a and 12c placed on the outside of the transfer roller 52 from becoming faster than the transfer speed of the objects to be processed 12b placed on the inside of the transfer rollers 52. It suffices that the warp direction of the transport roller 52 changes periodically. For example, the warp direction may be periodically changed by using two adjacent transport rollers 52 as one unit. That is, the warpage directions of the two adjacent transport rollers 52 are the same, and the warp directions of the two transport rollers 52 and the adjacent two transport rollers 52 are 90 ° or 180. It may be off by °. Further, when the number of transport rollers 52 for mounting one object 12 to be processed is large, the warp directions of three or more adjacent transport rollers 52 are the same, and the warp directions are the same. The warp direction of the three or more transfer rollers 52 and the adjacent three or more transfer rollers 52 may be deviated by 90 ° or 180 °.

また、本実施例では、搬送ローラ52の「撓み」が搬送ローラ52の「反り」より大きい場合に、隣接する搬送ローラ52を90°又は180°ずらして配置しているが、このような構成に限定されない。搬送ローラ52の外側に載置される被処理物12a、12cの搬送速度が搬送ローラ52の内側に載置される被処理物12bの搬送速度に対して速くなることを抑制できればよく、隣接する搬送ローラ52の反り方向をずらす角度は上記の実施例に限定されない。例えば、隣接する搬送ローラ52の反り方向を45°、72°又は120°ずつずらしてもよい。 Further, in the present embodiment, when the "deflection" of the transfer roller 52 is larger than the "warp" of the transfer roller 52, the adjacent transfer rollers 52 are arranged so as to be offset by 90 ° or 180 °. Not limited to. It suffices if it is possible to prevent the transfer speed of the objects to be processed 12a and 12c placed on the outside of the transfer roller 52 from becoming faster than the transfer speed of the objects to be processed 12b placed on the inside of the transfer rollers 52, and they are adjacent to each other. The angle at which the warp direction of the transport roller 52 is shifted is not limited to the above embodiment. For example, the warp direction of the adjacent transfer rollers 52 may be shifted by 45 °, 72 °, or 120 °.

また、本実施例では、熱処理部20に設置される全ての搬送ローラ52の反り方向を調整しているが、このような構成に限定されない。第2方向に並べて載置した複数の被処理物12の熱処理部20での搬送速度の差が小さくなるように、搬送ローラ52の反り方向が調整されていればよく、例えば、熱処理部20に設置される搬送ローラ52のうちの一部において、搬送ローラ52の反り方向が調整されていてもよい。 Further, in this embodiment, the warp directions of all the transport rollers 52 installed in the heat treatment unit 20 are adjusted, but the configuration is not limited to this. The warp direction of the transport roller 52 may be adjusted so that the difference in transport speed between the heat-treated portions 20 of the plurality of objects 12 placed side by side in the second direction becomes small. For example, the heat-treated portion 20 may be used. The warp direction of the transport roller 52 may be adjusted in a part of the transport rollers 52 to be installed.

以上、本明細書に開示の技術の具体例を詳細に説明したが、これらは例示に過ぎず、請求の範囲を限定するものではない。請求の範囲に記載の技術には、以上に例示した具体例を様々に変形、変更したものが含まれる。また、本明細書または図面に説明した技術要素は、単独であるいは各種の組合せによって技術的有用性を発揮するものであり、出願時請求項記載の組合せに限定されるものではない。 Although specific examples of the techniques disclosed in the present specification have been described in detail above, these are merely examples and do not limit the scope of claims. The techniques described in the claims include various modifications and modifications of the specific examples illustrated above. In addition, the technical elements described in the present specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing.

Claims (6)

被処理物を熱処理する熱処理炉であって、
前記被処理物を熱処理する空間を備える熱処理部と、
前記熱処理部に配置され、前記被処理物を搬送する複数の搬送ローラと、を備えており、
前記熱処理部の所定範囲に設置される複数の搬送ローラは、当該搬送ローラを軸方向に沿って見たときの当該搬送ローラの反りが最も大きくなる部位の反り方向が周期的に変化している、熱処理炉。
A heat treatment furnace that heat-treats an object to be processed.
A heat treatment unit provided with a space for heat-treating the object to be treated,
It is provided with a plurality of transport rollers arranged in the heat treatment section and transport the object to be processed.
In the plurality of transport rollers installed in the predetermined range of the heat treatment section, the warp direction of the portion where the warp of the transport roller is the largest when the transport roller is viewed along the axial direction is periodically changed. , Heat treatment furnace.
前記熱処理部の所定範囲に設置される複数の搬送ローラは、所定数の搬送ローラによって1周期が構成されており、
前記1周期を構成する各搬送ローラの反り方向は、当該搬送ローラと隣接する搬送ローラの反り方向に対して所定角度ずれている、請求項1に記載の熱処理炉。
The plurality of transfer rollers installed in the predetermined range of the heat treatment section are composed of a predetermined number of transfer rollers for one cycle.
The heat treatment furnace according to claim 1, wherein the warping direction of each transport roller constituting the one cycle is deviated by a predetermined angle with respect to the warp direction of the transport roller adjacent to the transport roller.
前記所定範囲に設置される複数の搬送ローラを同時に駆動可能な駆動装置をさらに備えており、
前記駆動装置は、前記搬送ローラの前記反り方向が隣接する搬送ローラの前記反り方向と前記所定角度ずれた状態を維持して、前記所定範囲に設置される複数の搬送ローラを駆動する、請求項2に記載の熱処理炉。
Further, it is further provided with a drive device capable of simultaneously driving a plurality of transfer rollers installed in the predetermined range.
The drive device claims to drive a plurality of transfer rollers installed in the predetermined range while maintaining a state in which the warp direction of the transfer roller deviates from the warp direction of adjacent transfer rollers by the predetermined angle. 2. The heat treatment furnace according to 2.
前記所定角度は、90度である、請求項2又は3に記載の熱処理炉。 The heat treatment furnace according to claim 2 or 3, wherein the predetermined angle is 90 degrees. 前記所定角度は、180度である、請求項2又は3に記載の熱処理炉。 The heat treatment furnace according to claim 2 or 3, wherein the predetermined angle is 180 degrees. 被処理物を熱処理する空間を備える熱処理部と、
前記熱処理部に配置され、前記被処理物を搬送する複数の搬送ローラと、を備える熱処理炉の製造方法であって、
前記熱処理部の所定範囲に設置される複数の搬送ローラのそれぞれについて、当該搬送ローラを軸方向に沿って見たときに当該搬送ローラの反りが最も大きくなる部位の反り方向を測定する測定工程と、
前記熱処理部の所定範囲については、測定した反り方向が周期的に変化するように前記搬送ローラを設置する設置工程と、を備える、熱処理炉の製造方法。
A heat treatment unit having a space for heat-treating the object to be treated,
A method for manufacturing a heat treatment furnace, which is arranged in the heat treatment section and includes a plurality of transfer rollers for conveying the object to be processed.
For each of the plurality of transport rollers installed in the predetermined range of the heat treatment section, a measurement step of measuring the warp direction of the portion where the warp of the transport roller is the largest when the transport roller is viewed along the axial direction. ,
A method for manufacturing a heat treatment furnace, comprising an installation step of installing the transfer roller so that the measured warp direction changes periodically for a predetermined range of the heat treatment section.
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