JP5361635B2 - Vibrator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibrator capable of suppressing a laminated piezoelectric element from being peeled off from a supporting plate during a fall. <P>SOLUTION: A pair of side surfaces of a laminate 17 are case surfaces, a principal surface of the laminate 17 at a side of the supporting plate 14 and the supporting plate 14 are bonded by a bottom-surface side adhesive layer 15a, an exposed surface of an external electrode 13b at a side of a drawing direction of an inner electrode layer 12 and the supporting plate 14 are bonded by a side-surface side adhesive layer 15b, and a height (h) of the side-surface side adhesive layer 15b from the supporting plate 14 is equal to or more than a height h<SB>1</SB>of the principal surface of the laminate 17 at the side of the supporting plate 14 from the supporting plate. Thus, it is made possible to be immune to tensile stress between a laminated piezoelectric element 10, 16 and the supporting plate 14 generated at a moment of landing during a fall test, and the laminated piezoelectric element 10, 16 can be suppressed from being peeled off from the supporting plate 14 when the vibrator falls down. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a vibrating body, and more particularly to a vibrating body using a bimorph type or unimorph type laminated piezoelectric element used in a flat speaker device for a computer, a mobile phone or a small terminal device.

  A conventional multilayer piezoelectric element is formed by alternately laminating piezoelectric layers and internal electrode layers, and a pair of rectangular main surfaces formed in the laminating direction of the piezoelectric layers and internal electrode layers alternate in the longitudinal direction. A plate-like laminate having a pair of side surfaces drawn to the outside, and external electrodes provided at both ends in the longitudinal direction of the laminate.

  As shown in FIG. 6, the conventional vibrating body is manufactured as a bimorph type or unimorph type vibrating body by bonding one main surface of the multilayer piezoelectric element as described above to a support plate using an adhesive. (For example, refer to Patent Document 1).

  As shown in FIG. 6A, the conventional vibrating body is configured by joining laminated piezoelectric elements 30 and 36 to the upper and lower surfaces of the support plate 34 using only the bottom surface side adhesive layer 35.

  That is, the multilayer piezoelectric elements 30 and 36 are configured by alternately laminating seven layers of piezoelectric bodies 31 and six layers of internal electrode layers 32, and having a surface electrode layer 33a on the upper and lower main surfaces. And a pair of external electrodes 33b provided at both ends in the longitudinal direction of the laminate. The laminated body is plate-shaped, and the upper and lower main surfaces are rectangular, and in the longitudinal direction of the laminated body, the laminated body has a pair of side surfaces from which the internal electrode layers 32 are alternately drawn. An external electrode 33b is provided.

  The six internal electrode layers 32 and the two surface electrode layers 33a are alternately formed as electrode layers. The pair of external electrodes 33b includes three layers of internal electrode layers 32 and one layer on the side surface of the laminate. The surface electrode layer 33a is electrically connected.

  Usually, an adhesive is applied to the support plate 34, and the laminated piezoelectric elements 30 and 36 are pressed against the adhesive layer to join them. As shown in FIG. 6B, a wide adhesive layer is formed. Even if the laminated piezoelectric elements 30 and 36 are pressed against and bonded to the adhesive layer, the height h of the side-side adhesive layer 39 from the support plate 34 is equal to the support plate 34 side of the laminate from the support plate 34. It is lower than the height to the main surface.

  Also, conventionally, a vibrating body in which unevenness is formed on the support plate and the bonding area between the laminated piezoelectric element and the support plate is increased by an adhesive, or a through hole is formed in the support plate, and the adhesive is placed in the through hole. In addition, a vibrating body is known in which the bonding strength between the laminated piezoelectric element and the support plate is improved (see Patent Document 2).

JP 2007-329431 A JP-A-8-293631

  In the vibrating body of Patent Document 1, one main surface of the laminated body is bonded to the support plate 34 only by the bottom-side adhesive layer 35. In such a vibrating body, the laminated piezoelectric element 30 is dropped when the vibrating body is dropped. , 36 is easily peeled off from the support plate 34.

  In other words, the vibrating body is used in small terminal devices, etc., and even if the user accidentally drops it, it must have sufficient strength so that it will not be destroyed. In such a case, a strong force in the direction of gravity according to the weight of the multilayer piezoelectric elements 30, 36 acts on the multilayer piezoelectric elements 30, 36 located on the lower surface of the support plate 34 at the moment when the vibrating body lands. When this force exceeds the bonding force by the bottom surface side adhesive layer 35, there is a problem that the laminated piezoelectric elements 30 and 36 are easily peeled off from the support plate 34.

  Moreover, in patent document 2, an unevenness | corrugation or a through-hole is formed in a support plate, and only one main surface of a laminated body is joined to a support plate with an adhesive via an unevenness | corrugation and a through-hole, and the joining strength by a tension test However, there is a problem that the laminated piezoelectric element is still easily peeled off from the support plate due to an impact such as dropping of the vibrating body.

  An object of this invention is to provide the vibrating body which can suppress peeling from the support plate of a lamination type piezoelectric element at the time of fall.

Vibrator of the present invention, the piezoelectric layers and internal electrode layers made of a ceramic made by alternately stacking, provided in the longitudinal direction end sides of the pair of main surfaces and main surfaces formed on upper and lower surfaces multilayer piezoelectric element comprising a product layer body that having a pair of side surfaces, alternately with the internal electrode layers respectively provided on the pair of side surfaces of the laminate and electrically connected to a pair of external electrodes When, a vibrator having a, a support plate the major surface of the laminate are joined, together are the skin surface baked the pair of side surfaces of the laminate, the support plate side of the laminate The main surface and the support plate are joined by a bottom surface side adhesive layer, and the exposed surface of the external electrode and the support plate are joined by a side surface side adhesive layer, and the support of the side surface side adhesive layer is formed. The height from the plate is not less than the height from the support plate to the main surface of the laminate on the support plate side. Ri, the ends of the external electrodes, wherein the laminate is positioned on the support plate side protrudes to the support plate side of the main surface, said end portion of said external electrodes, the main of the laminate It is characterized by being sandwiched between the bottom surface side adhesive layer and the side surface side adhesive material layer in the longitudinal direction of the surface .

