JPWO2018128121A1 - Actuator - Google Patents

Abstract

Provided is an actuator that can withstand continuous use for a long time and has excellent noise reduction. A piezoelectric type, preferably a laminated piezoelectric type actuator, a dielectric type actuator, or an electromagnetic induction type actuator is constituted by using a stretchable conductor composition for a conductor portion. As the stretchable conductor composition, a stretchable conductor composition, preferably a stretchable conductor containing conductive particles and an elastomer as a main binder resin is used. The obtained actuator is excellent in quietness and withstands continuous use for a long time. [Selection diagram] None

Description

  The present invention relates to an actuator, and more particularly, to an actuator using a stretchable conductor composition as an electrode material, and more particularly to at least one actuator selected from a piezoelectric type, a dielectric type, and an electromagnetic induction type.

A first aspect of the present invention relates to an actuator utilizing a piezoelectric phenomenon, and more particularly, to a laminated piezoelectric actuator in which piezoelectric substances and internal electrodes are alternately laminated.
In recent years, in order to obtain a high displacement at a low voltage, a ceramic laminate in which a large number of piezoelectric ceramics having a small thickness and internal electrode layers are alternately laminated and integrally fired has been used for a piezoelectric actuator. Specifically, a thin plate having a thickness of 20 to 200 μm is used as a ceramic layer made of a piezoelectric ceramic, and the number of ceramic layers alternately stacked with the internal electrode layers reaches about 100 to 700.

Since the piezoelectric actuator having such a structure has an integrally fired structure, an internal stress in a direction that hinders the operation in the operation direction during operation increases as the number of layers increases. When the internal stress at the time of this operation increases, cracks are generated inside the ceramic laminate, and as a result, the product characteristics such as the displacement amount may be reduced, and the product reliability may be reduced due to the occurrence of a short circuit.
Patent Document 1 discloses an example of this type of laminated piezoelectric actuator. As a countermeasure against the problem caused by the internal stress of the ceramic laminate, the outer invention has a structure in which a ceramic laminate (piezo stack) having a smaller number of laminations than the final number of laminations is bonded with an adhesive, that is, a laminated type having a divided bonding structure. A piezoelectric actuator is disclosed.

However, even when the piezo stack is divided in this way, it is difficult to reduce the stress applied to the side electrodes for connecting the internal electrode layers in the stacking direction with the operation of the piezoelectric actuator.
The side electrode is generally formed of a sintered conductive paste or a thermosetting conductive paste. The cured product of such a paste is hard and brittle, so that cracks are generated on the side electrode when repeatedly subjected to stretching stress. In addition, there is a fear that a failure such as a conduction failure due to a crack or a short circuit of an adjacent electric circuit due to an electrode piece falling off from the crack may occur.
Further, since the side electrode is hard and brittle, the operation of the piezoelectric actuator itself is hindered, and the displacement of the actuator may be limited to a small value.

A second aspect of the present invention relates to an actuator using a volume change of a dielectric when a voltage is applied to the dielectric.
When an elastic dielectric material (elastic insulating material) is sandwiched between a pair of electrodes and a high voltage is applied between the electrodes, polarization occurs in the elastic dielectric material, and positive charges accumulate on one of the opposing electrode surfaces and negative charges on the other. Accumulates. This is a so-called capacitor. Attraction occurs between the positive and negative charges due to Coulomb force. Due to this Coulomb force, the electrodes are attracted to each other and a displacement in a direction in which the thickness of the elastic dielectric material is reduced and a contraction stress are generated. At the same time, a displacement and a force are generated that extend in the surface direction of the dielectric material. Patent Literature 2 discloses an example of a dielectric actuator utilizing such a phenomenon.

By using a dielectric actuator having such a structure as a laminated structure, it is possible to further expect displacement and force to be obtained. The dielectric actuator described in Patent Document 1 shows a basic configuration of this type. In the dielectric actuator, the Coulomb attraction can be increased by increasing the charge stored in the electrode. When the driving voltage is limited, a large amount of polarization can be caused by increasing the dielectric constant of the dielectric elastic body, and the accumulated charge can be increased. Also, the higher the applied voltage, the greater the accumulated charge and the greater the Coulomb force. However, an increase in the stored charge directly leads to an increase in the risk of dielectric breakdown between the electrodes.
In this document, a dielectric elastic body in which conductive carbon is kneaded to artificially increase the dielectric constant of the dielectric elastic body is used, and in order to cover the insulating property that is reduced by kneading the conductive carbon, separately between the layers. It has a structure that sandwiches a highly insulating elastic body.

  However, when the insulating property is increased in this way, a layer having a low dielectric constant is interposed between the electrodes, so that the effective dielectric constant is reduced. Also, since the electrode material is generally a metal, the deformation of the dielectric elastic body in the plane direction is constrained by the electrode metal, and the internal stress in the dielectric elastic body increases, but the amount of displacement is limited. , A satisfactory displacement could not be obtained.

A third aspect of the present invention relates to an actuator using deformation of an inductor itself due to an electromagnetic force generated by passing a current through the inductor.
An electromagnetic induction actuator is an actuator that uses a magnetic force generated by an electric current. This type of actuator has been applied as a motor and an inductor for a long time. 2. Description of the Related Art A known electromagnetic induction actuator operates by moving an armature set in advance to perform a horizontal motion or a rotary motion by an electromagnetic force.
The electromagnetic force not only drives the armature, but also generates a stress on the coil itself that can generate and stab the electromagnetic force. Usually, deformation of the coil due to the electromagnetic force leads to structural deterioration of the actuator itself, and thus the coil is required to have rigidity for suppressing the deformation. The present invention is an actuator that positively uses the deformation of the coil itself due to the electromagnetic force applied to the coil. An actuator based on such a technical idea has not been put to practical use.

JP 2008-218864 A JP 2010-68667A

An object of the present invention is to provide a novel actuator by applying a stretchable conductor composition to an electrode or a conductor portion of an actuator.
The first aspect of the present invention has been made in view of such a conventional problem, and aims to provide a laminated piezoelectric actuator having a side electrode that can follow the operation of the actuator and does not hinder the operation of the actuator. Is what you do.
The second aspect of the present invention has been made in view of such a conventional problem, and aims to provide a dielectric actuator having an electrode that can follow the operation of the actuator and does not hinder the operation of the actuator. .
The third aspect of the present invention has been made in view of such a conventional problem, and aims to provide a novel electromagnetic induction actuator that deforms the coil itself by energization by using a conductive material having a large degree of freedom in deformation. Things.

