TWI568894B - Black surface treatment of copper foil and copper foil with carrier foil - Google Patents

Black surface treatment of copper foil and copper foil with carrier foil Download PDF

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TWI568894B
TWI568894B TW104128398A TW104128398A TWI568894B TW I568894 B TWI568894 B TW I568894B TW 104128398 A TW104128398 A TW 104128398A TW 104128398 A TW104128398 A TW 104128398A TW I568894 B TWI568894 B TW I568894B
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copper foil
treated
blackened
copper
jis
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TW104128398A
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Chinese (zh)
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TW201619448A (en
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Misato Mizoguchi
Sakiko Tomonaga
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Mitsui Mining & Smelting Co
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/04Wires; Strips; Foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C25D5/611Smooth layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils

Description

黑色化表面處理銅箔及附載體箔之銅箔 Blackened surface treated copper foil and copper foil with carrier foil

本發明關於一種黑色化表面處理銅箔及附載體之銅箔。 The present invention relates to a blackened surface treated copper foil and a copper foil with a carrier.

近年來,行動電話、行動式數據終端機等的各種電器用品的操作部正在採用觸控面板。觸控面板是在液晶顯示裝置等的顯示面板的畫面上組合了可偵測指尖或筆尖等的接觸位置的輸入裝置的電子零件,從使用者觀看畫面的操作順序,同時容易進行輸入操作的觀點看來,便利性高。觸控面板依照其構造及偵測方式的不同,而有電阻膜型或電容型等的各種類型。 In recent years, touch panels have been used in operation units of various electric appliances such as mobile phones and mobile data terminals. The touch panel is an electronic component in which an input device capable of detecting a contact position such as a fingertip or a pen tip is combined on a screen of a display panel such as a liquid crystal display device, and the operation sequence of the user is viewed from the screen while the input operation is easy. From the point of view, convenience is high. The touch panel has various types such as a resistive film type or a capacitive type depending on the structure and the detection method.

尤其電容式觸控面板是能夠掌握指尖與導電膜之間的電容變化來偵測位置的產品,活用只需要手指接近面板表面即可產生靜電結合的性質,能夠達成在接觸前顯示出游標的表現或操作。電容式有表面型與投影型2種。如圖1所示般,投影型電容式觸控面板10是將分別在x軸方向及y軸方向圖型化的2層透明電極層12、12’以夾住絕緣層14的方式層合,由電極間的電容變化來偵 測觸碰的位置,能夠以高精密度進行多點偵測,因此智慧型手機等的行動式機器經常採用。此外,在圖1之中,透明電極層12/絕緣層14/透明電極層12’的層合物,會被玻璃基板16與保護蓋18夾持住。 In particular, the capacitive touch panel is capable of grasping the change in capacitance between the fingertip and the conductive film to detect the position. The use of the finger only allows the finger to be close to the surface of the panel to generate an electrostatic bond, which can achieve the performance of the cursor before the contact. Or operation. There are two types of capacitive type: surface type and projection type. As shown in FIG. 1 , the projection type capacitive touch panel 10 is formed by laminating two transparent electrode layers 12 and 12 ′ each patterned in the x-axis direction and the y-axis direction so as to sandwich the insulating layer 14 . Detected by changes in capacitance between electrodes By measuring the position of the touch, multi-point detection can be performed with high precision, so mobile devices such as smart phones are often used. Further, in Fig. 1, the laminate of the transparent electrode layer 12 / the insulating layer 14 / the transparent electrode layer 12' is sandwiched by the glass substrate 16 and the protective cover 18.

近年來有文獻提出在電容式觸控面板之中,將銅箔加工成條紋狀或網狀銅配線來使用以代替過去廣泛使用的ITO(銦錫氧化物)透明電極。這種銅配線的電阻低於ITO透明電極,因此可實現更高靈敏度且運作時安定性優異的觸控面板。例如專利文獻1(日本特開2013-206315號公報)揭示了分別在薄膜表面與背面的透視所需的部分具備條紋狀或網狀銅配線的觸控面板感應器。銅配線會因為金屬本身特有的鏡面反射造成反射率變高,在專利文獻1的觸控面板感應器中,藉由使銅配線在觀看側成為氧化膜而黑色化,降低了由銅配線產生的反射,藉此,作為觸控面板感應器搭載於顯示器時,可抑制對比的降低。另外,該條紋狀或網狀銅配線的形成,是藉由對於將銅箔貼合於薄膜而成的層合體,利用光蝕刻進行圖型化以及將銅箔蝕刻除去,然後對銅配線的觀看側使用鹼藥液進行黑色化處理。 In recent years, it has been proposed in the literature to process copper foil into stripe-like or mesh-shaped copper wiring in a capacitive touch panel to replace the ITO (indium tin oxide) transparent electrode which has been widely used in the past. Since such a copper wiring has a lower electric resistance than the ITO transparent electrode, it is possible to realize a touch panel having higher sensitivity and excellent stability during operation. For example, Patent Document 1 (JP-A-2013-206315) discloses a touch panel sensor having a stripe-like or mesh-shaped copper wiring in a portion required for see-through of the front and back surfaces of the film. In the touch panel sensor of Patent Document 1, the copper wiring is blackened by the oxide film on the viewing side, and the copper wiring is reduced by the copper wiring, which is caused by the specular reflection of the metal. By reflecting, when the touch panel sensor is mounted on the display, the contrast can be suppressed from being lowered. In addition, the formation of the stripe-like or mesh-shaped copper wiring is performed by photolithography and etching of the copper foil by laminating the copper foil to the film, and then viewing the copper wiring. The side is treated with an alkali solution for blackening.

另一方面還已知實施黑色化或褐色化處理的銅箔可作為電漿顯示器前面板用的電磁波遮蔽導電性網所使用的銅箔。例如專利文獻2(WO2007/007870)揭示了一種在未處理銅箔的表面具備鎳系黑色化處理面或鈷系黑色化處理面的表面處理銅箔。另外,專利文獻3(日本特 開2005-187913號公報)揭示了一種具備藉由多階段銅電鍍所形成的褐色面之褐色化表面處理銅箔。 On the other hand, it is also known that a copper foil which is subjected to blackening or browning treatment can be used as a copper foil for shielding electromagnetic waves for electromagnetic waves on the front panel of a plasma display. For example, Patent Document 2 (WO2007/007870) discloses a surface-treated copper foil provided with a nickel-based blackened surface or a cobalt-based blackened surface on the surface of an untreated copper foil. In addition, Patent Document 3 (Japan Special Japanese Laid-Open Patent Publication No. 2005-187913 discloses a browned surface-treated copper foil having a brown surface formed by multi-stage copper plating.

〔先前技術文獻〕 [Previous Technical Literature] 〔專利文獻〕 [Patent Document]

〔專利文獻1〕日本特開2013-206315號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2013-206315

〔專利文獻2〕國際公開第2007/007870號 [Patent Document 2] International Publication No. 2007/007870

〔專利文獻3〕日本特開2005-187913號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2005-187913

附帶一提,如果可使用如引用文獻2或引用文獻3所揭示般預先經過黑色化或褐色化的表面處理銅箔作為觸控面板感應器用的配線材料,則剛好可以不需另外進行黑色化處理。另一方面,像專利文獻1這種條紋狀等的銅配線,是將銅箔蝕刻除去所形成,因此,為了使液晶顯示裝置等的觸控面板所顯示的影像鮮明,重點在於確保薄膜(例如PET薄膜等的樹脂薄膜)在銅箔被蝕刻之處的透明性。這是因為在銅箔被蝕刻之處,薄膜表面會繼承銅箔表面粗糙度等的表面輪廓,因此薄膜的透明性(以下稱為銅箔蝕刻後的薄膜的透明性)顯著受到銅箔表面輪廓影響。關於這點,專利文獻2所記載的表面處理銅箔,雖然在銅箔蝕刻後,薄膜的透明性優異,然而實施了在銅蝕刻液中比銅更不易溶解的鎳系黑色化處理或鈷系黑色化處理,因此蝕刻時會發生線偏差、或銅蝕刻液受到污染而難 以控制液體濃度。另外,專利文獻3所記載的表面處理銅箔,在褐色化處理表面不含會成為阻礙蝕刻主因的異種金屬,因此在如進行專利文獻2的黑色化處理這樣的蝕刻時,不易發生線偏差,雖然如此,然而,藉由多階段的焦化電鍍,銅箔蝕刻後的薄膜的透明性會變差,因此背光部發生散射,液晶顯示部的影像難以鮮明地呈現。 Incidentally, if a surface-treated copper foil which has been previously blackened or browned as disclosed in the cited document 2 or the cited document 3 can be used as a wiring material for a touch panel sensor, it is possible to eliminate the need for additional blackening treatment. . On the other hand, the copper wiring such as the stripe shape of Patent Document 1 is formed by etching away the copper foil. Therefore, in order to make the image displayed on the touch panel such as a liquid crystal display device clear, the focus is on securing the film (for example, The resin film of a PET film or the like) is transparent at the place where the copper foil is etched. This is because when the copper foil is etched, the surface of the film inherits the surface profile of the surface roughness of the copper foil, etc., so the transparency of the film (hereinafter referred to as the transparency of the film after the copper foil etching) is significantly affected by the surface profile of the copper foil. influences. In the surface-treated copper foil described in Patent Document 2, the transparency of the film is excellent after the copper foil is etched, but a nickel-based blackening treatment or a cobalt-based method which is less soluble in copper than the copper in the copper etching solution is applied. Blackening treatment, so line deviation occurs during etching, or copper etching solution is contaminated and difficult To control the liquid concentration. In addition, the surface-treated copper foil described in the patent document 3 does not contain a dissimilar metal which is a main cause of the etching on the surface of the browning treatment. Therefore, in the etching such as the blackening treatment of Patent Document 2, the line deviation is less likely to occur. However, in the multi-stage coking plating, the transparency of the film after the copper foil etching is deteriorated, so that the backlight portion is scattered, and the image of the liquid crystal display portion is hardly presented.

本發明人等這次得到的見解為,藉由使用銅粒子的微細粗糙化使銅箔黑色化,藉此減少處理表面的凹凸及其斜率,在貼合於樹脂薄膜加工成觸控面板用的條紋或網狀配線的情況,可提高銅箔蝕刻後的薄膜的透明性,而且,可實現降低條紋或網狀配線能見度所非常需要的黑色。 The inventors of the present invention have found that the copper foil is blackened by the use of fine roughening of copper particles, whereby the unevenness and the slope of the treated surface are reduced, and the stripe for processing into a touch panel is bonded to the resin film. In the case of the mesh wiring, the transparency of the film after the copper foil etching can be improved, and black which is required to reduce the visibility of the stripe or the mesh wiring can be realized.

