JPWO2018212181A1 - Tuning fork type crystal resonator, method of manufacturing the same, and tuning fork type crystal resonator - Google Patents

Abstract

A base (50); a plurality of vibrating arms (60) extending from the base (50) in a first direction (D1) and arranged in a second direction (D2) intersecting the first direction (D1); A receiving portion (70), the base portion (50) is provided with a connecting portion (51) provided so as to commonly fix the roots of the plurality of vibrating arms (60), and a first direction (D1). ), A supporting portion (52) provided at an interval from the connecting portion (51), and a connecting portion (51) and a supporting portion (52) between the connecting portion (51) and the supporting portion (52). And a narrow portion (53) having a smaller width in the second direction (D2) than the connecting portion (51) and the supporting portion (52), and the receiving portion (70) It is provided between the connecting portion (51) and the supporting portion (52) in the direction (D1).

Description

  The present invention relates to a tuning fork type quartz vibrating element that operates based on the piezoelectric effect of quartz, a method for manufacturing the same, and a tuning fork type quartz vibrator.

  As the tuning-fork type quartz vibrator, a tuning-fork type quartz vibrating element in which a pair of vibrating arms extend in parallel from a base of a base material is used. Such a crystal oscillator is used for a timing device or a vibration gyro sensor mounted on an electronic device such as a mobile computer, a portable game machine, a mobile phone, an IC card, and a communication base station. With the downsizing and high performance of electronic devices, tuning down fork type quartz vibrators and tuning fork type quartz vibrating elements incorporated therein are required to be reduced in size and improved in reliability.

  For example, Patent Literature 1 discloses a resonator element including a base, a pair of vibrating arms extending from the base, and a supporting arm extending parallel to the vibrating arm. The vibrating reed described in Patent Literature 1 has cuts on both main surfaces of the base so as to be constricted in order to reduce loss of vibration energy. Also, in order to prevent the constriction of the base from being damaged when an impact is applied that greatly displaces the vibrating arm, the vibrating arm contacts the vibrating arm when it is displaced beyond the normal amplitude range. And a receiving portion at the tip of the support arm.

JP 2012-151639 A

  However, in order to provide the receiving portion in the vibrating reed described in Patent Literature 1, the supporting arm must be provided in parallel with the vibrating arm, and there is a problem that miniaturization is hindered.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a tuning-fork type quartz vibrating element which can be miniaturized while improving impact resistance, a method for manufacturing the same, and a tuning-fork type quartz vibrator. It is.

  A tuning-fork type quartz vibrating element according to one embodiment of the present invention includes a base, a plurality of vibrating arms extending from the base in a first direction and arranged in a second direction intersecting the first direction, and at least one receiving portion; A connecting portion provided so as to commonly fix the roots of the plurality of vibrating arms, a supporting portion provided at a distance from the connecting portion in the first direction, and a connecting portion. And a narrow portion having a width in the second direction smaller than the connecting portion and the supporting portion, the receiving portion being provided in the first direction. It is provided between the connection part and the support part.

  A tuning-fork type quartz vibrating element according to another aspect of the present invention includes a base, a plurality of vibrating arms extending in a first direction from the base and arranged in a second direction intersecting the first direction, and at least one receiving portion. A base portion, a connecting portion provided to fix the roots of the plurality of vibrating arms in common, and a supporting portion provided at a distance from the connecting portion in the first direction, A narrow portion provided between the connecting portion and the support portion so as to connect the connecting portion and the supporting portion, the width in the second direction being smaller than the connecting portion and the supporting portion; When the vibrating arm exceeds the desired amplitude range, the displacement of the vibrating arm is restricted by contacting the connecting portion or the support in the first direction.

  A method for manufacturing a tuning-fork type quartz vibrating element according to another aspect of the present invention includes a step of preparing a quartz substrate, a step of providing a photoresist layer on the quartz substrate, a step of patterning the photoresist layer, and a step of patterning. Etching the quartz substrate by wet etching based on the formed photoresist layer to form a quartz piece. The quartz piece extends from the base in the first direction and intersects the first direction. A plurality of vibrating arms arranged in two directions, and at least one receiving portion, wherein the base has a connecting portion provided to fix the roots of the plurality of vibrating arms in common; And a supporting portion provided at a distance from the connecting portion, and provided between the connecting portion and the supporting portion so as to connect the connecting portion and the supporting portion, and the width in the second direction is set to the connecting portion and the supporting portion. Comprising a remote small narrow portion, the receiving portion is provided between the coupling portion and the support portion in the first direction.

  A tuning fork type crystal resonator according to another aspect of the present invention includes a base member, a lid member forming an internal space between the base member, a tuning fork type crystal vibrating element housed in the internal space, and a tuning fork type. The tuning-fork type quartz vibrating element includes a holding member that holds the crystal vibrating element to the base member, and the tuning fork type quartz vibrating element includes a plurality of vibrating arms that extend from the base in the first direction and are arranged in a second direction that intersects the first direction. , At least one receiving portion, wherein the base portion is provided at a distance from the connecting portion in the first direction, the connecting portion being provided to fix the bases of the plurality of vibrating arms in common. A supporting portion, provided between the connecting portion and the supporting portion to connect the connecting portion and the supporting portion, the width in the second direction includes a narrow portion smaller than the connecting portion and the supporting portion, The receiving portion is provided between the connecting portion and the supporting portion in the first direction. It is and the holding member is fixed to the base member supporting portion.

  According to the present invention, it is possible to provide a tuning-fork type quartz vibrating element which can be reduced in size while improving impact resistance, a method of manufacturing the same, and a tuning-fork type quartz vibrator.

FIG. 1 is an exploded perspective view schematically showing a configuration of a tuning-fork type crystal resonator. FIG. 2 is a sectional view schematically showing a configuration of a section taken along line II-II of the tuning-fork type quartz resonator shown in FIG. FIG. 3 is a plan view schematically showing a configuration of the tuning-fork type quartz vibrating element according to the first embodiment. FIG. 4 is a cross-sectional view schematically showing a configuration of a cross section taken along line IV-IV of the tuning-fork type quartz vibrating element shown in FIG. FIG. 5 is an enlarged plan view more specifically showing the structure of the base of the tuning-fork type quartz vibrating element. FIG. 6 is a plan view schematically showing a configuration of a tuning-fork type quartz vibrating element according to the second embodiment. FIG. 7 is a plan view schematically showing a configuration of a tuning-fork type quartz vibrating element according to the third embodiment. FIG. 8 is a flowchart showing a manufacturing process of the tuning-fork type quartz vibrating element according to the fourth embodiment. FIG. 9 is a diagram showing a cross section along the electric axis of the quartz substrate in the step of cutting the quartz substrate shown in FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, in the second and subsequent embodiments, components that are the same as or similar to those in the first embodiment will be denoted by the same or similar reference numerals as those in the first embodiment, and detailed description thereof will be omitted as appropriate. Regarding the effects obtained in the second and subsequent embodiments, descriptions of the same effects as in the first embodiment will be omitted as appropriate. The drawings of each embodiment are exemplifications, and the dimensions and shapes of each part are schematic, and the technical scope of the present invention should not be limited to the embodiments.