That is, the present invention has the following configuration.
[1] In a laminated piezoelectric actuator having a structure in which piezoelectric substances and internal electrodes that change in volume by applying a voltage are alternately laminated, and the internal electrodes are alternately arranged as a positive electrode and a negative electrode, A laminated piezoelectric actuator characterized in that an elastic conductor composition is used for side electrodes connecting between electrodes and between negative electrodes.
[2] The multilayer piezoelectric actuator according to [1], wherein the elastic conductive composition is a mixture of conductive particles and a binder resin containing 90% by mass or more of an elastomer.
[3] The elastomer is natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile Rubber (NBR), ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM) The multilayer piezoelectric actuator according to [1] or [2], comprising at least one kind of rubber selected from polysulfide rubber (T).
[4] The multilayer piezoelectric actuator according to any one of [1] to [3], wherein the conductive particles include metal particles having a center diameter in a range of 0.08 μm to 25 μm.
[5] The multilayer piezoelectric actuator according to any one of [1] to [4], wherein the conductor composition constituting the side electrode has a free volume of 3 to 35% by volume.

[6] A dielectric actuator which deforms the dielectric elastic body by interposing a dielectric elastic body between a pair of opposing electrodes and applying a voltage between the pair of electrodes, wherein the conductive composition has elasticity for the electrodes. A dielectric actuator using:
[7] The laminated dielectric actuator according to [6], wherein the elastic conductive composition is a mixture of conductive particles and a binder resin containing 90% by mass or more of an elastomer.
[8] The elastomer is a natural rubber (NR), a synthetic natural rubber (isoprene rubber) (IR), a styrene-butadiene rubber (SBR), a butadiene rubber (BR), a chloroprene rubber (CR), a butyl rubber (IIR), a nitrile. Rubber (NBR), ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM) The laminated dielectric actuator according to [6] or [7], comprising at least one rubber selected from polysulfide rubber (T).
[9] The laminated dielectric actuator according to any one of [6] to [8], wherein the conductive particles include metal particles having a center diameter in a range of 0.08 μm to 25 μm.
[10] The laminated dielectric actuator according to any one of [6] to [9], wherein the conductor composition constituting the side electrode has a free volume of 3 to 35% by volume.
[11] The dielectric according to any one of [6] to [10], having a structure in which electrodes and dielectric elastic bodies are alternately laminated, and the internal electrodes are arranged so as to be alternately a positive electrode and a negative electrode. Actuator.
[12] The dielectric actuator according to any one of [6] to [11], wherein an elastic conductor composition is used for the side electrodes connecting the positive electrodes and the negative electrodes.

[13] An electromagnetic induction actuator characterized in that the inductor itself is deformed by using an electromagnetic force generated by passing an electric current through the inductor, which is made of an elastic conductor material.
[14] The electromagnetic induction actuator according to [13], wherein the elastic conductive composition is a mixture of conductive particles and a binder resin containing 90% by mass or more of an elastomer.
[15] The elastomer is natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile Rubber (NBR), ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM) The electromagnetic induction actuator according to [13] or [14], comprising at least one kind of rubber selected from polysulfide rubber (T).
[16] The electromagnetic induction actuator according to any one of [13] to [15], wherein the conductive particles include metal particles having a center diameter in a range of 0.08 μm to 25 μm.
[17] The electromagnetic induction actuator according to any one of [13] to [16], wherein the elastic conductive composition has a free volume of 3 to 35% by volume.

Further, the present invention preferably has the following configuration.
[18] The electromagnetic induction actuator according to any one of [13] to [17], having a structure in which a layer made of a stretchable conductor and a layer made of a stretchable insulator are co-wound in a roll shape.
[19] The electromagnetic induction actuator according to any one of [13] to [18], wherein the layer made of a stretchable conductor and the layer made of a stretchable insulator are co-wound around an iron core. .

  In the first aspect of the present invention, a conductive composition having elasticity on a side electrode of a laminated piezoelectric actuator (abbreviated as an elastic conductor), preferably an elastic conductor that is a composite of conductive particles and an elastomer, More preferably, by employing a stretchable conductor having a free volume inside, the durability of the side-surface electrode is improved, and furthermore, since the side-surface electrode does not hinder the operation of the multi-layer piezoelectric actuator, the operating area of the Is also realized at the same time.

By having a free volume inside the elastic conductor, an apparent volume contraction can be caused when compressive strain is applied to the elastic conductor, and internal stress applied to the elastic conductor can be reduced. The internal stress of the stretchable conductor, which is the side electrode, is directly linked to the hindrance of the operation of the multilayer piezoelectric actuator.
The shrinkage due to the internal compression of the free volume is realized by forming the side electrode from a composite of conductive particles and an elastomer. Since electric conduction in such a composite conductor is realized by a contact chain of conductive particles, even when metal particles are used for the conductive particles, the specific resistance is one or two digits or more compared to bulk metal. It is common technical knowledge to get higher. Therefore, it is unavoidable that the resistance value of the side electrode is also increased. However, this is not a problem for a piezoelectric element which is a voltage-driven element and does not flow a current, that is, an element having an extremely high input impedance.

According to the second aspect of the present invention, the conductor composition having elasticity in the electrode of the dielectric actuator (abbreviated as "elastic conductor"), preferably an elastic conductor which is a composite of conductive particles and an elastomer, and more preferably the inner part. By using a stretchable conductor having a free volume, the durability of the electrode is improved, and the operation range of the dielectric actuator is also improved because the electrode does not hinder the operation of the dielectric actuator.
Further, according to the present invention, in a laminated dielectric actuator having a structure in which dielectric actuators are laminated, a conductive composition (abbreviated as “stretchable conductor”), preferably conductive particles, is used for an interlayer electrode and / or a side electrode. By employing a stretchable conductor that is an elastomer composite, more preferably a stretchable conductor having a free volume inside, the durability of the side electrode is improved, and the side electrode does not hinder the operation of the laminated dielectric actuator. Therefore, the operation range of the laminated dielectric actuator can be improved at the same time.

  By having a free volume inside the elastic conductor, an apparent volume contraction can be caused when compressive strain is applied to the elastic conductor, and internal stress applied to the elastic conductor can be reduced. The internal stress of the stretchable conductor, which is an electrode (including the case of an interlayer electrode and / or a side electrode), is directly linked to the inhibition of the operation of the dielectric actuator.