  When the laminated piezoelectric element is bonded to the support plate using only the bottom surface side adhesive layer, the drop test results in the laminated piezoelectric element positioned in the falling direction of the support plate at the moment of landing according to the weight of the laminated piezoelectric element. When a strong force in the direction of gravity is applied, and this force exceeds the bonding force of the bottom surface side adhesive layer, peeling from the support plate of the multilayer piezoelectric element is likely to occur. The laminated piezoelectric element is bonded to the support plate not only by the adhesive layer but also by the side adhesive layer whose height from the support plate is equal to or higher than the height from the support plate to the main surface on the support plate side of the laminate. In other words, the external electrode of the multilayer piezoelectric element is firmly bonded to the support plate by the side adhesive layer whose height from the support plate is equal to or higher than the height of the main surface of the laminate, Tensile stress between the laminated piezoelectric element and the support plate generated at the moment of landing Endure it can, it is possible to suppress separation from the support plate of the laminated piezoelectric element at the time of drop of the vibrator.

  In addition, when the height of the side adhesive layer from the support plate is high, the laminated piezoelectric element is firmly bonded to the support plate, and the peeling of the laminated piezoelectric element from the support plate in the drop test is effectively suppressed. However, since the thermal expansion coefficient of the organic adhesive that forms the side adhesive layer is large, a tensile stress in the longitudinal direction of the main surface is generated between the side surface of the laminate and the external electrode, and peeling occurs during this time. It becomes easy. In the present invention, the side surface of the laminate is a burnt skin surface, and no processing such as flattening the side surface of the laminate is performed, so the side surface of the laminate reflects the shape of the ceramic particles constituting the piezoelectric layer. That is, the unevenness is formed by the ceramic particles, and the external electrode paste is applied to the side surface where the unevenness by the ceramic particles is formed, so that the external electrode is formed. The joint strength can be improved. Therefore, the height of the side adhesive layer from the support plate can be increased, and the external electrode of the multilayer piezoelectric element can be firmly bonded to the support plate, and the height of the side adhesive layer from the support plate can be increased. Even so, the external electrode can be prevented from peeling from the side surface of the laminate.

  Further, in the vibrating body of the present invention, the tip of the internal electrode layer is recessed from the side surface of the laminate, and the tip of the internal electrode layer that is recessed from the side surface of the laminate is disposed on the side surface of the laminate. The provided external electrode is joined. In such a vibrating body, the electrode material of the external electrode enters the recessed portion from the side surface of the multilayer body and is joined to the tip of the internal electrode layer, so that the bonding strength of the external electrode to the side surface of the multilayer body can be further improved. it can.

  Further, in the vibrating body according to the present invention, the support plate is made of a metal or an alloy, and a conductor layer for electrically connecting the external electrode and the support plate is formed on the upper surface of the side surface side adhesive layer. It is characterized by. When the conductor layer is formed on the upper surface of the side adhesive layer, the thermal expansion coefficient of the adhesive of the side adhesive layer and the metal of the conductor layer is larger than the thermal expansion coefficient of the piezoelectric layer of the multilayer piezoelectric element. Therefore, although a larger tensile stress is applied between the side surface of the laminate and the external electrode layer, in the present invention, as described above, the side surface of the laminate is a burnt surface, and the side surface of the laminate is uneven by ceramic particles. The external electrode is formed on the side surface where the irregularities due to the ceramic particles are formed, and the bonding strength of the external electrode to the side surface of the laminate can be improved, and the external electrode is peeled off from the side surface of the laminate. Can be suppressed.

  In the vibrator according to the invention, the number of piezoelectric layers in the multilayer piezoelectric element is 7 or more. In order to drive the multilayer piezoelectric element at a high displacement and a low voltage, it is conceivable to increase the number of piezoelectric layers. However, if the number of piezoelectric layers is increased to 7 or more, the weight of the multilayer piezoelectric element increases. Since it becomes heavier and the support plate and the laminated piezoelectric element are easily separated in a drop test, the present invention can be used particularly suitably.

  In the vibrating body of the present invention, when the metal component of the internal electrode layer is made of silver or silver and palladium, and the internal electrode layer contains palladium, the content ratio of palladium in the metal component is 5 mass. % Or less. In such a vibrating body, the metal component of the internal electrode layer in the multilayer piezoelectric element is composed of silver or silver and palladium, and the palladium content ratio in the metal component is 5% by mass or less, whereby the firing temperature of the multilayer body The amount of expensive palladium used can be reduced, and an inexpensive vibrator can be obtained.

  In the vibrating body of the present invention, not only the bottom surface side adhesive layer but also the side surface side adhesive layer whose height from the support plate is higher than the height from the support plate to the main surface on the support plate side of the laminate is laminated. By joining the piezoelectric element to the support plate, the external electrode of the multilayer piezoelectric element is firmly joined to the support plate, and occurs between the multilayer piezoelectric element and the support plate, which occurs at the moment of landing during the drop test. It can withstand the tensile stress and can suppress the peeling of the laminated piezoelectric element from the support plate when the vibrating body is dropped.

  In addition, the side surface of the laminate is a burnt skin surface, and since no processing such as flattening the side surface of the laminate is performed, the side surface of the laminate reflects the shape of the ceramic particles constituting the piezoelectric layer, Concavities and convexities are formed by the ceramic particles on the side surfaces of the multilayer body, and external electrodes are formed on the side surfaces on which the irregularities by the ceramic particles are formed, thereby improving the bonding strength of the external electrodes to the side surfaces of the multilayer body. be able to. Therefore, the height of the side adhesive layer from the support plate can be increased, and the external electrode of the multilayer piezoelectric element can be firmly bonded to the support plate, and the height of the side adhesive layer from the support plate can be increased. Even so, the external electrode can be prevented from peeling from the side surface of the laminate.

It is sectional drawing of the bimorph type vibrating body of this invention. It is a top view of the bimorph type oscillating body of the present invention. It is sectional drawing which expands and shows the side part of a laminated body, (a) shows this invention product and (b) shows a conventional product. It is sectional drawing of the vibrating body of this invention which has a conductor layer on the surface of a side surface side adhesive layer. It is explanatory drawing which shows an example of the manufacturing method of the lamination type piezoelectric material element used for the vibrating body of this invention. 1 shows a conventional bimorph type vibrator, (a) is a cross-sectional view, (b) is a cross-sectional view when an adhesive layer is widely formed, and a laminated piezoelectric element is pressed against and bonded to the adhesive layer. It is.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 and 2. FIG. 1 is a cross-sectional view of a bimorph type vibrator of the present invention, and FIG. 2 is a plan view. In FIG. 2, the same oblique lines are shown for the same members as in FIG. 1 for easy understanding.

  As shown in FIGS. 1 and 2, the bimorph type vibrating body of the present invention is configured by bonding laminated piezoelectric elements 10 and 16 to the upper and lower surfaces of a support plate 14 with an adhesive. Note that the present invention is not limited to the bimorph type multilayer piezoelectric element, and the effect of the present invention can be obtained even with a unimorph type in which the multilayer piezoelectric element is joined to one side of the support plate.