<First embodiment>
First, a tuning fork type quartz vibrating element 10 and a tuning fork type quartz vibrator 1 including the tuning fork type quartz vibrating element 10 according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an exploded perspective view schematically showing a configuration of a tuning-fork type crystal resonator. FIG. 2 is a sectional view schematically showing a configuration of a section taken along line II-II of the tuning-fork type quartz resonator shown in FIG. FIG. 3 is a plan view schematically showing a configuration of the tuning-fork type quartz vibrating element according to the first embodiment.

  1 to 3, electrodes such as an excitation electrode and a connection electrode provided in the tuning-fork type quartz vibrating element 10 are not shown. The first direction D1, the second direction D2, and the third direction D3 shown in the drawing are, for example, directions orthogonal to each other. The first direction D1, the second direction D2, and the third direction D3 may be directions that intersect each other at an angle other than 90 °. In addition, the first direction D1, the second direction D2, and the third direction D3 are not limited to the direction of the arrow shown in FIG. 1 (positive direction), but also include the direction opposite to the arrow (negative direction).

  The tuning-fork type crystal resonator 1 is a kind of a crystal resonator (Quartz Crystal Resonator Unit). The tuning-fork type quartz vibrating element 10 is a kind of a quartz vibrating element (Quartz Crystal Resonator), and an exciting portion to be excited according to an applied voltage corresponds to parallel arms in a tuning fork shape. The quartz vibrating element is a piezoelectric vibrating element (Piezoelectric Resonator) that uses a quartz piece (Quartz Crystal Element) as a piezoelectric body that vibrates according to an applied voltage.

  As shown in FIG. 1, the tuning-fork type crystal resonator 1 includes a tuning-fork type crystal resonator element 10, a cover member 20, a base member 30, and a joining member 40. The base member 30 and the lid member 20 are holders for accommodating the tuning-fork type quartz vibrating element 10. In the example shown here, the lid member 20 has a concave shape, specifically, a box shape having an opening, and the base member 30 has a flat plate shape. The shapes of the lid member 20 and the base member 30 are not limited to the above. For example, the base member may have a concave shape, and both the lid member and the base member have a concave shape having an opening on a side facing each other. It may be.

  The tuning-fork type crystal vibrating element 10 has a crystal blank 11. The crystal blank 11 is a Z-plate crystal blank. Specifically, in a rectangular coordinate system including an X axis, a Y axis, and a Z axis, a plane specified by the X axis and the Y axis is rotated clockwise around the Z axis in a range of 0 to 5 degrees. (Hereinafter referred to as “XY plane”. The same applies to a plane specified by another axis or another direction.) Is the main surface of the Z-plate quartz piece, and is a direction parallel to the Z axis. Is the thickness of the Z-plate quartz piece. The Z-plate quartz piece is formed by, for example, etching a quartz substrate obtained by cutting and polishing an ingot of artificial quartz (Synthetic Quartz Crystal). The X axis, the Y axis, and the Z axis are crystal axes of quartz, respectively. The X axis corresponds to the electric axis, the Y axis corresponds to the mechanical axis, and the Z axis corresponds to the optical axis. The X axis is a polar axis having a positive direction. Hereinafter, a direction parallel to the + X axis is referred to as a + X axis direction. The same applies to the X-axis direction, the Y-axis direction, and the Z-axis direction. Note that the crystal blank 11 may employ a different cut other than the Z-plate crystal blank.

  The tuning-fork type quartz vibrating element 10 is defined such that the Y axis is parallel to the first direction D1, the X axis is parallel to the second direction D2, and the Z axis is parallel to the third direction D3. In the X axis direction, which is the polar axis, the + X axis direction is defined as the positive direction in the second direction D2, and the −X axis direction is defined as the negative direction in the second direction D2. However, the first direction D1 may be along the Y-axis direction, and may be inclined in a range of −5 degrees to +5 degrees from the Y-axis direction, for example. Similarly, the second direction D2 may be inclined in a range of -5 degrees to +5 degrees from the X-axis direction, and the third direction D3 may be inclined in a range of -5 degrees to +5 degrees from the Z-axis direction.

  As shown in FIGS. 1 and 3, the tuning-fork type quartz vibrating element 10 including the Z-plate quartz piece 11 has a base 50 and a vibrating arm 60 extending from the base 50 in the second direction D2.

  The base 50 has a front surface (first main surface) 50a on the side facing the lid member 20, and has a back surface (second main surface) 50b on the side facing the base member 30. The base 50 has a connecting portion 51, a supporting portion 52, and a narrow portion 53 arranged in a direction parallel to the first main surface 50a. The connecting portion 51 is provided at the base of the vibrating arm portion 60 and commonly fixes the vibrating arm portions 60 arranged in the second direction D2. The support portion 52 is provided at a distance from the connecting portion 51 in the first direction D1. The narrow portion 53 is provided between the connecting portion 51 and the supporting portion 52 so as to connect the connecting portion 51 and the supporting portion 52. The connecting portion 51 has a facing surface 51a facing the supporting portion 52, and the supporting portion 52 has a facing surface 51b facing the connecting portion 51. The narrow portion 53 is connected to the center of the opposing surface 51 a of the connecting portion 51, and is connected to the center of the opposing surface 52 a of the support 52. The narrow portion 53 has a constricted portion 53a having a minimum width in the second direction D2 when the first main surface 50a is viewed in plan. The constricted portion 53a is located at the center of the narrow portion 53 in the first direction D1.

  The width of the connecting portion 51 in the second direction D2 is W1, the width of the supporting portion 52 in the second direction D2 is W2, and the width of the narrow portion 53 in the second direction D2 is W3. The width W3 is the width of the narrow portion 53 at the constricted portion 53a. The width W3 is smaller than the widths W1 and W2 (W3 <W1, W3 <W2). In other words, the shape of the base 50 is constricted in the second direction D2 by the narrow portion 53 when the first main surface 50a of the base 50 is viewed in plan. Since the base 50 has a constricted shape, propagation of vibration in the base 50 can be suppressed. Therefore, the vibration excited by the pair of vibrating arms 60 is transmitted to the outside through the base 50, so-called vibration leakage can be suppressed. Further, as an example, the width W2 is larger than the width W1 (W1 <W2). However, the magnitude relationship between the width W1 and the width W2 is not limited to this, and the width W1 may be equal to or greater than the width W2.