According to a third aspect of the present invention, there is provided an actuator utilizing the fact that the coil itself is deformed by energization by forming the coil using a conductor having a large degree of freedom in deformation. The present invention preferably employs a stretchable conductor, which is a composite of conductive particles and an elastomer, and more preferably a stretchable conductor having a free volume inside, so that the coil has a sufficient degree of freedom of deformation when contracted by energization. . In particular, the degree of freedom of compression deformation can be secured. Since the conventional conductor material has a low degree of freedom in compressive deformation, the electromagnetic contraction force of the coil itself cannot be used as a practical actuator.
By having a free volume inside the elastic conductor, an apparent volume contraction can be caused when compressive strain is applied to the elastic conductor, and internal stress applied to the elastic conductor can be reduced.

  The actuator of the present invention generally uses a stretchable conductor composition for a conductor portion where a metal member is often used. The actuator emits vibration or operation sound due to the movement of the metal part along with its operation. However, in the present invention, since the stretchable conductor composition has a vibration absorbing function, a low vibration and noiseless actuator is realized. Can do things.

FIG. 1 is a schematic diagram showing the configuration of a multilayer piezoelectric actuator according to the present invention. FIG. 1 is a schematic diagram showing the configuration of a dielectric actuator (single layer) in the present invention. FIG. 1 is a schematic view showing a configuration of a laminated dielectric actuator according to the present invention. FIG. 4 is a schematic diagram showing the configuration of an example (cylindrical type) of the electromagnetic induction actuator according to the present invention. FIG. 5 is a schematic diagram showing a configuration of an example of the electromagnetic induction type actuator (plane coil type) according to the present invention.

The first embodiment of the present invention will be described with reference to FIG.
In the multilayer piezoelectric actuator according to the first embodiment of the present invention, as shown in FIG. 1. Piezoelectric material (piezoelectric material) and A stacked piezoelectric actuator having a structure in which internal electrodes (interlayer electrodes) are alternately stacked, and the internal electrodes are alternately arranged as a positive electrode and a negative electrode.
Examples of the piezoelectric substance (piezoelectric substance) which changes its volume by applying a voltage according to the first embodiment of the present invention include berlinite (aluminum phosphate: AlPO4), sucrose, quartz (quartz) (SiO2), and Rochelle salt (potassium-sodium tartrate). (KNaC4H4O6), topaz (yellow, silicate) (Al2SiO4 (F, OH) 2), tourmaline (tourmaline) group mineral, ortho (positive) gallium phosphate (GaPO4), langasite (La3Ga5SiO14), perovskite (perovskite titanium) Calcium oxide: CaTiO3), ceramics with a tungsten-bronze structure, barium titanate (BaTiO3), lead titanate (PbTiO3), PZT: lead zirconate titanate (zirconate-lead titanate) (Pb [ZrxTi1-x] O3 0 <x <1 mixed crystal), potassium niobate (KNbO3), lithium niobate (LiNbO3), lithium tantalate (LiTaO3), sodium tungstate (NaXWO3), zinc oxide (ZnO, Zn2O3), Ba2NaNb5O5, Pb2KNb5O15, lithium tetraborate (Li2B4O7), sodium potassium niobate ((K, Na) NbO3), bismuth ferrite (BiFeO3), sodium niobate (NaNbO3), bismuth titanate (Bi4Ti3O12) Bismuth sodium titanate (Na0.5Bi0.5TiO3), polyvinylidene fluoride (1,1-2 fluoroethane polymer, PVDF), aluminum nitride (AlN), gallium phosphate (GaPO4), gallium arsenide (GaAs), etc. Examples can be given.
Among such piezoelectric substances (piezo substances), it is preferable to use piezoelectric ceramics such as barium titanate and PZT (lead zirconate titanate).

  As the internal electrode layer in the first embodiment of the present invention, a conductive metal electrode can be adopted. Metals that can be used include copper, aluminum, nickel, gold, silver, chromium, nickel-chromium alloy, tungsten, molybdenum, brass, bronze, white copper, platinum, rhodium, etc. Thick film conductor can be used. When a relatively high temperature is not used in the manufacturing process of the laminated piezoelectric body, a polymer type thick film conductor composed of conductive particles and a binder resin may be used.

The second embodiment of the present invention will be described with reference to the drawings. FIG. 2 shows a basic configuration of the dielectric actuator according to the second embodiment of the present invention. That is, the dielectric elastic body 11 is sandwiched between the electrodes 10 and has the same structure as a so-called parallel one-sided capacitor.
FIG. 3 is a configuration diagram of a laminated dielectric actuator having a laminated structure of a dielectric actuator according to the second embodiment of the present invention. The dielectric elastic bodies 11 that change in volume by applying a voltage are alternately sandwiched by internal electrodes (interlayer electrodes), and the internal electrodes are alternately arranged as a positive electrode and a negative electrode. The electrodes 13 and the side electrodes 14 are connected.

As the dielectric substance (dielectric) which changes its volume by applying a voltage according to the second aspect of the present invention, an elastomer exhibiting rubber elasticity can be used. As the elastomer in the second embodiment of the present invention, natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile rubber (NBR), ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), Fluorine rubber (FKM), polysulfide rubber (T) and the like can be used. In the second aspect of the present invention, it is preferable to contain at least one rubber selected from the exemplified elastomers.
In the second aspect of the present invention, among these elastomers, nitrile group-containing rubber, chloroprene rubber, and chlorosulfonated polyethylene rubber are preferable, and nitrile group-containing rubber is particularly preferable. In the second aspect of the present invention, the preferable range of the elastic modulus is 2 to 480 MPa, more preferably 3 to 240 MPa, and still more preferably 4 to 120 MPa. These rubber materials have a high relative dielectric constant because they have a larger polarization due to a nitrile group or a halogen group.

In the second aspect of the present invention, the effective dielectric constant can be increased by further mixing a ferroelectric filler with the elastomer. The ferroelectric used in the second embodiment of the present invention includes berlinite (aluminum phosphate: AlPO4), sucrose, quartz (quartz) (SiO2), Rochelle salt (potassium-sodium tartrate) (KNaC4H4O6), topaz (yellow, (Silicate) (Al2SiO4 (F, OH) 2), tourmaline (tourmaline) group mineral, gallium ortho (positive) phosphate (GaPO4), langasite (La3Ga5SiO14), perovskite (perovskite calcium titanate: CaTiO3), tungsten- Ceramics with bronze structure, barium titanate (BaTiO3), lead titanate (PbTiO3), PZT: lead zirconate titanate (zirconate-lead titanate) (Pb [ZrxTi1-x] O3 0 <x <1 mixed crystal ), Potassium niobate (KNbO3), lithium niobate (LiNbO3), lithium tantalate (LiTaO3), sodium tungstate (NaXWO3), zinc oxide (ZnO, Zn2O3), Ba2NaNb5O5, Pb2 KNb5O15, lithium tetraborate (Li2B4O7), sodium potassium niobate ((K, Na) NbO3), bismuth ferrite (BiFeO3), sodium niobate (NaNbO3), bismuth titanate (Bi4Ti3O12), bismuth sodium titanate (Na0.5Bi0 .5TiO3), polyvinylidene fluoride (1,1-2 fluoroethane polymer, PVDF), aluminum nitride (AlN), gallium phosphate (GaPO4), gallium arsenide (GaAs), and the like.
Among such dielectric substances (piezo substances), it is preferable to use dielectric ceramics such as barium titanate and PZT (lead zirconate titanate).
In the second embodiment of the present invention, these ferroelectrics are powder fillers having a center diameter of about 0.1 to 10 μm, and the ratio of the elastomer resin to the ferroelectric substance is 3 to 70 parts by mass / 97 to 30 parts by mass. It can be kneaded and compounded so that it can be used as a hybrid.

