JPWO2016035604A1 - Blackened surface treated copper foil and copper foil with carrier foil - Google Patents

Blackened surface treated copper foil and copper foil with carrier foil Download PDF

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JPWO2016035604A1
JPWO2016035604A1 JP2016546563A JP2016546563A JPWO2016035604A1 JP WO2016035604 A1 JPWO2016035604 A1 JP WO2016035604A1 JP 2016546563 A JP2016546563 A JP 2016546563A JP 2016546563 A JP2016546563 A JP 2016546563A JP WO2016035604 A1 JPWO2016035604 A1 JP WO2016035604A1
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copper foil
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JP6539281B2 (en
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美智 溝口
美智 溝口
咲子 朝長
咲子 朝長
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Mitsui Mining and Smelting Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/04Wires; Strips; Foils
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    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
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    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C25D5/611Smooth layers
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    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils

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  • Engineering & Computer Science (AREA)
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  • Electrochemistry (AREA)
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Abstract

銅粒子を用いた微細粗化により黒色化された処理表面を有する黒色化表面処理銅箔が提供される。この黒色化表面処理銅箔であって、前記処理表面は、JIS B 0601(2001)に準拠して測定される、粗さ曲線の二乗平均平方根傾斜RΔqが25以下であり、かつ、JIS Z 8729(2004)及びJIS Z 8722(2009)に準拠して測定されるL*a*b*表色系の明度L*が30以下である、黒色化表面処理銅箔が提供される。本発明によれば、樹脂フィルムに貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、銅箔エッチング後のフィルム透明性を高くすることができ、なおかつ、ストライプ又はメッシュ状配線の視認性を低減するのに十分な望ましい黒色を実現することが可能な黒色化表面処理銅箔を提供することができる。Provided is a blackened surface-treated copper foil having a treated surface blackened by fine roughening using copper particles. In this blackened surface-treated copper foil, the treated surface has a root mean square slope RΔq of a roughness curve measured in accordance with JIS B 0601 (2001) of 25 or less, and JIS Z 8729. (2004) and a blackened surface-treated copper foil having a lightness L * of an L * a * b * color system measured in accordance with JIS Z 8722 (2009) of 30 or less. According to the present invention, when being bonded to a resin film and processed into a stripe or mesh wiring for a touch panel, the film transparency after copper foil etching can be increased, and the stripe or mesh wiring It is possible to provide a blackened surface-treated copper foil capable of realizing a desirable black color sufficient to reduce the visibility of the surface.

Description

本発明は、黒色化表面処理銅箔及びキャリア付銅箔に関するものである。   The present invention relates to a blackened surface-treated copper foil and a copper foil with a carrier.

近年、携帯電話、携帯情報端末等の様々な電子機器の操作部にタッチパネルが採用されている。タッチパネルは、液晶表示装置等の表示用パネルの表示面上に、指先やペン先等の接触位置を検出する入力装置を組み合わせた電子部品であり、使用者が画面の操作手順を見ながら容易に入力操作を行える点で利便性が高い。タッチパネルには、その構造及び検出方式の違いにより、抵抗膜型や静電容量型等の様々なタイプが存在する。   In recent years, touch panels have been adopted for operation units of various electronic devices such as mobile phones and portable information terminals. A touch panel is an electronic component that combines an input device that detects the contact position of a fingertip or pen tip on the display surface of a display panel such as a liquid crystal display device. Convenient in that input operations can be performed. There are various types of touch panels such as a resistance film type and a capacitance type depending on the structure and detection method.

特に、静電容量方式タッチパネルは、指先と導電膜との間での静電容量の変化を捉えて位置を検出するものであり、指がパネル表面に近づくだけで静電結合が起きる性質を活かして、接触する前にカーソルを表示するという表現や操作が可能である。静電容量方式には表面型と投影型の2種類が存在する。図1に示されるように、投影型の静電容量方式タッチパネル10は、x軸方向及びy軸方向にそれぞれパターニングされた2層の透明電極層12,12’を絶縁層14を挟んで積層し、タッチされた位置を電極間の静電容量の変化から検出するものであり、高精度で多点検出可能なため、スマートフォン等の携帯機器に採用されている。なお、図1においては、透明電極層12/絶縁層14/透明電極層12’の積層物はガラス基板16と保護カバー18に挟持されている。   In particular, the capacitive touch panel detects the position by detecting the change in capacitance between the fingertip and the conductive film, and takes advantage of the fact that electrostatic coupling occurs when the finger is close to the panel surface. Thus, it is possible to express and operate to display a cursor before touching. There are two types of electrostatic capacity methods: surface type and projection type. As shown in FIG. 1, the projected capacitive touch panel 10 includes two transparent electrode layers 12 and 12 ′ that are patterned in the x-axis direction and the y-axis direction, with an insulating layer 14 interposed therebetween. The touched position is detected from the change in capacitance between the electrodes, and can be detected with high accuracy at multiple points. Therefore, the touched position is employed in portable devices such as smartphones. In FIG. 1, the laminate of transparent electrode layer 12 / insulating layer 14 / transparent electrode layer 12 ′ is sandwiched between a glass substrate 16 and a protective cover 18.

近年、静電容量方式タッチパネルにおいて、従来広く用いられてきたITO(インジウム錫酸化物)透明電極に代えて、銅箔をストライプ状又はメッシュ状の銅配線に加工して用いることが提案されている。このような銅配線はITO透明電極よりも低抵抗であり、それ故、より高感度で動作安定性に優れたタッチパネルを実現できる。例えば、特許文献1(特開2013−206315号公報)には、フィルム表面と裏面の透視が必要な部分のそれぞれにストライプ状又はメッシュ状の銅配線を備えたタッチパネルセンサーが開示されている。銅配線は本来、金属特有の鏡面反射のため反射率が高くなるが、特許文献1のタッチパネルセンサーでは、銅配線の視認される側の面を酸化膜化して黒色化することで、銅配線からの反射を低く抑え、それによりタッチパネルセンサーとしてディスプレイに搭載した時のコントラストの低下を抑制している。また、このストライプ状又はメッシュ状の銅配線の形成は、銅箔をフィルムに貼り合わせた積層体にフォトリソグラフィによるパターニング及び銅箔のエッチング除去を施すことにより行われ、その後、銅配線の視認される側にアルカリ薬液を用いて黒色化処理が行われる。   In recent years, it has been proposed to use a copper foil processed into a striped or mesh copper wiring instead of the ITO (indium tin oxide) transparent electrode that has been widely used in the past in capacitive touch panels. . Such a copper wiring has a lower resistance than the ITO transparent electrode, and therefore, a touch panel with higher sensitivity and excellent operational stability can be realized. For example, Patent Document 1 (Japanese Patent Application Laid-Open No. 2013-206315) discloses a touch panel sensor including striped or meshed copper wirings in each of the portions where the front surface and the back surface of the film need to be seen through. Although the copper wiring is inherently highly reflective due to the specular reflection unique to the metal, the touch panel sensor of Patent Document 1 uses an oxide film on the visible side of the copper wiring to blacken the surface, so that the copper wiring The reflection of the light is kept low, thereby suppressing the decrease in contrast when mounted as a touch panel sensor on the display. In addition, the formation of the striped or meshed copper wiring is performed by performing patterning by photolithography and etching removal of the copper foil on the laminated body in which the copper foil is bonded to the film, and then the copper wiring is visually recognized. The blackening treatment is performed using an alkaline chemical solution on the side of the surface.

一方、プラズマディスプレイ前面パネル用の電磁波遮蔽導電性メッシュに用いられる銅箔として、黒色化又は褐色化処理を施した銅箔が知られている。例えば、特許文献2(WO2007/007870)には、未処理銅箔の表面に、ニッケル系黒色化処理面やコバルト系黒色化処理面を備える表面処理銅箔が開示されている。また、特許文献3(特開2005−187913号公報)には、多段階に行う銅めっきにより形成された褐色面を備える褐色化表面処理銅箔が開示されている。   On the other hand, as a copper foil used for an electromagnetic wave shielding conductive mesh for a plasma display front panel, a copper foil subjected to blackening or browning is known. For example, Patent Document 2 (WO2007 / 007870) discloses a surface-treated copper foil having a nickel-based blackening treatment surface or a cobalt-based blackening treatment surface on the surface of an untreated copper foil. Moreover, patent document 3 (Unexamined-Japanese-Patent No. 2005-187913) has disclosed the browning surface treatment copper foil provided with the brown surface formed by the copper plating performed in multistep.

特開2013−206315号公報JP 2013-206315 A 国際公開第2007/007870号International Publication No. 2007/007870 特開2005−187913号公報JP-A-2005-187913

ところで、引用文献2や引用文献3に開示されるような予め黒色化又は褐色化された表面処理銅箔をタッチパネルセンサー用の配線材料として使用できれば、黒色化処理を別途行う必要が無くなるため好都合である。その一方で、特許文献1のようなストライプ状等の銅配線は銅箔をエッチング除去して形成されるため、液晶表示装置等のタッチパネルに表示される画像を鮮明にするためには、銅箔がエッチングされた箇所におけるフィルム(例えばPETフィルム等の樹脂フィルム)の透明性の確保が重要となる。というのも、銅箔がエッチングされた箇所におけるフィルムの透明性(以下、銅箔エッチング後のフィルムの透明性という)は、そこに存在していた銅箔の表面粗さ等の表面プロファイルがフィルム表面に引き継がれるため、銅箔の表面プロファイルに大きく左右されるからである。この点、特許文献2に記載の表面処理銅箔は、銅箔エッチング後のフィルムの透明性には優れるが、銅エッチング液に対し銅よりも溶解し難いニッケル系黒色化処理又はコバルト系黒色化処理が施されているため、エッチング時の線バラツキが生じたり、あるいは銅エッチング液が汚染されて液濃度を制御しづらくなる。また、特許文献3に記載の表面処理銅箔は、エッチング阻害要因となる異種金属を褐色化処理表面に含まないため、特許文献2の黒色化処理のようなエッチング時の線バラツキは生じにくいものの、多段階のヤケめっきにより、銅箔エッチング後のフィルムの透明性が悪くなるため、バックライトが散乱してしまい、液晶表示部の画像が鮮明に見えづらくなる。   By the way, if the surface-treated copper foil previously blackened or browned as disclosed in the cited document 2 or the cited document 3 can be used as a wiring material for the touch panel sensor, it is advantageous because it is not necessary to separately perform the blackening process. is there. On the other hand, since the copper wiring of stripe shape etc. like patent document 1 is formed by etching away copper foil, in order to make the image displayed on touch panels, such as a liquid crystal display device clear, copper foil It is important to ensure the transparency of a film (for example, a resin film such as a PET film) at a location where is etched. Because the transparency of the film at the location where the copper foil was etched (hereinafter referred to as the transparency of the film after etching the copper foil), the surface profile such as the surface roughness of the copper foil that existed there was a film. This is because it is inherited by the surface and is greatly influenced by the surface profile of the copper foil. In this respect, the surface-treated copper foil described in Patent Document 2 is excellent in the transparency of the film after etching the copper foil, but is not easily dissolved in copper etching solution than copper, but is nickel-based blackening treatment or cobalt-based blackening. Since the treatment is performed, line variations during etching occur, or the copper etching solution is contaminated, making it difficult to control the solution concentration. Moreover, since the surface-treated copper foil described in Patent Document 3 does not include a dissimilar metal that causes etching inhibition on the surface of the browning treatment, the line variation during etching as in the blackening treatment of Patent Literature 2 is less likely to occur. The multi-stage burn plating deteriorates the transparency of the film after etching the copper foil, so that the backlight is scattered and the image on the liquid crystal display section is difficult to see clearly.