所以,本發明之目的在於提供一種黑色化表面處理銅箔,在貼合於樹脂薄膜加工成觸控面板用的條紋或網狀配線的情況下,可提高銅箔蝕刻後的薄膜透明性,而且可實現降低條紋或網狀配線的能見度所非常需要的黑色,適合於觸控面板用電極材料的用途。另外,本發明另一個目的在於提供一種具備這種黑色化表面處理銅箔之附載體箔之銅箔。 Therefore, an object of the present invention is to provide a blackened surface-treated copper foil which can improve the transparency of a film after etching of a copper foil in the case where the resin film is bonded to a stripe or mesh wiring for a touch panel, and It is a black that is very much needed to reduce the visibility of stripes or mesh wiring, and is suitable for the use of electrode materials for touch panels. Further, another object of the present invention is to provide a copper foil with a carrier foil having such a blackened surface-treated copper foil.

依據本發明的一個態樣,可提供一種黑色化表面處理銅箔,其係藉由使用銅粒子的微細粗糙化,具有經過黑色化的處理表面之黑色化表面處理銅箔,而且前述處理表面依據JIS B 0601(2001),所測得的粗糙度曲線的方均根斜率R△q為25以下,且依據JIS Z 8729 (2004)及JIS Z 8722(2009)所測得的L*a*b*色度系統的亮度L*為30以下。 According to an aspect of the present invention, there is provided a blackened surface-treated copper foil which has a blackened surface-treated copper foil having a blackened treated surface by using a fine roughening of copper particles, and the aforementioned treatment surface is based on JIS B 0601 (2001), the measured root mean square slope R Δq of the roughness curve is 25 or less, and according to JIS Z 8729 The luminance L* of the L*a*b* chromaticity system measured by (2004) and JIS Z 8722 (2009) is 30 or less.

依據本發明的另一個態樣,可提供一種附載體箔之銅箔,其係具備載體箔、設置於該載體箔上的剝離層、及以前述處理表面為外側設置於該剝離層上的本發明之黑色化表面處理銅箔。 According to another aspect of the present invention, a copper foil with a carrier foil comprising a carrier foil, a release layer provided on the carrier foil, and a surface provided on the release layer with the treatment surface outside is provided. The invention has a blackened surface treated copper foil.

10‧‧‧投影型電容式觸控面板 10‧‧‧Projected capacitive touch panel

12、12’‧‧‧透明電極層 12, 12'‧‧‧ transparent electrode layer

14‧‧‧絕緣層 14‧‧‧Insulation

16‧‧‧玻璃基板 16‧‧‧ glass substrate

18‧‧‧保護蓋 18‧‧‧ protective cover

24‧‧‧薄膜 24‧‧‧film

22、22’‧‧‧銅配線 22, 22'‧‧‧ copper wiring

22a、22a’‧‧‧經過黑色化的處理表面 22a, 22a’‧‧‧ blackened surface

圖1表示投影型的電容式觸控面板的一般構造之圖。 FIG. 1 is a view showing a general configuration of a projection type capacitive touch panel.

圖2A表示觸控面板用的銅配線的一例之圖。 FIG. 2A is a view showing an example of a copper wiring for a touch panel.

圖2B表示觸控面板用的銅配線的其他例之圖。 FIG. 2B is a view showing another example of the copper wiring for the touch panel.

黑色化表面處理銅箔 Blackened surface treated copper foil

本發明之銅箔為黑色化表面處理銅箔。該黑色化表面處理銅箔具有藉由使用銅粒子的微細粗糙化而黑色化的處理表面。藉由使用銅粒子的微細粗糙化而黑色化,會使處理表面的粗糙度曲線的凹凸小,而具有凹凸斜率特別小的特性。此凹凸斜率小的處理表面,可藉由依據JIS B 0601(2001)所測得的粗糙度曲線的方均根斜率R△q為25以下來規定。藉由降低這種凹凸斜率亦即R△q,在貼合於樹脂薄膜(例如PET薄膜)加工成觸控面板用的條紋或 網狀配線的情況下,可明顯提高銅箔蝕刻後的薄膜的透明性。如前述般,為了使液晶顯示裝置等的觸控面板顯示的影像鮮明地顯現,重點在於確保銅箔蝕刻後的薄膜的透明性,而藉由使用本發明之黑色化表面處理銅箔,可實現此薄膜的透明性。而且,此黑色化表面處理銅箔可實現降低條紋或網狀配線的能見度所非常需要的黑色,此特性可藉由依據JIS Z 8729(2004)及JIS Z 8722(2009)所測得的L*a*b*色度系統的亮度L*為30以下來規定。如前述般,銅配線會因為金屬本身特有的鏡面反射,反射率變高,而如上述般,藉由黑色化成為亮度L*,作為觸控面板感應器搭載於顯示器時,可使顯示的影像鮮明。像這樣,依據本發明,可提供一種黑色化表面處理銅箔,在貼合於樹脂薄膜而加工成觸控面板用的條紋或網狀配線的情況下,可提高銅箔蝕刻後的薄膜透明性,而且可實現降低條紋或網狀配線的能見度所非常需要的黑色。 The copper foil of the present invention is a blackened surface treated copper foil. The blackened surface-treated copper foil has a treated surface which is blackened by the use of fine roughening of copper particles. By using the fine roughening of the copper particles to be blackened, the roughness of the roughness curve of the treated surface is small, and the uneven slope is particularly small. The treatment surface having a small unevenness slope can be defined by a square root mean square slope RΔq of a roughness curve measured in accordance with JIS B 0601 (2001) of 25 or less. By reducing the slope of the unevenness, that is, RΔq, it is processed into a resin film (for example, a PET film) to form a stripe for a touch panel or In the case of the mesh wiring, the transparency of the film after the copper foil etching can be remarkably improved. As described above, in order to vividly display an image displayed on a touch panel such as a liquid crystal display device, the focus is on ensuring the transparency of the film after the copper foil is etched, and by using the blackened surface-treated copper foil of the present invention, The transparency of this film. Moreover, the blackened surface-treated copper foil can achieve black which is highly desirable for reducing the visibility of the stripe or the mesh wiring, and this characteristic can be obtained by L* measured in accordance with JIS Z 8729 (2004) and JIS Z 8722 (2009). The brightness L* of the a*b* chromaticity system is specified to be 30 or less. As described above, the copper wiring has a specular reflection characteristic of the metal itself, and the reflectance is high. As described above, the luminance is L* by the blackening, and the displayed image can be displayed when the touch panel sensor is mounted on the display. Bright. According to the present invention, it is possible to provide a blackened surface-treated copper foil which can improve the transparency of the film after etching of the copper foil in the case of being processed into a stripe or mesh wiring for a touch panel by being bonded to a resin film. And it can achieve black that is very much needed to reduce the visibility of stripes or mesh wiring.

所以,本發明之黑色化表面處理銅箔宜使用於觸控面板感應器用的配線材料,電阻低於以往廣泛使用於觸控面板感應器的ITO透明電極,而成為更好的替代材料。本發明之黑色化表面處理銅箔,在使用於觸控面板感應器用的配線材料的情況下,如圖2A所示般,在銅配線22與薄膜24層合而成的構造之中,宜以朝向觀看側(在圖2A為薄膜24側)的方式來配置經過黑色化的處理表面22a。另外,如圖2B所示般,亦可在薄膜24的兩面層合銅配線22、22’,此情況下,至少上側的銅配線22’,宜 以朝向觀看側(在圖2B中,相對於薄膜24為配線22’側)的方式來配置經過黑色化的處理表面22a’,亦可使兩側的銅配線22、22’的經過黑色化的處理表面22a、22a’朝向觀看側。在圖2A及2B的任一構造之中,銅配線在與觀看側的相反側亦可具有經過黑色化的處理表面。 Therefore, the blackened surface-treated copper foil of the present invention is preferably used for a wiring material for a touch panel inductor, and the electric resistance is lower than that of an ITO transparent electrode widely used in a touch panel sensor, and is a better alternative material. When the blackened surface-treated copper foil of the present invention is used for a wiring material for a touch panel sensor, as shown in FIG. 2A, in the structure in which the copper wiring 22 and the film 24 are laminated, it is preferable to use The blackened treatment surface 22a is disposed toward the viewing side (the side of the film 24 in Fig. 2A). Further, as shown in Fig. 2B, the copper wirings 22, 22' may be laminated on both sides of the film 24. In this case, at least the upper copper wiring 22' should be The blackened processing surface 22a' is disposed so as to face the viewing side (the side of the wiring 22' with respect to the film 24 in FIG. 2B), and the blackened copper wirings 22, 22' may be blackened. The treatment surfaces 22a, 22a' are oriented towards the viewing side. In any of the configurations of FIGS. 2A and 2B, the copper wiring may have a blackened processing surface on the side opposite to the viewing side.

本發明之黑色化表面處理銅箔,藉由使用銅粒子的微細粗糙化,而具有經過黑色化的處理表面。像這樣,本發明之經過黑色化的處理表面是由銅粒子所構成,因此蝕刻性優異。亦即可解決如專利文獻2所揭示的在銅蝕刻液中比銅更不易溶解的鎳系黑色化處理或鈷系黑色化處理在蝕刻時發生線偏差、或銅蝕刻液受到污染而難以控制液體濃度這些缺點。所以,銅粒子宜為由銅及無法避免雜質所構成。銅粒子的粒徑不受特別限定。這是因為銅粒子的粒徑會反映在粗糙度曲線之方均根斜率R△q、粗糙度曲線要素的平均高度Rc、算術平均粗糙度Ra等的表面特性參數,只要藉由這些參數來評估即足夠。雖然如此,認為銅粒子的粒徑宜為10nm~250nm。銅粒子的形狀並未受到特別限定,而若從有效地防止掉屑的觀點看來,則宜為略球狀。 The blackened surface-treated copper foil of the present invention has a blackened treated surface by using fine roughening of copper particles. As described above, since the blackened surface of the present invention is composed of copper particles, it is excellent in etching property. Further, it is possible to solve the problem that the nickel-based blackening treatment or the cobalt-based blackening treatment which is less soluble in copper in the copper etching solution than in the copper etching liquid, which causes the line deviation or the copper etching liquid to be contaminated, and the liquid is difficult to control. Concentration of these shortcomings. Therefore, the copper particles are preferably composed of copper and unavoidable impurities. The particle diameter of the copper particles is not particularly limited. This is because the particle size of the copper particles is reflected in the surface root mean square slope R Δq of the roughness curve, the average height Rc of the roughness curve element, the arithmetic mean roughness Ra, etc., as long as the evaluation by these parameters is sufficient. . Nevertheless, it is considered that the particle diameter of the copper particles is preferably from 10 nm to 250 nm. The shape of the copper particles is not particularly limited, and is preferably slightly spherical from the viewpoint of effectively preventing chipping.