The elastic modulus of the dielectric elastic body according to the second aspect of the present invention is preferably 1 MPa or more and 1000 MPa or less.
The dielectric elastic material used in the second aspect of the present invention is preferably a paste obtained by kneading and mixing ferroelectric particles and a flexible resin, preferably a binder resin containing 90% by mass or more of an elastomer, and a solvent added as necessary. After forming, it can be obtained by giving a predetermined shape by printing, dip coating, dispensing, etc., and drying and curing. Alternatively, it can be obtained by, for example, pasting, forming into a film or sheet shape, giving the obtained film or sheet a predetermined shape, and then attaching the film or sheet.

  In the second aspect of the present invention, in particular, in the case of an actuator mainly using displacement of the dielectric elastic body in the thickness direction, a conductive metal electrode can be used as an electrode or an internal electrode. Metals that can be used include copper, aluminum, nickel, gold, silver, chromium, nickel-chromium alloy, tungsten, molybdenum, brass, bronze, white copper, platinum, rhodium, etc. Thick film conductor can be used. If a relatively high temperature is not used in the manufacturing process of the laminated dielectric, a polymer type thick film conductor composed of conductive particles and a binder resin may be used.

  A third embodiment of the present invention will be described with reference to the drawings. FIG. 4 shows an example of a cylindrical electromagnetic induction actuator formed by co-winding a layer made of a stretchable conductor and a layer made of a stretchable insulator in a roll shape. In this configuration, energization causes contraction in the diameter direction of the cylinder and contraction in the height direction. Therefore, for example, if a hose-shaped space is provided inside the cylinder and the tube is passed through the tube, the tube can be compressed at the time of energization to create a pulsating flow. Further, if the internal space is made into a bag shape and filled with an incompressible liquid, it can be applied as a pump for discharging the liquid in the bag when energized. Of course, the contraction of the actuator itself in the diametrical or height direction can be used directly for mechanical drive.

FIG. 5 shows a planar coil-type electromagnetic induction actuator in which a coil is formed on a stretchable base material with a stretchable conductor on a plane. In such a configuration, contraction of the coil in the plane direction is remarkably caused by energization. In the case of the planar coil type, since the actuator itself can be regarded as a sheet, it is possible to apply a deformation such as compression or compression by winding the actuator regarded as a sheet around an object.
Both the cylindrical type and the planar coil type can increase the amount of deformation by inserting an iron core in close proximity, preferably at the center of the coil.

A feature of the present invention resides in the use of an elastic conductor Seo for electrodes, coils, and wiring.
The feature of the multilayer piezoelectric actuator according to the first aspect of the present invention resides in that a stretchable conductor is used for a side electrode.
The feature of the dielectric actuator according to the second aspect of the present invention is that a stretchable conductor is used as an electrode of the dielectric actuator, and a side-surface electrode is preferably used as an interlayer electrode in the case of a laminated dielectric actuator. It is to use.
The feature of the electromagnetic induction actuator according to the present invention resides in that a stretchable conductor is used as a conductor material, in particular, a conductor material of the coil.

The stretchable conductor in the present invention refers to a conductor that maintains electrical conductivity even when expanded by 10% or more or compressed by 3% or more. The stretchable conductor of the present invention is preferably composed of at least metal particles and a flexible resin having a tensile modulus of 1 MPa or more and 1000 MPa or less.
The stretchable conductor used in the present invention is formed by kneading and mixing a conductive resin and a flexible resin, preferably a binder resin containing 90% by mass or more of an elastomer, and a solvent added as necessary, and then printing, dip coating, It can be obtained by giving a predetermined shape with a dispenser or the like and drying and curing. Alternatively, it can be obtained by, for example, pasting, forming into a film or sheet shape, giving the obtained film or sheet a predetermined shape, and then attaching the film or sheet.
In the present invention, a binder resin containing preferably 90% by mass or more of an elastomer can be used as the flexible resin. Elastomer is a general term for polymer materials exhibiting rubber elasticity.

The conductive particles of the present invention are particles made of a substance having a specific resistance of 1 × 10 ⁻¹ Ωcm or less and having a particle diameter of 100 μm or less. Examples of the substance having a specific resistance of 1 × 10 ⁻¹ Ωcm or less include metals, alloys, carbon, graphite, graphite, carbon nanoparticles, fullerenes, carbon nanotubes, graphene pieces, doped semiconductors, and conductive polymers. be able to. The conductive particles preferably used in the present invention are metals such as silver, gold, platinum, palladium, copper, nickel, aluminum, zinc, lead, and tin, brass, bronze, copper alloy, alloy particles such as solder, and silver-coated copper. Hybrid particles, metal-plated polymer particles, metal-plated glass particles, metal-coated ceramic particles, and the like can be used.

  In the present invention, it is preferable to mainly use flake silver particles or amorphous aggregated silver powder. Here, the term “mainly used” means that 90% by mass or more of the conductive particles is used. The amorphous aggregated powder is a three-dimensionally aggregated spherical or irregular primary particle. Amorphous agglomerated powder and flake-like powder are preferable because they have a larger specific surface area than spherical powder or the like, and thus can form a conductive network even with a low filling amount. Since the amorphous aggregated powder is not in a monodispersed form, the particles are in physical contact with each other, so that a conductive network is easily formed.

  The particle size of the flake powder is not particularly limited, but preferably has an average particle size (50% D) of 0.5 to 20 μm as measured by a dynamic light scattering method. More preferably, it is 3 to 12 μm. When the average particle diameter exceeds 15 μm, it becomes difficult to form fine wiring, and clogging occurs in screen printing or the like. If the average particle size is less than 0.5 μm, the particles cannot be contacted with each other at a low filling, and the conductivity may be deteriorated.

