JPWO2015029783A1 - Manufacturing method of component-integrated sheet, manufacturing method of resin multilayer substrate incorporating electronic component, and resin multilayer substrate - Google Patents

Manufacturing method of component-integrated sheet, manufacturing method of resin multilayer substrate incorporating electronic component, and resin multilayer substrate Download PDF

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JPWO2015029783A1
JPWO2015029783A1 JP2015534134A JP2015534134A JPWO2015029783A1 JP WO2015029783 A1 JPWO2015029783 A1 JP WO2015029783A1 JP 2015534134 A JP2015534134 A JP 2015534134A JP 2015534134 A JP2015534134 A JP 2015534134A JP WO2015029783 A1 JPWO2015029783 A1 JP WO2015029783A1
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electronic component
resin
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JP6094680B2 (en
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大介 釣賀
大介 釣賀
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Murata Manufacturing Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5389Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L24/19Manufacturing methods of high density interconnect preforms
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/185Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
    • H05K1/186Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit manufactured by mounting on or connecting to patterned circuits before or during embedding
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4632Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating thermoplastic or uncured resin sheets comprising printed circuits without added adhesive materials between the sheets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04105Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73267Layer and HDI connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
    • H01L2224/92242Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92244Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a build-up interconnect
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3431Leadless components
    • H05K3/3436Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4697Manufacturing multilayer circuits having cavities, e.g. for mounting components

Abstract

電子部品を内蔵した樹脂多層基板において、電子部品の位置ずれを十分に防止しつつ、特性劣化を抑制することのできる、部品一体型シートの製造方法、および、電子部品を内蔵した樹脂多層基板の製造方法を適用する。本発明は、電子部品と、熱可塑性樹脂を含む熱可塑性の樹脂シートとが一体化された部品一体型シートの製造方法であって、前記電子部品の一方の主面上の少なくとも一部分、または、前記樹脂シートの一方の主面上の前記電子部品と接着される部分の少なくとも一部分に、前記樹脂シートに含まれる熱可塑性樹脂と同じ熱可塑性樹脂を含むペーストを塗布するペースト塗布工程と、前記電子部品を前記ペーストを介して前記樹脂シートに搭載する搭載工程と、前記ペーストを乾燥させる乾燥工程とを含む、部品一体型シートの製造方法である。A method of manufacturing a component-integrated sheet capable of suppressing deterioration of characteristics while sufficiently preventing misalignment of an electronic component in a resin multilayer substrate incorporating an electronic component, and a resin multilayer substrate incorporating an electronic component Apply the manufacturing method. The present invention is a method for producing a component-integrated sheet in which an electronic component and a thermoplastic resin sheet containing a thermoplastic resin are integrated, and at least a part of one main surface of the electronic component, or A paste applying step of applying a paste containing the same thermoplastic resin as the thermoplastic resin contained in the resin sheet to at least a part of a portion to be bonded to the electronic component on one main surface of the resin sheet; It is a manufacturing method of a component-integrated sheet including a mounting step of mounting a component on the resin sheet via the paste, and a drying step of drying the paste.

Description

本発明は、部品一体型シートの製造方法、電子部品を内蔵した樹脂多層基板の製造方法、ならびに樹脂多層基板に関する。   The present invention relates to a method for manufacturing a component-integrated sheet, a method for manufacturing a resin multilayer substrate incorporating an electronic component, and a resin multilayer substrate.

電子部品を内蔵した樹脂多層基板の製造方法としては、電子部品を収容するための貫通孔が形成された1以上の樹脂シートを積層し、その貫通孔によって形成されたキャビティ内に、真空吸引などの公知技術によって個別に保持された電子部品を配置した後に、キャビティ内に配置された電子部品の露出部分を覆うように樹脂シートを積層する方法が知られている。   As a method of manufacturing a resin multilayer substrate incorporating an electronic component, one or more resin sheets having through holes for accommodating electronic components are stacked, and vacuum suction or the like is performed in a cavity formed by the through holes. A method of laminating a resin sheet so as to cover an exposed portion of an electronic component arranged in a cavity after arranging the electronic components individually held by the known technique is known.