本発明者らは、今般、銅粒子を用いた微細粗化により銅箔を黒色化し、それにより処理表面の凹凸及びその傾斜を低減することで、樹脂フィルムに貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、銅箔エッチング後のフィルムの透明性を高くすることができ、なおかつ、ストライプ又はメッシュ状配線の視認性を低減するのに十分な望ましい黒色を実現できるとの知見を得た。   The inventors of the present invention have blackened the copper foil by fine roughening using copper particles, thereby reducing the unevenness of the treatment surface and the inclination thereof, thereby bonding the resin film to a stripe or mesh for a touch panel. When processed into a shaped wiring, the transparency of the film after copper foil etching can be increased, and a desirable black color sufficient to reduce the visibility of stripes or mesh-like wiring can be realized. Obtained knowledge.

したがって、本発明の目的は、樹脂フィルムに貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、銅箔エッチング後のフィルム透明性を高くすることができ、なおかつ、ストライプ又はメッシュ状配線の視認性を低減するのに十分な望ましい黒色を実現することが可能な、タッチパネル用電極材料の用途に適した黒色化表面処理銅箔を提供することにある。また、本発明の他の目的は、そのような黒色化表面処理銅箔を備えたキャリア箔付銅箔を提供することにある。   Therefore, the object of the present invention is to increase the film transparency after etching a copper foil when it is bonded to a resin film and processed into a stripe or mesh wiring for a touch panel, and the stripe or mesh An object of the present invention is to provide a blackened surface-treated copper foil suitable for use as an electrode material for a touch panel, capable of realizing a desirable black color sufficient to reduce the visibility of a wire-like wiring. Another object of the present invention is to provide a copper foil with a carrier foil provided with such a blackened surface-treated copper foil.

本発明の一態様によれば、銅粒子を用いた微細粗化により黒色化された処理表面を有する黒色化表面処理銅箔であって、
前記処理表面は、JIS B 0601(2001)に準拠して測定される、粗さ曲線の二乗平均平方根傾斜RΔqが25以下であり、かつ、JIS Z 8729(2004)及びJIS Z 8722(2009)に準拠して測定されるL表色系の明度Lが30以下である、黒色化表面処理銅箔が提供される。
According to one aspect of the present invention, a blackened surface-treated copper foil having a treated surface blackened by fine roughening using copper particles,
The treated surface has a root mean square slope RΔq of a roughness curve measured in accordance with JIS B 0601 (2001) of 25 or less, and conforms to JIS Z 8729 (2004) and JIS Z 8722 (2009). Provided is a blackened surface-treated copper foil having a lightness L * of L * a * b * color system measured in conformity with 30 or less.

本発明の他の一態様によれば、キャリア箔と、該キャリア箔上に設けられた剥離層と、該剥離層上に前記処理表面を外側にして設けられた本発明の黒色化表面処理銅箔とを備えた、キャリア箔付銅箔が提供される。   According to another aspect of the present invention, a carrier foil, a release layer provided on the carrier foil, and the blackened surface-treated copper of the invention provided on the release layer with the treated surface outside. A copper foil with a carrier foil is provided.

投影型の静電容量方式タッチパネルの一般的な構成を示す図である。It is a figure which shows the general structure of a projection type capacitive touch panel. タッチパネル用の銅配線の一例を示す図である。It is a figure which shows an example of the copper wiring for touchscreens. タッチパネル用の銅配線の他の一例を示す図である。It is a figure which shows another example of the copper wiring for touchscreens.

黒色化表面処理銅箔
本発明の銅箔は黒色化表面処理銅箔である。この黒色化表面処理銅箔は、銅粒子を用いた微細粗化により黒色化された処理表面を有する。銅粒子を用いた微細粗化により黒色化されることで処理表面の粗さ曲線は凹凸が小さいものとなっており、とりわけ凹凸の傾きが小さいことで特性付けられる。この凹凸の傾きが小さい処理表面は、JIS B 0601(2001)に準拠して測定される、粗さ曲線の二乗平均平方根傾斜RΔqが25以下であることによって規定される。このような凹凸の傾き、すなわちRΔqが小さいことで、樹脂フィルム(例えばPETフィルム)に貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、銅箔エッチング後のフィルムの透明性を有意に高くすることができる。前述のとおり、液晶表示装置等のタッチパネルに表示される画像を鮮明に表示させるためには銅箔エッチング後のフィルムの透明性の確保が重要となるが、本発明の黒色化表面処理銅箔を用いることでこのフィルムの透明性を実現することができる。しかも、この黒色化表面処理銅箔はストライプ又はメッシュ状配線の視認性を低減するのに十分な望ましい黒色を実現できるものであり、この特性はJIS Z 8729(2004)及びJIS Z 8722(2009)に準拠して測定されるL表色系の明度Lが30以下であることによって規定される。前述のとおり、銅配線は本来、金属特有の鏡面反射のため反射率が高くなるが、上記のような明度Lに黒色化することで、タッチパネルセンサーとしてディスプレイに搭載した時の表示画像を鮮明にすることができる。このように、本発明によれば、樹脂フィルムに貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、銅箔エッチング後のフィルム透明性を高くすることができ、なおかつ、ストライプ又はメッシュ状配線の視認性を低減するのに十分な望ましい黒色を実現することが可能な黒色化表面処理銅箔が提供される。
Blackened surface-treated copper foil The copper foil of the present invention is a blackened surface-treated copper foil. This blackened surface-treated copper foil has a treated surface that is blackened by fine roughening using copper particles. By being blackened by fine roughening using copper particles, the roughness curve of the treated surface has small irregularities, and is characterized by the small inclination of the irregularities. The treatment surface having a small inclination of the unevenness is defined by a root mean square slope RΔq of the roughness curve measured in accordance with JIS B 0601 (2001) being 25 or less. Because of the small slope of such irregularities, that is, RΔq, when the film is bonded to a resin film (for example, a PET film) and processed into a stripe or mesh wiring for a touch panel, the transparency of the film after etching the copper foil Can be significantly increased. As described above, in order to clearly display an image displayed on a touch panel such as a liquid crystal display device, it is important to ensure transparency of the film after etching the copper foil. By using this, the transparency of this film can be realized. Moreover, this blackened surface-treated copper foil can achieve a desirable black color sufficient to reduce the visibility of stripes or mesh-like wiring, and this characteristic is JIS Z 8729 (2004) and JIS Z 8722 (2009). The lightness L * of the L * a * b * color system measured in accordance with the above is defined as 30 or less. As described above, the copper wiring originally has a high reflectivity due to the specular reflection characteristic of metal, but by blackening the lightness L * as described above, the display image when mounted on a display as a touch panel sensor is clear. Can be. Thus, according to the present invention, when processed into a stripe for a touch panel or a mesh-like wiring by being bonded to a resin film, the film transparency after copper foil etching can be increased, and the stripe Alternatively, a blackened surface-treated copper foil capable of realizing a desirable black color sufficient to reduce the visibility of the mesh wiring is provided.

したがって、本発明の黒色化表面処理銅箔は、タッチパネルセンサー用の配線材料に用いられるのが好ましく、従来タッチパネルセンサーに広く用いられてきたITO透明電極よりも低抵抗なより良い代替材料となる。本発明の黒色化表面処理銅箔がタッチパネルセンサー用の配線材料に用いられる場合、図2Aに示されるように、銅配線22とフィルム24が積層された構成において、視認される側(図2Aではフィルム24側)に黒色化された処理表面22aを向けて配置されるのが好ましい。また、図2Bに示されるように、フィルム24の両面に銅配線22,22’を積層させてもよいが、この場合は、少なくとも上側の銅配線22’は視認される側(図2Bではフィルム24に対して配線22’側)に黒色化された処理表面22a’を向けて配置されるのが好ましく、両側の銅配線22,22’が視認される側に黒色化された処理表面22a,22a’を向けていてもよい。図2A及び2Bのいずれの構成においても、銅配線は視認される側と反対側にも黒色化された処理表面を有していてよい。   Therefore, the blackened surface-treated copper foil of the present invention is preferably used as a wiring material for a touch panel sensor, and becomes a better alternative material having a lower resistance than the ITO transparent electrode that has been widely used in conventional touch panel sensors. When the blackened surface-treated copper foil of the present invention is used as a wiring material for a touch panel sensor, as shown in FIG. 2A, in the configuration in which the copper wiring 22 and the film 24 are laminated (in FIG. 2A, It is preferable to arrange the blackened treated surface 22a facing the film 24 side). Further, as shown in FIG. 2B, copper wirings 22 and 22 ′ may be laminated on both surfaces of the film 24. In this case, at least the upper copper wiring 22 ′ is the side that is visually recognized (in FIG. 2B, the film It is preferable to arrange the blackened treatment surface 22a ′ on the wiring 22 ′ side with respect to 24, and the blackened treatment surface 22a on the side where the copper wirings 22 and 22 ′ on both sides are visually recognized. 22a 'may be directed. 2A and 2B, the copper wiring may have a blackened treatment surface on the side opposite to the side to be visually recognized.

本発明の黒色化表面処理銅箔は、銅粒子を用いた微細粗化により黒色化された処理表面を有する。このように本発明の黒色化された処理表面は銅粒子で構成されるため、エッチング性に優れる。すなわち、特許文献2に開示されるような銅エッチング液に対し銅よりも溶解し難いニッケル系黒色化処理又はコバルト系黒色化処理は、エッチング時の線バラツキが生じたり、あるいは銅エッチング液が汚染されて液濃度を制御しづらくなるが、そのような欠点が解消される。したがって、銅粒子が、銅及び不可避不純物からなるのが好ましい。銅粒子の粒径は特に限定されない。これは、銅粒子の粒径は、粗さ曲線の二乗平均平方根傾斜RΔq、粗さ曲線要素の平均高さRc、算術平均粗さRa等の表面性状パラメータに反映され、それらのパラメータで評価すれば足りるからである。もっとも、銅粒子の粒径は、10nm〜250nmが好ましいとはいえる。銅粒子の形状は、特に限定されないが、粉落ちを効果的に防止する観点からすれば、略球状であることが好ましい。   The blackened surface-treated copper foil of the present invention has a treated surface blackened by fine roughening using copper particles. Thus, since the blackened process surface of this invention is comprised with a copper particle, it is excellent in etching property. In other words, nickel-based blackening treatment or cobalt-based blackening treatment, which is less soluble than copper with respect to the copper etching solution disclosed in Patent Document 2, causes line variations during etching or contamination of the copper etching solution. As a result, it becomes difficult to control the liquid concentration, but such drawbacks are eliminated. Therefore, it is preferable that a copper particle consists of copper and an unavoidable impurity. The particle size of the copper particles is not particularly limited. This is because the particle diameter of the copper particles is reflected in the surface property parameters such as the root mean square slope RΔq of the roughness curve, the average height Rc of the roughness curve element, the arithmetic average roughness Ra, and the like, and the evaluation is made using those parameters. This is enough. However, it can be said that the particle size of the copper particles is preferably 10 nm to 250 nm. The shape of the copper particles is not particularly limited, but is preferably substantially spherical from the viewpoint of effectively preventing powder falling off.