  The particle size of the amorphous aggregated powder is not particularly limited, but preferably has an average particle size (50% D) of 1 to 20 μm as measured by a light scattering method. More preferably, it is 3 to 12 μm. If the average particle diameter exceeds 20 μm, the dispersibility is reduced, and it becomes difficult to form a paste. When the average particle diameter is less than 1 μm, the effect as an agglomerated powder is lost, and good conductivity may not be maintained with low filling.

  The non-conductive particles in the present invention are particles made of an organic or inorganic insulating material. The inorganic particles of the present invention are added for the purpose of improving printing characteristics, improving stretching characteristics, and improving the surface properties of a coating film, and inorganic particles such as silica, titanium oxide, talc, alumina, and barium sulfate, and a microgel comprising a resin material. Etc. are available.

As the elastomer in the present invention, natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile Rubber (NBR), ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM) And polysulfide rubber (T). In the present invention, it is preferable to contain at least one kind of rubber selected from the exemplified elastomers.
In the present invention, among these elastomers, nitrile group-containing rubber, chloroprene rubber, and chlorosulfonated polyethylene rubber are preferable, and nitrile group-containing rubber is particularly preferable. The preferred range of the elastic modulus in the present invention is from 2 to 480 MPa, more preferably from 3 to 240 MPa, and still more preferably from 4 to 120 MPa.

  The rubber containing a nitrile group is not particularly limited as long as it is a rubber or an elastomer containing a nitrile group, but a nitrile rubber and a hydrogenated nitrile rubber are preferred. Nitrile rubber is a copolymer of butadiene and acrylonitrile. When the amount of bound acrylonitrile is large, the affinity for metal increases, but the rubber elasticity that contributes to elasticity decreases. Accordingly, the amount of bound acrylonitrile in the acrylonitrile-butadiene copolymer rubber is preferably from 18 to 50% by mass, and particularly preferably from 40 to 50% by mass.

In the present invention, it is preferable to knead and mix a binder resin containing 90% by mass or more of conductive particles and an elastomer and a solvent to be added as necessary to form a paste for forming an elastic conductor, and then process the side electrode. The percentage of the elastomer is determined from the mass of the elastomer relative to the mass of the binder resin.
An epoxy resin can be blended with the binder resin of the present invention. The epoxy resin is an organic compound having an epoxy phase, and preferably a bisphenol A type resin or a phenol novolak type resin can be used. A curing agent can be blended with the epoxy compound. A known amine compound, polyamine compound, or the like may be used as the curing agent. When a curing agent is added, the epoxy resin is the total amount of the epoxy group-containing compound and the curing agent.
The binder resin of the present invention may contain a polyester resin, a non-crosslinked polyester urethane resin, a phenoxy resin, an acrylic resin having a glass transition temperature of 20 ° C. or less.
It is preferable that the resin component other than the elastomer is less than 10% by mass, more preferably less than 5% by mass, based on the binder resin.

The paste for forming an elastic conductor used in the present invention contains a solvent, if necessary. The solvent in the present invention is water or an organic solvent. The content of the solvent is not particularly limited because it should be appropriately investigated depending on the viscosity required for the paste, but is preferably 30 to 80 mass ratio when the total mass of the conductive particles and the flexible resin is generally 100. The organic solvent used in the present invention preferably has a boiling point of 100 ° C or higher and lower than 300 ° C, and more preferably a boiling point of 130 ° C or higher and lower than 280 ° C. If the boiling point of the organic solvent is too low, the solvent volatilizes during the paste manufacturing process or during paste use, and there is a concern that the component ratio of the conductive paste is likely to change. On the other hand, when the boiling point of the organic solvent is too high, the amount of the residual solvent in the dried and cured coating film increases, and there is a concern that the reliability of the coating film may be reduced.

  Examples of the organic solvent in the present invention include cyclohexanone, toluene, xylene, isophorone, γ-butyrolactone, benzyl alcohol, Solvesso 100, 150, 200 manufactured by Exxon Chemical, propylene glycol monomethyl ether acetate, terpionaire, butyl glycol acetate, and diamylbenzene. , Triamylbenzene, n-dodecanol, diethylene glycol, ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol dibutyl ether, diethylene glycol monoacetate, triethylene glycol diacetate, triethylene glycol, triethylene glycol Monomethyl ether Triethylene glycol monoethyl ether, triethylene glycol monobutyl ether, tetraethylene glycol, tetraethylene glycol monobutyl ether, tripropylene glycol, tripropylene glycol monomethyl ether, 2,2,4-trimethyl-1,3-pentanediol monoisobuty Rates and the like. Examples of petroleum hydrocarbons include AF Solvent No. 4 (boiling point: 240 to 265 ° C.), No. 5 (boiling point: 275 to 306 ° C.), and No. 6 (boiling point: 296 to 317 ° C.) manufactured by Nippon Oil Corporation. , No. 7 (boiling point: 259 to 282 ° C.), and No. 0 solvent H (boiling point: 245 to 265 ° C.), and two or more of them may be included as necessary. Such an organic solvent is appropriately contained so that the paste for forming a stretchable conductor has a viscosity suitable for printing or the like.

  The paste for forming a stretchable conductor used in the present invention includes conductive particles, barium sulfate particles, a stretchable resin, and a solvent, such as a dissolver, a three-roll mill, a self-revolving mixer, an attritor, a ball mill, and a sand mill. It can be obtained by mixing and dispersing with a disperser.

  To the stretchable conductor forming paste used in the present invention, known organic and inorganic additives such as imparting printability, adjusting color tone, leveling, an antioxidant, and an ultraviolet absorber, as long as the content of the invention is not impaired. An agent can be compounded.

The stretchable conductor composition of the present invention preferably has a free volume of 3 to 35% by volume.
Here, the free volume is three-dimensionally expanded from the cross-sectional image of the stretchable conductive layer to the void area% with respect to the total cross-sectional area obtained from the area of the void portion and the non-void portion. Convert to That is, it can be obtained by directly reading the numerical value of the area% as the volume%.
The free volume is preferably from 10 to 35% by volume, and more preferably from 15 to 35% by volume. Such free volume can cause apparent volume contraction particularly when compressive strain is applied to the elastic conductor, and has an effect of reducing internal stress applied to the elastic conductor.

  The blending amount of the elastomer in the present invention is 7 to 35% by mass, preferably 9 to 28% by mass, more preferably 12 to 35% by mass with respect to the total of the conductive particles, preferably the added non-conductive particles and the flexible resin. -20% by mass. In particular, it is possible to form a predetermined free volume in a stretchable conductor by forming flake-shaped or agglomerated conductive particles, which are non-spherical conductive particles, into an elastomer at such a mixing ratio.