ここで、平面的に見たときのキャビティ(貫通孔)のサイズが電子部品のサイズと同じであると、電子部品の位置が少しずれただけであっても電子部品がキャビティに入らないこととなるので、そのような事態を避けるためにキャビティ(貫通孔)のサイズは、ずれ幅の最大値のずれを許容するように電子部品のサイズより大きく作られる。したがって、キャビティ内に電子部品が配置された状態では、電子部品の外周側面とキャビティの内周側面との間に間隙が生じる。   Here, when the size of the cavity (through hole) when viewed in plan is the same as the size of the electronic component, the electronic component does not enter the cavity even if the position of the electronic component is slightly shifted. Therefore, in order to avoid such a situation, the size of the cavity (through hole) is made larger than the size of the electronic component so as to allow the deviation of the maximum deviation width. Therefore, in a state where the electronic component is disposed in the cavity, a gap is generated between the outer peripheral side surface of the electronic component and the inner peripheral side surface of the cavity.

このような間隙が生じる場合、複数の樹脂シートを樹脂多層基板として一体化するための熱圧着時に、樹脂の流動によって埋まる領域が大きくなる。この樹脂の流動に押されることにより、電子部品の位置ずれが生じやすいという問題があった。また、場合によっては、電子部品周囲の回路パターン(例えば金属箔などからなる平面導体や、導電性ペースト由来のビアホール導体)にも形状が変化して電気的特性が変化してしまったり、ショートが起こってしまったりするなどの不具合が生じることがあった。   When such a gap is generated, a region filled with the flow of the resin becomes large at the time of thermocompression bonding for integrating a plurality of resin sheets as a resin multilayer substrate. There has been a problem that the electronic components are likely to be displaced due to the resin flow. In some cases, the circuit pattern around the electronic component (for example, a flat conductor made of metal foil or a via-hole conductor derived from a conductive paste) changes its shape and changes its electrical characteristics, or a short circuit occurs. In some cases, problems such as things happened.

特許文献1(特開2006−73763号公報)には、このような電子部品を内蔵した樹脂多層基板の製造において、樹脂シートの貫通孔の内壁に複数の突起を設ける方法が開示されている。この方法においては、チップ部品をキャビティ内に配置する際には、これらの突起の先端を潰しつつ電子部品を圧入することとなる。こうして、チップ部品は突起によって側方から固定されるため、周囲の凹部(キャビティ)へのチップ部品の挿入時における振動や、次工程への搬送時に生じる振動等によって、チップ部品が所定の位置からずれるといった不具合を抑制できる旨記載されている。   Patent Document 1 (Japanese Patent Application Laid-Open No. 2006-73763) discloses a method of providing a plurality of protrusions on the inner wall of a through hole of a resin sheet in manufacturing a resin multilayer substrate incorporating such an electronic component. In this method, when the chip component is placed in the cavity, the electronic component is press-fitted while crushing the tips of these protrusions. In this way, since the chip component is fixed from the side by the protrusion, the chip component is moved from a predetermined position by vibration when the chip component is inserted into the surrounding concave portion (cavity), vibration generated when the chip component is conveyed to the next process, or the like. It is described that it is possible to suppress problems such as deviation.

特開2006−73763号公報JP 2006-73763 A

上述のように、電子部品の外周側面とキャビティの内周側面との間の間隙は大きくしておく必要があるが、この間隙が大きい場合には、熱圧着時の樹脂の流動によって生じる電子部品の位置ずれが問題となる。なお、特許文献2のように貫通孔に突起を設けた場合でも、間隙はある程度大きく確保せざるを得ず、製造工程での振動等による電子部品の位置ずれは防止できたとしても、熱圧着時の樹脂の流動による電子部品の位置ずれを十分に防止することは難しかった。また、電子部品をキャビティ内に配置する際に、この突起が電子部品を弾いてしまい、電子部品の配置に不具合を生じる可能性もあった。   As described above, the gap between the outer peripheral side surface of the electronic component and the inner peripheral side surface of the cavity needs to be large. If this gap is large, the electronic component generated by the flow of resin during thermocompression bonding This is a problem. Even when the through hole is provided with a protrusion as in Patent Document 2, the gap must be secured to a certain extent, and even if the electronic component is prevented from being displaced due to vibration in the manufacturing process, the thermocompression bonding is possible. It was difficult to sufficiently prevent displacement of electronic components due to resin flow. In addition, when the electronic component is placed in the cavity, the protrusion may flip the electronic component, which may cause a problem in the placement of the electronic component.