  The laminated piezoelectric elements 10 and 16 are formed by alternately laminating 7 layers of piezoelectric layers 11 made of ceramics and 6 layers of internal electrode layers 12, and a laminated body 17 having surface electrode layers 13a on the upper and lower surfaces. The laminated body 17 includes a pair of external electrodes 13b provided at both ends in the longitudinal direction x. In FIG. 1, the thickness of the multilayer piezoelectric elements 10 and 16 is enlarged for easy understanding. Moreover, the laminated body 17 may not have the surface electrode layer 13a.

  The laminated body 17 is plate-shaped, the upper and lower main surfaces are rectangular, and the main surface of the laminated body 17 has a pair of side surfaces at both ends in the longitudinal direction x. The rectangular main surface of the laminated body 17 desirably has a width of 5 mm or less and a length of 10 mm or more. In such a laminated piezoelectric element, in particular, the displacement in the longitudinal direction x of the main surface becomes large, and a tensile stress in the longitudinal direction x of the main surface tends to occur between the side surface of the multilayer body 17 and the external electrode 13b. Therefore, the present invention can be preferably used. The present invention can be suitably used when the rectangular main surface of the laminate 17 has a width of 5 mm or less and a length of 17 mm or more.

  As the length of the main surface of the multilayer body 17 becomes longer, in other words, as the length of the multilayer body 17 becomes longer, the contraction amount in the longitudinal direction x of the main surface of the internal electrode layer 12 becomes larger. Since the amount of dent at the tip of the internal electrode layer 12 increases from the side surface of 17, usually, after firing, the internal electrode layer 12 is exposed to the side surface of the laminated body 17 by cutting. As described later, the invention is characterized in that the side surface of the laminate 17 is a burnt surface without being cut after firing.

  Further, when the number of stacked piezoelectric layers 11 of the stacked body 17 is 7 or more, the weight of the stacked piezoelectric elements 10 and 16 becomes heavy, and therefore the support plate 14 and the stacked piezoelectric element 10 are used in the drop test. , 16 can be easily peeled off, so that the present invention can be used more suitably. The number of stacked piezoelectric layers 11 is desirably 30 or less from the viewpoint of preventing an increase in size.

  The internal electrode layer 12 is made of silver or silver and palladium. When the internal electrode layer 12 contains palladium, the content ratio of palladium in the metal component is preferably 5% by mass or less. The internal electrode layer 12 may be made of silver as a metal component. The internal electrode layer 12 may contain material components that constitute the piezoelectric layer 11. By including the material component constituting the piezoelectric layer 11 in the internal electrode layer 12, it is possible to reduce stress due to a difference in thermal expansion between the piezoelectric layer 11 and the internal electrode layer 12, and a stacked piezoelectric element that does not have stacking faults 10, 16 can be obtained. As a ceramic component, it is not limited to the material component which comprises the piezoelectric material layer 11, Other ceramic components may be sufficient.

  The internal electrode layer 12 is mainly composed of silver as a metal component. When the content ratio of palladium in the metal component is 5% by mass or less, the internal electrode layer 12 is sintered to suppress oversintering. The temperature is about 920 to 960 ° C., and the piezoelectric layer 11 needs to be sufficiently sintered at this temperature. The piezoelectric layer 11 that can be sintered at such a low temperature will be described later.

  The present invention can be applied to the case where the internal electrode layer 12 is mainly composed of silver as a metal component and the content ratio of palladium in the metal component is more than 5% by mass.

  As the metal component of the internal electrode layer, the main component is silver, and by setting the palladium content ratio in the metal component to 5% by mass or less, the firing temperature of the laminate can be lowered, and the amount of expensive palladium used can be reduced. Therefore, an inexpensive vibrator can be obtained. In addition, the Young's modulus of the internal electrode layer can be reduced, and by making a flexible multilayer piezoelectric element, the displacement amount of the multilayer piezoelectric element can be increased, and it is difficult to break even in a drop test or the like. be able to.

  Further, the internal electrode layer 12 in the multilayer body 17 is formed inside the outer peripheral edge of the piezoelectric layer 11. That is, the internal electrode layer 12 is formed by providing a blank portion from the outer peripheral edge of the piezoelectric layer 11 so as not to be exposed on the side surface of the multilayer body 17. However, since it is necessary to be electrically connected to the internal electrode layer 12 at the connection portion with the external electrode 13b described later, the side surface of the multilayer body 17 is drawn out, but the portion exposed to this side surface is formed by the external electrode 13b. Covered. It is desirable that the width of the blank portion between the internal electrode layer 12 and the side surface of the multilayer body 17 is 100 μm or more. By doing so, corrosion due to moisture and sulfur components in the atmosphere of the internal electrode layer 12 made of silver or silver having a palladium content ratio of 5 mass% or less can be prevented, and as a result, the laminated piezoelectric element The ion migration between the internal electrode layers 12 in 10 and 16 can be suppressed, and the stacked piezoelectric elements 10 and 16 with high insulation reliability can be obtained.

  The surface electrode layer 13a and the external electrode 13b desirably contain a glass component in the metal component made of silver. By containing a glass component, it is possible to obtain a strong adhesion between the piezoelectric layer 11 and the internal electrode layer 12 and the surface electrode layer 13a or the external electrode 13b.

  External electrodes 13b are provided at both ends in the longitudinal direction x of the multilayer body 17 so as to cover from the side surface of the multilayer body 17 to the longitudinal direction x ends of the upper and lower main surfaces. The laminated piezoelectric elements 10 and 16 have six internal electrode layers 12 and two surface electrode layers 13a as electrode layers. The pair of external electrodes 13b has three layers on the side surfaces facing the laminate 17. Each internal electrode layer 12 and each surface electrode layer 13a are electrically connected alternately.

In the vibrating body of the present invention, the main surface of the laminate 17 on the support plate 14 side and the support plate 14 are joined by the bottom surface side adhesive layer 15a, and a part of the exposed surface of the external electrode 13b and the support plate 14 are joined. Are joined by the side adhesive layer 15b. In other words, the side adhesive layer 15b is attached to a part of the exposed surface of the external electrode 13b, and is also attached to the surface of the support plate 14 so that the skirt is widened. The side surface adhesive layer 15 b has a height h from the support plate 14 equal to or higher than the height h ₁ of the main surface of the laminate 17 on the support plate 14 side.