The laminated piezoelectric actuator according to the first aspect of the present invention, also known as a piezo actuator, the dielectric actuator according to the second aspect of the present invention, and the electromagnetic induction actuator according to the third aspect of the present invention are a semiconductor. It is mainly used in industrial equipment that requires precise position control, such as moving stages, precision positioning probes, and scanning. Drives for probes such as tunneling microscopes (STM) and atomic force microscopes (AFM). Recently, camera modules for mobile phones and digital cameras (auto focus mechanism, zoom mechanism, image stabilization mechanism), hard disk drives (head position control), optical equipment (optical axis adjustment, focus adjustment), motors (impact linear motor, It is also used as a sonic linear motor. Other than these, ultra-precision fine polishing tool, small type mechanical transformer, high-speed angle adjustment mechanism, minute load loading / detection device, pressurizing mechanism, pump, positioning stage mechanism, punching machine, inkjet head, liquid ejector for fuel, etc. It is also used as such.
The actuator of the present invention can be applied not only to these applications but also to applications requiring a larger displacement.

  Hereinafter, the present invention will be described in more detail and specifically with reference to examples. The evaluation results in the examples were measured by the following methods.

<Nitrile amount>
From the composition ratio obtained by NMR analysis of the obtained flexible resin, it was converted into mass% by mass ratio of monomers.
<Mooney viscosity>
Mooney viscosity was measured using SMV-300RT “Mooney Viscometer” manufactured by Shimadzu Corporation.
<Elastic modulus>
A resin material (elastomer) was heated and compression-molded into a sheet having a thickness of 200 ± 20 μm, and then punched out into a dumbbell shape specified by ISO 527-2-1A to obtain a test piece. A tensile test was performed by a method specified in ISO 527-1 to determine an elastic modulus.
<Average particle size>
The average particle diameter was measured using a light scattering particle size distribution analyzer LB-500 manufactured by Horiba, Ltd.

<Specific resistance>
The stretchable conductor was formed into a sheet and cut into a width of 10 mm and a length of 140 mm to prepare a test piece. The sheet resistance and the film thickness of the stretchable conductive sheet test piece in a natural state (elongation ratio 0%) were measured, and the specific resistance was calculated. The thickness was measured using a thickness gauge SMD-565L (manufactured by TECLOCK), and the sheet resistance was measured on four test pieces using Loresta-GP MCP-T610 (manufactured by Mitsubishi Chemical Analytech), and the average value was used. . The specific resistance was calculated by the following equation.
Specific resistance (Ω · cm) = Rs (Ω _□ ) × t (cm)
Here, Rs indicates sheet resistance, and t indicates film thickness.
<Void ratio>
The multilayer piezoelectric actuator is embedded in epoxy resin, cut so that the cross-section of the side electrode made of stretchable conductor can be observed, the cut surface is polished, and the cross-section is observed by SEM. The area% of the void portion of the body part was determined, and the volume% was determined assuming the thickness as a unit length. That is, area% was directly read as volume%.

<Displacement>
The operation of the actuator when a voltage was applied was photographed with a high-speed camera, the maximum change with respect to the initial dimensions was measured, and displayed as a percentage of the initial dimensions.
<Insulation resistance between electrodes>
The resistance was determined from the current value after 60 seconds when 500 V was applied using a high resistance measuring device manufactured by Agilent Technologies.
<Silent characteristics>
Sensory evaluation by the following subjects Healthy female at age 24, healthy male at age 35, healthy female at age 41, healthy male at age 56. None of the subjects was abnormal in the auditory test at the health examination Has been diagnosed.

[Production example]
<Polymerization of flexible resin (synthetic rubber material)>
In a stainless steel reaction vessel equipped with a stirrer and water cooling jacket,
Butadiene 54 parts by mass Acrylonitrile 46 parts by mass Deionized water 270 parts by mass Sodium dodecylbenzenesulfonate 0.5 parts by mass Sodium naphthalenesulfonate condensate 2.5 parts by mass t-dodecylmercaptan 0.3 parts by mass triethanolamine 0.2 Parts by mass 0.1 parts by mass of sodium carbonate was charged, and the bath temperature was kept at 15 ° C. while flowing nitrogen, followed by gentle stirring. Then, an aqueous solution in which 0.3 parts by mass of potassium persulfate was dissolved in 19.7 parts by mass of deionized water was added dropwise over 30 minutes, and the reaction was further continued for 20 hours. The polymerization was stopped by adding an aqueous solution dissolved in 0.5 parts by mass.

Next, in order to distill off the unreacted monomer, the pressure inside the reaction vessel was first reduced, steam was introduced to recover the unreacted monomer, and a synthetic rubber latex (L1) composed of NBR was obtained.
To the obtained latex, salt and dilute sulfuric acid are added, and the mixture is aggregated and filtered. The resin is washed by repeatedly dispersing the resin in deionized water in a volume of 20 times the volume of the resin in 5 portions and repeating the filtration. After drying in air, a flexible resin (elastomer) (R1) was obtained. Table 1 shows the evaluation results of (R1).

Hereinafter, the same operation was performed by changing the charged raw materials, polymerization conditions, washing conditions, and the like, to obtain flexible resins (elastomers) (R2) and (R3) shown in Table 1. The abbreviations in the table are as follows.
NBR: Acronitrile butadiene rubber SBR: Styrene butadiene rubber (styrene / butadiene = 50/50% by mass)

<Agglomerated silver particles>
As the agglomerated silver particles (A), amorphous agglomerated silver powder (G-35 manufactured by DOWA Electronics Co., Ltd., average particle diameter 6.0 μm) was used.
AGC-A (average particle size: 3.1 μm, manufactured by Fukuda Metal Foil & Powder Co., Ltd.) was used as the flake silver particles (B).

<Preparation of paste for forming stretchable conductive sheet>
As shown in Table 2, after blending the respective components, the mixture was kneaded with a three-roll mill to obtain stretchable conductor forming pastes [P1] to [P8].
Similarly, the resuscitation was changed to obtain a dielectric elastic body forming paste D1 and a stretchable insulator forming paste E1 shown in Table 2.
In Table 2, the epoxy resin is a 9/1 (mass ratio) mixture of bisphenol A type epoxy resin epicoat 1001 and a curing agent (aliphatic polyamine).
The leveling agent of the additive is BYKETOL-OK manufactured by BYK.