本発明の黒色化表面処理銅箔の処理表面は、粗さ曲線の二乗平均平方根傾斜RΔqが25以下である。RΔqは、JIS B 0601(2001)に準拠して測定される、粗さ曲線の基準長さlにおける局部傾斜dZ/dxの二乗平均平方根であり、以下の式:

Figure 2016035604
によって規定されるものである。このようにRΔqは凹凸の傾斜を平均化したパラメータであり、処理表面におけるコブの有無を明確に示唆する。すなわち、RΔqが高すぎるとコブや凹凸が大きすぎることを意味し、銅箔エッチング後のフィルムの透明性が悪くなる。この点、RΔqが25以下であると処理表面におけるコブや凹凸が小さくなるため、銅箔エッチング後のフィルムの透明性が向上する。好ましいRΔqは3〜25であり、さらに好ましくは3〜10であり、特に好ましくは3〜8であり、最も好ましくは4〜7である。このような範囲であると、銅箔エッチング後のフィルムの透明性をさらに向上することができ、また、微細粗化量を減らしてコブで黒くすることもある程度可能となる。The treated surface of the blackened surface-treated copper foil of the present invention has a root mean square slope RΔq of the roughness curve of 25 or less. RΔq is the root mean square of the local slope dZ / dx at the reference length l of the roughness curve, measured according to JIS B 0601 (2001), and has the following formula:
Figure 2016035604
It is prescribed by. Thus, RΔq is a parameter that averages the slope of the unevenness, and clearly indicates the presence or absence of bumps on the treated surface. That is, when RΔq is too high, it means that the bumps and irregularities are too large, and the transparency of the film after etching the copper foil is deteriorated. In this regard, when RΔq is 25 or less, bumps and irregularities on the treated surface are reduced, and thus the transparency of the film after the copper foil etching is improved. Preferred RΔq is 3 to 25, more preferably 3 to 10, particularly preferably 3 to 8, and most preferably 4 to 7. Within such a range, the transparency of the film after the copper foil etching can be further improved, and it becomes possible to some extent to reduce the amount of fine roughening and make it black with a bump.

本発明の黒色化表面処理銅箔の処理表面は、JIS Z 8729(2004)及びJIS Z 8722(2009)に準拠して測定されるL表色系の明度Lが30以下であり、好ましくは20以下、より好ましくは15以下、さらに好ましくは13以下である。下限値は特に限定されないが、例えば0.5以上である。明度Lはその値が低いほどより黒く見えることを意味し、その値が高いほどより白っぽく見えることを意味する。この点、上記範囲内であると、樹脂フィルムに貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、ストライプ又はメッシュ状配線の視認性をより効果的に低減することができる。その結果、タッチパネルセンサーとしてディスプレイに搭載した時の表示画像を鮮明にすることができる。The treated surface of the blackened surface-treated copper foil of the present invention has an L * a * b * color system brightness L * of 30 or less measured according to JIS Z 8729 (2004) and JIS Z 8722 (2009). Preferably, it is 20 or less, more preferably 15 or less, and still more preferably 13 or less. Although a lower limit is not specifically limited, For example, it is 0.5 or more. The lightness L * means that the lower the value, the darker the color appears, and the higher the value, the brighter the color appears. In this respect, when it is within the above range, the visibility of the stripe or mesh wiring can be more effectively reduced when it is bonded to a resin film and processed into a stripe or mesh wiring for a touch panel. . As a result, a display image when mounted on a display as a touch panel sensor can be made clear.

本発明の黒色化表面処理銅箔の処理表面は、JIS Z 8701(1999)及びJIS Z 8722(2009)に準拠して測定されるXYZ表色系のY値が10以下であるのが好ましく、より好ましくは5以下である。下限値は特に限定されないが、典型的には0.5以上である。Y値は視感反射率と呼ばれるものであり、緑色と反射率を併せ持つパラメータである。特に、Y値が10以下であると、反射率が低くなる結果、ディスプレイ部のセンサーが反射して白っぽく見えるといった現象を効果的に回避ないし抑制することができる点で好ましい。   The treated surface of the blackened surface-treated copper foil of the present invention preferably has a XYZ color system Y value of 10 or less measured according to JIS Z 8701 (1999) and JIS Z 8722 (2009). More preferably, it is 5 or less. The lower limit is not particularly limited, but is typically 0.5 or more. The Y value is called luminous reflectance, and is a parameter having both green and reflectance. Particularly, it is preferable that the Y value is 10 or less in that the phenomenon that the sensor of the display unit is reflected and looks whitish as a result of the low reflectance can be effectively avoided or suppressed.

本発明の黒色化表面処理銅箔の処理表面は、JIS Z 8729(2004)及びJIS Z 8722(2009)に準拠して測定されるL表色系のa値が4以下であるのが好ましく、より好ましくは−5〜3、さらに好ましくは−3〜2である。L表色系のa値はその値が高いほど赤みがかった色調であることを意味するが、人間の目には赤みがかった色調が目につきやすい傾向がある。この点、タッチパネルセンサー用の配線材料の用途において、a値が上記のような範囲であると赤みが強調されず配線がより目立ちにくくなる点でより望ましい色調を呈するといえる。The treated surface of the blackened surface-treated copper foil of the present invention has an L * a * b * color system a * value of 4 or less measured according to JIS Z 8729 (2004) and JIS Z 8722 (2009). More preferably, it is -5-3, More preferably, it is -3-2. The a * value in the L * a * b * color system means that the higher the value, the reddish color tone, but the reddish color tone tends to be noticeable to human eyes. In this regard, in the application of the wiring material for the touch panel sensor, it can be said that if the a * value is in the above range, redness is not emphasized and the wiring becomes more inconspicuous so that a more desirable color tone is exhibited.

本発明の黒色化表面処理銅箔の処理表面は、JIS B 0601(2001)に準拠して測定される粗さ曲線要素の平均高さRcが0.1〜1.0μmであるのが好ましく、より好ましくは0.1〜0.8μm、さらに好ましくは0.1〜0.5μm、特に好ましくは0.2〜0.4μmである。上記範囲内であると、樹脂フィルムに貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、回路剥がれが起こりにくく、また、回路パターンの直線性も実現しやすい。   The treated surface of the blackened surface-treated copper foil of the present invention preferably has an average height Rc of a roughness curve element measured in accordance with JIS B 0601 (2001) of 0.1 to 1.0 μm. More preferably, it is 0.1-0.8 micrometer, More preferably, it is 0.1-0.5 micrometer, Most preferably, it is 0.2-0.4 micrometer. When the thickness is within the above range, circuit peeling hardly occurs and the linearity of the circuit pattern is also easily realized when bonded to a resin film and processed into a touch panel stripe or mesh wiring.

本発明の黒色化表面処理銅箔の処理表面は、JIS B 0601(2001)に準拠して測定される算術平均粗さRaが0.10〜0.35μmであるのが好ましく、より好ましくは0.15〜0.25μm、さらに好ましくは0.20〜0.25μmである。上記範囲内であると、樹脂フィルムに貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、回路剥がれが起こりにくく、また、回路パターンの直線性も実現しやすい。   The treated surface of the blackened surface-treated copper foil of the present invention preferably has an arithmetic average roughness Ra measured in accordance with JIS B 0601 (2001) of 0.10 to 0.35 μm, more preferably 0. .15 to 0.25 μm, more preferably 0.20 to 0.25 μm. When the thickness is within the above range, circuit peeling hardly occurs and the linearity of the circuit pattern is also easily realized when bonded to a resin film and processed into a touch panel stripe or mesh wiring.

本発明の黒色化表面処理銅箔は、黒色化表面処理銅箔を前記処理表面側で厚さ100μmのポリエチレンテレフタレート樹脂(PET)フィルムの片面に貼り合わせた後、エッチングにより銅箔を除去した場合に、残されたポリエチレンテレフタレート樹脂フィルムが60%以下のヘイズ値(Haze)を有するようなものが好ましく、より好ましくは50%以下、さらに好ましくは45%以下、特に好ましくは20%以下、最も好ましくは10%以下である。下限値は特に限定されないが、例えば1%以上である。ヘイズ値は曇り度を意味することから、上記のように低いヘイズ値は高い透明性を意味する。したがって、このような構成の黒色化表面処理銅箔は、樹脂フィルムに貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、銅箔エッチング後のフィルムの透明性を高くすることができる。なお、ヘイズ値は、黒色化表面処理銅箔とPETフィルム(厚さ100μm)とを熱圧着して銅張積層板を作製した後、当該表面処理銅箔をエッチング除去し、残ったPETフィルムを、市販のヘイズメーター(例えば、日本電色工業株式会社製、NDH5000)を用いて、JIS K 7136(2000)に準じて、23℃でのフィルムのヘイズ値(Haze:単位%)を3箇所測定し、その平均値を求めることにより行えばよい。   When the blackened surface-treated copper foil of the present invention is bonded to one side of a polyethylene terephthalate resin (PET) film having a thickness of 100 μm on the treated surface side and then removed by etching. In addition, it is preferable that the remaining polyethylene terephthalate resin film has a haze value (Haze) of 60% or less, more preferably 50% or less, still more preferably 45% or less, particularly preferably 20% or less, and most preferably. Is 10% or less. Although a lower limit is not specifically limited, For example, it is 1% or more. Since the haze value means haze, a low haze value as described above means high transparency. Therefore, when the blackened surface-treated copper foil having such a configuration is bonded to a resin film and processed into a stripe or mesh wiring for a touch panel, the transparency of the film after etching the copper foil is increased. Can do. The haze value was determined by thermo-compressing a blackened surface-treated copper foil and a PET film (thickness 100 μm) to produce a copper-clad laminate, and then removing the surface-treated copper foil by etching. Using a commercially available haze meter (for example, NDH5000, manufactured by Nippon Denshoku Industries Co., Ltd.), the haze value (Haze: unit%) of the film at 23 ° C. was measured at three locations according to JIS K 7136 (2000). The average value may be obtained.