本發明之黑色化表面處理銅箔的處理表面,其粗糙度曲線的方均根斜率R△q為25以下。R△q是依據JIS B 0601(2001)所測得的粗糙度曲線的基準長度l中的局部斜率dZ/dx的方均根,依照下式來定義。 The treated surface of the blackened surface-treated copper foil of the present invention has a root mean square slope R?q of a roughness curve of 25 or less. R Δq is a square root of the local slope dZ/dx in the reference length l of the roughness curve measured according to JIS B 0601 (2001), and is defined according to the following formula.

像這樣,R△q是將凹凸傾向平均化的參數,明確指示了處理表面上的瘤狀物的有無。亦即,R△q若過高,則代表瘤狀物或凹凸過大,銅箔蝕刻後的薄膜的透明性變差。關於這點,若R△q為25以下,則處理表面上的瘤狀物或凹凸變小,因此銅箔蝕刻後的薄膜的透明性提升。合適的R△q為3~25,更佳為3~10,特佳為3~8,最佳為4~7。若在這樣的範圍,則可進一步提升銅箔蝕刻後的薄膜的透明性,另外亦可達到某種程度減少微細粗糙化的量而以瘤狀物來黑化。 In this manner, R Δq is a parameter for averaging the unevenness, and clearly indicates the presence or absence of the tumor on the treated surface. That is, if RΔq is too high, it means that the nodules or the irregularities are too large, and the transparency of the film after the copper foil etching is deteriorated. In this regard, when RΔq is 25 or less, the nodules or irregularities on the treated surface become small, and thus the transparency of the film after copper foil etching is improved. A suitable RΔq is 3 to 25, more preferably 3 to 10, particularly preferably 3 to 8, and most preferably 4 to 7. In such a range, the transparency of the film after the copper foil etching can be further improved, and the amount of fine roughening can be reduced to some extent to be blackened by the nodules.

本發明之黑色化表面處理銅箔的處理表面依據JIS Z 8729(2004)及JIS Z 8722(2009)所測得的L*a*b*色度系統的亮度L*為30以下,宜為20以下,較佳為15以下,更佳為13以下。下限值不受特別限定,而例如0.5以上。亮度L*值愈低代表看到愈黑,其值愈高代表看到愈白。關於這點,若在上述範圍內,則貼合於樹脂薄膜加工成觸控面板用的條紋或網狀配線的情況下,可更有效地降低條紋或網狀配線的能見度。其結果,在作為觸控面板感應器搭載於顯示器時,可使顯示的影像鮮明。 The treated surface of the blackened surface-treated copper foil of the present invention has a brightness L* of 30 or less, preferably 20, in accordance with JIS Z 8729 (2004) and JIS Z 8722 (2009). Hereinafter, it is preferably 15 or less, more preferably 13 or less. The lower limit value is not particularly limited, and is, for example, 0.5 or more. The lower the brightness L* value, the darker the color, and the higher the value, the whiter it is. In this case, when the resin film is processed into a stripe or mesh wiring for a touch panel in the above range, the visibility of the stripe or the mesh wiring can be more effectively reduced. As a result, when the touch panel sensor is mounted on the display, the displayed image can be made sharp.

本發明之黑色化表面處理銅箔的處理表面依據JIS Z 8701(1999)及JIS Z 8722(2009)所測得的 XYZ色度系統之Y值宜為10以下,較佳為5以下。下限值不受特別限定,而通常為0.5以上。Y值被稱為視感反射率,是同時代表綠色與反射率的參數。尤其從反射率變低,結果能夠有效避免或抑制顯示器部的感應器發生反射而看到呈現白色的現象的觀點看來,Y值宜為10以下。 The treated surface of the blackened surface-treated copper foil of the present invention is measured in accordance with JIS Z 8701 (1999) and JIS Z 8722 (2009). The Y value of the XYZ chromaticity system is preferably 10 or less, preferably 5 or less. The lower limit value is not particularly limited, but is usually 0.5 or more. The Y value is called the visual reflectance and is a parameter that simultaneously represents green and reflectance. In particular, from the viewpoint that the reflectance is lowered, as a result, it is possible to effectively prevent or suppress the reflection of the sensor of the display unit and to observe the phenomenon of white appearance, the Y value is preferably 10 or less.

本發明之黑色化表面處理銅箔的處理表面依據JIS Z 8729(2004)及JIS Z 8722(2009)所測得的L*a*b*色度系統之a*值宜為4以下,較佳為-5~3、更佳為-3~2。L*a*b*色度系統之a*值愈高,代表色調愈呈紅色,而肉眼會有容易看到色調呈紅色的傾向。關於這點,在觸控面板感應器用的配線材料的用途,a*值若在如上述般的範圍,從紅色不會被強調,配線變得較不明顯的觀點看來,認為會呈現較適合的色調。 The treated surface of the blackened surface-treated copper foil of the present invention preferably has an a* value of 4 or less in accordance with the L*a*b* chromaticity system measured in accordance with JIS Z 8729 (2004) and JIS Z 8722 (2009). It is -5 to 3, more preferably -3 to 2. The higher the a* value of the L*a*b* chromaticity system, the more reddish the hue, and the tendency for the naked eye to be seen in red. In this regard, in the use of the wiring material for the touch panel sensor, if the a* value is in the range as described above, it is considered to be more suitable from the viewpoint that the red color is not emphasized and the wiring becomes less noticeable. Tone.

本發明之黑色化表面處理銅箔的處理表面依據JIS B 0601(2001)所測得的粗糙度曲線要素的平均高度Rc宜為0.1~1.0μm,較佳為0.1~0.8μm,更佳為01~0.5μm,特佳為0.2~0.4μm。若上述範圍內,則貼合於樹脂薄膜加工成觸控面板用的條紋或網狀配線的情況下,電路不易剝離,另外還容易實現電路圖型的直線性。 The treated surface of the blackened surface-treated copper foil of the present invention has an average height Rc of 0.1 to 1.0 μm, preferably 0.1 to 0.8 μm, more preferably 01, as measured by JIS B 0601 (2001). ~0.5μm, particularly preferably 0.2~0.4μm. In the case where the resin film is processed into a stripe or mesh wiring for a touch panel in the above range, the circuit is not easily peeled off, and the linearity of the circuit pattern can be easily realized.

本發明之黑色化表面處理銅箔的處理表面依據JIS B 0601(2001)所測得的算術平均粗糙度Ra宜為010~0.35μm,較佳為0.15~0.25μm、更佳為0.20~0.25μm。若在上述範圍內,則在貼合於樹脂薄膜加工成觸控面板用的條紋或網狀配線的情況下,電路不易剝離,另 外還容易實現電路圖型的直線性。 The treated surface of the blackened surface-treated copper foil of the present invention preferably has an arithmetic mean roughness Ra of from 010 to 0.35 μm, preferably from 0.15 to 0.25 μm, more preferably from 0.20 to 0.25 μm, measured according to JIS B 0601 (2001). . If it is in the above range, the film is not easily peeled off when the resin film is processed into a stripe or mesh wiring for a touch panel. It is also easy to realize the linearity of the circuit pattern.

本發明之黑色化表面處理銅箔,將黑色化表面處理銅箔以前述處理表面側貼合於厚度100μm的聚對苯二甲酸乙二酯樹脂(PET)薄膜的單面之後,藉由蝕刻除去銅箔的情況下,殘留的聚對苯二甲酸乙二酯樹脂薄膜宜具有60%以下的霧度值(Haze),較佳為50%以下,更佳為45%以下,特佳為20%以下,最佳為10%以下。下限值不受特別限定,而例如1%以上。霧度值意指模糊程度,因此如上述般低霧度值意指高透明性。所以,這種構造的黑色化表面處理銅箔,在貼合於樹脂薄膜加工成觸控面板用的條紋或網狀配線的情況,可提高銅箔蝕刻後的薄膜的透明性。此外,霧度值只要藉由在將黑色化表面處理銅箔與PET薄膜(厚度100μm)熱壓接而製作出貼銅層合板之後,將該表面處理銅箔蝕刻除去,使用市售的霧度計(例如日本電色工業股份有限公司製,NDH5000),依據JIS K 7136(2000),對於殘留的PET薄膜測定3處在23℃下薄膜的霧度值(Haze:單位%)並求得其平均值即可。 In the blackened surface-treated copper foil of the present invention, the blackened surface-treated copper foil is bonded to one side of a polyethylene terephthalate resin (PET) film having a thickness of 100 μm by the treatment surface side, and then removed by etching. In the case of a copper foil, the residual polyethylene terephthalate resin film preferably has a haze value of 60% or less, preferably 50% or less, more preferably 45% or less, and particularly preferably 20%. Hereinafter, the optimum is 10% or less. The lower limit value is not particularly limited, and is, for example, 1% or more. The haze value means the degree of blurring, so the low haze value as described above means high transparency. Therefore, the blackened surface-treated copper foil having such a structure can improve the transparency of the film after the copper foil etching in the case where the resin film is bonded to the stripe or mesh wiring for the touch panel. Further, the haze value was obtained by subjecting a blackened surface-treated copper foil to a PET film (thickness: 100 μm) by thermocompression bonding to prepare a copper-clad laminate, and then etching the surface-treated copper foil to remove commercially available haze. The haze value (Haze: unit %) of three films at 23 ° C was measured for the residual PET film according to JIS K 7136 (2000) and determined according to JIS K 7136 (2000). The average value is sufficient.