  The obtained pastes for forming a stretchable conductor [P1] to [P8] are coated on a polytetrafluoroethylene resin sheet by an applicator to form a film, dried at 120 ° C. for 20 minutes, and stretched to a thickness of 50 μm. A sheet was formed. The specific resistance of the obtained stretchable conductive sheet was determined. Table 2 shows the results. Shown in

<Example 1>
A multilayer piezoelectric actuator having the configuration shown in FIG. 1 was manufactured by the following process.
First, powders such as lead oxide, zirconium oxide, titanium oxide, niobium oxide, and strontium carbonate, which are main raw materials of a piezoelectric substance (piezoelectric substance), are weighed to have a desired composition, and the final composition is PZT (zirconic acid). (Lead titanate). In the preparation, in accordance with a conventional method, taking into account the evaporation of lead, the mixture was prepared so that the lead component was in excess of the stoichiometric ratio of the mixing ratio composition by 1 to 2%. The prepared raw materials were dry-mixed with a mixer and then calcined at 800 to 950 ° C. to obtain calcined powder.

Next, ion-exchanged water and a dispersant are added to the calcined powder and premixed, and then wet-pulverized by a planetary ball mill to obtain pulverized powder. After drying the pulverized powder, a solvent, a binder, a plasticizer, a dispersant, etc. were added, mixed by a ball mill to form a slurry, and the slurry was subjected to vacuum defoaming and viscosity adjustment while being stirred by a stirrer in a vacuum device. .
The slurry after vacuum defoaming and viscosity adjustment is formed into a green sheet of a certain thickness by a doctor blade device, and a silver / radium fired paste which becomes an internal electrode (interlayer electrode) by firing is screened on the green sheet in a predetermined pattern. The sheet was printed, punched out with a press, and formed into a predetermined size and shape to obtain a green sheet with an electrode layer.

  A predetermined number of the obtained green sheets with electrode layers are laminated in the configuration shown in FIG. 1, degreased after thermocompression bonding, baked at a temperature of 900 to 1200 ° C., polished into a desired shape, and polished in a thickness direction. A polarization controlled electron was obtained. FIG. Was applied and dried and hardened at 120 ° C. for 30 minutes to form side electrodes, thereby obtaining a laminated piezoelectric actuator [A1]. Note that 30 actuators were manufactured under the same conditions (same lot).

The obtained actuator [A1] was embedded in epoxy resin, and the cross section of the side electrode was observed to determine the porosity. Table 3 shows the results. Shown in
A continuous sinusoidal electric field having an amplitude of 50 V and a frequency of 20 kHz was applied to the obtained laminated piezoelectric actuator [A1], and a continuous operation test of the actuator was performed for 12 hours. Table 3. Shown in

<Examples 2 to 8, Comparative Example 1>
Hereinafter, multilayer piezoelectric actuators [A2] to [A9] were prepared and evaluated by replacing the elastic conductor forming paste [P1] with [P2] to [P9] sequentially. Table 3 shows the results. Shown in
As shown in Table 3, it can be seen that the laminated piezoelectric actuator using the stretchable conductor of the present invention for the side electrode shows good characteristics that can withstand continuous use for a long time. On the other hand, in the comparative example, it is understood that cracks occur in the side electrodes in a short time, and the practicality is poor.

<Example 10>
A single-layer dielectric actuator having the configuration shown in FIG. 2 was manufactured by the following process.
First, a predetermined pattern was printed by screen printing using the polyester film subjected to the mold release treatment as a temporary base material and the stretchable conductor forming paste P5 obtained in the previous production example, followed by drying and curing. Next, on the obtained stretchable conductor layer, printing and drying and curing are performed using the dielectric elastic body forming paste D1 to form a dielectric elastic body layer, and further printing drying and curing is performed using the stretching and forming conductor forming paste P5. An electrode layer was formed to form a three-layer capacitor. The obtained capacitor was peeled from the release polyester film and cut into a predetermined shape to obtain a single-layer dielectric actuator X0. In the obtained dielectric actuator X0, the thickness of the stretchable conductive layer formed first was 15 μm, the thickness of the layer of the dielectric elastic body was 22 μm, and the thickness of the stretchable conductive layer formed last was 13 μm. The insulation resistance between the front and back electrodes of the dielectric actuator A0 was> 1 × 10 ¹² . A voltage of 0 to 1000 V was applied to the dielectric actuator, and the operation was confirmed.

<Example 11>
By the following process, a laminated dielectric actuator shown in FIG. 3 was prototyped.
The paste for forming a dielectric elastic body obtained in the production example was coated on a polyester film subjected to a release treatment so as to have a constant thickness by a doctor blade device, and a dielectric elastic green sheet was obtained through a drying step. After forming as described above, paste P1 for forming an elastic conductor, which will be an internal electrode (interlayer electrode), is screen-printed in a predetermined pattern on a green sheet, punched out with a press, and formed into a predetermined size and shape. Thus, a green sheet with an electrode layer was obtained.

  A predetermined number of the obtained green sheets with electrode layers are laminated in the configuration shown in FIG. 3, degreased after thermocompression bonding, subjected to additional drying and heat treatment at a temperature of 120 ° C., molded into a desired shape, and formed in a thickness direction. To obtain a multilayer capacitor. FIG. Was applied and dried and cured at 120 ° C. for 30 minutes to form side electrodes, thereby obtaining a laminated dielectric actuator [X1]. Note that 30 actuators were manufactured under the same conditions (same lot).

The obtained actuator [X1] was embedded in an epoxy resin, the cross section of the electrode was observed, and the porosity was determined. Table 4 shows the results. Shown in
A sinusoidal alternating electric field having an amplitude of 500 V and a frequency of 5 kHz was applied to the obtained laminated dielectric actuator [X1], a continuous operation test of the actuator was performed for 5 hours, the operation of the actuator after the test, and the state of the electrodes by microscopic observation Table 4. Shown in

<Examples 2 to 8, Comparative Example>
Hereinafter, laminated dielectric actuators [X2] to [X9] were prepared and evaluated by replacing the stretchable conductor forming paste [P1] with [P2] to [P9] sequentially. Table 4 shows the results. Shown in
As shown in Table 4, it can be seen that the laminated dielectric actuator using the stretchable conductor of the present invention for the side electrode shows a large displacement and has good characteristics that can withstand continuous use for a long time. On the other hand, in the comparative example, it is understood that the displacement is small, cracks occur in the side electrode in a short time, and the practicality is poor.