  Like the base 50, the vibrating arm 60 also has a front surface (first main surface) 60a on the side facing the lid member 20, and has a back surface (second main surface) 60b on the side facing the base member 30. The vibrating arm section 60 is a general term for the first vibrating arm section 61 and the second vibrating arm section 62 that extend in the first direction D1 from the connecting section 51 of the base 50 and are arranged in the second direction D2. The first vibrating arm portion 61 is located on the positive side of the second vibrating arm portion 62 in the second direction D2. Each of the first vibrating arm portion 61 and the second vibrating arm portion 62 has a first groove 63a having a bottom along a first direction D1 on a first main surface 60a, and a first direction 63 on a second main surface 60b. A bottomed second groove 63b is provided along D1. The first groove 63a and the second groove 63b face each other in the third direction D3. Thus, by providing the first groove 63a and the second groove 63b, the ease of movement of the first vibrating arm 61 and the second vibrating arm 62 is improved, and the first vibrating arm 61 and the second vibrating arm are provided. Vibration leakage from the portion 62 to the base 50 can be suppressed.

  The tuning-fork type quartz vibrating element 10 further has a receiving portion 70 between the connecting portion 51 of the base 50 and the supporting portion 52. The receiving portion 70 regulates the displacement of the pair of vibrating arms 60 when the pair of vibrating arms 60 exceeds the desired amplitude range. For example, the receiving portion 70 is a general term for the first receiving portion 71 and the second receiving portion 72 extending from the facing surface 52a of the support portion 52.

  The first receiving portion 71 and the second receiving portion 72 are provided so as to sandwich the narrow portion 53 in the second direction D2. The first receiving portion 71 is preferably separated from the narrow portion 53 so as not to hinder the vibration of the vibrating arm portion 60. For example, the end of the facing surface 52a of the supporting portion 52 on the positive direction side in the second direction D2. And is opposed to the end of the opposing surface 51 a of the connecting portion 51. Similarly, it is desirable that the second receiving portion 72 is also separated from the narrow portion 53. For example, the second receiving portion 72 is connected to the end of the facing surface 52 a of the support portion 52 on the negative direction side in the second direction D <b> 2, and It faces the end of the surface 51a. The first receiving portion 71 and the second receiving portion 72 face the first vibrating arm portion 61 and the second vibrating arm portion 62 in the first direction D1, respectively. The first receiving portion 71 has a contact surface 71a on a side of the connecting portion 51 facing the facing surface 51a. Further, the second receiving portion 72 has a contact surface 72a on a side of the connecting portion 51 facing the facing surface 51a. The distance between the contact surfaces 71a, 72a of the receiving portions 71, 72 and the opposing surface 51a of the connecting portion 51 is smaller than the distance between the opposing surface 51a of the connecting portion 51 and the opposing surface 52a of the support portion 52.

  In the tuning-fork type quartz vibrating element 10, when a drive voltage is applied to each of the first vibrating arm 61 and the second vibrating arm 62 by an excitation electrode (not shown), the first vibrating arm 61 and the second vibrating arm are applied. The portions 62 vibrate so as to approach or separate from each other in a direction indicated by an arrow in the drawing at the tip of the vibrating arm portion 60. In other words, the vibrating arm portion 60 is excited in an arc direction starting from the connecting portion 51. When the tuning-fork type quartz vibrating element 10 is in a stationary state, or when the first vibrating arm 61 and the second vibrating arm 62 vibrate in the amplitude range of the excitation, the opposing surface 51 a of the connecting part 51 and the first receiving part The contact surface 71a of the portion 71 is separated, and the facing surface 51a of the connecting portion 51 and the contact surface 72a of the second receiving portion 72 are also separated.

  When the first vibrating arm portion 61 and the second vibrating arm portion 62 are greatly displaced beyond the amplitude range by the excitation, the contact surface 71a of the first receiving portion 71 or the contact surface 72a of the second receiving portion 72 becomes the connecting portion 51. Contact with the opposing surface 51a. Specifically, when an impact is applied to the tuning-fork type quartz vibrating element 10 such that the first vibrating arm 61 is largely displaced in the positive direction of the second direction D2, the opposing surface 51a of the connecting portion 51 and the first receiving portion The contact surface 71a of the portion 71 comes into contact, and the first receiving portion 71 regulates the displacement of the first vibrating arm portion 61. Similarly, when an impact is applied to the tuning-fork type quartz vibrating element 10 such that the second vibrating arm portion 62 is largely displaced in the negative direction of the second direction D2, the second receiving portion 72 becomes the second vibrating arm portion 62. Regulate the displacement of

  When the first vibrating arm 61 or the second vibrating arm 62 is largely displaced in the second direction D2, the deformation stress concentrates on the narrow portion 53 (particularly, the constricted portion 53a). The first receiving portion 71 and the second receiving portion 72 reduce the deformation stress applied to the narrow portion 53 by restricting the displacement of the first vibrating arm portion 61 and the second vibrating arm portion 62, and reduce the narrow portion 53. Suppress damage. The case where the first vibrating arm portion 61 or the second vibrating arm portion 62 is largely displaced in the second direction D2 means, for example, a case where a shock is applied to the crystal blank 11 due to a vibration or a drop during transportation.

  The shape of the lid member 20 is concave, and is a box shape opened toward the first main surface 32 a of the base member 30. The lid member 20 is joined to the base member 30 to provide an internal space 26 surrounded by the lid member 20 and the base member 30. The tuning-fork type quartz vibrating element 10 is housed in the internal space 26. The shape of the cover member 20 is not particularly limited as long as the tuning fork type quartz vibrating element 10 can be accommodated. For example, the lid member 20 has a rectangular shape when the main surface of the top surface portion 21 is viewed in plan. . The shape of the lid member 20 is defined by, for example, a long side parallel to the first direction D1, a short side parallel to the second direction D2, and a height parallel to the third direction D3. The material of the lid member 20 is not particularly limited, but is made of, for example, a conductive material such as a metal. By including the conductive material, an electromagnetic shielding function capable of shielding at least a part of the electromagnetic waves that enter and exit the internal space 26 through the lid member 20 is obtained.

  As shown in FIG. 2, the lid member 20 has an inner surface 24 and an outer surface 25. The inner surface 24 is a surface on the inner space 26 side, and the outer surface 25 is a surface on the opposite side to the inner surface 24. The lid member 20 has a top surface 21 facing the first main surface 32 a of the base member 30, and a side wall connected to an outer edge of the top surface 21 and extending in a direction intersecting the main surface of the top surface 21. A part 22. Further, the lid member 20 has a facing surface 23 facing the first main surface 32a of the base member 30 at a concave opening end (an end of the side wall portion 22 closer to the base member 30). The opposing surface 23 extends in a frame shape so as to surround the tuning fork type quartz vibrating element 10.

  The base member 30 holds the tuning-fork type quartz vibrating element 10 so as to be excitable. The base member 30 has a flat plate shape. The base member 30 has a long side parallel to the first direction D1, a short side parallel to the second direction D2, and a thickness parallel to the third direction D3. The base member 30 has a base 31. The base 31 has a first main surface 32a (front surface) and a second main surface 32b (back surface) facing each other. The base 31 is a sintered material such as an insulating ceramic (alumina). The base 31 is preferably made of a heat-resistant material.