そこで、本発明は、電子部品を内蔵した樹脂多層基板において、電子部品の位置ずれを十分に防止しつつ、特性劣化を抑制することのできる、部品一体型シートの製造方法、および、電子部品を内蔵した樹脂多層基板の製造方法を提供することを目的とする。   Accordingly, the present invention provides a method for producing a component-integrated sheet, which can suppress deterioration of characteristics while sufficiently preventing displacement of the electronic component in a resin multilayer substrate incorporating the electronic component, and an electronic component. An object of the present invention is to provide a method for producing a built-in resin multilayer substrate.

本発明は、電子部品と、熱可塑性樹脂を含む熱可塑性の樹脂シートとが一体化された部品一体型シートの製造方法であって、
前記電子部品の一方の主面上の少なくとも一部分、または、前記樹脂シートの一方の主面上の前記電子部品と接着される部分の少なくとも一部分に、前記樹脂シートに含まれる熱可塑性樹脂と同じ熱可塑性樹脂を含むペーストを塗布するペースト塗布工程と、
前記電子部品を前記ペーストを介して前記樹脂シートに搭載する搭載工程と、
前記ペーストを乾燥させる乾燥工程と
を含む、部品一体型シートの製造方法である。
The present invention is a method for producing a component-integrated sheet in which an electronic component and a thermoplastic resin sheet containing a thermoplastic resin are integrated,
The same heat as the thermoplastic resin contained in the resin sheet is applied to at least a part of one main surface of the electronic component or at least a part of a portion bonded to the electronic component on one main surface of the resin sheet. A paste application step of applying a paste containing a plastic resin;
A mounting step of mounting the electronic component on the resin sheet via the paste;
And a drying step of drying the paste.

前記ペーストは、前記樹脂シートに含まれる熱可塑性樹脂と同じ熱可塑性樹脂からなるフィブリル化した粉末を含むことが好ましい。前記樹脂シートに含まれる熱可塑性樹脂は、液晶ポリマーを主成分として含むものであることが好ましい。   The paste preferably includes a fibrillated powder made of the same thermoplastic resin as the thermoplastic resin contained in the resin sheet. The thermoplastic resin contained in the resin sheet preferably contains a liquid crystal polymer as a main component.

また、本発明は、電子部品を内蔵した樹脂多層基板の製造方法であって、
上記の製造方法によって製造された部品一体型シートと、前記電子部品を収容するための貫通孔を有する1以上の熱可塑性樹脂シートとを、前記電子部品が前記貫通孔によって形成されるキャビティ内に配置されるように積層する積層工程と、
積層された前記部品一体型シートおよび1以上の前記熱可塑性樹脂シートを熱圧着する熱圧着工程とを含む、製造方法にも関する。
Further, the present invention is a method for manufacturing a resin multilayer substrate incorporating an electronic component,
A component-integrated sheet manufactured by the above-described manufacturing method and one or more thermoplastic resin sheets having through holes for accommodating the electronic components are placed in a cavity in which the electronic components are formed by the through holes. A laminating step of laminating so as to be arranged;
The present invention also relates to a manufacturing method including a thermocompression bonding step of thermocompressing the laminated component-integrated sheet and the one or more thermoplastic resin sheets.