<Example 21>
A cylindrical electromagnetic induction actuator having the configuration shown in FIG. 4 was manufactured by the following process.
First, a predetermined pattern was printed by screen printing using the stretchable conductor forming paste P1 obtained in the above-mentioned production example as a temporary substrate using the polyester film that had been subjected to the release treatment, followed by drying and curing. Next, the stretchable insulator is formed by performing printing drying and curing using the stretchable insulator forming paste E1 on the stretchable conductor layer obtained, and forming a two-layer sheet of the stretchable conductor and the stretchable insulator. Formed. The obtained sheet was peeled from the release polyester film, slit-formed to a predetermined width, and a lead wire was attached to a predetermined portion and wound into a cylindrical shape to obtain an electromagnetic induction actuator [Z1]. In the obtained electromagnetic induction actuator Z1, the thickness of the elastic conductor layer is 18 μm, and the thickness of the elastic insulator layer is 12 μm. The insulation resistance of the stretchable insulator was 1 × 10 ¹² Ω or more. A voltage of 0 to 1000 V was applied to the electromagnetic induction actuator, and the operation was confirmed.

<Examples 22 to 28, Comparative Example 3>
Hereinafter, electromagnetic induction actuators [Z2] to [Z9] were prepared and evaluated by replacing the stretchable conductor forming paste [P1] with [P2] to [P9] sequentially. Table 3 shows the results. Shown in
As shown in Table 3, the electromagnetic induction actuator using the stretchable conductor of the present invention for the side electrode showed a large displacement. On the other hand, in the comparative example, it was shown that the displacement was small and the practicability as an actuator was poor.

<Example 29>
A planar coil type electromagnetic induction actuator shown in FIG. 5 was prototyped by the following process.
The stretchable insulator forming paste E1 obtained in the production example was coated on a polyester film subjected to a release treatment so as to have a constant thickness by a doctor blade device, and a stretchable substrate was obtained through a drying step. . Using a paste P5 for forming a stretchable conductor, a predetermined planar coil was printed on the stretchable substrate obtained by a screen printing method, dried and cured, and peeled from the stretchable base material release PET film. An electromagnetic induction actuator [Z10] having the structure described above was obtained. Table 3 shows the results of evaluation of the obtained electromagnetic induction actuator “Z10”.

  As described above, the actuator according to the present invention has extremely low noise, can withstand continuous use for a long time, and has a semiconductor. A stage for fine movement of an exposure apparatus, a precision positioning probe, and a scanning. It is mainly used for industrial equipment that requires precise position control, such as for driving a probe such as an atomic force microscope (AFM). Recently, camera modules for mobile phones and digital cameras (auto focus mechanism, zoom mechanism, image stabilization mechanism), hard disk drives (head position control), optical equipment (optical axis adjustment, focus adjustment), motors (impact linear motor, It is also used as a sonic linear motor. Other than these, ultra-precision fine polishing tool, small type mechanical transformer, high-speed angle adjustment mechanism, minute load loading / detection device, pressurizing mechanism, pump, positioning stage mechanism, punching machine, inkjet head, liquid ejector for fuel, etc. It can also be used as such. Further, the laminated piezoelectric actuator of the present invention can be sufficiently applied to a speaker used for a long time.

1: Piezoelectric material (piezoelectric material)
2: Internal electrode (interlayer electrode)
3: Side electrode 4: Side electrode 10: Electrode 11: Dielectric elastic body 12: Internal electrode (interlayer electrode)
13: Side electrode 14: Side electrode 100: Stretchable insulating base material (base material)
101: Stretchable conductor material (stretchable conductor)
102: Stretchable electromagnetic derivative material (stretchable insulator or stretchable electromagnetic derivative)

Claims (17)

  Piezoelectric substances that cause a volume change by applying a voltage and internal electrodes are alternately stacked, and the internal electrodes are alternately arranged as a positive electrode and a stacked piezoelectric actuator having a structure in which the internal electrodes are arranged so as to be a negative electrode. A multilayer piezoelectric actuator characterized in that an elastic conductor composition is used for side electrodes connecting negative electrodes to each other.   2. The multilayer piezoelectric actuator according to claim 1, wherein the elastic conductive composition is a mixture of conductive particles and a binder resin containing 90% by mass or more of an elastomer. 3.   The elastomer is natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile rubber (NBR) ), Ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM), polysulfide 3. The multilayer piezoelectric actuator according to claim 1, wherein the multilayer piezoelectric actuator contains at least one kind of rubber selected from rubber (T).   4. The multilayer piezoelectric actuator according to claim 1, wherein the conductive particles include metal particles having a center diameter in a range of 0.08 μm to 25 μm. 5.   The multilayer piezoelectric actuator according to any one of claims 1 to 4, wherein the conductor composition constituting the side electrode has a free volume of 3 to 35% by volume.   A dielectric actuator in which a dielectric elastic body is sandwiched between a pair of electrodes facing each other and a voltage is applied between the pair of electrodes to deform the dielectric elastic body, and a stretchable conductor composition is used for the electrodes. A dielectric actuator, characterized in that:   The laminated dielectric actuator according to claim 6, wherein the stretchable conductive composition is a mixture of conductive particles and a binder resin containing 90% by mass or more of an elastomer.   The elastomer is natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile rubber (NBR) ), Ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM), polysulfide 8. The laminated dielectric actuator according to claim 6, wherein the laminated dielectric actuator contains at least one kind of rubber selected from rubber (T).   9. The multilayer dielectric actuator according to claim 6, wherein the conductive particles include metal particles having a center diameter in a range of 0.08 μm to 25 μm. 10.   The laminated dielectric actuator according to any one of claims 6 to 9, wherein the conductor composition constituting the side electrode has a free volume of 3 to 35% by volume.   The dielectric actuator according to any one of claims 6 to 10, wherein the dielectric actuator has a structure in which electrodes and dielectric elastic bodies are alternately stacked, and the internal electrodes are alternately arranged as a positive electrode and a negative electrode.   The dielectric actuator according to any one of claims 6 to 11, wherein an elastic conductor composition is used for the side electrode connecting the positive electrode and the negative electrode.   An electromagnetic induction actuator characterized in that an inductor itself is deformed by using an electromagnetic force generated by passing an electric current through an inductor, which is made of an elastic conductor material.   The electromagnetic induction actuator according to claim 13, wherein the elastic conductive composition is a mixture of conductive particles and a binder resin containing 90% by mass or more of an elastomer.   The elastomer is natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile rubber (NBR) ), Ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM), polysulfide 15. The electromagnetic induction actuator according to claim 13, wherein the electromagnetic induction actuator contains at least one kind of rubber selected from rubber (T).   The electromagnetic induction actuator according to claim 13, wherein the conductive particles include metal particles having a center diameter in a range of 0.08 μm to 25 μm. The electromagnetic induction actuator according to any one of claims 13 to 16, wherein the stretchable conductor composition has a free volume of 3 to 35% by volume.