  The base member 30 has electrode pads 33a, 33b provided on the first main surface 32a, and external electrodes 35a, 35b, 35c, 35d provided on the second main surface 32b. The electrode pads 33a and 33b are terminals for electrically connecting the base member 30 and the tuning-fork type quartz vibrating element 10. The external electrodes 35a, 35b, 35c, and 35d are terminals for electrically connecting a circuit board (not shown) and the tuning-fork type crystal resonator 1. The electrode pad 33a is electrically connected to the external electrode 35a via a via electrode 34a extending in the third direction D3, and the electrode pad 33b is electrically connected to the external electrode 35b via a via electrode 34b extending in the third direction D3. 35b is electrically connected. The via electrodes 34a and 34b are formed in via holes penetrating the base 31 in the third direction D3. The external electrodes 35c and 35d may be dummy electrodes to which electric signals or the like are not input / output, or may be ground electrodes that supply a ground potential to the cover member 20 to improve the electromagnetic shielding function of the cover member 20. The external electrodes 35c and 35d may be omitted.

  The conductive holding members 36a and 36b are provided between the first main surface 32a of the base member 30 and the second main surface 50b of the base 50 of the tuning-fork type quartz vibrating element 10. Specifically, the conductive holding members 36 a and 36 b fix the support portion 52 of the base 50 to the base member 30. The conductive holding members 36 a and 36 b electrically connect the tuning-fork type quartz vibrating element 10 to a pair of electrode pads 33 a and 33 b of the base member 30. The conductive holding members 36a and 36b hold the tuning-fork type quartz vibrating element 10 on the first main surface 32a of the base member 30 so as to be excitable. The conductive holding members 36a and 36b are made of, for example, a resin material containing a thermosetting resin or an ultraviolet-curing resin, a filler for keeping an interval between the base member and the quartz vibrating element, or a filler for increasing the strength, and a conductive material for the holding member. And conductive particles for imparting properties. A member for holding the tuning-fork type quartz vibrating element on the base member may be insulative. At this time, the tuning-fork type quartz vibrating element may be electrically connected to the electrode pad by a conducting means such as a wire bond.

  A sealing member 37 is provided on the first main surface 32 a of the base member 30. In the example shown in FIG. 1, the shape of the sealing member 37 is a rectangular frame when the first main surface 32a is viewed in plan. When the first main surface 32a is viewed in a plan view, the electrode pads 33a and 33b are arranged inside the sealing member 37, and the sealing member 37 is provided so as to surround the tuning-fork type quartz vibrating element 10. I have. The sealing member 37 is made of a conductive material. For example, when the sealing member 37 is made of the same material as the electrode pads 33a and 33b, the sealing member 37 can be provided at the same time as the step of providing the electrode pads 33a and 33b.

  The joining member 40 is provided over the entire periphery of the lid member 20 and the base member 30. Specifically, the joining member 40 is provided on the sealing member 37 and is formed in a rectangular frame shape. The sealing member 37 and the joining member 40 are sandwiched between the opposing surface 23 of the side wall 22 of the lid member 20 and the first main surface 32a of the base member 30.

  Since both the lid member 20 and the base member 30 are joined together with the sealing member 37 and the joining member 40 interposed therebetween, the tuning-fork type quartz vibrating element 10 is surrounded by the inner space ( (Cavity) 26. The internal space 26 preferably has a pressure lower than the atmospheric pressure, and more preferably has a vacuum state. According to this, it is possible to reduce the variation over time of the frequency characteristic of the tuning-fork type crystal resonator 1 due to the oxidation of the first excitation electrode 81 and the second excitation electrode 82 described later. Note that the sealing member 37 may be provided in a discontinuous frame shape, and the joining member 40 may be provided in a discontinuous frame shape.

  Next, a more detailed configuration of the vibrating arm portion 60 and an operation of the tuning-fork type quartz vibrating element 10 will be described with reference to FIG. FIG. 4 is a cross-sectional view schematically showing a configuration of a cross section taken along line IV-IV of the tuning-fork type quartz vibrating element shown in FIG.

  A first excitation electrode 81 and a second excitation electrode 82 are provided on the surfaces of the first vibration arm 61 and the second vibration arm 62, respectively. The first excitation electrodes 81 are provided on both side surfaces of the first vibrating arm 61 and the second vibrating arm 62. The two side surfaces are a pair of side surfaces connecting the first main surface 60a and the second main surface 60b. That is, the first excitation electrode 81 is opposed to each of the first vibrating arm portion 61 and the second vibrating arm portion 62 in the second direction D2. The second excitation electrode 82 is provided inside each of the first groove 63a and the second groove 63b on the first main surface 60a and the second main surface 60b. Further, the second excitation electrode 82 is also provided outside the first groove 63a and the second groove 63b.

  The first excitation electrode 81 and the second excitation electrode 82 are, for example, electrodes formed of a metal film having a multilayer structure in which nickel (Ni) or chromium (Cr) is a base layer and gold (Au) is the outermost layer. Since chromium has high adhesion to the quartz piece, peeling of the excitation electrode due to long-term continuous operation or the like can be suppressed. Since gold has high chemical stability, fluctuation of vibration characteristics due to oxidation of the excitation electrode can be suppressed.

  The first excitation electrode 81 and the second excitation electrode 82 are electrically connected to the external electrodes 35a and 35b through the conductive holding members 36a and 36b, respectively. When the first excitation electrode 81 and the second excitation electrode 82 form an electric field inside the first vibrating arm portion 61 and the second vibrating arm portion 62, each side surface of the first vibrating arm portion 61 and the second vibrating arm portion 62 Expands and contracts based on the magnitude of the electric field voltage. By applying an alternating electric field of a specific frequency between the first excitation electrode 81 and the second excitation electrode 82, the first vibrating arm 61 and the second vibrating arm 62 are turned into a pair of vibrating arms 60 in FIG. Vibrate at the resonance frequency so as to approach and separate from each other in the direction of the arrow shown at the tip of the.

  Next, a more specific configuration of the base 50 will be described with reference to FIG. FIG. 5 is an enlarged plan view more specifically showing the structure of the base of the tuning-fork type quartz vibrating element. The connecting portion 51, the supporting portion 52, and the narrow portion 53 of the base 50 are provided by cutting a quartz substrate by wet etching described later. In addition, although an etching residue is actually formed on the end face of the crystal blank 11 as shown in FIG. 5, the illustration of the etching residue is omitted in other drawings to simplify the description.