本発明の黒色化表面処理銅箔の厚さは特に限定されないが、0.1〜18μmが好ましく、より好ましくは0.5〜10μm、さらに好ましくは0.5〜7μm、特に好ましくは0.5〜5μm、最も好ましくは0.5〜3μmである。なお、本発明の黒色化表面処理銅箔は、通常の銅箔の表面に黒色粗化を行ったものに限らず、キャリア箔付銅箔の銅箔表面の黒色粗化を行ったものであってもよい。   The thickness of the blackened surface-treated copper foil of the present invention is not particularly limited, but is preferably 0.1 to 18 μm, more preferably 0.5 to 10 μm, still more preferably 0.5 to 7 μm, and particularly preferably 0.5. -5 μm, most preferably 0.5-3 μm. In addition, the blackened surface-treated copper foil of the present invention is not limited to the surface of the normal copper foil subjected to black roughening, but is obtained by performing black roughening of the copper foil surface of the copper foil with carrier foil. May be.

黒色化表面処理銅箔の製造方法
本発明による黒色化表面処理銅箔の好ましい製造方法の一例を説明するが、本発明による黒色化表面処理銅箔は以下に説明する方法に限らず、銅粒子を用いた微細粗化が行われるかぎり、あらゆる方法によって製造されたものであってよい。
Method for Producing Blackened Surface Treated Copper Foil An example of a preferred method for producing a blackened surface treated copper foil according to the present invention will be described. However, the blackened surface treated copper foil according to the present invention is not limited to the method described below, and copper particles As long as fine roughening using is performed, it may be produced by any method.

(1)銅箔の準備
黒色化表面処理銅箔の製造に使用する銅箔として、電解銅箔及び圧延銅箔の双方の使用が可能である。また、銅箔は、無粗化の銅箔であってもよいし、予備的粗化を施したものであってもよい。銅箔の厚さは特に限定されないが、0.1〜18μmが好ましく、より好ましくは0.5〜10μm、さらに好ましくは0.5〜7μm、特に好ましくは0.5〜5μm、最も好ましくは0.5〜3μmである。銅箔がキャリア箔付銅箔の形態で準備される場合には、銅箔は、無電解銅めっき法及び電解銅めっき法等の湿式成膜法、スパッタリング及び化学蒸着等の乾式成膜法、又はそれらの組合せにより形成したものであってよい。
(1) Preparation of copper foil As copper foil used for manufacture of blackened surface-treated copper foil, both electrolytic copper foil and rolled copper foil can be used. Further, the copper foil may be a non-roughened copper foil or a pre-roughened copper foil. The thickness of the copper foil is not particularly limited, but is preferably 0.1 to 18 μm, more preferably 0.5 to 10 μm, still more preferably 0.5 to 7 μm, particularly preferably 0.5 to 5 μm, and most preferably 0. 0.5-3 μm. When the copper foil is prepared in the form of a copper foil with a carrier foil, the copper foil is a wet film forming method such as an electroless copper plating method and an electrolytic copper plating method, a dry film forming method such as sputtering and chemical vapor deposition, Alternatively, it may be formed by a combination thereof.

銅粒子による微細粗化が行われることになる銅箔の表面は、うねりの最大高低差(Wmax)が2.0μm以下であるのが好ましく、より好ましくは1.2μm以下、さらに好ましくは0.8μm以下である。下限値は特に限定されないが、例えば0.1μm以上である。上記範囲内であると、銅粒子による微細粗化を行った際に、粗さ曲線の二乗平均平方根傾斜RΔqで規定される凹凸の傾きを低減することができ、樹脂フィルム(例えばPETフィルム)に貼り合わせてタッチパネル用のストライプ又はメッシュ状の配線に加工された場合に、銅箔エッチング後のフィルムの透明性を有意に高くすることができる。なお、「うねりの最大高低差(Wmax)」とは、三次元表面構造解析顕微鏡を用いて得られる試料表面の凹凸に関する情報から、うねりに係る波形データをフィルタリングして抽出した波形データにおける高低差の最大値(波形の最大ピーク高さと最大バレー深さの和)をいい、例えば、測定機器としてzygo New View 5032(Zygo社製)を用い、解析ソフトにMetro Pro Ver.8.0.2を用いて、低周波フィルタを11μmの条件を採用することにより測定することができる。   The surface of the copper foil to be finely roughened with copper particles preferably has a maximum waviness difference (Wmax) of 2.0 μm or less, more preferably 1.2 μm or less, and still more preferably 0.8. 8 μm or less. Although a lower limit is not specifically limited, For example, it is 0.1 micrometer or more. Within the above range, when fine roughening with copper particles is performed, the slope of the irregularities defined by the root mean square slope RΔq of the roughness curve can be reduced, and the resin film (eg, PET film) can be reduced. When bonded and processed into a stripe or mesh wiring for a touch panel, the transparency of the film after etching the copper foil can be significantly increased. The “maximum undulation height difference (Wmax)” is the height difference in the waveform data extracted by filtering the waveform data relating to undulation from the information on the unevenness of the sample surface obtained using a three-dimensional surface structure analysis microscope. (The sum of the maximum peak height and the maximum valley depth of the waveform). For example, zygo New View 5032 (manufactured by Zygo) is used as a measuring instrument, and Metro Pro Ver. With 8.0.2, the low frequency filter can be measured by employing the condition of 11 μm.

(2)黒色粗化
銅粒子を用いた微細粗化により、銅箔の少なくとも一方の表面を黒色化させる。この黒色粗化は、黒色粗化用銅電解溶液を用いた電解により行われる。好ましい黒色粗化用銅電解溶液は、銅濃度10〜20g/L、フリー硫酸濃度30〜100g/L、塩素濃度20〜100ppmの電解溶液である。ここで、銅濃度が10g/L未満の場合には、銅粒子の電着速度が遅くなり、工業的に要求される生産性を満足しないため好ましくない。一方、銅濃度が20g/Lを超えると、後述する電流密度との関係で、平滑めっき条件に近づき、黒色粗化が困難となるため好ましくない。そして、フリー硫酸濃度は、この銅濃度との関係で、この濃度範囲を逸脱すると、電解時の通電特性が変化して、良好な黒色粗化が困難となるため好ましくない。
(2) Black roughening At least one surface of the copper foil is blackened by fine roughening using copper particles. This black roughening is performed by electrolysis using a black roughening copper electrolytic solution. A preferable copper electrolytic solution for roughening black is an electrolytic solution having a copper concentration of 10 to 20 g / L, a free sulfuric acid concentration of 30 to 100 g / L, and a chlorine concentration of 20 to 100 ppm. Here, when the copper concentration is less than 10 g / L, the electrodeposition rate of the copper particles is slow, which is not preferable because it does not satisfy industrially required productivity. On the other hand, if the copper concentration exceeds 20 g / L, it is not preferable because it approaches smooth plating conditions and makes it difficult to roughen the black in relation to the current density described later. If the concentration of free sulfuric acid deviates from this concentration range due to the relationship with the copper concentration, the current-carrying characteristics during electrolysis change and it becomes difficult to achieve good black roughening.

黒色粗化用銅電解溶液には添加剤をさらに加えて微細粗化を制御するのが好ましい。そのような添加剤の好ましい例としては、ポリエチレングリコール及びビス(3−スルホプロピル)ジスルフィドの組合せ、ポリアクリル酸ナトリウム等が挙げられる。例えば、ポリエチレングリコール及びビス(3−スルホプロピル)ジスルフィドは、それぞれ濃度10〜500ppmで黒色粗化用銅電解溶液に添加されるのが好ましい。ポリアクリル酸ナトリウムは、濃度10〜1000ppmで黒色粗化用銅電解溶液に添加されるのが好ましい。このように添加剤を単独で又は適宜組み合わせて添加することにより、針状の粒成長を抑制し、球状の微細粗化粒子を形成することができる。   It is preferable to control the fine roughening by further adding an additive to the black roughening copper electrolytic solution. Preferable examples of such additives include a combination of polyethylene glycol and bis (3-sulfopropyl) disulfide, sodium polyacrylate, and the like. For example, polyethylene glycol and bis (3-sulfopropyl) disulfide are preferably added to the black roughening copper electrolytic solution at a concentration of 10 to 500 ppm. Sodium polyacrylate is preferably added to the black roughening copper electrolytic solution at a concentration of 10 to 1000 ppm. Thus, by adding an additive singly or in appropriate combination, acicular grain growth can be suppressed and spherical fine roughened particles can be formed.

黒色粗化用銅電解溶液を用いた電解は、溶液温度20〜40℃の電解液中で、銅箔を陰極に分極し、電流密度30〜100A/dm、時間2〜10secの条件で行うのが好ましい。溶液温度が20℃未満になると、形成する粗化粒子の形状にバラツキが生じやすくなるため好ましくない。一方、この溶液温度が40℃を超えると、黒色粗化用銅電解溶液の溶液性状の変化が起こりやすく、安定した微細粗化が出来なくなる傾向があるため好ましくない。また、電流密度が30A/dm未満の場合には、十分な黒色粗化が出来ず、黒色粗化面の明度Lを30以下とすることが困難となるため好ましくない。一方、電流密度が100A/dmを超えると、微細な銅粒子の析出速度が過剰となり、形成される銅粒子形状が、良好な球状体とならなくなるため好ましくない。Electrolysis using the black roughening copper electrolytic solution is performed under conditions of a current density of 30 to 100 A / dm 2 and a time of 2 to 10 sec in an electrolytic solution having a solution temperature of 20 to 40 ° C. Is preferred. When the solution temperature is less than 20 ° C., the shape of the coarse particles to be formed tends to vary, which is not preferable. On the other hand, if the solution temperature exceeds 40 ° C., the solution property of the black roughening copper electrolytic solution tends to change, and there is a tendency that stable fine roughening cannot be performed. Further, when the current density is less than 30 A / dm 2 , it is not preferable because sufficient black roughening cannot be performed and it becomes difficult to set the lightness L * of the black roughened surface to 30 or less. On the other hand, when the current density exceeds 100 A / dm 2 , the precipitation rate of fine copper particles becomes excessive, and the shape of the formed copper particles does not become a good spherical body, which is not preferable.