本發明的黑色化表面處理銅箔的厚度不受特別限定,宜為0.1~18μm,較佳為0.5~10μm,更佳為0.5~7μm,特佳為0.5~5μm,最佳為0.5~3μm。此外,本發明的黑色化表面處理銅箔,不限於對通常的銅箔表面實施黑色粗糙化的銅箔,亦可對附載體箔之銅箔的銅箔表面實施黑色粗糙化。 The thickness of the blackened surface-treated copper foil of the present invention is not particularly limited, but is preferably 0.1 to 18 μm, preferably 0.5 to 10 μm, more preferably 0.5 to 7 μm, particularly preferably 0.5 to 5 μm, and most preferably 0.5 to 3 μm. Further, the blackened surface-treated copper foil of the present invention is not limited to a copper foil which is roughened to the surface of a normal copper foil, and the surface of the copper foil of the copper foil with a carrier foil may be blackened.

黑色化表面處理銅箔的製造方法 Method for producing blackened surface treated copper foil

對於本發明的黑色化表面處理銅箔合適的製造方法的一例作說明,然而本發明的黑色化表面處理銅箔不受限於以下說明的方法,只要進行使用銅粒子的微細粗糙化,則藉由各種方法製造的物品皆可。 An example of a suitable method for producing a blackened surface-treated copper foil of the present invention will be described. However, the blackened surface-treated copper foil of the present invention is not limited to the method described below, and as long as fine graining using copper particles is performed, Items made by various methods are acceptable.

(1)銅箔的準備 (1) Preparation of copper foil

製造黑色化表面處理銅箔所使用的銅箔,可採用電解銅箔及壓延銅箔兩者。另外,銅箔可為無粗糙化的銅箔,或實施預粗糙化的銅箔。銅箔之厚度不受特別限定,而以0.1~18μm為佳,較佳為0.5~10μm、更佳為0.5~7μm,特佳為0.5~5μm,最佳為0.5~3μm。在以附載體箔的銅箔的形態來準備銅箔的情況下,銅箔可藉由無電解鍍銅法及銅電鍍法等的濕式成膜法、濺鍍及化學蒸鍍等的乾式成膜法、或該等的組合而形成。 As the copper foil used for producing the blackened surface-treated copper foil, both an electrolytic copper foil and a rolled copper foil can be used. Further, the copper foil may be a copper foil which is not roughened or a copper foil which is pre-roughened. The thickness of the copper foil is not particularly limited, and is preferably 0.1 to 18 μm, more preferably 0.5 to 10 μm, still more preferably 0.5 to 7 μm, particularly preferably 0.5 to 5 μm, and most preferably 0.5 to 3 μm. When the copper foil is prepared in the form of a copper foil with a carrier foil, the copper foil can be dried by a wet film formation method such as electroless copper plating or copper plating, sputtering, or chemical vapor deposition. A film method or a combination of these is formed.

利用銅粒子進行微細粗糙化的銅箔表面起伏的最大高低差(Wmax)宜為2.0μm以下,較佳為1.2μm以下,更佳為0.8μm以下。下限值不受特別限定,而例如0.1μm以上。若在上述範圍內,則在利用銅粒子進行微細粗糙化時,可降低粗糙度曲線的方均根斜率R△q所規定的凹凸斜率,在貼合於樹脂薄膜(例如PET薄膜)加工成觸控面板用的條紋或網狀配線的情況下,可明顯提高銅箔蝕刻後的薄膜的透明性。此外,「起伏的最大高低差 (Wmax)」,是指由使用三維表面構造解析顯微鏡所得到關於試樣表面凹凸的資訊,將起伏所關連的波形數據過濾而抽出的波形數據中的高低差之最大值(波形的最大峰高度與最大波谷深度的和),可藉由例如測定機器採用zygo New View 5032(Zygo公司製),解析軟體使用Metro Pro Ver.8.0.2,低頻率濾波器採用11μm的條件來測定。 The maximum height difference (Wmax) of the surface roughness of the copper foil which is finely roughened by the copper particles is preferably 2.0 μm or less, preferably 1.2 μm or less, more preferably 0.8 μm or less. The lower limit value is not particularly limited, and is, for example, 0.1 μm or more. When it is in the above range, when the copper particles are finely roughened, the slope of the unevenness defined by the root mean square slope RΔq of the roughness curve can be reduced, and the film can be processed into a touch panel by bonding to a resin film (for example, a PET film). In the case of stripe or mesh wiring, the transparency of the film after copper foil etching can be remarkably improved. In addition, "the maximum height difference of the undulation (Wmax) is the maximum value of the waveform in the waveform data obtained by filtering the waveform data associated with the undulation by the information obtained by using the three-dimensional surface structure analysis microscope. For example, the measurement machine uses zygo New View 5032 (manufactured by Zygo Co., Ltd.), the analysis software uses Metro Pro Ver. 8.0.2, and the low frequency filter is measured under the condition of 11 μm.

(2)黑色粗糙化 (2) Black roughening

藉由使用銅粒子的微細粗糙化,使銅箔的至少一個表面黑色化。此黑色粗糙化是藉由使用黑色粗糙化用銅電解溶液的電解來進行。合適的黑色粗糙化用銅電解溶液為銅濃度10~20g/L、游離硫酸濃度30~100g/L、氯濃度20~100ppm的電解溶液。此處,在銅濃度未滿10g/L的情況下,銅粒子的電沉積速度變慢,不滿足工業上所要求的生產性,故不適合。另一方面,若銅濃度超過20g/L,則因為與後述電流密度有關,會接近平滑電鍍的條件,而難以達成黑色粗糙化,故不適合。而且,游離硫酸濃度與該銅濃度有關,若脫離該濃度範圍,則電解時的通電特性變化,難以達成良好的黑色粗糙化,故不適合。 At least one surface of the copper foil is blackened by using fine roughening of the copper particles. This black roughening is performed by electrolysis using a copper electrolytic solution for black roughening. A suitable copper electrolytic solution for black roughening is an electrolytic solution having a copper concentration of 10 to 20 g/L, a free sulfuric acid concentration of 30 to 100 g/L, and a chlorine concentration of 20 to 100 ppm. Here, when the copper concentration is less than 10 g/L, the electrodeposition speed of the copper particles becomes slow, and the industrially required productivity is not satisfied, which is not suitable. On the other hand, when the copper concentration exceeds 20 g/L, it is close to the current density described later, and it is close to the conditions of smooth plating, and it is difficult to achieve black roughening, which is not suitable. Further, the concentration of free sulfuric acid is related to the concentration of copper. When the concentration is out of this concentration range, the electrification characteristics at the time of electrolysis change, and it is difficult to achieve good black roughening, which is not suitable.

在黑色粗糙化用銅電解溶液中,宜進一步加入添加劑來控制微細粗糙化。這種添加劑合適的例子,可列舉聚乙二醇及雙(3-磺酸基丙基)二硫化物的組合、聚丙烯酸鈉等。例如聚乙二醇及雙(3-磺酸基丙基)二硫化 物宜分別以濃度10~500ppm添加至黑色粗糙化用銅電解溶液。聚丙烯酸鈉宜為以濃度10~1000ppm添加至黑色粗糙化用銅電解溶液。以這種方式,藉由將添加劑單獨或適當地組合而添加,可抑制針狀的粒成長,而形成球狀微細粗糙化粒子。 In the copper electrolytic solution for black roughening, it is preferable to further add an additive to control fine roughening. Suitable examples of such an additive include a combination of polyethylene glycol and bis(3-sulfopropyl)disulfide, sodium polyacrylate, and the like. For example, polyethylene glycol and bis(3-sulfopropyl) disulfide The materials should be added to the black electrolytic copper electrolytic solution at a concentration of 10 to 500 ppm. The sodium polyacrylate is preferably added to the black electrolytic copper electrolytic solution at a concentration of 10 to 1000 ppm. In this manner, by adding the additives singly or appropriately, it is possible to suppress the growth of the acicular particles and form the spherical fine roughened particles.

使用黑色粗糙化用銅電解溶液的電解,宜在溶液溫度20~40℃的電解液中,使銅箔極化為陰極,在電流密度30~100A/dm2,時間2~10sec的條件下進行。若溶液溫度未滿20℃,則所形成的粗糙化粒子的形狀容易發生偏差,故不適合。另一方面,若此溶液溫度超過40℃,則黑色粗糙化用銅電解溶液的溶液性質容易變化,會有無法安定進行微細粗糙化的傾向,故不適合。另外,在電流密度未滿30A/dm2的情況下,無法充分進行黑色粗糙化,黑色粗糙面的亮度L*難以定在30以下,故不適合。另一方面,若電流密度超過100A/dm2,則微細的銅粒子的析出速度太快,所形成的銅粒子形狀無法成為良好的球狀體,故不適合。 The electrolysis of the copper electrolytic solution for black roughening is preferably carried out by polarizing the copper foil into a cathode in an electrolyte having a solution temperature of 20 to 40 ° C, and performing the current density of 30 to 100 A/dm 2 for 2 to 10 sec. . If the solution temperature is less than 20 ° C, the shape of the formed roughened particles tends to vary, which is not suitable. On the other hand, when the temperature of the solution exceeds 40° C., the solution properties of the copper electrolytic solution for black roughening tend to change, and there is a tendency that the fine roughening tends not to be stabilized, which is not preferable. In addition, when the current density is less than 30 A/dm 2 , the black roughening cannot be sufficiently performed, and the luminance L* of the black rough surface is hardly set to 30 or less, which is not suitable. On the other hand, when the current density exceeds 100 A/dm 2 , the deposition rate of the fine copper particles is too fast, and the shape of the formed copper particles cannot be a good spherical body, which is not suitable.

(3)防銹處理 (3) Anti-rust treatment

依照需求,亦可對於黑色粗糙化後的銅箔實施防銹處理。防銹處理宜為包含使用鋅的電鍍處理。使用鋅的電鍍處理可為鋅電鍍處理及鋅合金電鍍處理之任一者,鋅合金電鍍處理以鋅-鎳合金處理為特佳。鋅-鎳合金處理只要是至少含有Ni及Zn的電鍍處理即可,亦可進一步含有 Sn、Cr、Co等的其他元素。鋅-鎳合金電鍍中的Ni/Zn附著比率,以質量比而計,宜為1.2~10,較佳為2~7、更佳為2.7~4。另外,防銹處理宜進一步包含鉻酸鹽處理,該鉻酸鹽處理,以在使用鋅的電鍍處理之後,對於含鋅的電鍍的表面進行為較佳。藉此可進一步提升防銹性。特別合適的防銹處理是鋅-鎳合金電鍍處理與後續的鉻酸鹽處理的組合。 According to the demand, the black roughened copper foil can also be subjected to rustproof treatment. The rustproof treatment is preferably an electroplating treatment involving the use of zinc. The zinc plating treatment can be either zinc plating treatment or zinc alloy plating treatment, and zinc alloy plating treatment is particularly preferable for zinc-nickel alloy treatment. The zinc-nickel alloy treatment may be performed by plating treatment containing at least Ni and Zn, and may further contain Other elements such as Sn, Cr, Co, and the like. The Ni/Zn adhesion ratio in the zinc-nickel alloy plating is preferably 1.2 to 10, preferably 2 to 7, more preferably 2.7 to 4 in terms of mass ratio. Further, the rustproof treatment preferably further includes a chromate treatment which is preferably carried out on the surface of the zinc-containing plating after the plating treatment using zinc. Thereby, the rust prevention property can be further improved. A particularly suitable rust-preventing treatment is a combination of a zinc-nickel alloy plating treatment followed by a subsequent chromate treatment.