  Quartz has a characteristic that, in chemical etching such as wet etching, the etching rate varies depending on the crystal orientation. For this reason, etching residues having different sizes may be generated on the end surfaces of the crystal blank 11 processed by the wet etching. The etching residue is a fin-shaped portion thinner than the base 50. For example, the etching residue L1 is formed on the + X-axis direction side of the end surface of the base 50 extending in the Y-axis direction. Therefore, the etching residue L1 extends from the connecting portion 51 and the support portion 52 along the + X-axis direction when the first main surface 50a of the base 50 is viewed in plan. The etching residue is not substantially formed on the end surface extending in the Y-axis direction on the −X-axis direction side.

  For example, the etching residues L21 and L22 are formed between the narrow portion 53 and the first receiving portion 71. When the first main surface 50a of the base 50 is viewed in plan, the etching residue L21 extends from the narrow portion 53 and the end surface of the support portion 52, and the etching residue L22 extends from the end surface of the first receiving portion 71 and the support portion 52. ing. Further, for example, the etching residues L31 and L32 are formed between the narrow portion 53 and the second receiving portion 72. When the first main surface 50a of the base 50 is viewed in a plan view, the etching residue L31 extends from the narrow portion 53 and the end surface of the support portion 52, and the etching residue L32 extends from the end surface of the second receiving portion 72 and the support portion 52. ing.

  When the area of the etching residue when the first main surface 50a of the base 50 is viewed in a plan view is compared, as an example, the etching residue L21 extends to the vicinity of the connecting portion 51, so that the etching residue L21 is larger than the etching residue L31. . Therefore, the narrow portion 53 has a higher shock resistance to the displacement along the + X axis direction than the shock resistance to the displacement of the connecting portion 51 along the −X axis direction. Conversely, the narrow portion 53 may have a lower impact resistance to the displacement along the + X-axis direction than the impact resistance to the displacement of the connecting portion 51 along the -X-axis direction. That is, in the substantially U-shaped (crotch-shaped) region surrounded by the narrow portion 53, the first receiving portion 71, and the support portion 52, the etching residue L22 can be formed relatively larger than the etching residue L21. Further, in the crotch region surrounded by the narrow portion 53, the second receiving portion 72, and the support portion 52, the etching residue L31 can be formed relatively larger than the etching residue L32. For these reasons, the etching residue L31 may be formed to be relatively larger than the etching residue L21.

  The etching residue is not substantially formed on the contact surface 71a of the first receiving portion 71 and the contact surface 72a of the second receiving portion 72. The etching residue is not substantially formed on the opposing surface 51 a of the connecting portion 51. Therefore, when the vibrating arm 60 is largely displaced so as to exceed the normal amplitude range, the receiving portion 70 is opposed to the end surface of the connecting portion 51 by the contact surfaces 71a and 72a having substantially no etching residue. The surface 51a is received.

<Second embodiment>
Next, the configuration of the tuning fork type crystal resonator element 110 according to the second embodiment will be described with reference to FIG. FIG. 6 is a plan view schematically showing a configuration of a tuning-fork type quartz vibrating element according to the second embodiment. The difference from the tuning-fork type quartz vibrating element 10 according to the first embodiment is that the receiving portion 170 is composed of one first receiving portion 171.

  In the example illustrated in FIG. 6, the first receiving portion 171 is connected to a region of the facing surface 152 a of the support portion 152 on the positive side in the second direction D2 with respect to the narrow portion 153. The first receiving portion 171 extends toward the connecting portion 151 along the first direction D1. When the contact surface 171a of the first receiving portion 171 receives the opposing surface 151a of the connecting portion 151, a large displacement of the first vibrating arm 161 in the positive direction of the second direction D2 beyond the normal amplitude range can be restricted. . However, the position of the receiving portion 170 is not limited to the above, and the receiving portion 170 may be provided in a region on the negative side in the second direction D2 with respect to the narrow portion 153 in the facing surface 152a of the supporting portion 152. According to this, a large displacement of the second vibrating arm 162 in the second direction D2 negative direction side can be restricted. As described above, an anisotropic etching residue is generated on the end face of the tuning-fork type quartz vibrating element due to the etching anisotropy based on the crystal orientation of the quartz crystal. The target strength balance is broken. Therefore, when the number of receiving portions is one, it is necessary to calculate or measure the balance of the mechanical strength of the tuning-fork type quartz vibrating element, and arrange the receiving portions so as to receive the displacement in the direction of low mechanical strength. desirable.

<Third embodiment>
Next, the configuration of a tuning-fork type quartz vibrating element 210 according to the third embodiment will be described with reference to FIG. FIG. 7 is a plan view schematically showing a configuration of a tuning-fork type quartz vibrating element according to the third embodiment. In the tuning-fork type quartz vibrating element 210 according to the third embodiment, the receiving portion 270 is connected to the facing surface 251a of the connecting portion 251 and extends toward the supporting portion 252 in the first direction D1. In other words, the contact surface 271a of the first receiving portion 271 and the contact surface 272a of the second receiving portion 272 face the opposing surface 252a of the support portion 252 at an interval in the first direction D1. In the facing surface 252a of the support portion 252, a first receiving portion 271 is provided at an end on the positive side in the second direction D2, and a second receiving portion 272 is provided on an end on the negative side in the second direction D2. I have. The first receiving portion 271 restricts the large displacement of the first vibrating arm portion 261 by receiving the opposing surface 252a of the support portion 252 with the contact surface 271a, and the second receiving portion 272 connects the opposing surface 252a of the support portion 252 with the contact surface. The large displacement of the second vibrating arm portion 262 is restricted by receiving it at 272a. As described above, also in the third embodiment, the same effects as in the first embodiment can be obtained.

<Fourth embodiment>
Next, a method for manufacturing a tuning-fork type quartz vibrating element according to the fourth embodiment will be described with reference to FIGS. The mechanism of generation of the etching residue will be described using the etching residue L1 as an example. FIG. 8 is a flowchart showing a manufacturing process of the tuning-fork type quartz vibrating element according to the fourth embodiment. FIG. 9 is a diagram showing a cross section along the electric axis of the quartz substrate in the step of cutting the quartz substrate shown in FIG. The fourth embodiment corresponds to a process of manufacturing a crystal blank 911 applicable to the tuning-fork type quartz vibrating element according to each of the above embodiments. After the step shown in FIG. 8, a tuning fork type quartz vibrating element is completed through a step of providing electrodes such as excitation electrodes.

  First, a quartz substrate is prepared (S11). The quartz substrate 910 is a plate-shaped member cut out from a single crystal of artificial quartz such that the XY plane becomes the first principal surface 910a and the second principal surface 910b, and is, for example, a quartz wafer. Note that the quartz substrate 910 has a plurality of element regions in which a crystal piece of a tuning fork type quartz vibrating element can be formed, and is not limited to a quartz wafer as long as a collective element of the tuning fork type quartz vibrating element can be formed. . The quartz substrate 910 may be, for example, a rectangular plate-shaped member cut from a quartz wafer. After the crystal substrate 910 is cut into a flat plate shape, the surface is flattened by a polishing process such as chemical mechanical polishing. By adjusting the thickness of the quartz substrate 910 by this polishing process, the frequency characteristics of the tuning-fork type quartz vibrating element can be adjusted.