(3)防錆処理
所望により、黒色粗化後の銅箔に防錆処理を施してもよい。防錆処理は、亜鉛を用いためっき処理を含むのが好ましい。亜鉛を用いためっき処理は、亜鉛めっき処理及び亜鉛合金めっき処理のいずれであってもよく、亜鉛合金めっき処理は亜鉛−ニッケル合金処理が特に好ましい。亜鉛−ニッケル合金処理は少なくともNi及びZnを含むめっき処理であればよく、Sn、Cr、Co等の他の元素をさらに含んでいてもよい。亜鉛−ニッケル合金めっきにおけるNi/Zn付着比率は、質量比で、1.2〜10が好ましく、より好ましくは2〜7、さらに好ましくは2.7〜4である。また、防錆処理はクロメート処理をさらに含むのが好ましく、このクロメート処理は亜鉛を用いためっき処理の後に、亜鉛を含むめっきの表面に行われるのがより好ましい。こうすることで防錆性をさらに向上させることができる。特に好ましい防錆処理は、亜鉛−ニッケル合金めっき処理とその後のクロメート処理との組合せである。
(3) Rust prevention treatment If desired, the copper foil after the roughening of black may be subjected to a rust prevention treatment. The rust prevention treatment preferably includes a plating treatment using zinc. The plating treatment using zinc may be either a zinc plating treatment or a zinc alloy plating treatment, and the zinc alloy plating treatment is particularly preferably a zinc-nickel alloy treatment. The zinc-nickel alloy treatment may be a plating treatment containing at least Ni and Zn, and may further contain other elements such as Sn, Cr, and Co. The Ni / Zn adhesion ratio in the zinc-nickel alloy plating is preferably 1.2 to 10, more preferably 2 to 7, still more preferably 2.7 to 4, in terms of mass ratio. The rust prevention treatment preferably further includes a chromate treatment, and this chromate treatment is more preferably performed on the surface of the plating containing zinc after the plating treatment using zinc. By carrying out like this, rust prevention property can further be improved. A particularly preferable antirust treatment is a combination of a zinc-nickel alloy plating treatment and a subsequent chromate treatment.

(4)シランカップリング剤処理
所望により、銅箔にシランカップリング剤処理を施し、シランカップリング剤層を形成してもよい。これにより耐湿性、耐薬品性及び接着剤等との密着性等を向上することができる。シランカップリング剤層は、シランカップリング剤を適宜希釈して塗布し、乾燥させることにより形成することができる。シランカップリング剤の例としては、4−グリシジルブチルトリメトキシシラン、γ−グリシドキシプロピルトリメトキシシラン等のエポキシ官能性シランカップリング剤、又はγ−アミノプロピルトリエトキシシラン、N−β(アミノエチル)γ−アミノプロピルトリメトキシシラン、N−3−(4−(3−アミノプロポキシ)ブトキシ)プロピル−3−アミノプロピルトリメトキシシラン、N−フェニル−γ−アミノプロピルトリメトキシシラン等のアミノ官能性シランカップリング剤、又はγ−メルカプトプロピルトリメトキシシラン等のメルカプト官能性シランカップリング剤又はビニルトリメトキシシラン、ビニルフェニルトリメトキシシラン等のオレフィン官能性シランカップリング剤、又はγ−メタクリロキシプロピルトリメトキシシラン等のアクリル官能性シランカップリング剤、又はイミダゾールシラン等のイミダゾール官能性シランカップリング剤、又はトリアジンシラン等のトリアジン官能性シランカップリング剤等が挙げられる。
(4) Silane coupling agent treatment If desired, the copper foil may be treated with a silane coupling agent to form a silane coupling agent layer. Thereby, moisture resistance, chemical resistance, adhesiveness with an adhesive agent, etc. can be improved. The silane coupling agent layer can be formed by appropriately diluting and applying a silane coupling agent and drying. Examples of silane coupling agents include epoxy-functional silane coupling agents such as 4-glycidylbutyltrimethoxysilane and γ-glycidoxypropyltrimethoxysilane, or γ-aminopropyltriethoxysilane, N-β (amino Amino functions such as ethyl) γ-aminopropyltrimethoxysilane, N-3- (4- (3-aminopropoxy) butoxy) propyl-3-aminopropyltrimethoxysilane, N-phenyl-γ-aminopropyltrimethoxysilane Silane coupling agent, or mercapto functional silane coupling agent such as γ-mercaptopropyltrimethoxysilane, or olefin functional silane coupling agent such as vinyltrimethoxysilane, vinylphenyltrimethoxysilane, or γ-methacryloxypropyl Trimetoki Acrylic-functional silane coupling agent such as a silane, or imidazole functional silane coupling agent such as imidazole silane, or triazine functional silane coupling agents such as triazine silane.

キャリア箔付銅箔
本発明の黒色化表面処理銅箔は、キャリア箔付銅箔の形態で提供することができる。特に、タッチパネルセンサーとしてディスプレイに搭載した時の表示画像を鮮明にするために、より狭い回路パターン幅や銅配線の高さを5μm以下とする場合には、薄い銅箔を用いることになるため、ハンドリング性向上の観点から、キャリア付銅箔を用いることが好ましい。この場合、キャリア箔付銅箔は、キャリア箔と、このキャリア箔上に設けられた剥離層と、この剥離層上に黒色化処理表面を外側にして設けられた本発明の黒色化表面処理銅箔とを備えてなる。もっとも、キャリア箔付銅箔は、本発明の黒色化表面処理銅箔を用いること以外は、公知の層構成が採用可能である。
Copper foil with carrier foil The blackened surface-treated copper foil of the present invention can be provided in the form of a copper foil with carrier foil. In particular, in order to make a display image when mounted on a display as a touch panel sensor clear, when a narrower circuit pattern width or a copper wiring height is 5 μm or less, a thin copper foil is used. From the viewpoint of improving handling properties, it is preferable to use a copper foil with a carrier. In this case, the copper foil with a carrier foil is a carrier foil, a release layer provided on the carrier foil, and the blackened surface-treated copper of the present invention provided on the release layer with the blackened treatment surface outside. It is provided with foil. However, the copper foil with carrier foil can employ a known layer configuration except that the blackened surface-treated copper foil of the present invention is used.

キャリア箔は、黒色化表面処理銅箔を支持してそのハンドリング性を向上させるための箔である。キャリア箔の例としては、アルミニウム箔、銅箔、表面をメタルコーティングした樹脂フィルム等が挙げられ、好ましくは銅箔である。銅箔は圧延銅箔及び電解銅箔のいずれであってもよい。キャリア箔の厚さは典型的には200μm以下であり、好ましくは18μm〜200μmである。   The carrier foil is a foil for supporting the blackened surface-treated copper foil and improving its handleability. Examples of the carrier foil include an aluminum foil, a copper foil, a resin film whose surface is metal-coated, and the like, and preferably a copper foil. The copper foil may be a rolled copper foil or an electrolytic copper foil. The thickness of the carrier foil is typically 200 μm or less, preferably 18 μm to 200 μm.

剥離層は、キャリア箔の引き剥がし強度を弱くし、該強度の安定性を担保し、さらには高温でのプレス成形時にキャリア箔と銅箔の間で起こりうる相互拡散を抑制する機能を有する層である。剥離層は、キャリア箔の一方の面に形成されるのが一般的であるが、両面に形成されてもよい。剥離層は、有機剥離層及び無機剥離層のいずれであってもよい。有機剥離層に用いられる有機成分の例としては、窒素含有有機化合物、硫黄含有有機化合物、カルボン酸等が挙げられる。窒素含有有機化合物の例としては、トリアゾール化合物、イミダゾール化合物等が挙げられ、中でもトリアゾール化合物は剥離性が安定し易い点で好ましい。トリアゾール化合物の例としては、1,2,3−ベンゾトリアゾール、カルボキシベンゾトリアゾール、N’,N’−ビス(ベンゾトリアゾリルメチル)ユリア、1H−1,2,4−トリアゾール及び3−アミノ−1H−1,2,4−トリアゾール等が挙げられる。硫黄含有有機化合物の例としては、メルカプトベンゾチアゾール、チオシアヌル酸、2−ベンズイミダゾールチオール等が挙げられる。カルボン酸の例としては、モノカルボン酸、ジカルボン酸等が挙げられる。一方、無機剥離層に用いられる無機成分の例としては、Ni、Mo、Co、Cr、Fe、Ti、W、P、Zn、クロメート処理膜等が挙げられる。なお、剥離層の形成はキャリア箔の少なくとも一方の表面に剥離層成分含有溶液を接触させ、剥離層成分をキャリア箔の表面に固定されること等により行えばよい。キャリア箔の剥離層成分含有溶液への接触は、剥離層成分含有溶液への浸漬、剥離層成分含有溶液の噴霧、剥離層成分含有溶液の流下等により行えばよい。また、剥離層成分のキャリア箔表面への固定は、剥離層成分含有溶液の乾燥、剥離層成分含有溶液中の剥離層成分の電着等により行えばよい。剥離層の厚さは、典型的には1nm〜1μmであり、好ましくは5nm〜500nmである。   The release layer is a layer having a function of weakening the peeling strength of the carrier foil, ensuring the stability of the strength, and further suppressing interdiffusion that may occur between the carrier foil and the copper foil during press molding at a high temperature. It is. The release layer is generally formed on one side of the carrier foil, but may be formed on both sides. The release layer may be either an organic release layer or an inorganic release layer. Examples of organic components used in the organic release layer include nitrogen-containing organic compounds, sulfur-containing organic compounds, carboxylic acids and the like. Examples of nitrogen-containing organic compounds include triazole compounds, imidazole compounds, and the like. Among these, triazole compounds are preferred in terms of easy release stability. Examples of triazole compounds include 1,2,3-benzotriazole, carboxybenzotriazole, N ′, N′-bis (benzotriazolylmethyl) urea, 1H-1,2,4-triazole and 3-amino- 1H-1,2,4-triazole and the like can be mentioned. Examples of the sulfur-containing organic compound include mercaptobenzothiazole, thiocyanuric acid, 2-benzimidazolethiol and the like. Examples of the carboxylic acid include monocarboxylic acid and dicarboxylic acid. On the other hand, examples of inorganic components used in the inorganic release layer include Ni, Mo, Co, Cr, Fe, Ti, W, P, Zn, and a chromate-treated film. The release layer may be formed by bringing a release layer component-containing solution into contact with at least one surface of the carrier foil and fixing the release layer component to the surface of the carrier foil. The contact of the carrier foil with the release layer component-containing solution may be performed by immersion in the release layer component-containing solution, spraying of the release layer component-containing solution, flowing down of the release layer component-containing solution, or the like. The release layer component may be fixed to the surface of the carrier foil by drying the release layer component-containing solution, electrodeposition of the release layer component in the release layer component-containing solution, or the like. The thickness of the release layer is typically 1 nm to 1 μm, preferably 5 nm to 500 nm.

黒色化表面処理銅箔としては、上述した本発明の黒色化表面処理銅箔を用いる。本発明の黒色化表面処理銅箔は銅粒子を用いた微細粗化(黒色化)が施されたものであるが、手順としては、先ず剥離層の表面に銅層を銅箔として形成し、その後少なくとも微細粗化(黒色化)を行えばよい。微細粗化(黒色化)の詳細については前述したとおりである。なお、銅箔はキャリア付銅箔としての利点を活かすべく、極薄銅箔の形態で構成されるのが好ましい。極薄銅箔としての好ましい厚さは0.1μm〜7μmであり、より好ましくは0.5μm〜5μm、さらに好ましくは0.5μm〜3μmである。   As the blackened surface-treated copper foil, the above-described blackened surface-treated copper foil of the present invention is used. The blackened surface-treated copper foil of the present invention has been subjected to fine roughening (blackening) using copper particles, but as a procedure, first, a copper layer is formed on the surface of the release layer as a copper foil, Thereafter, at least fine roughening (blackening) may be performed. The details of the fine roughening (blackening) are as described above. In addition, it is preferable that copper foil is comprised with the form of an ultra-thin copper foil in order to utilize the advantage as copper foil with a carrier. A preferable thickness of the ultrathin copper foil is 0.1 μm to 7 μm, more preferably 0.5 μm to 5 μm, and still more preferably 0.5 μm to 3 μm.