(4)矽烷偶合劑處理 (4) decane coupling agent treatment

依照需求,對銅箔實施矽烷偶合劑處理,亦可形成矽烷偶合劑層。藉此可提升耐濕性、耐藥品性及與黏著劑等的密接性等。矽烷偶合劑層可藉由將矽烷偶合劑適當地稀釋、塗佈,並使其乾燥而形成。矽烷偶合劑的例子,可列舉4-縮水甘油基丁基三甲氧基矽烷、γ-縮水甘油醚氧基丙基三甲氧基矽烷等的環氧官能性矽烷偶合劑、或γ-胺丙基三乙氧基矽烷、N-β(胺乙基)γ-胺丙基三甲氧基矽烷、N-3-(4-(3-胺基丙氧基)丁氧基)丙基-3-胺丙基三甲氧基矽烷、N-苯基v胺丙基三甲氧基矽烷等的胺基官能性矽烷偶合劑、或γ-巰丙基三甲氧基矽烷等的巰基官能性矽烷偶合劑或乙烯基三甲氧基矽烷、乙烯基苯基三甲氧基矽烷等的烯烴官能性矽烷偶合劑、或γ-甲基丙烯醯氧基丙基三甲氧基矽烷等的丙烯酸官能性矽烷偶合劑、或咪唑矽烷等的咪唑官能性矽烷偶合劑、或三嗪矽烷等的三嗪官能性矽烷偶合劑等。 The copper foil may be subjected to a decane coupling agent treatment according to requirements, and a decane coupling agent layer may also be formed. Thereby, moisture resistance, chemical resistance, adhesion to an adhesive, etc. can be improved. The decane coupling agent layer can be formed by appropriately diluting, coating, and drying the decane coupling agent. Examples of the decane coupling agent include an epoxy functional decane coupling agent such as 4-glycidylbutyltrimethoxy decane or γ-glycidoxypropyltrimethoxy decane, or γ-aminopropyl hydride. Ethoxy decane, N-β (aminoethyl) γ-aminopropyltrimethoxydecane, N-3-(4-(3-aminopropoxy)butoxy)propyl-3-amine-propyl An amino functional decane coupling agent such as a methoxymethoxy decane or an N-phenyl propyl propyl trimethoxy decane, or a thiol functional decane coupling agent such as γ-mercaptopropyltrimethoxy decane or a vinyl trimethyl An olefin functional decane coupling agent such as oxydecane or vinylphenyltrimethoxy decane, or an acrylic functional decane coupling agent such as γ-methacryloxypropyltrimethoxydecane or an imidazolium or the like An imidazole-functional decane coupling agent or a triazine-functional decane coupling agent such as triazine decane.

附載體箔的銅箔 Copper foil with carrier foil

本發明之黑色化表面處理銅箔,能夠以附載體箔之銅箔的形態來提供。尤其在為了使作為觸控面板感應器搭載於顯示器時的顯示的影像鮮明而將電路圖型寬設定得較狹窄或將銅配線的高度定在5μm以下的情況下,會需要使用薄的銅箔,因此從操作性提升的觀點看來,宜為使用附載體之銅箔。此情況下,附載體箔之銅箔係具備載體箔、設置於該載體箔上的剝離層、在該剝離層上以黑色化處理表面為外側的方式設置的本發明之黑色化表面處理銅箔而成。當然地,附載體箔之銅箔除了使用本發明之黑色化表面處理銅箔之外,還可採用周知的層構成。 The blackened surface-treated copper foil of the present invention can be provided in the form of a copper foil with a carrier foil. In particular, when the image of the display when the touch panel sensor is mounted on the display is sharp, and the circuit pattern width is set to be narrow or the height of the copper wiring is set to 5 μm or less, it is necessary to use a thin copper foil. Therefore, it is preferable to use a copper foil with a carrier from the viewpoint of operability improvement. In this case, the copper foil with a carrier foil is provided with a carrier foil, a peeling layer provided on the carrier foil, and the blackened surface-treated copper foil of the present invention provided on the peeling layer so that the blackened surface is outside. Made. Of course, the copper foil with a carrier foil may be formed of a well-known layer in addition to the blackened surface-treated copper foil of the present invention.

載體箔是用來支持黑色化表面處理銅箔,提升其操作性的箔。載體箔的例子,可列舉鋁箔、銅箔、表面經過金屬塗佈的樹脂薄膜等,宜為銅箔。銅箔可為壓延銅箔及電解銅箔之任一者。載體箔的厚度通常為200μm以下,宜為18μm~200μm。 The carrier foil is a foil used to support the blackened surface-treated copper foil to improve its operability. Examples of the carrier foil include an aluminum foil, a copper foil, a resin film whose surface is metal-coated, and the like, and are preferably a copper foil. The copper foil may be any of a rolled copper foil and an electrolytic copper foil. The thickness of the carrier foil is usually 200 μm or less, preferably 18 μm to 200 μm.

剝離層是具有能夠使載體箔的剝離強度變弱,確保該強度的安定性,進一步在高溫下壓延成形時,抑制可能會在載體箔與銅箔之間發生的互相擴散的機能的層。剝離層一般是形成於載體箔的一面,而亦可形成於兩面。剝離層可為有機剝離層或無機剝離層之任一者。 The release layer is a layer having a function of reducing the peel strength of the carrier foil and ensuring the strength, and further suppressing the mutual diffusion between the carrier foil and the copper foil during the calender molding at a high temperature. The release layer is generally formed on one side of the carrier foil, and may be formed on both sides. The release layer may be either an organic release layer or an inorganic release layer.

有機剝離層所使用的有機成分的例子,可列舉含氮的有機化合物、含硫的有機化合物、羧酸等。含氮的有機化 合物的例子,可列舉三唑化合物、咪唑化合物等,尤其從剝離性容易安定的觀點看來,適合為三唑化合物。三唑化合物的例子,可列舉1,2,3-苯并三唑、羧苯并三唑、N’,N’-雙(苯并三唑甲基)尿素、1H-1,2,4-三唑及3-胺基-1H-1,2,4-三唑等。含硫的有機化合物的例子,可列舉巰基苯并噻唑、三聚硫氰酸、2-苯甲咪唑硫醇等。羧酸的例子,可列舉單羧酸、二羧酸等。另一方面,無機剝離層所使用的無機成分的例子,可列舉Ni、Mo、Co、Cr、Fe、Ti、W、P、Zn、鉻酸鹽處理膜等。此外,剝離層的形成,只要藉由使載體箔的至少一個表面與含有剝離層成分的溶液接觸,使剝離層成分固定於載體箔的表面等來進行即可。載體箔與含有剝離層成分的溶液的接觸,只要藉由在含有剝離層成分的溶液中的浸漬、含有剝離層成分的溶液的噴霧、含有剝離層成分的溶液的滴流等來進行即可。另外,剝離層成分在載體箔表面的固定,只要藉由含有剝離層成分的溶液的乾燥、含有剝離層成分的溶液中的剝離層成分的電沉積等進行即可。剝離層的厚度通常為1nm~1μm,宜為5nm~500nm。 Examples of the organic component used in the organic release layer include a nitrogen-containing organic compound, a sulfur-containing organic compound, and a carboxylic acid. Nitrogen-containing organication Examples of the compound include a triazole compound, an imidazole compound, and the like, and are particularly preferably a triazole compound from the viewpoint of easy removability. Examples of the triazole compound include 1,2,3-benzotriazole, carboxybenzotriazole, N', N'-bis(benzotriazolmethyl)urea, and 1H-1,2,4- Triazole and 3-amino-1H-1,2,4-triazole and the like. Examples of the sulfur-containing organic compound include mercaptobenzothiazole, trimeric thiocyanate, 2-benzimidazolethiol, and the like. Examples of the carboxylic acid include a monocarboxylic acid, a dicarboxylic acid, and the like. On the other hand, examples of the inorganic component used in the inorganic release layer include Ni, Mo, Co, Cr, Fe, Ti, W, P, Zn, and a chromate treatment film. Further, the formation of the release layer may be carried out by bringing at least one surface of the carrier foil into contact with a solution containing the release layer component, and fixing the release layer component to the surface of the carrier foil or the like. The contact between the carrier foil and the solution containing the release layer component may be carried out by dipping in a solution containing the release layer component, spraying of a solution containing the release layer component, dripping of a solution containing the release layer component, or the like. Further, the fixing of the peeling layer component on the surface of the carrier foil may be carried out by drying of the solution containing the peeling layer component, electrodeposition of the peeling layer component in the solution containing the peeling layer component, or the like. The thickness of the release layer is usually from 1 nm to 1 μm, preferably from 5 nm to 500 nm.

黑色化表面處理銅箔採用上述本發明之黑色化表面處理銅箔。本發明之黑色化表面處理銅箔,是實施了使用銅粒子的微細粗糙化(黑色化)的產品,其順序只要首先在剝離層的表面形成銅層作為銅箔,然後至少進行微細粗糙化(黑色化)即可。微細粗糙化(黑色化)的細節如前述。此外,銅箔宜為能發揮附載體之銅箔的優點, 以極薄銅箔的形態構成。極薄銅箔合適的厚度為0.1μm~7μm,較佳為0.5μm~5μm、更佳為0.5μm~3μm。 The blackened surface-treated copper foil is the blackened surface-treated copper foil of the present invention described above. The blackened surface-treated copper foil of the present invention is a product which is subjected to fine roughening (blackening) using copper particles in the order of first forming a copper layer as a copper foil on the surface of the peeling layer, and then at least finely roughening ( Black)). The details of the fine roughening (blackening) are as described above. In addition, the copper foil is preferably an advantage of being able to exhibit a copper foil with a carrier. It is constructed in the form of an extremely thin copper foil. A suitable thickness of the ultra-thin copper foil is from 0.1 μm to 7 μm, preferably from 0.5 μm to 5 μm, more preferably from 0.5 μm to 3 μm.