また、本発明は、熱可塑性樹脂を含む熱可塑性の樹脂層と、内蔵された電子部品とを含む樹脂多層基板であって、
前記電子部品の一方の主面上の少なくとも一部分において、前記樹脂層に含まれる熱可塑性樹脂と同じ熱可塑性樹脂からなる接着層を含む、樹脂多層基板にも関する。
Further, the present invention is a resin multilayer substrate including a thermoplastic resin layer containing a thermoplastic resin and a built-in electronic component,
The present invention also relates to a resin multilayer substrate including an adhesive layer made of the same thermoplastic resin as the thermoplastic resin included in the resin layer in at least a part on one main surface of the electronic component.

本発明では、あらかじめ樹脂シートの表面に電子部品を固定した部品一体型シートを作製することで、電子部品を内蔵した樹脂多層基板における電子部品の位置ずれを十分に防止しつつ、樹脂シートと同じ材料を用いて電子部品を樹脂シートに固定することで、樹脂多層基板の特性劣化を抑制することができる。   In the present invention, by producing a component-integrated sheet in which electronic components are fixed on the surface of the resin sheet in advance, the same misalignment as that of the resin sheet can be achieved while sufficiently preventing displacement of the electronic components in the resin multilayer substrate incorporating the electronic components. By fixing the electronic component to the resin sheet using the material, it is possible to suppress the characteristic deterioration of the resin multilayer substrate.

実施形態1の部品一体型シートの製造工程(ペースト塗布工程)を説明するための断面模式図である。FIG. 5 is a schematic cross-sectional view for explaining a manufacturing process (paste application process) of the component-integrated sheet according to the first embodiment. 実施形態1の部品一体型シートの製造工程(搭載工程)を説明するための断面模式図である。FIG. 5 is a schematic cross-sectional view for explaining a manufacturing process (mounting process) of the component-integrated sheet according to the first embodiment. 実施形態1の樹脂多層基板の製造工程(積層工程)を説明するための断面模式図である。It is a cross-sectional schematic diagram for demonstrating the manufacturing process (lamination process) of the resin multilayer substrate of Embodiment 1. FIG. 実施形態1の樹脂多層基板の製造工程(熱圧着工程)を説明するための断面模式図である。It is a cross-sectional schematic diagram for demonstrating the manufacturing process (thermocompression bonding process) of the resin multilayer substrate of Embodiment 1. 実施形態2の部品一体型シートの製造工程(ペースト塗布工程)を説明するための断面模式図である。It is a cross-sectional schematic diagram for demonstrating the manufacturing process (paste application | coating process) of the components integrated sheet of Embodiment 2. FIG.

<部品一体型シートの製造>
本発明において、「部品一体型シート」とは、電子部品と、熱可塑性樹脂を含む熱可塑性の樹脂シートとが一体化されたものをいう。
<Manufacture of component-integrated sheets>
In the present invention, the “component-integrated sheet” refers to an electronic component integrated with a thermoplastic resin sheet containing a thermoplastic resin.

本発明の部品一体型シートの製造方法は、少なくともペースト塗布工程と、電子部品の搭載工程と、ペーストの乾燥工程とを含む。   The component-integrated sheet manufacturing method of the present invention includes at least a paste application step, an electronic component mounting step, and a paste drying step.

(ペースト塗布工程)
ペースト塗布工程では、樹脂シートに含まれる熱可塑性樹脂と同じ熱可塑性樹脂を含むペーストが使用される。熱可塑性樹脂としては、例えば、液晶ポリマー(LCP)、ポリエチレン(PE)、熱可塑性ポリイミド(PI)、ポリエーテルエーテルケトン(PEEK)、ポリエーテルイミド(PEI)、ポニフェニレンスルファイド(PPS)が挙げられる。
(Paste application process)
In the paste application step, a paste containing the same thermoplastic resin as the thermoplastic resin contained in the resin sheet is used. Examples of the thermoplastic resin include liquid crystal polymer (LCP), polyethylene (PE), thermoplastic polyimide (PI), polyether ether ketone (PEEK), polyether imide (PEI), and poniphenylene sulfide (PPS). It is done.