In the present invention, not only the bottom surface side adhesive layer 15a but also the side surface side adhesive whose height h from the support plate 14 is higher than the height h ₁ from the support plate 14 to the main surface on the support plate 14 side of the laminate 17. The exposed surface of the external electrode 13b and the side surface side adhesive layer 15b against the tensile stress generated between the laminated piezoelectric elements 10 and 16 and the support plate 14, which is generated by the agent layer 15b when landing in the drop test. The shear stress generated during the period can be resisted and resisted, and the peeling of the laminated piezoelectric elements 10 and 16 from the support plate 14 can be suppressed.

The height h from the support plate 14 of the side-side adhesive layer 15b is, even the height h ₁ to the main surface of the supporting plate 14 side of the laminate 17 from the support plate 14, as shown in FIG. 1 In addition, since the external electrode 13b protrudes more to the support plate side than the main surface of the laminate 17 on the support plate 14 side, the side adhesive layer 15b is joined to the side surface of the external electrode 13b. Separation of the 10 and 16 from the support plate 14 can be suppressed.

On the other hand, when the height h of the side face side adhesive layer 15b is lower than the height h ₁ from the support plate 14 of the main surface of the laminate 17 that occur when landing drop test, the laminated piezoelectric element 10, 16 cannot withstand the tensile stress between the support plate 14 and the laminated piezoelectric elements 10 and 16 have almost no effect of suppressing the peeling from the support plate 14. In particular the height h from the support plate 14 of the side-side adhesive layer 15b is higher than the height h ₁ from the support plate 14 of the main surface of the supporting plate 14 side of the laminate 17, 10 [mu] m or more in particular from the support plate 14 It is desirable that the height be less than or equal to ½ of the thickness t of the laminate 17 from the support plate 14.

  The side surface side adhesive layer 15b is continuous with the bottom surface side adhesive layer 15a, and in the present invention, the adhesive layer between the portions protruding to the support plate 14 side of the external electrode 13b is defined as the bottom surface side adhesive layer 15a. The adhesive layer positioned on the outer side was defined as the side adhesive layer 15b.

  Further, the thickness of the bottom surface side adhesive layer 15a between the multilayer piezoelectric elements 10, 16 and the support plate 14 is not particularly mentioned, but when the thickness of the bottom surface side adhesive layer 15a is 1 μm or more, the adhesive Since the thermal expansion coefficient is large, in particular, tensile stress in the longitudinal direction x is likely to be generated between the laminate 17 and the external electrode 13b, so that the present invention can be used more suitably. The thickness of the bottom surface side adhesive layer 15a is desirably 5 μm or less from the viewpoint of the generation of stress due to the difference in thermal expansion coefficient.

  As the organic adhesive for forming the bottom surface side adhesive layer 15a and the side surface side adhesive layer 15b, known ones such as epoxy resins, silicon resins and polyester resins can be used. As a method for curing the resin used for the adhesive, the vibrating body can be produced by using any of thermosetting, photocuring, anaerobic curing, and the like.

  And in this invention, a pair of side surface of the laminated body 17 is made into a baking surface. Accordingly, the side surface in the longitudinal direction x of the main surface of the multilayer body 17 reflects the shape of the ceramic particles constituting the piezoelectric layer 11, and as shown in FIG. In addition, due to the firing shrinkage of the internal electrode layer 12, openings are formed on the side surfaces of the laminate 17, the irregularities due to the ceramic particles are formed, and the side surfaces having the openings due to the firing shrinkage of the internal electrode layers 12, By applying the external electrode paste to form the external electrode 13b, the external electrode material bites into the irregularities due to the ceramic particles, and the external electrode material enters into the opening, and is seized in this state and applied to the side surface of the laminate 17 The bonding strength of the external electrode 13b can be improved.

  Therefore, the height h of the side-side adhesive layer 15b from the support plate 14 can be increased so that the external electrodes 13b of the laminated piezoelectric elements 10 and 16 can be firmly bonded to the support plate 14 and the side-side adhesive layer 15b. Even if the height h from the support plate 14 is increased, the external electrode 13 b can be prevented from peeling from the side surface of the multilayer body 17.

  That is, due to the difference in the thermal expansion coefficients of the multilayer piezoelectric elements 10 and 16, the support plate 14 and the side surface side adhesive layer 15b, the side surface of the multilayer body 17 and the outside of the multilayer body 17 in the reliability test such as a temperature cycle and a high temperature and high humidity test. A tensile stress in the longitudinal direction x of the main surface is generated between the electrode 13b, and this tensile stress is particularly increased as the height h of the side adhesive layer 15b from the support plate 14 increases. The tensile stress increases when the height h from the height exceeds 1/2 of the thickness t of the laminated body 17. In the present invention, the pair of side surfaces of the laminated body 17 are burnt skin surfaces. Since the external electrode 13b is formed on the outer side, the external electrode 13b can be prevented from peeling from the side surface of the multilayer body 17 even if the height h of the side surface side adhesive layer 15b from the support plate 14 is increased. FIG. 3B shows a side surface portion of a conventional laminate.

  Further, since the processing such as flattening the side surface of the laminated body 17 is not performed after sintering, the processing cost can be reduced and the manufacturing cost can be reduced.

  Here, the burned surface means having a porcelain surface as it is after sintering without performing processing such as flattening the side surface of the laminate 17 such as dicing or barrel after sintering.

Further, the side surfaces in the width direction of the laminated piezoelectric elements 10 and 16 are also burnt skin surfaces, and as shown in FIG. 2, the width direction side adhesive layer 18 is formed also on the side surfaces in the width direction. The height from the support plate 14 of the lateral side adhesive layer 18 in the width direction is also equal to or higher than the height h ₁ from the support plate 14 of the main surface of the laminate 17 on the support plate 14 side. Thus, the side surfaces in the width direction of the multilayer piezoelectric elements 10 and 16 are also firmly bonded to the support plate 14.

  In the vibrating body of the present invention, the laminated piezoelectric elements 10 and 16 make the external electrode 13b conductive to the electrode pattern formed on the insulating support plate 14 or the conductive support plate 14 itself, and between the external electrodes 13b. A voltage is applied to drive. Further, a voltage is applied to the multilayer piezoelectric element 10 and the multilayer piezoelectric element 16 so as to be displaced in the same direction. Thereby, the bimorph type vibrator as shown in FIGS. 1 and 2 vibrates greatly.