  Next, a photoresist layer is provided (S12). In step S12, first, the first metal layer 912a is provided on the first main surface 910a of the quartz substrate 910 so that the first metal layer 912a and the second metal layer 912b sandwich the quartz substrate 910, and the second main surface 910b is provided. A second metal layer 912b is provided. The first metal layer 912a and the second metal layer 912b correspond to a corrosion-resistant film against an etchant (for example, ammonium fluoride or buffered hydrofluoric acid) used when etching the quartz substrate 910, and improve the etching processing accuracy. . As the first metal layer 912a and the second metal layer 912b, for example, a multilayer film having a chromium (Cr) layer and a gold (Au) layer is used. The Cr layer improves the adhesion of the first metal layer 912a and the second metal layer 912b to the quartz substrate 910 as a base layer. Further, the Au layer improves the corrosion resistance of the first metal layer 912a and the second metal layer 912b as the outermost layers. The method for forming the first metal layer 912a and the second metal layer 912b is not particularly limited. For example, the first metal layer 912a and the second metal layer 912b are provided by dry plating (dry process) such as evaporation or sputtering, or wet plating (wet process) such as electrolytic plating. Can be

  In step S12, next, a first photoresist layer 913a is provided on the first metal layer 912a so that the first photoresist layer 913a and the second photoresist layer 913b sandwich the quartz crystal substrate 910. A second photoresist layer 913b is provided over 912b. The first photoresist layer 913a and the second photoresist layer 913b apply a photoresist solution containing a photoresist material on the first metal layer 912a and the second metal layer 912b, respectively, and evaporate the solvent by heating. Is formed. The method for applying the photoresist solution is, for example, a spin coating method. From the viewpoint of improving the processing accuracy of a pattern obtained by developing the first photoresist layer 913a and the second photoresist layer 913b, the photoresist material is a positive type photosensitive resin in which the solubility of the exposed portion is increased. Is desirable. The method of applying the photoresist solution is not particularly limited, and may be, for example, a spray coating method.

  Next, the photoresist layer is exposed (S13). In step S13, the first photoresist layer 913a and the second photoresist layer 913b are irradiated with light such as ultraviolet light through a photomask on which the outer shape patterns of the plurality of crystal pieces 911 are drawn. The exposure apparatus used for exposure is a one-sided exposure apparatus that exposes only one of the first photoresist layer 913a and the second photoresist layer 913b. Note that a double-sided exposure device that can expose both at the same time may be used.

  Next, the photoresist layer is developed (S14). When the first photoresist layer 913a and the second photoresist layer 913b are a positive photosensitive resin, the exposed portions are developed by immersing the first photoresist layer 913a and the second photoresist layer 913b in a developer. Dissolved in liquid and removed. Thus, the outer shape pattern of the crystal blank 911 is patterned on the first photoresist layer 913a and the second photoresist layer 913b. In other words, a part of the first metal layer 912a and a part of the second metal layer 912b are respectively exposed based on the outer shape pattern of the crystal blank 911.

  Next, the quartz substrate is cut by wet etching (S15). In step S15, first, the first metal layer 912a and the second metal layer 912b exposed based on the outer shape pattern of the crystal blank 911 are etched. Thereby, a part of the crystal substrate 910 is exposed based on the outer shape pattern of the crystal piece 911. The first metal layer 912a and the second metal layer 912b are etched by, for example, wet etching of a Cr layer using a cerium-based etching solution and wet etching of an Au layer using an iodine-based etching solution.

  Next, in step S15, cutting is performed so as to penetrate the exposed portion of the quartz substrate 910. The quartz substrate 910 is etched by wet etching using a hydrofluoric acid-based etching solution to form a quartz piece 911 of a tuning-fork type quartz vibrating element. Thereby, the quartz substrate 910 is processed into an aggregate substrate having a plurality of quartz pieces 911. By simultaneously etching the quartz substrate 910 from both sides of the first main surface 910a and the second main surface 910b, the processing speed and processing accuracy are improved as compared with the processing method of etching from one side.

  Next, the photoresist layer is removed (S16). At the stage where the etching of the quartz substrate 910 is completed, the first metal layer 912a and the first photoresist layer 913a remain on the first main surface 910a of the quartz substrate 910, and the second metal layer 912b is formed on the second main surface 910b. And the second photoresist layer 913b remains. The residues of the first and second photoresist layers 913a and 913b are removed from the quartz substrate 910 by washing with a solvent, and then the residues of the first and second metal layers 912a and 912b are removed.

  In the above step S15, the etching rate (etching rate) of the single crystal of the artificial quartz differs depending on the crystal orientation, so that an etching residue L1 is formed on the quartz piece 911 formed by the etching. When the first main surface 911a of the crystal blank 911 is viewed in a plan view, the etching residue L1 extends outward from the first main surface 911a with a different size according to the crystal axis direction.

  As shown in FIG. 9, a cross section of the crystal blank 911 parallel to the XZ plane has a first main surface 911a, a second main surface 911b, and an etching residue L1. The first main surface 911a and the second main surface 911b correspond to portions covered by the first metal layer 912a and the second metal layer 912b as the quartz substrate 910, respectively. The etching residue L1 corresponds to an end surface connecting the ends of the first main surface 911a and the second main surface 911b in the + X-axis direction (positive direction of the electric axis).

  In the region where the etching residue L1 is formed, the quartz substrate 910 undergoes etching in the direction in which the crystal plane is formed, for example. Specifically, crystal substrate 910 is etched to be closer to the crystal plane from first main surface 910a, so that first end face 911c is formed, and is etched to be closer to the crystal plane from second main surface 910b. This forms the second end face 911d. The first end surface 911c is inclined with respect to the first main surface 911a, and the second end surface 911d is inclined with respect to the second main surface 911b, following the inclination of the crystal plane with respect to the + X-axis direction of the crystal. As a result, the etching residue L1 is connected to the first main surface 911a so as to form an obtuse angle on the crystal piece 911 side, and the second end surface 911b is connected to the second main surface 911b so as to form an obtuse angle on the crystal piece 911 side. The end face 911d. The first end face 911c and the second end face 911d are connected to each other at the tip of the etching residue L1 in the + X-axis direction so as to form an angle θ1 on the quartz piece 911 side. Conversely, ends of the first main surface 911a and the second main surface 911b in the −X-axis direction are connected by a third end surface 911e that is substantially orthogonal to the first main surface 911a and the second main surface 911b.

  Since the etching residue L1 is generated, the length of the third end face 911e on the XZ plane is smaller than the sum of the lengths of the first end face 911c and the second end face 911d on the XZ plane. Since the angle formed by the tip of the etching residue L1 is θ1, the end surface having the etching residue L1 is an end surface where other etching residues are substantially not generated (for example, the facing surface 51a of the connecting portion 51 and the contact surface 71a of the receiving portion 70). , 72a), it is easily damaged by an external impact.