剥離層と銅箔の間に他の機能層を設けてもよい。そのような他の機能層の例としては補助金属層が挙げられる。補助金属層はニッケル及び/又はコバルトからなるのが好ましい。補助金属層の厚さは、0.001〜3μmとするのが好ましい。   Another functional layer may be provided between the release layer and the copper foil. An example of such another functional layer is an auxiliary metal layer. The auxiliary metal layer is preferably made of nickel and / or cobalt. The thickness of the auxiliary metal layer is preferably 0.001 to 3 μm.

本発明を以下の例によってさらに具体的に説明する。   The present invention is more specifically described by the following examples.

例1:黒色化表面処理銅箔
黒色化表面処理銅箔の作製及び評価を以下のようにして行った。
Example 1 : Blackened surface-treated copper foil Production and evaluation of a blackened surface-treated copper foil were performed as follows.

(1)電解銅箔の作製
銅電解液として以下に示される組成の硫酸酸性硫酸銅溶液を用い、陰極に表面粗さRaが0.20μmのチタン製の回転電極を用い、陽極にはDSA(寸法安定性陽極)を用いて、溶液温度45℃、電流密度55A/dmで電解し、厚さ12μmの電解銅箔を得た。この電解銅箔の析出面のうねりの最大高低差(Wmax)は0.8μm、電極面のうねりの最大高低差(Wmax)は1.5μmであった。
<硫酸酸性硫酸銅溶液の組成>
‐ 銅濃度:80g/L
‐ フリー硫酸濃度:140g/L
‐ ビス(3−スルホプロピル)ジスルフィド濃度:30mg/L
‐ ジアリルジメチルアンモニウムクロライド重合体濃度:50mg/L
‐ 塩素濃度:40mg/L
(1) Preparation of electrolytic copper foil An acidic copper sulfate solution having the following composition was used as the copper electrolyte, a titanium rotating electrode having a surface roughness Ra of 0.20 μm was used for the cathode, and DSA ( Using a dimensionally stable anode), electrolysis was performed at a solution temperature of 45 ° C. and a current density of 55 A / dm 2 to obtain an electrolytic copper foil having a thickness of 12 μm. The maximum height difference (Wmax) of the waviness of the deposited surface of this electrolytic copper foil was 0.8 μm, and the maximum height difference (Wmax) of the waviness of the electrode surface was 1.5 μm.
<Composition of sulfuric acid copper sulfate solution>
-Copper concentration: 80 g / L
-Free sulfuric acid concentration: 140 g / L
-Bis (3-sulfopropyl) disulfide concentration: 30 mg / L
-Diallyldimethylammonium chloride polymer concentration: 50 mg / L
-Chlorine concentration: 40 mg / L

<うねりの最大高低差(Wmax))>
測定機器としてzygo New View 5032(Zygo社製)を用い、解析ソフトにMetro Pro Ver.8.0.2を用いて、低周波フィルタを11μmの条件を採用して、うねりの最大高低差(Wmax)を測定した。このとき、表面処理銅箔の被測定面を試料台に密着させて固定し、試料片の1cm角の範囲内の中で108μm×144μmの視野を6点選択して測定し、6箇所の測定点から得られたうねりの最大高低差(Wmax)の平均値を代表値として採用した。
<Maximum wave height difference (Wmax)>
Zygo New View 5032 (manufactured by Zygo) was used as a measuring instrument, and Metro Pro Ver. The maximum height difference (Wmax) of the waviness was measured by using the condition of 11 μm for the low frequency filter using 8.0.2. At this time, the surface to be measured of the surface-treated copper foil is fixed in close contact with the sample stage, and 6 fields of 108 μm × 144 μm are selected and measured within the 1 cm square range of the sample piece, and 6 measurements are made. The average value of the maximum height difference (Wmax) of the swell obtained from the points was adopted as a representative value.

(2)黒色粗化
上述の電解銅箔が備える電極面及び析出面の内、析出面側に対して、以下に示される組成の黒色粗化用銅電解溶液を用い、溶液温度30℃、電流密度50A/dm、時間4secの条件で電解して、黒色粗化を行った。
<黒色粗化用銅電解溶液の組成>
‐ 銅濃度:13g/L
‐ フリー硫酸濃度:70g/L
‐ 塩素濃度:35mg/L
‐ ポリエチレングリコール濃度:100ppm
‐ ビス(3−スルホプロピル)ジスルフィド濃度:100ppm
(2) Black roughening Among the electrode surface and precipitation surface provided in the above-mentioned electrolytic copper foil, a black roughening copper electrolytic solution having the following composition is used for the precipitation surface side, the solution temperature is 30 ° C., and the current is Blackening was performed by electrolysis under conditions of a density of 50 A / dm 2 and a time of 4 seconds.
<Composition of copper electrolytic solution for black roughening>
-Copper concentration: 13 g / L
-Free sulfuric acid concentration: 70 g / L
-Chlorine concentration: 35 mg / L
-Polyethylene glycol concentration: 100ppm
-Bis (3-sulfopropyl) disulfide concentration: 100 ppm

(3)防錆処理
黒色粗化後の電解銅箔の両面に、無機防錆処理及びクロメート処理からなる防錆処理を行った。まず、無機防錆処理として、ピロリン酸浴を用い、ピロリン酸カリウム濃度80g/L、亜鉛濃度0.2g/L、ニッケル濃度2g/L、液温40℃、電流密度0.5A/dmで亜鉛−ニッケル合金防錆処理を行った。次いで、クロメート処理として、亜鉛−ニッケル合金防錆処理の上に、更にクロメート層を形成した。このクロメート処理は、クロム酸濃度が1g/L、pH11、溶液温度25℃、電流密度1A/dmで行った。
(3) Rust prevention treatment Rust prevention treatment consisting of inorganic rust prevention treatment and chromate treatment was performed on both surfaces of the electrolytic copper foil after blackening. First, as an inorganic rust prevention treatment, using a pyrophosphate bath, potassium pyrophosphate concentration 80 g / L, zinc concentration 0.2 g / L, nickel concentration 2 g / L, liquid temperature 40 ° C., current density 0.5 A / dm 2 Zinc-nickel alloy rust prevention treatment was performed. Next, as a chromate treatment, a chromate layer was further formed on the zinc-nickel alloy rust prevention treatment. This chromate treatment was performed at a chromic acid concentration of 1 g / L, pH 11, a solution temperature of 25 ° C., and a current density of 1 A / dm 2 .

(4)シランカップリング剤処理
上記防錆処理が施された銅箔を水洗し、その後直ちにシランカップリング剤処理を行い、黒色粗化面の防錆処理層上にシランカップリング剤を吸着させた。このシランカップリング剤処理は、純水を溶媒とし、3−アミノプロピルトリメトキシシラン濃度が3g/Lの溶液を用い、この溶液をシャワーリングにて黒色粗化面に吹き付けて吸着処理することにより行った。シランカップリング剤の吸着後、最終的に電熱器により水分を蒸発させ、厚さ12μmの黒色化表面処理銅箔を得た。
(4) Silane coupling agent treatment The copper foil subjected to the above rust prevention treatment is washed with water, and then immediately treated with a silane coupling agent to adsorb the silane coupling agent on the rust prevention treatment layer on the black roughened surface. It was. In this silane coupling agent treatment, pure water is used as a solvent, a solution having a 3-aminopropyltrimethoxysilane concentration of 3 g / L is used, and this solution is sprayed onto the black roughened surface by showering to perform an adsorption treatment. went. After adsorption of the silane coupling agent, water was finally evaporated by an electric heater to obtain a blackened surface-treated copper foil having a thickness of 12 μm.

(5)評価
得られた黒色化表面処理銅箔について、各種特性の評価を以下のとおり行った。
(5) Evaluation About the obtained blackening surface-treated copper foil, various characteristics were evaluated as follows.

<表面性状パラメータ(RΔq、Rc及びRa)>
光学測定装置としてレーザー顕微鏡(オリンパス製、OLS4100)を用い、JIS B 0601(2001)に準拠して、表面処理銅箔の表面性状パラメータRΔq、Rc及びRaを測定した。この測定は、評価長さを642μmとし、銅箔の幅方向で測定を行った。ここで、銅箔の幅方向は、電解銅箔製造時の回転陰極の幅方向(TD方向)に対応する。
<Surface property parameters (RΔq, Rc and Ra)>
Using a laser microscope (OLS4100, manufactured by Olympus) as an optical measuring device, surface property parameters RΔq, Rc, and Ra of the surface-treated copper foil were measured in accordance with JIS B 0601 (2001). In this measurement, the evaluation length was 642 μm, and the measurement was performed in the width direction of the copper foil. Here, the width direction of the copper foil corresponds to the width direction (TD direction) of the rotating cathode during the production of the electrolytic copper foil.

<明度L、色度a及びY値>
分光色彩計(日本電色工業株式会社製、SE6000)を用いて、明度L及び色度aをJIS Z 8729(2004)及びJIS Z 8722(2009)に準拠して、Y値をJIS Z 8701(1999)及びJIS Z 8722(2009)に準拠して測定した。
<Lightness L * , chromaticity a * and Y value>
Using a spectral colorimeter (Nippon Denshoku Industries Co., Ltd., SE6000), the lightness L * and chromaticity a * are based on JIS Z 8729 (2004) and JIS Z 8722 (2009), and the Y value is JIS Z. It was measured according to 8701 (1999) and JIS Z 8722 (2009).

<ヘイズ値(Haze)>
表面処理銅箔とPETフィルム(厚さ100μm)とを熱圧着して銅張積層板を作製した。その後、当該表面処理銅箔をエッチング除去し、残ったPETフィルムを、ヘイズメーター(日本電色工業株式会社製、NDH5000)を用いて、JIS K 7136(2000)に準じて、23℃でのフィルムのヘイズ値(Haze:単位%)を3箇所測定し、その平均値を求めた。
<Haze value>
A surface-treated copper foil and a PET film (thickness 100 μm) were thermocompression bonded to produce a copper-clad laminate. Thereafter, the surface-treated copper foil was removed by etching, and the remaining PET film was filmed at 23 ° C. according to JIS K 7136 (2000) using a haze meter (NDH5000, manufactured by Nippon Denshoku Industries Co., Ltd.). The haze value (Haze: unit%) was measured at three locations, and the average value was obtained.