  As shown in FIG. 4, the support plate 14 is made of a metal or an alloy, and a conductor layer 55 for electrically connecting the external electrode 13b and the support plate 14 is formed on the upper surface of the side adhesive layer 15b. In this case, since the thermal expansion coefficient of the adhesive of the side adhesive layer 15b and the metal of the conductor layer 55 is larger than the thermal expansion coefficient of the multilayer piezoelectric elements 10 and 16, the side surface of the multilayer body 17 and the external electrode layer 13b. Therefore, the present invention can be used more suitably.

  Next, the manufacturing method of the vibrating body of this invention is demonstrated based on FIG. First, a binder, a dispersant, a plasticizer, and a solvent are kneaded with the piezoelectric material powder to prepare a slurry. As the piezoelectric material, any of lead-based and non-lead-based materials can be used.

  Next, the obtained slurry is formed into a sheet shape to obtain a green sheet 21, and an internal electrode paste 22 is printed on the green sheet 21 to form an internal electrode pattern 22. When printing the internal electrode pattern 22, as described above, it is desirable to print so that the blank portion L is 100 μm or more in the fired laminated piezoelectric elements 10 and 16. Next, as shown in FIG. 5A, a desired number of green sheets 21 on which internal electrode patterns are formed are stacked, and only the green sheet is stacked on the uppermost layer to produce a stacked molded body. This laminated molded body is cut into a desired shape, and as shown in FIG. 5B, a piece-shaped laminated molded body for an element 24 is produced. When cutting, the internal electrode patterns are cut so as to be alternately exposed on the side surfaces of the element laminated molded body 24.

  Next, the laminated body 17 can be obtained by degreasing and firing the laminated molded body 24 for an element. After firing, the side surface 25 on which the external electrode 13b of the multilayer body 17 is formed is not processed at all, so that the side surface of the piezoelectric layer 11 has irregularities formed by the ceramic particles constituting the piezoelectric layer 11. Further, since the internal electrode layer 12 has a larger sintering shrinkage than the piezoelectric layer 11, the tip of the internal electrode layer 12 that should be connected to the external electrode 13 b is slightly recessed from the side surface 25 of the multilayer body 17. In other words, an opening due to contraction of the internal electrode layer 12 is formed on the side surface 25 of the multilayer body 17.

  Thereafter, the surface electrode paste is printed on both main surfaces in the stacking direction of the piezoelectric layer 11 of the multilayer body 17 to form the surface electrode pattern 26a. Subsequently, the external electrode paste is formed on both side surfaces of the multilayer body 17 in the longitudinal direction x. Is printed to form the external electrode pattern 26b. At this time, it is desirable to print the external electrode paste so as to cover all the end surfaces of the internal electrode layer 12 drawn out to the side surface 25 of the multilayer piezoelectric element 24. The laminated piezoelectric elements 10 and 16 can be obtained by baking the electrodes at a predetermined temperature. By baking the surface electrode pattern 26a and the external electrode pattern 26b, the paste of the external electrode 13b enters the opening formed in the side surface of the laminate 17, and the external electrode 13b is connected to the internal electrode layer 12. Become. In addition, when the length of the laminated body 17 is long, the firing shrinkage amount of the internal electrode layer 12 is large, and the opening is long, the external electrode paste can be easily put into the opening by evacuating the internal electrode layer. 12 and the external electrode 13b can be reliably connected.

  Further, in the vibrating body of the present invention, the surface electrode layer 13a of the multilayer body 17 and the external electrode 13b are connected by the corners of the multilayer body 17, but the side surface and the surface of the multilayer body 17 are formed with unevenness due to ceramic particles. Therefore, the surface electrode layer 13a and the external electrode 13b can be reliably connected.

  Next, in order to impart piezoelectricity to the multilayer piezoelectric elements 10 and 16, a DC voltage is applied through the surface electrode layer 13a or the external electrode 13b to polarize the multilayer piezoelectric elements 10 and 16.

  Next, an adhesive is applied to the support plate 14, the laminated piezoelectric elements 10 and 16 are pressed onto the support plate 14, and then the height h of the side adhesive layer 15 b is increased. By applying the adhesive on the side adhesive layer 15b on the exposed surface 13b with a brush or the like, increasing the height h of the side adhesive layer 15b, and then irradiating the adhesive with heat or ultraviolet rays. It can be cured to obtain the vibrating body of the present invention.

The piezoelectric layer 11 that can be sintered at a low temperature of about 920 to 960 ° C. will be described. The piezoelectric layer 11 contains at least one of Sb and Nb and Pb, Zr, Ti, Zn and Bi, and at least one of Sb and Nb as a metal component, and Pb, Zr, Ti, Sr. , Ba, Zn, a composite perovskite compound including Bi, the composition formula by molar ratio of the metal elements _{Pb 1-x-y-z} Sr x Ba y Bi z (Zn 1/3 α 2 / ₃ ) When expressed as _a Zr _b Ti _1- abO ₃ , x, y, z, a, b are 0 ≦ x ≦ 0.14, 0 ≦ y ≦ 0.14, 0 <z ≦ 0 It is desirable to satisfy .015, 0.04 ≦ x + y, 0.01 ≦ a ≦ 0.12, and 0.43 ≦ b ≦ 0.58. α is at least one of Sb and Nb.

Here, the reason why x, y, z, a, and b are set in the above ranges will be described. The reason why the substitution amount x of Pb with Sr is set to 0 ≦ x ≦ 0.14 is that the Curie temperature can be kept high by substituting a part of Pb with Sr. The reason why the substitution amount y of Pb with Ba is set to 0 ≦ y ≦ 0.14 is that the Curie temperature can be kept high by substituting a part of Pb with Ba, and a high piezoelectric strain constant d ₃₃ can be obtained. Because it can.

Furthermore, if the substitution amount z of Pb by Bi is set to 0 <z ≦ 0.015, within this range, Bi ₂ O ₃ forms a liquid phase at the time of firing, and wets the crystal grains of the PZT crystal, This is because the sinterability can be improved and, after sintering, Bi ₂ O ₃ is dissolved in the PZT-based crystal and the piezoelectric characteristics can be improved.

Also, the reason why the substitution amount a of Ti with (Zn _1/3 α _2/3 ) is set to 0.01 ≦ a ≦ 0.12 is that a large piezoelectric strain constant d ₃₃ and piezoelectric output constant g ₃₃ are obtained. This is because the temperature can be kept high and the dielectric loss can be kept small. When this piezoelectric ceramic is used as a vibrating body, a large piezoelectric strain constant can be obtained by setting 0.05 ≦ a ≦ 0.12.