在剝離層與銅箔之間亦可設置其他機能層。這種其他機能層的例子,可列舉輔助金屬層。輔助金屬層宜由鎳及/或鈷所構成。輔助金屬層的厚度宜定在0.001~3μm。 Other functional layers may also be provided between the release layer and the copper foil. Examples of such other functional layers include an auxiliary metal layer. The auxiliary metal layer is preferably composed of nickel and/or cobalt. The thickness of the auxiliary metal layer should be set at 0.001 to 3 μm.

〔實施例〕 [Examples]

藉由以下的例子對本發明進一步具體說明。 The invention is further illustrated by the following examples.

例1:黑色化表面處理銅箔 Example 1: Blackened surface treated copper foil

如以下所述般進行黑色化表面處理銅箔的製作及評估。 The production and evaluation of the blackened surface treated copper foil were carried out as follows.

(1)電解銅箔的製作 (1) Production of electrolytic copper foil

銅電解液採用以下所示組成的硫酸酸性硫酸銅溶液,陰極使用表面粗糙度Ra為0.20μm的鈦製旋轉電極,陽極使用DSA(尺寸安定性陽極),在溶液溫度45℃、電流密度55A/dm2的條件下電解,而得到厚度12μm的電解銅箔。 The copper electrolyte is a sulfuric acid acidic copper sulfate solution having the composition shown below, the cathode is a titanium rotating electrode having a surface roughness Ra of 0.20 μm, and the anode is a DSA (size stable anode) at a solution temperature of 45 ° C and a current density of 55 A/ electrolysis, the electrolytic copper foil having a thickness of 12μm in dm 2.

此電解銅箔的析出面的起伏的最大高低差(Wmax)為0.8μm、電極面的起伏的最大高低差(Wmax)為1.5μm。 The maximum height difference (Wmax) of the undulation of the deposition surface of this electrolytic copper foil was 0.8 μm, and the maximum height difference (Wmax) of the undulation of the electrode surface was 1.5 μm.

<硫酸酸性硫酸銅溶液的組成> <Composition of sulfuric acid acidic copper sulfate solution>

- 銅濃度:80g//L - Copper concentration: 80g//L

- 游離硫酸濃度:140g/L - Free sulfuric acid concentration: 140g/L

- 雙(3-磺酸基丙基)二硫化物濃度:30mg/L - Bis(3-sulfopropyl) disulfide concentration: 30 mg/L

- 二烯丙基二甲基氯化銨聚合物濃度:50mg/L - Diallyldimethylammonium chloride polymer concentration: 50mg/L

- 氯濃度:40mg/L - Chlorine concentration: 40mg/L

<起伏的最大高低差(Wmax))> <Maximum height difference (Wmax) of undulation>

測定機器採用zygo New View5032(Zygo公司製),解析軟體使用Metro Pro Ver.8.0.2,低頻率濾波器採用11μm的條件,測定起伏的最大高低差(Wmax)。此時,使表面處理銅箔的被測定面和試樣座密接而固定,在試樣片1cm見方的範圍內之中,從108μm×144μm的視野選擇6點進行測定,採用從6處測定點所得到的起伏的最大高低差(Wmax)的平均值作為代表值。 The measuring machine was zygo New View 5032 (manufactured by Zygo Co., Ltd.), the analysis software was Metro Pro Ver. 8.0.2, and the low frequency filter was used under the condition of 11 μm to measure the maximum height difference (Wmax) of the undulation. In this case, the surface to be measured and the sample holder of the surface-treated copper foil are adhered to each other and fixed. In the range of 1 cm square of the sample piece, 6 points are selected from the field of view of 108 μm × 144 μm, and the measurement points are measured from 6 places. The average value of the maximum height difference (Wmax) of the obtained undulation is taken as a representative value.

(2)黑色粗糙化 (2) Black roughening

上述電解銅箔所具備的電極面及析出面內,對於析出面側,使用以下所示組成的黑色粗糙化用銅電解溶液,在溶液溫度30℃、電流密度50A/dm2、時間4sec的條件下電解,進行黑色粗糙化。 In the electrode surface and the deposition surface of the electrodeposited copper foil, the copper electrolytic solution for black roughening having the following composition was used for the deposition surface side, and the solution temperature was 30 ° C, the current density was 50 A/dm 2 , and the time was 4 sec. Under electrolysis, black roughening is performed.

<黑色粗糙化用銅電解溶液的組成> <Composition of copper electrolytic solution for black roughening>

- 銅濃度:13g/L - Copper concentration: 13g/L

- 游離硫酸濃度:70g/L - Free sulfuric acid concentration: 70g/L

- 氯濃度:35mg/L - Chlorine concentration: 35mg/L

- 聚乙二醇濃度:100ppm - Polyethylene glycol concentration: 100ppm

- 雙(3-磺酸基丙基)二硫化物濃度:100ppm - Bis(3-sulfopropyl) disulfide concentration: 100 ppm

(3)防銹處理 (3) Anti-rust treatment

對於黑色粗糙化後的電解銅箔的兩面,實施由無機防銹處理及鉻酸鹽處理所構成的防銹處理。首先,在無機防銹處理採用焦磷酸浴,焦磷酸鉀濃度80g/L、鋅濃度0.2g/L、鎳濃度2g/L、液溫40℃、電流密度0.5A/dm2的條件下進行鋅-鎳合金防銹處理。接下來,鉻酸鹽處理是在鋅-鎳合金防銹處理之後,進一步形成鉻酸鹽層。此鉻酸鹽處理,是在鉻酸濃度為1g/L、pH11、溶液溫度25℃、電流密度1A/dm2的條件下進行。 The rust-preventing treatment consisting of inorganic rust-proof treatment and chromate treatment is performed on both surfaces of the blackened roughened electrodeposited copper foil. First, zinc is used in the inorganic rust-preventing treatment using a pyrophosphoric acid bath, a potassium pyrophosphate concentration of 80 g/L, a zinc concentration of 0.2 g/L, a nickel concentration of 2 g/L, a liquid temperature of 40 ° C, and a current density of 0.5 A/dm 2 . - Nickel alloy anti-rust treatment. Next, the chromate treatment is to further form a chromate layer after the zinc-nickel alloy anti-rust treatment. This chromate treatment was carried out under the conditions of a chromic acid concentration of 1 g/L, a pH of 11, a solution temperature of 25 ° C, and a current density of 1 A/dm 2 .

(4)矽烷偶合劑處理 (4) decane coupling agent treatment

將實施上述防銹處理的銅箔水洗,然後立刻進行矽烷偶合劑處理,使矽烷偶合劑吸附於黑色粗糙化面的防銹處理層上。此矽烷偶合劑處理,是藉由使用以純水為溶劑,3-胺丙基三甲氧基矽烷濃度為3g/L的溶液,以蓮蓬頭將該溶液噴灑至黑色粗糙化面而實施吸附處理來進行。吸附矽烷偶合劑的之後,最後藉由電熱器使水分蒸發,而得到厚度12μm的黑色化表面處理銅箔。 The copper foil subjected to the above rust-preventing treatment was washed with water, and immediately subjected to a decane coupling agent treatment to adsorb the decane coupling agent to the rust-preventing treatment layer of the black roughened surface. The decane coupling agent is treated by applying a solution having a concentration of 3-aminopropyltrimethoxydecane of 3 g/L in a solvent of pure water to a black roughened surface by a showerhead. . After the adsorption of the decane coupling agent, the water was finally evaporated by an electric heater to obtain a blackened surface-treated copper foil having a thickness of 12 μm.

(5)評估 (5) Evaluation

針對所得到的黑色化表面處理銅箔,如以下所述般進行各種特性的評估。 With respect to the obtained blackened surface-treated copper foil, various characteristics were evaluated as described below.

<表面特性參數(R△q、Rc及Ra)> <Surface characteristic parameters (RΔq, Rc, and Ra)>

光學測定裝置採用雷射顯微鏡(Olympus製,OLS4100),依據JIS B 0601(2001),測定表面處理銅箔的表面特性參數R△q、Rc及Ra。此測定,是將評估長度定為642μm,在銅箔的寬度方向進行測定。此處,銅箔的寬度方向對應於電解銅箔製造時的旋轉陰極的寬度方向(TD方向)。 The optical measuring apparatus was subjected to a laser microscope (OLS 4100, manufactured by Olympus), and surface characteristic parameters RΔq, Rc and Ra of the surface-treated copper foil were measured in accordance with JIS B 0601 (2001). In this measurement, the evaluation length was set to 642 μm, and the measurement was performed in the width direction of the copper foil. Here, the width direction of the copper foil corresponds to the width direction (TD direction) of the rotating cathode at the time of production of the electrolytic copper foil.

<亮度L*、色度a*及Y值> <Luminance L*, Chroma a* and Y value>

使用分光色彩計(日本電色工業股份有限公司製,SE6000),依據JIS Z 8729(2004)及JIS Z 8722(2009)測定亮度L*及色度a*,依據JIS Z 8701(1999)及JIS Z 8722(2009)測定Y值。 Luminance L* and chromaticity a* were measured in accordance with JIS Z 8729 (2004) and JIS Z 8722 (2009) using a spectrophotometer (SE6000, manufactured by Nippon Denshoku Industries Co., Ltd.) in accordance with JIS Z 8701 (1999) and JIS. Z 8722 (2009) measures the Y value.

<霧度值(Haze)> <Haze value>

將表面處理銅箔與PET薄膜(厚度100μm)熱壓接,而製作出貼銅層合板。然後,藉由蝕刻除去該表面處理銅箔,對於殘留的PET薄膜,使用霧度計(日本電色工業股份有限公司製,NDH5000),依據JIS K 7136(2000),在23℃下測定3處薄膜的霧度值(Haze:單 位%),求得其平均值。 A surface-treated copper foil and a PET film (thickness: 100 μm) were thermocompression bonded to form a copper-clad laminate. Then, the surface-treated copper foil was removed by etching, and a residual haze meter was used, and a haze meter (NDH5000, manufactured by Nippon Denshoku Industries Co., Ltd.) was used, and three places were measured at 23 ° C according to JIS K 7136 (2000). Haze value of the film (Haze: single Bit %), find the average.