例2
黒色粗化を電解銅箔の電極面側に対して行ったこと以外は、例1と同様にして黒色化表面処理銅箔の作製及び評価を行った。
Example 2
A blackened surface-treated copper foil was prepared and evaluated in the same manner as in Example 1 except that the blackening was performed on the electrode surface side of the electrolytic copper foil.

例3
黒色化表面処理銅箔を備えたキャリア箔付銅箔の作製及び評価を以下のようにして行った。
Example 3
Preparation and evaluation of the copper foil with carrier foil provided with the blackened surface-treated copper foil were performed as follows.

(1)キャリア箔の作製
銅電解液として以下に示される組成の硫酸酸性硫酸銅溶液を用い、陰極に表面粗さRaが0.20μmのチタン製の回転電極を用い、陽極にはDSA(寸法安定性陽極)を用いて、溶液温度45℃、電流密度55A/dmで電解し、厚さ12μmの電解銅箔をキャリア箔として得た。
<硫酸酸性硫酸銅溶液の組成>
‐ 銅濃度:80g/L
‐ フリー硫酸濃度:140g/L
‐ ビス(3−スルホプロピル)ジスルフィド濃度:30mg/L
‐ ジアリルジメチルアンモニウムクロライド重合体濃度:50mg/L
‐ 塩素濃度:40mg/L
(1) Preparation of carrier foil An acidic copper sulfate solution having the following composition is used as the copper electrolyte, a titanium rotating electrode having a surface roughness Ra of 0.20 μm is used as the cathode, and a DSA (dimension) is used as the anode. Using a stable anode), electrolysis was performed at a solution temperature of 45 ° C. and a current density of 55 A / dm 2 to obtain an electrolytic copper foil having a thickness of 12 μm as a carrier foil.
<Composition of sulfuric acid copper sulfate solution>
-Copper concentration: 80 g / L
-Free sulfuric acid concentration: 140 g / L
-Bis (3-sulfopropyl) disulfide concentration: 30 mg / L
-Diallyldimethylammonium chloride polymer concentration: 50 mg / L
-Chlorine concentration: 40 mg / L

(2)有機剥離層形成
酸洗処理されたキャリア用銅箔の電極面側を、CBTA(カルボキシベンゾトリアゾール)1000重量ppm、硫酸150g/l及び銅10g/lを含むCBTA水溶液に、液温30℃で30秒間浸漬して引き上げ、CBTA成分をキャリア箔の電極面に吸着させた。こうして、キャリア用銅箔の光沢面の表面にCBTA層を有機剥離層として形成した。
(2) Formation of organic release layer The electrode surface side of the pickled copper foil for carrier was placed in a CBTA aqueous solution containing 1000 ppm by weight of CBTA (carboxybenzotriazole), 150 g / l of sulfuric acid and 10 g / l of copper at a liquid temperature of 30. The CBTA component was adsorbed on the electrode surface of the carrier foil by dipping for 30 seconds at 0 ° C. Thus, a CBTA layer was formed as an organic release layer on the glossy surface of the carrier copper foil.

(3)補助金属層形成
有機剥離層が形成されたキャリア用銅箔を、硫酸ニッケルを用いて作製されたニッケル20g/l及びピロリン酸カリウム300g/lを含む溶液に浸漬して、液温45℃、pH3、電流密度5A/dmの条件で、厚さ0.002μm相当の付着量のニッケルを有機剥離層上に付着させた。こうして有機剥離層上にニッケル層を補助金属層として形成した。
(3) Auxiliary metal layer formation The carrier copper foil on which the organic release layer was formed was immersed in a solution containing 20 g / l nickel and 300 g / l potassium pyrophosphate prepared using nickel sulfate, and the liquid temperature was 45. Nickel having a deposition amount corresponding to a thickness of 0.002 μm was deposited on the organic release layer under the conditions of ° C., pH 3, and current density 5 A / dm 2 . Thus, a nickel layer was formed as an auxiliary metal layer on the organic release layer.

(4)極薄銅箔形成
補助金属層が形成されたキャリア用銅箔を、酸性硫酸銅溶液に浸漬して、電流密度8A/dmの平滑めっき条件で60秒間電解して、厚さ3μmの極薄銅箔を補助金属層上に形成した。この極薄銅箔の析出面のうねりの最大高低差(Wmax)は1.1μmであった。
(4) Ultra-thin copper foil formation The carrier copper foil on which the auxiliary metal layer is formed is immersed in an acidic copper sulfate solution and electrolyzed for 60 seconds under a smooth plating condition with a current density of 8 A / dm 2 to obtain a thickness of 3 μm. The ultrathin copper foil was formed on the auxiliary metal layer. The maximum height difference (Wmax) of the waviness of the deposited surface of this ultrathin copper foil was 1.1 μm.

(5)黒色粗化
上述の極薄銅箔の析出面に対して、以下に示される組成の黒色粗化用銅電解溶液を用い、溶液温度30℃、電流密度50A/dm、時間4secの条件で電解して、黒色粗化を行った。
<黒色粗化用銅電解溶液の組成>
‐ 銅濃度:13g/L
‐ フリー硫酸濃度:70g/L
‐ 塩素濃度:35mg/L
‐ ポリアクリル酸ナトリウム濃度:400ppm
(5) Black roughening For the precipitation surface of the ultrathin copper foil, a black roughening copper electrolytic solution having the composition shown below was used, and the solution temperature was 30 ° C., the current density was 50 A / dm 2 , and the time was 4 sec. Electrolysis was performed under conditions to perform black roughening.
<Composition of copper electrolytic solution for black roughening>
-Copper concentration: 13 g / L
-Free sulfuric acid concentration: 70 g / L
-Chlorine concentration: 35 mg / L
-Sodium polyacrylate concentration: 400ppm

(6)防錆処理
黒色粗化後のキャリア箔付極薄銅箔の両面に、無機防錆処理及びクロメート処理からなる防錆処理を行った。まず、無機防錆処理として、ピロリン酸浴を用い、ピロリン酸カリウム濃度80g/L、亜鉛濃度0.2g/L、ニッケル濃度2g/L、液温40℃、電流密度0.5A/dmで亜鉛−ニッケル合金防錆処理を行った。次いで、クロメート処理として、亜鉛−ニッケル合金防錆処理の上に、更にクロメート層を形成した。このクロメート処理は、クロム酸濃度が1g/L、pH11、溶液温度25℃、電流密度1A/dmで行った。
(6) Rust prevention treatment Rust prevention treatment consisting of inorganic rust prevention treatment and chromate treatment was performed on both surfaces of the ultrathin copper foil with carrier foil after black roughening. First, as an inorganic rust prevention treatment, using a pyrophosphate bath, potassium pyrophosphate concentration 80 g / L, zinc concentration 0.2 g / L, nickel concentration 2 g / L, liquid temperature 40 ° C., current density 0.5 A / dm 2 Zinc-nickel alloy rust prevention treatment was performed. Next, as a chromate treatment, a chromate layer was further formed on the zinc-nickel alloy rust prevention treatment. This chromate treatment was performed at a chromic acid concentration of 1 g / L, pH 11, a solution temperature of 25 ° C., and a current density of 1 A / dm 2 .

(7)シランカップリング剤処理
上記防錆処理が施された銅箔を水洗し、その後直ちにシランカップリング剤処理を行い、黒色粗化面の防錆処理層上にシランカップリング剤を吸着させた。このシランカップリング剤処理は、純水を溶媒とし、3−アミノプロピルトリメトキシシラン濃度が3g/Lの溶液を用い、この溶液をシャワーリングにて黒色粗化面に吹き付けて吸着処理することにより行った。シランカップリング剤の吸着後、最終的に電熱器により水分を気散させ、厚さ3μmの黒色化表面処理極薄銅箔を備えた、キャリア箔付銅箔を得た。
(7) Silane coupling agent treatment The copper foil that has been subjected to the above rust prevention treatment is washed with water and then immediately treated with a silane coupling agent to adsorb the silane coupling agent on the rust prevention treatment layer on the black roughened surface. It was. In this silane coupling agent treatment, pure water is used as a solvent, a solution having a 3-aminopropyltrimethoxysilane concentration of 3 g / L is used, and this solution is sprayed onto the black roughened surface by showering to perform an adsorption treatment. went. After the adsorption of the silane coupling agent, moisture was finally diffused by an electric heater to obtain a copper foil with a carrier foil, which was provided with a blackened surface-treated ultrathin copper foil having a thickness of 3 μm.

(8)評価
得られた黒色化表面処理銅箔を備えたキャリア箔付銅箔について、各種特性の評価を例1と同様にして行った。
(8) Evaluation About the copper foil with a carrier foil provided with the obtained blackened surface-treated copper foil, various characteristics were evaluated in the same manner as in Example 1.

例4(比較)
黒色粗化の代わりに以下に述べる褐色化処理を電解銅箔の電極面側に対して行ったこと以外は、例1と同様にして褐色化表面処理銅箔の作製及び評価を行った。
Example 4 (Comparison)
A browned surface-treated copper foil was prepared and evaluated in the same manner as in Example 1 except that the browning treatment described below was performed on the electrode surface side of the electrolytic copper foil instead of the black roughening.

<褐色化処理>
まず、粗化処理を施していない電解銅箔(例1(1)で作製されたもの)を、硫酸濃度150g/l、液温30℃の希硫酸溶液に30秒間浸漬して、表面の清浄化を行った。こうして清浄化された電解銅箔に対して、以下に示される工程(a)〜(e)をこの順に施すことにより褐色化処理を行った。
<Browning treatment>
First, an electrolytic copper foil that was not roughened (prepared in Example 1 (1)) was immersed in a dilute sulfuric acid solution having a sulfuric acid concentration of 150 g / l and a liquid temperature of 30 ° C. for 30 seconds to clean the surface. Made. The electrolytic copper foil thus cleaned was subjected to the browning treatment by performing the following steps (a) to (e) in this order.

(a)基礎めっき処理工程
上記電解銅箔の電極面側に対して、硫酸銅系めっき溶液をヤケめっき条件で用いて、銅箔の表面を褐色にするための基礎めっき処理を行った。この基礎めっき処理は、銅濃度18g/l、フリー硫酸濃度100g/l、液温25℃の硫酸銅溶液を用いて、電流密度(Ia)10A/dmのヤケめっき条件で電解することにより行った。その結果、この基礎めっき工程で行ったヤケめっきは、ある程度の凹凸を銅箔表面に形成するための核を形成したのみであり、換算厚さ300mg/mの電着量であった。
(A) Basic plating treatment step A basic plating treatment for browning the surface of the copper foil was performed on the electrode surface side of the electrolytic copper foil using a copper sulfate-based plating solution under burn plating conditions. This basic plating treatment is performed by electrolysis under a burn plating condition of a current density (Ia) of 10 A / dm 2 using a copper sulfate solution having a copper concentration of 18 g / l, a free sulfuric acid concentration of 100 g / l, and a liquid temperature of 25 ° C. It was. As a result, the burn plating performed in this basic plating process only formed nuclei for forming a certain degree of irregularities on the copper foil surface, and the electrodeposition amount was 300 mg / m 2 in terms of converted thickness.