A piezoelectric ceramic mainly composed of PZT has an MPB (composition phase boundary) showing a maximum value of the piezoelectric strain constant when the solid solution ratio of PbZrO ₃ and PbTiO ₃ is changed. As the piezoelectric layer 11 of the vibrator, this MPB and the composition value in the vicinity thereof are used. Since this MPB varies depending on the amounts of x and a, the value of b is set to a composition range in which MPB can be captured within the composition range of x and a.

The density of the piezoelectric ceramic is 7.7 g / cm ³ or more, in particular, 7.8 g / cm ³ or more. Note that the bulk density of the laminate was the density of the piezoelectric ceramic.

The piezoelectric ceramic can be manufactured as follows. First, in the X-ray diffraction measurement using at least one of Sb and Nb and Pb, Zr, Ti, and Zn and using Cukα rays, the (101) peak (2θ≈ the peak intensity of 30 °) and _{I 1,} when the the _{I 2} peak intensity of the peak (2 [Theta] ≒ 38 °) of _(111), calcined powder I 2 / _{I 1} is from 0.130 to 0.160 Is made.

Specifically, for example, PbO, ZrO ₂ , TiO ₂ , SrCO ₃ , BaCO ₃ , ZnO, Sb ₂ O ₃ , and Nb ₂ O ₅ powders are weighed and mixed as raw materials, and then this mixture is dehydrated and dried. And calcining at 850 to 950 ° C. for 1 to 3 hours. After calcination, I ₂ / I ₁ was adjusted to 0.130 to 0.160. Again ground in a ball mill or the like, for example, the average particle diameter _{D 50} is set to be in the range of 0.5～0.7Myuemu.

The reason why I ₂ / I ₁ was set to 0.130 to 0.160 is that if I ₂ / I ₁ is in the range of 0.130 to 0.160, the sinterability is improved by adding Bi ₂ O ₃ , As the synthesis of lead zirconate titanate crystals progresses, Bi ₂ O ₃ is taken into the lead zirconate titanate crystals at the same time as the grain growth accompanying sintering, and in the sintering temperature range of 920 to 960 ° C. This is because the phase component does not remain and is sintered. On the other hand, when I ₂ / I ₁ is smaller than 0.130, the synthesis of lead zirconate titanate crystals is insufficient, and even if Bi ₂ O ₃ powder is added and fired, the sinterability is reduced. This is because it cannot be improved. In addition, when I ₂ / I ₁ is larger than 0.160, the synthesis of lead zirconate titanate-based crystals proceeds too much, and even if Bi ₂ O ₃ powder is added and baked, it is dissolved in the crystals. Because it becomes difficult.

Here, as an index representing the synthesis degree of the lead zirconate titanate crystal, the peak intensity I ₁ of the peak (2θ≈30 °) of the lead zirconate titanate crystal (2θ≈30 °), the peak (2θ) The reason why the peak intensity I ₂ of ≈38 ° is used is that the peak position and pattern shape of other peaks change as the crystal phase changes depending on the calcining temperature. This is because the 2θ≈30 ° and the peak of (111) (2θ≈38 °) are not so, and are considered optimal for expressing the degree of synthesis.

Thereafter, for example, Bi ₂ O ₃ powder having a D ₅₀ of 0.5 to 0.7 μm and a binder are added to and mixed with the calcined powder, and then a green sheet is produced by a doctor blade method. The addition amount of Bi ₂ O ₃ powder, when expressed in a composition notation A site _{Pb 1-x-y-z} Sr x Ba y Bi z lead zirconate titanate crystals Kakiarawasa the chemical formula ABO ₃ It is desirable to add Bi ₂ O ₃ in an amount equal to or less than the amount corresponding to 0.015 mol of Bi.

  On the other hand, an internal electrode paste having a main component of Ag as the metal component and a Pd content ratio of 5% by mass or less in the metal component is produced. Ceramic particles may be mixed as a common material in the internal electrode paste.

  This internal electrode paste is applied to a green sheet to form an internal electrode pattern.

A plurality of green sheets on which the internal electrode patterns are formed are stacked, and finally, green sheets on which the internal electrode patterns are not formed are stacked to produce a stacked molded body. Bake at ℃. Accordingly, Bi ₂ O ₃ is dissolved in a lead zirconate titanate crystals in the piezoelectric ceramic.

In such a piezoelectric material, even when fired at a low temperature of 920 to 960 ° C., Bi ₂ O ₃ forms a liquid phase, wets the crystal grains of lead zirconate titanate crystal, and can improve the sinterability. After sintering, Bi ₂ O ₃ is almost completely dissolved in the lead zirconate titanate crystal, so that the piezoelectric ceramic is composed of crystal grains of lead titanate zirconate crystal and lead zirconate titanate. There is substantially no crystal phase other than the amorphous phase and the lead zirconate titanate crystal at the grain boundary of the crystal grains of the system crystal, and the piezoelectric characteristics can be improved.

Conventionally, Li, B, or the like that forms a liquid phase has been added to perform low-temperature firing, and low-temperature firing is possible, but at the grain boundaries of the PZT crystal grains, other than amorphous phases and PZT crystals There was a crystal phase, and the insulation resistance decreased with time, and the piezoelectric characteristics decreased. In the present invention, Bi ₂ O ₃ forming a liquid phase is used, and a liquid phase is formed at the time of firing to improve the sinterability, and a density of 7.7 g / cm ³ or more can be obtained. The solid phase is almost completely dissolved in the PZT crystal, and there is no amorphous phase or crystal phase other than the PZT crystal at the grain boundary of the PZT crystal grain, so that the piezoelectric characteristics can be improved. As a result, the insulation resistance value of the piezoelectric ceramic becomes 100 MΩ or more at 85 ° C., and insulation deterioration during continuous driving can be suppressed.

  The vibrator of the present invention may be used not only in an alternating electric field but also in a tactile switch that senses stress, a power generation device that senses a constant vibration as stress, and generates a charge corresponding to the stress. .

Piezoelectric powder containing lead zirconate titanate (PZT) in which part of Zr is substituted with Sb (material A: composition formula Pb _0.92 Ba _0.08 (Zn _1/3 Sb _2/3 ) _0.10 Zr _0.4425 Ti _0.4525 (Ni _1/2 Te _1/2 ) _0.005 O ₃ Oxide powder Pb ₃ O ₄ , TiO ₂ , ZrO ₂ , ZnO, Sb ₂ O ₃ , NiO, Fe ₂ O ₃ was weighed and calcined and synthesized), a binder, a dispersant, a plasticizer, and a solvent were kneaded for 24 hours by ball mill mixing to prepare a slurry.