例2 Example 2

對於電解銅箔的電極面側實施黑色粗糙化,除此之外,與例1同樣地進行黑色化表面處理銅箔的製作及評估。 The production and evaluation of the blackened surface-treated copper foil were carried out in the same manner as in Example 1 except that the electrode surface side of the electrodeposited copper foil was subjected to black roughening.

例3 Example 3

如以下所述般,進行具備黑色化表面處理銅箔的附載體箔之銅箔的製作及評估。 The production and evaluation of a copper foil with a carrier foil having a blackened surface-treated copper foil was carried out as follows.

(1)載體箔的製作 (1) Production of carrier foil

在銅電解液採用以下所示組成的硫酸酸性硫酸銅溶液,陰極使用表面粗糙度Ra為0.20μm的鈦製旋轉電極,陽極使用DSA(尺寸安定性陽極),溶液溫度45℃、電流密度55A/dm2的條件下電解,得到厚度12μm的電解銅箔作為載體箔。 In the copper electrolyte, a sulfuric acid acidic copper sulfate solution having the composition shown below was used, a cathode made of titanium having a surface roughness Ra of 0.20 μm was used for the cathode, and a DSA (size stability anode) was used for the anode, and the solution temperature was 45 ° C and the current density was 55 A/ Electrolysis was carried out under the conditions of dm 2 to obtain an electrolytic copper foil having a thickness of 12 μm as a carrier foil.

<硫酸酸性硫酸銅溶液的組成> <Composition of sulfuric acid acidic copper sulfate solution>

- 銅濃度:80g/L - Copper concentration: 80g/L

- 游離硫酸濃度:140g/L - Free sulfuric acid concentration: 140g/L

- 雙(3-磺酸基丙基)二硫化物濃度:30mg/L - Bis(3-sulfopropyl) disulfide concentration: 30 mg/L

- 二烯丙基二甲基氯化銨聚合物濃度:50mg/L - Diallyldimethylammonium chloride polymer concentration: 50mg/L

- 氯濃度:40mg/L - Chlorine concentration: 40mg/L

(2)有機剝離層的形成 (2) Formation of organic peeling layer

將經過酸洗處理的載體用銅箔的電極面側,在含有CBTA(羧苯并三唑)1000重量ppm、硫酸150g/l及銅10g/l的CBTA水溶液中,以液溫30℃的條件浸漬30秒鐘然後撈起,使CBTA成分吸附於載體箔的電極面。以這樣的方式,在載體用銅箔的光澤面的表面形成CBTA層作為有機剝離層。 The acid-washed carrier was used on the electrode surface side of the copper foil in a CBTA aqueous solution containing 1000 ppm by weight of CBTA (carboxybenzotriazole), 150 g/l of sulfuric acid, and 10 g/l of copper at a liquid temperature of 30 ° C. After immersing for 30 seconds and then picking up, the CBTA component was adsorbed to the electrode face of the carrier foil. In this manner, a CBTA layer was formed as an organic release layer on the surface of the shiny side of the copper foil for carrier.

(3)輔助金屬層的形成 (3) Formation of auxiliary metal layer

將形成了有機剝離層的載體用銅箔浸漬於含有使用硫酸鎳所製作出的鎳20g/l及焦磷酸鉀300g/l的溶液中,在液溫45℃、PH3、電流密度5A/dm2的條件下,使相當於厚度0.002μm的附著量的鎳附著於有機剝離層上。以這樣的方式,在有機剝離層上形成鎳層作為輔助金屬層。 The carrier in which the organic release layer was formed was immersed in a copper foil containing 20 g/l of nickel and 300 g/l of potassium pyrophosphate prepared by using nickel sulfate at a liquid temperature of 45 ° C, a pH of 3, and a current density of 5 A/dm 2 . Under the conditions, nickel corresponding to an adhesion amount of 0.002 μm in thickness was attached to the organic release layer. In this manner, a nickel layer is formed on the organic release layer as an auxiliary metal layer.

(4)極薄銅箔的形成 (4) Formation of extremely thin copper foil

將形成輔助金屬層的載體用銅箔浸漬於酸性硫酸銅溶液,在電流密度8A/dm2的平滑電鍍條件下電解60秒鐘,在輔助金屬層上形成厚度3μm的極薄銅箔。此極薄銅箔的析出面的起伏的最大高低差(Wmax)為1.1μm。 The carrier which forms the auxiliary metal layer was immersed in an acidic copper sulfate solution with a copper foil, and electrolyzed under smooth plating conditions of a current density of 8 A/dm 2 for 60 seconds to form an ultra-thin copper foil having a thickness of 3 μm on the auxiliary metal layer. The maximum height difference (Wmax) of the undulation of the deposition surface of this ultra-thin copper foil was 1.1 μm.

(5)黑色粗糙化 (5) Black roughening

對於上述極薄銅箔的析出面,使用以下所示組成的黑 色粗糙化用銅電解溶液,在溶液溫度30℃、電流密度50A/dm2、時間4sec的條件下電解,進行黑色粗糙化。 The copper thinning solution for black roughening having the composition shown below was electrolyzed under the conditions of a solution temperature of 30 ° C, a current density of 50 A/dm 2 , and a time of 4 sec, and blackening was performed on the deposition surface of the ultra-thin copper foil.

<黑色粗糙化用銅電解溶液的組成> <Composition of copper electrolytic solution for black roughening>

- 銅濃度:13g/L - Copper concentration: 13g/L

- 游離硫酸濃度:70g/L - Free sulfuric acid concentration: 70g/L

- 氯濃度:35mg/L - Chlorine concentration: 35mg/L

- 聚丙烯酸鈉濃度:400ppm - Sodium polyacrylate concentration: 400ppm

(6)防銹處理 (6) Anti-rust treatment

對黑色粗糙化後的附載體箔的極薄銅箔的兩面進行由無機防銹處理及鉻酸鹽處理所構成之防銹處理。首先,在無機防銹處理採用焦磷酸浴,焦磷酸鉀濃度80g/L、鋅濃度0.2g/L、鎳濃度2g/L、液溫40℃、電流密度0.5A/dm2的條件下進行鋅-鎳合金防銹處理。接下來,鉻酸鹽處理是在鋅-鎳合金防銹處理之後,進一步形成鉻酸鹽層。此鉻酸鹽處理是在鉻酸濃度為1g/L、pH11、溶液溫度25℃、電流密度1A/dm2的條件下進行。 The rust-preventing treatment consisting of inorganic rust-proof treatment and chromate treatment was performed on both sides of the ultra-thin copper foil with the carrier foil after the black roughening. First, zinc is used in the inorganic rust-preventing treatment using a pyrophosphoric acid bath, a potassium pyrophosphate concentration of 80 g/L, a zinc concentration of 0.2 g/L, a nickel concentration of 2 g/L, a liquid temperature of 40 ° C, and a current density of 0.5 A/dm 2 . - Nickel alloy anti-rust treatment. Next, the chromate treatment is to further form a chromate layer after the zinc-nickel alloy anti-rust treatment. This chromate treatment was carried out under the conditions of a chromic acid concentration of 1 g/L, a pH of 11, a solution temperature of 25 ° C, and a current density of 1 A/dm 2 .

(7)矽烷偶合劑處理 (7) decane coupling agent treatment

將實施上述防銹處理的銅箔水洗,然後立刻進行矽烷偶合劑處理,使矽烷偶合劑吸附於黑色粗糙化面的防銹處理層上。此矽烷偶合劑處理,是藉由使用以純水作為溶劑,3-胺丙基三甲氧基矽烷濃度為3g/L的溶液,以蓮蓬 頭將該溶液噴灑至黑色粗糙化面而實施吸附處理來進行。吸附矽烷偶合劑的之後,最後藉由電熱器使水分蒸散,而得到具備厚度3μm的黑色化表面處理極薄銅箔的附載體箔之銅箔。 The copper foil subjected to the above rust-preventing treatment was washed with water, and immediately subjected to a decane coupling agent treatment to adsorb the decane coupling agent to the rust-preventing treatment layer of the black roughened surface. The decane coupling agent is treated by using a solution containing pure water as a solvent and a concentration of 3-aminopropyltrimethoxydecane of 3 g/L. The solution is sprayed onto the black roughened surface to carry out an adsorption treatment. After the decane coupling agent was adsorbed, the water was finally evaporated by an electric heater to obtain a copper foil with a carrier foil having a blackened surface-treated ultra-thin copper foil having a thickness of 3 μm.

(8)評估 (8) Evaluation

對於具備所得到的黑色化表面處理銅箔的附載體箔之銅箔,與例1同樣地進行各種特性的評估。 Each of the characteristics was evaluated in the same manner as in Example 1 for the copper foil with a carrier foil having the obtained blackened surface-treated copper foil.

例4(比較) Example 4 (comparative)

對於電解銅箔的電極面側,進行下述褐色化處理來代替黑色粗糙化,除此之外,與例1同樣地進行褐色化表面處理銅箔的製作及評估。 The production and evaluation of the browned surface-treated copper foil were carried out in the same manner as in Example 1 except that the following browning treatment was carried out on the electrode surface side of the electrodeposited copper foil.

<褐色化處理> <Browning treatment>

首先,將並未實施粗糙化處理的電解銅箔(例1(1)所製作出的物品)在硫酸濃度150g/l、液溫30℃的稀硫酸溶液中浸漬30秒鐘,進行表面的淨化。藉由對於以這樣的方式淨化的電解銅箔依序實施以下所示的步驟(a)~(e),進行褐色化處理。 First, an electrolytic copper foil (an article prepared in Example 1 (1)) which was not subjected to the roughening treatment was immersed in a dilute sulfuric acid solution having a sulfuric acid concentration of 150 g/liter and a liquid temperature of 30 ° C for 30 seconds to carry out surface purification. . The browning treatment was carried out by sequentially performing the steps (a) to (e) shown below on the electrolytic copper foil purified in this manner.