(b)追加めっき処理工程
こうして基礎めっき処理された銅箔の表面に、硫酸銅系めっき溶液をヤケめっき条件で用いて1回のめっき処理を施した。このときの追加めっき処理は上記工程(a)と同様の濃度及び液温の硫酸銅溶液を用いて行った。このとき、ヤケめっきを行う際に採用する電流密度(Ib)をIaの15%の電流密度となる1.5A/dmとして、工程(a)で銅箔の表面に形成した核に対する電流集中を防止して無用な異常析出を防止した。この追加めっき工程での電着量は、換算厚さとして50mg/mの電着量とした。
(B) Additional plating treatment process The surface of the copper foil thus subjected to the basic plating treatment was subjected to a single plating treatment using a copper sulfate-based plating solution under burn plating conditions. The additional plating treatment at this time was performed using a copper sulfate solution having the same concentration and temperature as in the step (a). At this time, the current density (Ib) employed when burning plating is 1.5 A / dm 2 which is 15% of Ia, and the current concentration on the nucleus formed on the surface of the copper foil in step (a) To prevent unnecessary abnormal precipitation. The electrodeposition amount in this additional plating step was an electrodeposition amount of 50 mg / m 2 as a converted thickness.

(c)被覆めっき処理工程
こうしてヤケめっきを施した銅箔面に、銅めっき溶液を用いて平滑めっき条件で被覆めっき処理を行った。この被覆めっきは、銅濃度65g/l、フリー硫酸濃度150g/l、液温45℃の硫酸銅溶液を用いて、電流密度15A/dmの平滑めっき条件で電解することにより行った。このようにして、工程(a)及び(b)で粗化処理した表面を滑らかにした。このときの平滑めっきの換算厚さは4g/mであった。
(C) Cover plating treatment step The copper foil surface thus subjected to burnt plating was subjected to a cover plating treatment under a smooth plating condition using a copper plating solution. This coating plating was performed by electrolysis under a smooth plating condition with a current density of 15 A / dm 2 using a copper sulfate solution having a copper concentration of 65 g / l, a free sulfuric acid concentration of 150 g / l, and a liquid temperature of 45 ° C. In this way, the surface roughened in steps (a) and (b) was smoothed. The converted thickness of the smooth plating at this time was 4 g / m 2 .

(d)仕上げめっき処理工程
こうして平滑めっき処理が施された表面に、銅めっき溶液をヤケめっき条件で用いて、銅箔表面を褐色に仕上げるための仕上げめっき処理を施し、それにより極微細銅粒を付着形成した。この極微細銅粒の形成は、9−フェニルアクリジンを添加した、銅濃度が13g/l、フリー硫酸50g/l、9−フェニルアクリジン150mg/l、塩素濃度28ppm、液温35℃の硫酸銅溶液を用いて、電流密度24A/dm の電解条件で行った。この仕上げめっき処理工程での電着量は、換算厚さとして300mg/mの電着量とした。
(D) Finish plating process The surface subjected to the smooth plating process is subjected to a finish plating process for finishing the copper foil surface brown by using the copper plating solution under the condition of burnt plating. Was formed. The formation of this ultrafine copper grain was achieved by adding 9-phenylacridine, copper concentration of 13 g / l, free sulfuric acid 50 g / l, 9-phenylacridine 150 mg / l, chlorine concentration 28 ppm, liquid temperature 35 ° C. Was performed under electrolysis conditions with a current density of 24 A / dm 2 . The electrodeposition amount in the finish plating process was 300 mg / m 2 as the converted thickness.

(e)洗浄及び乾燥工程
こうして仕上げめっきが施された銅箔に対して、十分に純水をシャワーリングして洗浄を行い、電熱器により雰囲気温度を150℃とした乾燥炉内に4秒間滞留させ、水分を発させて褐色化処理面を備えた表面処理銅箔を得た。なお、水洗は、この工程に限らず、前述した各工程の間で前工程の溶液を後工程に持ち込まないように適宜行った。
(E) Washing and drying process The copper foil thus finish-plated is sufficiently washed by showering pure water, and stays in a drying furnace at an atmospheric temperature of 150 ° C. for 4 seconds by an electric heater. To obtain a surface-treated copper foil having a browned surface. The washing with water was not limited to this step, and was appropriately performed so as not to bring the solution of the previous step into the subsequent step between the aforementioned steps.

例5(比較)
黒色粗化を行わなかったこと以外は例2と同様にして、表面処理銅箔の作製及び評価を行った。
Example 5 (Comparison)
A surface-treated copper foil was prepared and evaluated in the same manner as in Example 2 except that black roughening was not performed.

結果
例1〜5において得られた評価結果は表1に示されるとおりであった。

Figure 2016035604
Results The evaluation results obtained in Examples 1 to 5 were as shown in Table 1.
Figure 2016035604

表1に示される結果から、RΔqが25以下であり、かつ、L表色系の明度Lが30以下である、黒色化表面処理銅箔を作製した例1〜3において、低いヘイズ値が実現されており、それ故、銅箔エッチング後のフィルム透明性が高くなることが分かる。また、ストライプ又はメッシュ状配線の視認性を低減するのに十分な望ましい黒色が実現されている。さらに、例1〜3においてはいずれもL表色系のa値が低く、赤みが強調されない(すなわち配線がより目立ちにくくなる)望ましい色調を呈した。したがって、本発明の黒色化表面処理銅箔はタッチパネルセンサー用の配線材料の用途に極めて適する。
From the results shown in Table 1, in Examples 1 to 3 in which blackened surface-treated copper foils having RΔq of 25 or less and L * a * b * color system brightness L * of 30 or less were prepared. It can be seen that a low haze value is realized, and therefore the film transparency after etching the copper foil is high. Also, a desirable black color sufficient to reduce the visibility of the stripe or mesh wiring is realized. Furthermore, in Examples 1 to 3, all the a * values of the L * a * b * color system were low, and a desirable color tone was exhibited in which redness was not emphasized (that is, the wiring became less noticeable). Therefore, the blackened surface-treated copper foil of the present invention is extremely suitable for use as a wiring material for a touch panel sensor.

Claims (11)

銅粒子を用いた微細粗化により黒色化された処理表面を有する黒色化表面処理銅箔であって、
前記処理表面は、JIS B 0601(2001)に準拠して測定される、粗さ曲線の二乗平均平方根傾斜RΔqが25以下であり、かつ、JIS Z 8729(2004)及びJIS Z 8722(2009)に準拠して測定されるL表色系の明度Lが30以下である、黒色化表面処理銅箔。
A blackened surface-treated copper foil having a treated surface blackened by fine roughening using copper particles,
The treated surface has a root mean square slope RΔq of a roughness curve measured in accordance with JIS B 0601 (2001) of 25 or less, and conforms to JIS Z 8729 (2004) and JIS Z 8722 (2009). A blackened surface-treated copper foil having a L * a * b * color system brightness L * of 30 or less as measured in accordance with the standard.
前記処理表面は、JIS Z 8701(1999)及びJIS Z 8722(2009)に準拠して測定されるXYZ表色系のY値が10以下である、請求項1に記載の黒色化表面処理銅箔。   2. The blackened surface-treated copper foil according to claim 1, wherein the treated surface has a Y value of an XYZ color system measured in accordance with JIS Z 8701 (1999) and JIS Z 8722 (2009) of 10 or less. . 前記RΔqが3〜10である、請求項1又は2に記載の黒色化表面処理銅箔。   The blackened surface-treated copper foil according to claim 1 or 2, wherein the RΔq is 3 to 10. 前記処理表面は、JIS Z 8729(2004)及びJIS Z 8722(2009)に準拠して測定されるL表色系のa値が4以下である、請求項1〜3のいずれか一項に記載の黒色化表面処理銅箔。The treated surface has an L * a * b * color system a * value of 4 or less as measured in accordance with JIS Z 8729 (2004) and JIS Z 8722 (2009). The blackening surface-treated copper foil as described in any one of Claims. 前記処理表面は、JIS B 0601(2001)に準拠して測定される粗さ曲線要素の平均高さRcが0.1〜1.0μmである、請求項1〜4のいずれか一項に記載の黒色化表面処理銅箔。   The said process surface is as described in any one of Claims 1-4 whose average height Rc of the roughness curve element measured based on JISB0601 (2001) is 0.1-1.0 micrometer. Blackened surface-treated copper foil. 前記処理表面は、JIS B 0601(2001)に準拠して測定される算術平均粗さRaが0.10〜0.35μmである、請求項1〜5のいずれか一項に記載の黒色化表面処理銅箔。   The blackened surface according to any one of claims 1 to 5, wherein the treated surface has an arithmetic average roughness Ra of 0.10 to 0.35 µm measured according to JIS B 0601 (2001). Treated copper foil. 前記銅粒子が、銅及び不可避不純物からなる、請求項1〜6のいずれか一項に記載の黒色化表面処理銅箔。   The blackening surface-treated copper foil as described in any one of Claims 1-6 in which the said copper particle consists of copper and an unavoidable impurity. 前記黒色化表面処理銅箔を前記処理表面側で厚さ100μmのポリエチレンテレフタレート樹脂フィルムの片面に貼り合わせた後、エッチングにより前記銅箔を除去した場合に、残されたポリエチレンテレフタレート樹脂フィルムが60%以下のヘイズ値を有する、請求項1〜7のいずれか一項に記載の黒色化表面処理銅箔。   When the blackened surface-treated copper foil is bonded to one side of a polyethylene terephthalate resin film having a thickness of 100 μm on the treated surface side, the remaining polyethylene terephthalate resin film is 60% when the copper foil is removed by etching. The blackening surface-treated copper foil as described in any one of Claims 1-7 which has the following haze values. 0.1〜18μmの厚さを有する、請求項1〜8のいずれか一項に記載の黒色化表面処理銅箔。   The blackening surface-treated copper foil as described in any one of Claims 1-8 which has a thickness of 0.1-18 micrometers. タッチパネルセンサー用の配線材料に用いられる、請求項1〜9のいずれか一項に記載の黒色化表面処理銅箔。   The blackening surface-treated copper foil as described in any one of Claims 1-9 used for the wiring material for touchscreen sensors. キャリア箔と、該キャリア箔上に設けられた剥離層と、該剥離層上に前記処理表面を外側にして設けられた請求項1〜10のいずれか一項に記載の黒色化表面処理銅箔とを備えた、キャリア箔付銅箔。

The blackened surface-treated copper foil according to any one of claims 1 to 10, provided with a carrier foil, a release layer provided on the carrier foil, and the treated surface on the release layer. A copper foil with a carrier foil.

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