  Using the obtained slurry, a green sheet having a thickness of about 50 μm was prepared by a doctor blade method. An internal electrode paste containing 70% by mass of Ag and 30% by mass of Pd as metal components was applied to the green sheet in a predetermined shape by a screen printing method, and the green sheet coated with the internal electrode paste was composed of 6 layers or 12 layers. Layers were laminated, and a green sheet not coated with the internal electrode paste was applied as an uppermost layer and pressed to produce two types of laminated molded bodies having different numbers of layers. This multilayer molded body was cut into a predetermined shape so that every other electrode pattern of the internal electrode layer was exposed on the side surface in the longitudinal direction, to produce a multilayer molded body for an element.

  And these laminated molded bodies for elements were degreased in the air at 500 ° C. for 1 hour, and then fired in the air at 1100 ° C. for 3 hours to obtain a laminated body 17.

  Next, in order to form the surface electrode layer 13a having a thickness of 3 μm on both main surfaces of the laminate 17, an electrode paste containing Ag and glass as an electrode material is applied to the main surface of the laminate 17 by a screen printing method. After that, electrode paste containing Ag and glass as external electrode materials is applied to both ends in the longitudinal direction x by dipping, and baked in the atmosphere at 700 ° C. for 10 minutes, as shown in FIG. Type piezoelectric elements 10 and 16 were produced.

  The dimensions of the main surface of the produced laminate 17 are 3.5 mm wide and 26 mm long, the piezoelectric layer 11 is 40 μm thick, the internal electrode layer 12 is 3 μm thick, and the laminate has a thickness of 298 μm ( 7-layer product) and 556 μm (13-layer product).

  Next, between the internal electrode layers 12 through the surface electrodes 13a of the multilayer piezoelectric elements 10 and 16, and between the internal electrode layer 12 and the surface electrode 13a, the multilayer piezoelectric elements 10 and 16 having 7 layers and 13 layers of piezoelectric layers are provided. , 100 V for 2 minutes to conduct polarization.

  Next, a support plate 14 of 42 alloy (made of alloy) having a thickness of 0.2 mm was prepared, an adhesive made of a thermosetting epoxy resin was applied to both main surfaces of the support plate 14, and the adhesive was applied. The laminated piezoelectric elements 10 and 16 are pressed against the portion of the plate 14, and the adhesive is repeatedly applied to the side adhesive layer 15 b of the exposed surface of the external electrode 13 b with a brush or the like, and 120 ° C. for 1 hour in the air. The adhesive is cured, a conductor layer 55 is formed on the surface of the side adhesive layer 15b, and the external electrode 13b and the support plate 14 are electrically joined to produce a bimorph type vibrator as shown in FIG. did. The conductor layer 55 was formed wider than the external electrode 13b.

  On the other hand, the area where the adhesive is applied to the support plate is narrowed, and the laminated piezoelectric elements 10 and 16 are pressed against this portion. As shown in FIG. 6 (a), the main surface of the laminate is only the bottom side adhesive layer. The sample of the comparative example joined by was produced. Further, as a comparative example, a laminated body having an element length after firing of 26.6 mm was prepared, and after firing, both ends of the laminated body were cut into a length of 26 mm by a dicing machine, and the internal electrode layers were alternately formed. A laminated body having 7 and 13 piezoelectric layers exposed on the side surfaces was prepared, and a surface electrode layer and an external electrode were formed in the same manner as described above. After polarization, the vibrating body was bonded to a support plate. Produced. The side surface state was a dicing cut surface.

  The number of piezoelectric layers laminated in each sample, the presence or absence of the side adhesive layer, the height of the side adhesive layer from the support plate (along with the thickness t ratio of the laminate), the thickness of the bottom adhesive layer, The side state is shown in Table 1. The height of the side adhesive layer from the support plate is, for example, Sample No. 2 shows a height (149 μm) that is ½ of the thickness t (298 μm) of the laminate from the support plate.

  When the side surface portion of the laminate was observed, in the sample of the present invention, as shown in FIG. 3A, the shape of the side surface of the piezoelectric layer was an uneven shape reflecting the particle shape of the piezoelectric material. Sample No. of the comparative example. In 20-22, as shown in FIG.3 (b), although the part which carried out the partial graining by a process is observed, it was substantially planar shape. In the sample of the present invention, the internal electrode layer did not reach the side surface of the laminate, and the external electrode was in a state of entering the opening of the internal electrode layer. On the other hand, Comparative Sample No. In 20-22, the internal electrode reached the side surface.

  The produced bimorph type vibrator was subjected to a temperature cycle test in which a temperature cycle of −40 ° C. to 85 ° C., −40 ° C., and 85 ° C. with a holding time of 30 minutes was performed 100 times, and the capacitance was 5% from the initial value. Table 2 shows that the above-mentioned decrease was regarded as defective, and the number of defects / number of tests was defined as the defect rate. The capacitance was measured using an impedance analyzer 4194A and the value at 1 kHz was measured.

  Further, the produced bimorph type vibrator was subjected to a high-temperature and high-humidity standing test at a temperature of 60 ° C., a humidity at room temperature of 90% Rh, and 1000 hours, and a capacitance decreased by 5% or more from the initial value. The defect number is determined by the number of defects / number of tests. 1-14 and 19-22.

  Further, the bonding strength between the support plate of the vibrating body and the laminated piezoelectric element was confirmed by a drop test. The test condition was that one end of the support plate of the vibrating body was fixed to a mounting member, this mounting member was fixed to a 100 g drop test jig, and dropped freely from a drop height of 100 cm to a drop point made of marble three times in total. The vibrating body was observed with a 40-fold microscope, and the laminate-type piezoelectric element and the support plate were separated or a crack occurred in the laminate-piezoelectric element was regarded as defective, and the defect rate was defined as the number of defects / number of tests.

  From Tables 1 and 2, when the height h of the side adhesive layer 15b exceeds 1/2 of the thickness t of the laminate 17 from the support plate 14, the side surface is a comparative example of a dicing cut surface ( In Sample Nos. 20 and 22), defects occurred in the temperature cycle test and the high-temperature and high-humidity test, but in the case of the present invention where the side surface is a burnt skin surface, the support plate for the side-side adhesive layer 15b It can be seen that even when the height h from 14 is increased, the external electrode 13b does not peel from the side surface of the multilayer body 17, and the defect rate is zero.