(a)基礎電鍍處理步驟 (a) Basic plating process steps

對於上述電解銅箔的電極面側,使用硫酸銅系電鍍溶液,依照焦化電鍍的條件,進行用以使銅箔表面成為褐色 的基礎電鍍處理。該基礎電鍍處理,是藉由使用銅濃度18g/l、游離硫酸濃度100g/l、液溫25℃的硫酸銅溶液,電流密度(Ia)10A/dm2的焦化電鍍條件下電解來進行。其結果,在此基礎電鍍步驟中進行的焦化電鍍,只形成了用來在銅箔表面形成某程度的凹凸的核,電沉積量為換算厚度300mg/m2On the electrode surface side of the above-mentioned electrodeposited copper foil, a copper sulfate-based plating solution was used, and a base plating treatment for making the surface of the copper foil brown was performed in accordance with the conditions of coking plating. This base plating treatment was carried out by electrolysis under a coking plating condition of a current density (Ia) of 10 A/dm 2 using a copper sulfate solution having a copper concentration of 18 g/l, a free sulfuric acid concentration of 100 g/liter, and a liquid temperature of 25 °C. As a result, in the coking plating performed in the basic plating step, only a core for forming a certain degree of irregularities on the surface of the copper foil was formed, and the electrodeposition amount was 300 mg/m 2 in terms of a converted thickness.

(b)追加電鍍處理步驟 (b) Additional plating process steps

對於以這樣的方式實施基礎電鍍處理的銅箔表面,使用硫酸銅系電鍍溶液,依照焦化電鍍條件,實施一次電鍍處理。此時的追加電鍍處理是使用與上述步驟(a)同樣的濃度及液溫之硫酸銅溶液來進行。此時,將進行焦化電鍍時所採用的電流密度(Ib)定為電流密度Ia的15%而為1.5A/dm2,以防止在步驟(a)形成於銅箔表面的核發生電流集中,並防止無用的異常析出。此追加電鍍步驟中的電沉積量是定為換算厚度為50mg/m2的電沉積量。 For the surface of the copper foil subjected to the basic plating treatment in this manner, a copper sulfate-based plating solution was used, and a plating treatment was performed in accordance with the coking plating conditions. The additional plating treatment at this time is carried out using a copper sulfate solution having the same concentration and liquid temperature as the above step (a). At this time, the current density (Ib) used for the coking plating is set to 15% of the current density Ia to be 1.5 A/dm 2 to prevent current concentration in the core formed on the surface of the copper foil in the step (a). And prevent useless abnormal precipitation. The amount of electrodeposition in this additional plating step was determined as the amount of electrodeposition in which the thickness was 50 mg/m 2 .

(c)被覆電鍍處理步驟 (c) coating plating process steps

對於以這樣的方式實施焦化電鍍的銅箔面,使用銅電鍍溶液,依照平滑電鍍條件進行被覆電鍍處理。此被覆電鍍,是藉由使用銅濃度65g/l、游離硫酸濃度150g/l、液溫45℃的硫酸銅溶液,在電流密度15A/dm2的平滑電鍍條件環境下進行電解來進行。像這樣,使步驟(a)及(b)粗糙化處理的表面變得平滑。此時的平滑電鍍的換 算厚度為4g/m2For the copper foil surface on which coking plating was carried out in this manner, a copper plating solution was used, and a coating plating treatment was performed in accordance with smooth plating conditions. This coating plating was carried out by electrolysis using a copper sulfate solution having a copper concentration of 65 g/l, a free sulfuric acid concentration of 150 g/liter, and a liquid temperature of 45 ° C in a smooth plating condition of a current density of 15 A/dm 2 . In this manner, the surfaces roughened in steps (a) and (b) are smoothed. At this time, in terms of the thickness of the plating is smooth 4g / m 2.

(d)修飾電鍍處理步驟 (d) modification plating process steps

對於以這樣的方式實施平滑電鍍處理的表面,使用銅電鍍溶液,依照焦化電鍍條件,實施將銅箔表面修飾成褐色的修飾電鍍處理,藉此使極微細銅粒附著而形成。此極微細銅粒的形成,是使用添加了9-苯基吖啶而且銅濃度為13g/l、游離硫酸為50g/l、9-苯基吖啶為150mg/l、氯濃度為28ppm、液溫35℃的硫酸銅溶液,以電流密度24A/dm2的電解條件來進行。此修飾電鍍處理步驟中的電沉積量,是定為換算厚度為300mg/m2的電沉積量。 With respect to the surface on which the smooth plating treatment was carried out in this manner, a copper plating solution was used, and a surface of the copper foil was subjected to a modified plating treatment in accordance with the coking plating conditions, whereby extremely fine copper particles were adhered and formed. The formation of the ultrafine copper particles is carried out by adding 9-phenyl acridine and having a copper concentration of 13 g/l, a free sulfuric acid of 50 g/l, a 9-phenyl acridine of 150 mg/l, a chlorine concentration of 28 ppm, and a liquid. The copper sulfate solution at a temperature of 35 ° C was carried out under the electrolysis conditions of a current density of 24 A/dm 2 . The amount of electrodeposition in this modified plating treatment step was determined as the amount of electrodeposition in which the thickness was 300 mg/m 2 .

(e)洗淨及乾燥步驟 (e) Washing and drying steps

對於以這樣的方式實施修飾電鍍的銅箔,充分噴灑純水,進行洗淨,在藉由電熱器將氣體環境溫度設定在150℃的乾燥爐內滯留4秒鐘,使水分蒸發,而得到具備褐色化處理面的表面處理銅箔。此外,水洗不限於此步驟,在前述各步驟之間,以不會將前步驟的溶液帶進後步驟的方式適當地進行。 The copper foil which was subjected to the modified plating in this manner was sufficiently sprayed with pure water, washed, and stored in a drying oven having a gas ambient temperature of 150 ° C for 4 seconds by an electric heater to evaporate water, thereby obtaining The surface treated copper foil of the browned surface. Further, the water washing is not limited to this step, and is suitably carried out between the above steps in such a manner that the solution of the previous step is not brought into the subsequent step.

例5(比較) Example 5 (comparative)

並未進行黑色粗糙化,除此之外,與例2同樣地進行表面處理銅箔的製作及評估。 The production and evaluation of the surface-treated copper foil were carried out in the same manner as in Example 2 except that the black roughening was not performed.

結果 result

例1~5所得到的評估結果如表1所示。 The evaluation results obtained in Examples 1 to 5 are shown in Table 1.

22‧‧‧銅配線 22‧‧‧Bronze wiring

22a‧‧‧經過黑色化的處理表面 22a‧‧‧Blackened surface

24‧‧‧薄膜 24‧‧‧film

Claims (11)

一種黑色化表面處理銅箔,其係具有藉由使用銅粒子的微細粗糙化而黑色化的處理表面之黑色化表面處理銅箔,並且前述處理表面依據JIS B 0601(2001)所測得的粗糙度曲線的方均根斜率R△q為25以下,且依據JIS Z 8729(2004)及JIS Z 8722(2009)所測得的L*a*b*色度系統的亮度L*為30以下。 A blackened surface-treated copper foil having a blackened surface-treated copper foil having a treated surface which is blackened by fine roughening of copper particles, and the aforementioned treated surface is roughened according to JIS B 0601 (2001) The square root mean square slope RΔq of the degree curve is 25 or less, and the luminance L* of the L*a*b* chromaticity system measured according to JIS Z 8729 (2004) and JIS Z 8722 (2009) is 30 or less. 如申請專利範圍第1項之黑色化表面處理銅箔,其中前述處理表面依據JIS Z 8701(1999)及JIS Z 8722(2009)所測得的XYZ色度系統之Y值為10以下。 The blackened surface-treated copper foil according to claim 1, wherein the Y value of the XYZ chromaticity system measured according to JIS Z 8701 (1999) and JIS Z 8722 (2009) is 10 or less. 如申請專利範圍第1項之黑色化表面處理銅箔,其中前述R△q為3~10。 The blackened surface-treated copper foil according to claim 1, wherein the aforementioned RΔq is 3 to 10. 如申請專利範圍第1項之黑色化表面處理銅箔,其中前述處理表面依據JIS Z 8729(2004)及JIS Z 8722(2009)所測得的L*a*b*色度系統之a*值為4以下。 The blackened surface-treated copper foil according to claim 1, wherein the aforesaid treated surface is a* value of the L*a*b* chromaticity system measured according to JIS Z 8729 (2004) and JIS Z 8722 (2009). It is 4 or less. 如申請專利範圍第1項之黑色化表面處理銅箔,其中前述處理表面依據JIS B 0601(2001)所測得的粗糙度曲線要素的平均高度Rc為0.1~1.0μm。 The blackened surface-treated copper foil according to the first aspect of the invention, wherein the average height Rc of the roughness curve element measured according to JIS B 0601 (2001) is 0.1 to 1.0 μm. 如申請專利範圍第1項之黑色化表面處理銅箔,其中前述處理表面依據JIS B 0601(2001)所測得的算術平均粗糙度Ra為0.10~0.35μm。 The blackened surface-treated copper foil according to claim 1, wherein the arithmetic surface roughness Ra measured according to JIS B 0601 (2001) is 0.10 to 0.35 μm. 如申請專利範圍第1項之黑色化表面處理銅箔,其中前述銅粒子係由銅及無法避免雜質所構成。 The blackened surface-treated copper foil according to claim 1, wherein the copper particles are composed of copper and unavoidable impurities. 如申請專利範圍第1項之黑色化表面處理銅箔,其中在將前述黑色化表面處理銅箔以前述處理表面側貼合於厚度100μm的聚對苯二甲酸乙二酯樹脂薄膜的單面之後,藉由蝕刻除去前述銅箔的情況,殘留的聚對苯二甲酸乙二酯樹脂薄膜具有60%以下的霧度值。 The blackened surface-treated copper foil according to the first aspect of the invention, wherein the blackened surface-treated copper foil is attached to one side of a polyethylene terephthalate resin film having a thickness of 100 μm with the aforementioned treated surface side When the copper foil is removed by etching, the residual polyethylene terephthalate resin film has a haze value of 60% or less. 如申請專利範圍第1項之黑色化表面處理銅箔,其係具有0.1~18μm的厚度。 The blackened surface-treated copper foil according to the first aspect of the patent application has a thickness of 0.1 to 18 μm. 如申請專利範圍第1項之黑色化表面處理銅箔,其係使用於觸控面板感應器用的配線材料。 The blackened surface-treated copper foil of claim 1 is used for a wiring material for a touch panel sensor. 一種附載體箔之銅箔,其係具備:載體箔、設置於該載體箔上的剝離層、及以前述處理表面為外側設置於該剝離層上的如申請專利範圍第1~10項中任一項之黑色化表面處理銅箔。 A copper foil with a carrier foil, comprising: a carrier foil, a release layer provided on the carrier foil, and a coating layer disposed on the release layer on the outer side of the treatment surface, as in any of claims 1 to 10 A blackened surface treated copper foil.
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