  As described above, according to one embodiment of the present invention, at least a plurality of vibrating arms 60 extending from the base 50 in the first direction D1 and arranged in the second direction D2 intersecting with the first direction D1 include: The base 50 includes one receiving portion 70, and the base 50 is spaced from the connecting portion 51 in the first direction D <b> 1 with the connecting portion 51 provided to fix the roots of the plurality of vibrating arms 60 in common. The supporting portion 52 is provided at an interval, and is provided between the connecting portion 51 and the supporting portion 52 so as to connect the connecting portion 51 and the supporting portion 52. The width in the second direction D2 is set to be equal to the connecting portion 51 and the supporting portion. And a narrow portion 53 smaller than 52, and the receiving portion 70 is provided with the tuning-fork type quartz vibrating element 10 provided between the connecting portion 51 and the supporting portion 52 in the first direction D1.

  According to the above aspect, since the receiving portion is provided between the support portion and the connecting portion, the size of the crystal resonator element can be reduced as compared with a configuration in which the receiving portion and the vibrating arm portion are arranged in the second direction. In addition, when an external force is applied to the vibrating arm by an external impact due to a drop or the like, the base and the receiving portion come into contact with each other, and a large displacement of the vibrating arm that exceeds the normal amplitude range as a quartz vibrating element can be regulated. . Thereby, the shock resistance of the crystal vibrating element is improved, and damage to the vibrating arm and the base can be suppressed. Further, the vibrating arm is mechanically connected to the support via a narrow portion where the vibration propagation region is small. Therefore, vibration leakage from the connecting portion to the support portion is reduced, and attenuation of vibration energy in the vibrating arm portion can be suppressed.

  The receiving section 70 may be connected to one of the connecting section 51 and the supporting section 52 and extend toward the other. According to this, since a complicated structure or the like for providing the receiving portion is not required, the tuning-fork type quartz vibrating element can be downsized.

  The receiving section 70 may be connected to the support section 52. According to this, the influence on the vibration characteristics of the tuning-fork type quartz vibrating element due to the provision of the receiving portion can be suppressed.

  The support section 52 may be a fixing section to which the tuning fork type quartz vibrating element 10 is fixed. According to this, vibration leakage from the vibrating arm portion to the holder such as the base member and the lid member of the tuning fork type crystal resonator through the fixing portion can be suppressed. Further, by connecting the receiving portion to the fixed portion, the shock resistance of the tuning-fork type quartz vibrating element is improved.

  The connecting portion 51 and the supporting portion 52 have opposing surfaces 51a and 52a opposing each other in the first direction D1, and the narrow portion 53 is connected to a central portion of the opposing surface 51a of the connecting portion 51 in the second direction D2. The receiving portion 70 may be connected to the facing surface 52a of the support portion 52 and face an end of the facing surface 51a of the connecting portion 51 in the second direction D2. According to this, interference between the receiving portion and the narrow portion can be suppressed.

  The connecting portion 251 and the supporting portion 252 have opposing surfaces 251a and 252a opposing each other in the first direction D1, and the narrow portion 253 is connected to the center of the opposing surface 251a of the connecting portion 251 in the second direction D2. The receiving portion 270 may be connected to an end of the facing surface 251a of the connecting portion 251 in the second direction D2, and may face the facing surface 252a of the support portion 252. According to this, interference between the receiving portion and the narrow portion can be suppressed.

  The receiving portions 70 may be provided in at least two places so as to sandwich the narrow portion 53 in the second direction D2. According to this, whether the direction of the large displacement of the vibrating arm portion is the positive direction or the negative direction of the second direction can be regulated by the receiving portion.

  The base 50, the vibrating arm 60, and the receiving part 70 are provided by quartz, and the receiving part 70 is a contact surface that comes into contact with the connecting part 51 or the supporting part 52 when the vibrating arm 60 exceeds a desired amplitude range. The contact surfaces 71a, 72a of the receiving portion 70 may extend along the electric axis of the quartz crystal. According to this, the etching residue formed on the contact surface of the receiving portion is small. Therefore, particles generated due to damage of the etching residue when the receiving portion contacts the base can be suppressed.

  According to another aspect of the present invention, a base 50, a plurality of vibrating arms 60 extending from the base 50 in the first direction D1 and arranged in a second direction D2 intersecting the first direction D1, and at least one receiving member And a base 70, wherein the base 50 is provided at a distance from the connecting part 51 in the first direction D <b> 1 and a connecting part 51 provided so as to commonly fix the roots of the plurality of vibrating arms 60. Provided between the connecting portion 51 and the supporting portion 52 between the connecting portion 51 and the supporting portion 52, and the width in the second direction D2 is greater than that of the connecting portion 51 and the supporting portion 52. And a small narrow portion 53, and the receiving portion 70 vibrates by contacting the connecting portion 51 or the supporting portion 52 in the first direction D1 when the plurality of vibrating arms 60 exceed a desired amplitude range. Tuning fork-type water that regulates the displacement of the arm 60 Vibrating element 10, it is provided. In such an embodiment, the same effects as described above can be obtained.

  According to another aspect of the present invention, a step of preparing a quartz substrate 910, a step of providing photoresist layers 913a and 913b on the quartz substrate 910, a step of patterning the photoresist layers 913a and 913b, and a step of patterning Forming a quartz piece 911 by etching the quartz substrate 910 by wet etching based on the photoresist layers 913a and 913b thus formed. The quartz piece 911 is formed in the first direction D1 from the base 50 in the first direction D1. A plurality of vibrating arm portions 60 arranged in a second direction D2 intersecting with the extending first direction D1 and at least one receiving portion 70 are provided, and the base 50 has a common base of the plurality of vibrating arm portions 60. A connecting portion 51 provided so as to be fixed; and a supporting portion 5 provided at an interval from the connecting portion 51 in the first direction D1. And a narrow portion 53 provided between the connecting portion 51 and the supporting portion 52 so as to connect the connecting portion 51 and the supporting portion 52, and having a width in the second direction D2 smaller than the connecting portion 51 and the supporting portion 52. The receiving portion 70 is provided between the connecting portion 51 and the supporting portion 52 in the first direction D1. In such an embodiment, the same effects as described above can be obtained.

  In such an embodiment, the first direction D1 may extend along the mechanical axis Y of the crystal constituting the crystal blank 911, and the second direction D2 may extend along the electric axis X of the crystal. . According to this, the mutually facing end surfaces of the connecting portion and the receiving portion (the opposing surface of the connecting portion and the contact surface of the receiving portion) can be formed such that substantially no etching residue is generated.