Using PbO, ZrO ₂ , TiO ₂ , SrCO ₃ , BaCO ₃ , ZnO, Sb ₂ O ₃ , Nb ₂ O ₅ powder as raw material powder, Pb _0.92 Ba _0.07 (Zn _1/3 Sb _{2 / 3} ) Weighed to _0.105 Zr _0.434 Ti _0.461 O ₃ and wet mixed in a ball mill for 24 hours. Next, this mixture was dehydrated and dried, and then calcined at 930 ° C. for 3 hours, and the calcined material was wet-ground again with a ball mill for 24 hours to obtain a calcined powder having a D ₅₀ of 0.5 to 0.7 μm. (Material B). With respect to this calcined powder, the peak intensity of the (101) peak (2θ≈30 °) of the lead zirconate titanate-based crystal in the X-ray diffraction measurement using the Cukα ray is I _1, and the peak of (111) (2θ When the peak intensity at ≈38 ° was I ₂ , I ₂ / I ₁ was found to be 0.147.

Thereafter, 0.01 mol of Bi ₂ O ₃ powder having a D ₅₀ of 0.5 to 0.7 μm was added, and an organic binder, a dispersant, a plasticizer, and a solvent were kneaded for 24 hours by ball mill mixing. A slurry was prepared.

  A green sheet having a thickness of about 50 μm was prepared in the same manner as in Example 1, and an internal electrode paste containing 100% by mass of Ag or 95% by mass of Ag and 5% by weight of Pd as a metal component was obtained by screen printing. Application to a predetermined shape was performed to form an internal electrode pattern. 6 or 12 layers of green sheets on which the internal electrode pattern is formed are stacked, one layer of green sheet with no electrode paste applied is pressed on the top layer, and pressurization is performed. The body was made. This multilayer molded body was cut into a predetermined shape so that every other electrode pattern of the internal electrode layer was exposed on the side surface in the longitudinal direction, to produce a multilayer molded body for an element.

  And these laminated molded bodies for elements were degreased in the air at 500 ° C. for 1 hour, and then fired in the air at 940 ° C. for 3 hours to obtain a laminated body 17.

  Next, in the same manner as in Example 1, the surface electrode layer 13a and the external electrode 13b were formed, and the laminated piezoelectric elements 10 and 16 as shown in FIG. 1 were produced.

  The dimensions of the main surface of the produced laminate 17 were 3.5 mm wide and 26 mm long, the piezoelectric layer 11 was 40 μm thick, and the internal electrode layer 12 was 3 μm thick.

  Next, polarization of the laminated piezoelectric elements 10 and 16 was performed in the same manner as in Example 1, and an adhesive made of a thermosetting epoxy resin was applied to both main surfaces of the support plate 14, and an adhesive was applied. The laminated piezoelectric elements 10 and 16 are pressed against the portion of the support plate 14, and further, an adhesive is applied over the side adhesive layer 15 b of the exposed surface of the external electrode 13 b with a brush or the like, and 120 ° C. for 1 hour in the air Then, the adhesive is cured, a conductor layer 55 is formed on the surface of the side adhesive layer 15b, the external electrode 13b and the support plate 14 are electrically joined, and a bimorph type vibrator as shown in FIG. Produced. The conductor layer 55 was formed wider than the external electrode 13b.

  For each sample, the number of piezoelectric layers stacked, the presence or absence of the side adhesive layer, the height of the side adhesive layer from the support plate, the thickness of the bottom adhesive layer, and the side state are shown in Sample No. 1 of Table 1. 15-18.

  When the side surface portion of the laminated body was observed, as shown in FIG. 3A, the shape of the side surface of the piezoelectric layer was an uneven shape reflecting the particle shape of the piezoelectric material. Further, the internal electrode layer did not reach the side surface of the laminate, and the external electrode was in a state of entering the opening of the internal electrode layer.

  The produced bimorph type vibrator was subjected to a temperature cycle test, a high-temperature and high-humidity standing test, and a drop test in the same manner as in Example 1, and the number of defects / number of tests was defined as the defect rate. 15-18. Moreover, it described also about the electrostatic capacitance.

  From these results, also in the case of using the material B as the piezoelectric layer, the metal component is mainly composed of Ag, and the internal electrode layer in which palladium is 5% by mass or less in the metal component is used, as in Example 1, It can be seen that even if the height h of the side adhesive layer 15b from the support plate 14 is increased, the external electrode 13b does not peel from the side surface of the laminate 17, and the defect rate is zero.

DESCRIPTION OF SYMBOLS 10, 16 ... Laminated piezoelectric element 11 ... Piezoelectric layer 12 ... Internal electrode layer 13a ... Surface electrode layer 13b ... External electrode 14 ... Support plate 15a ... Bottom side adhesion Agent layer 15b ... Side-side adhesive layer 17 ... Laminated body h ... Height of side-side adhesive layer from support plate ₁ ... Support plate on main surface of laminate on support plate side Height t from the thickness x of the laminate x longitudinal direction of the main surface

Claims (5)

The piezoelectric layers and internal electrode layers made of a ceramic made by alternately stacking, having a pair of side surfaces provided on the longitudinal end side of the pair of main surfaces and main surfaces formed on upper and lower surfaces that a product layer body, and the laminated piezoelectric element and a pair of external electrodes, wherein provided on each of the pair of side surfaces were electrically connected alternately with the inner electrode layer of the laminate,
A vibrating body comprising a support plate, wherein the main surface of the laminate is bonded,
The pair of side surfaces of the laminate are burnt skin surfaces, the main surface on the support plate side of the laminate and the support plate are joined by a bottom-side adhesive layer, and the exposed surface of the external electrode and the and the support plate is joined in a side-side adhesive layer, the height from the support plate of the side face side adhesive layer, from the support plate to the main surface of the support plate side of the laminate height Ri der above,
The end of the external electrode protrudes to the support plate side from the main surface of the laminate located on the support plate side,
The vibrating body , wherein the end portion of the external electrode is sandwiched between the bottom surface side adhesive layer and the side surface side adhesive material layer in the longitudinal direction of the main surface of the laminate .   The tip of the internal electrode layer is recessed from the side surface of the laminate, and the external electrode provided on the side surface of the laminate is joined to the tip of the internal electrode layer recessed from the side surface of the laminate. The vibrating body according to claim 1, wherein:   The said support plate consists of a metal or an alloy, and the conductor layer for electrically connecting the said external electrode and the said support plate is formed in the upper surface of the said side surface side adhesive bond layer. The vibrator described in 1.   4. The vibrating body according to claim 1, wherein the number of stacked piezoelectric layers in the stacked piezoelectric element is 7 or more. 5.   When the metal component of the internal electrode layer is made of silver or silver and palladium, and the internal electrode layer contains palladium, the content ratio of palladium in the metal component is 5% by mass or less. The vibrating body according to claim 1.

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