  According to another aspect of the present invention, a base member 30, a lid member 20 that forms an internal space 26 between the base member 30, a tuning fork type crystal vibrating element 10 housed in the internal space 26, and a tuning fork The tuning-fork type quartz vibrating element 10 includes conductive members 36a and 36b for holding the quartz crystal vibrating element 10 on the base member 30. The tuning fork type quartz vibrating element 10 extends from the base 50 in the first direction D1 and the first direction D1. A plurality of vibrating arms 60 arranged in the intersecting second direction D2 and at least one receiving portion 70 are provided, and the base 50 is provided so as to fix the roots of the plurality of vibrating arms 60 in common. Connecting portion 51, supporting portion 52 provided at an interval from connecting portion 51 in first direction D1, and connecting portion 51 and supporting portion 52 between connecting portion 51 and supporting portion 52. In the second direction D And a narrower portion 53 having a width smaller than that of the connecting portion 51 and the supporting portion 52. The receiving portion 70 is provided between the connecting portion 51 and the supporting portion 52 in the first direction D1. As the holding members 36a and 36b, the tuning-fork type crystal resonator 1 in which the support portion 52 is fixed to the base member 30 is provided. In such an embodiment, the same effects as described above can be obtained.

  As described above, according to one embodiment of the present invention, it is possible to provide a tuning-fork type quartz vibrating element that can be downsized while improving impact resistance, a method for manufacturing the same, and a tuning-fork type quartz vibrator.

  The embodiments described above are intended to facilitate understanding of the present invention, and are not intended to limit and interpret the present invention. The present invention can be changed / improved without departing from the spirit thereof, and the present invention also includes equivalents thereof. That is, those in which a person skilled in the art appropriately changes the design of each embodiment are also included in the scope of the present invention as long as they have the features of the present invention. For example, the components included in each embodiment and their arrangement, material, condition, shape, size, and the like are not limited to those illustrated, and can be appropriately changed. In addition, each element included in each embodiment can be combined as far as technically possible, and a combination of these elements is included in the scope of the present invention as long as it includes the features of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Tuning fork type crystal resonator 10 ... Tuning fork type crystal vibrating element 11 ... Quartz piece 30 ... Base member 40 ... Joining member 50 ... Base part 51 ... Connecting part 52 ... Support part 53 ... Narrow part 51a, 52a ... Opposing surface 60 ... Vibrating arm portion 61: first vibrating arm portion 62: second vibrating arm portion 70: receiving portion 71: first receiving portion 72: second receiving portion 71a, 72a: contact surface L1, L21, L22, L31, L32: etching Residue

Claims (12)

The base,
A plurality of vibrating arms extending from the base in a first direction and arranged in a second direction intersecting the first direction;
At least one receiving portion;
With
The base is
A connecting portion provided to fix the roots of the plurality of vibrating arms in common,
A support portion provided at a distance from the connecting portion in the first direction;
A narrow portion provided between the connection portion and the support portion so as to connect the connection portion and the support portion, the width in the second direction being smaller than the connection portion and the support portion;
With
The tuning-fork type quartz vibrating element, wherein the receiving portion is provided between the connecting portion and the supporting portion in the first direction. The receiving portion is connected to one of the connecting portion and the supporting portion, and extends toward the other.
The tuning-fork type quartz vibrating element according to claim 1. The receiving portion is connected to the support portion,
The tuning-fork type quartz vibrating element according to claim 2. The support portion is a fixing portion to which the tuning fork type quartz vibrating element is fixed,
The tuning-fork type quartz vibrating element according to claim 3. The connection portion and the support portion have opposing surfaces that oppose each other in the first direction,
The narrow portion is connected to a center portion of the facing surface of the connecting portion in the second direction,
The receiving portion is connected to the facing surface of the support portion, and faces an end of the facing surface of the connecting portion in the second direction.
The tuning-fork type quartz vibrating element according to claim 1. The connection portion and the support portion have opposing surfaces that oppose each other in the first direction,
The narrow portion is connected to a center portion of the facing surface of the connecting portion in the second direction,
The receiving portion is connected to an end of the connecting portion in the second direction of the facing surface, and faces the facing surface of the support portion.
The tuning-fork type quartz vibrating element according to claim 1. The receiving portion is provided at at least two places so as to sandwich the narrow portion in the second direction.
The tuning-fork type quartz vibrating element according to claim 1. The base, the vibrating arm, and the receiving portion are provided by quartz,
The receiving portion has a contact surface that contacts the connecting portion or the support portion when the vibrating arm portion exceeds a desired amplitude range,
The contact surface of the receiving portion extends along the electrical axis of the quartz;
The tuning-fork type quartz vibrating element according to claim 1. The base,
A plurality of vibrating arms extending from the base in a first direction and arranged in a second direction intersecting the first direction;
At least one receiving portion;
With
The base is
A connecting portion provided to fix the roots of the plurality of vibrating arms in common,
A support portion provided at a distance from the connecting portion in the first direction;
A narrow portion provided between the connection portion and the support portion so as to connect the connection portion and the support portion, the width in the second direction being smaller than the connection portion and the support portion;
With
A tuning fork that restricts displacement of the vibrating arm by contacting the connecting portion or the support in the first direction when the plurality of vibrating arms exceed a desired amplitude range; Type crystal vibrating element. Preparing a quartz substrate;
Providing a photoresist layer on the quartz substrate,
Patterning the photoresist layer,
A step of etching the quartz substrate by wet etching based on the patterned photoresist layer to form a quartz piece,
Including
The crystal blank includes a base, a plurality of vibrating arms extending in a first direction from the base and arranged in a second direction intersecting the first direction, and at least one receiving unit,
A connecting portion provided to fix the roots of the plurality of vibrating arms in common; a supporting portion provided at a distance from the connecting portion in the first direction; A narrow portion provided between the connecting portion and the supporting portion so as to connect the connecting portion and the supporting portion, the width in the second direction being smaller than the connecting portion and the supporting portion;
The method for manufacturing a tuning-fork type quartz vibrating element, wherein the receiving portion is provided between the connecting portion and the supporting portion in the first direction. The first direction extends along a mechanical axis of a crystal constituting the crystal blank,
The second direction extends along the electrical axis of the crystal;
A method for manufacturing the tuning-fork type quartz vibrating element according to claim 10. A base member,
A lid member that forms an internal space with the base member,
A tuning-fork type quartz vibrating element housed in the internal space,
A holding member for holding the tuning fork type quartz vibrating element to the base member,
The tuning fork type quartz vibrating element,
The base,
A plurality of vibrating arms extending from the base in a first direction and arranged in a second direction intersecting the first direction;
At least one receiving portion;
With
The base is
A connecting portion provided to fix the roots of the plurality of vibrating arms in common,
A support portion provided at a distance from the connecting portion in the first direction;
A narrow portion provided between the connection portion and the support portion so as to connect the connection portion and the support portion, the width in the second direction being smaller than the connection portion and the support portion;
With
The receiving portion is provided between the connecting portion and the supporting portion in the first direction,
The tuning fork type crystal unit, wherein the holding member fixes the support portion to the base member.

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