通常、熱可塑性樹脂は粉末の形態でぺースト中に分散され、ペーストは熱可塑性樹脂の粉末を分散させるための分散媒を含んでいる。分散媒は、熱可塑性樹脂が溶融または分解しない温度で除去可能な液体であることが好ましい。このような分散媒としては、例えば、エタノール、ターピネオール、ブチルラクトン、イソプロピルアルコールなどを用いることができる。   Usually, the thermoplastic resin is dispersed in the paste in the form of a powder, and the paste contains a dispersion medium for dispersing the powder of the thermoplastic resin. The dispersion medium is preferably a liquid that can be removed at a temperature at which the thermoplastic resin does not melt or decompose. As such a dispersion medium, for example, ethanol, terpineol, butyl lactone, isopropyl alcohol, or the like can be used.

ペースト中に含まれる熱可塑性樹脂の粉末は、特に限定されず、球状の粒子等からなる粉末であってもよいが、(樹脂シートに含まれる熱可塑性樹脂と同じ熱可塑性樹脂からなる)フィブリル化した粒子を含む「フィブリル化した粉末」であることが好ましい。「フィブリル化した粉末」(以下、「フィブリル化粉末」と略す場合がある)とは、多数のフィブリル(例えば、フィブリル状の繊維状の枝、フィブリルからなる網状構造)を有する粒子から構成される粉末であり、粒子全体が実質的にフィブリル化されているものを指す。   The thermoplastic resin powder contained in the paste is not particularly limited, and may be a powder made of spherical particles or the like, but may be fibrillated (made of the same thermoplastic resin as the thermoplastic resin contained in the resin sheet). Preferably, it is a “fibrillated powder” containing the prepared particles. “Fibrilized powder” (hereinafter sometimes abbreviated as “fibrillated powder”) is composed of particles having a large number of fibrils (for example, fibrillar fibrous branches, fibrillar network structure). A powder that is substantially fibrillated throughout.

フィブリル化粉末を構成する熱可塑性樹脂は、電子部品が固定される樹脂シートに含まれる熱可塑性樹脂と同じ樹脂であるため、本発明で使用される熱可塑性樹脂は、フィブリル化することのできる樹脂であることが好ましい。フィブリル化することのできる熱可塑性樹脂としては、例えば、液晶ポリマー、ポリエチレン、ポリイミドが挙げられる。このうち、より好ましい熱可塑性樹脂は、液晶ポリマーである。   Since the thermoplastic resin constituting the fibrillated powder is the same resin as the thermoplastic resin contained in the resin sheet to which the electronic component is fixed, the thermoplastic resin used in the present invention is a resin that can be fibrillated. It is preferable that Examples of the thermoplastic resin that can be fibrillated include liquid crystal polymer, polyethylene, and polyimide. Among these, a more preferable thermoplastic resin is a liquid crystal polymer.

フィブリル化粉末は、多数のフィブリルを有するため、表面付近に多数の空隙を有しており、嵩密度が低いものとなる。乾燥状態でのフィブリル化粉末全体の嵩密度は、好ましくは0.01〜0.2であり、より好ましくは0.03〜0.08である。このため、積層体の熱圧着時の圧縮によりフィブリル化粉末が潰れることで、熱可塑性樹脂を含むペーストの塗布部分において過度に厚みが増加することが抑制される。これにより、樹脂多層基板が平坦化され易くなる。   Since the fibrillated powder has a large number of fibrils, the fibrillated powder has a large number of voids near the surface and has a low bulk density. The bulk density of the entire fibrillated powder in the dry state is preferably 0.01 to 0.2, more preferably 0.03 to 0.08. For this reason, it is suppressed that a thickness increases too much in the application part of the paste containing a thermoplastic resin because a fibrillated powder is crushed by compression at the time of thermocompression bonding of a laminated body. Thereby, the resin multilayer substrate is easily flattened.

フィブリル化粉末には、それを構成する粒子同士の接着性や、フィブリル化粉末と樹脂シートとの接着性をさらに向上させるために、少なくともその一部に、紫外線(UV)またはプラズマの照射による表面処理が施されていてもよい。なお、プラズマによる表面処理よりも紫外線による表面処理の方が接合性向上効果が大きいため、より好ましい。   In order to further improve the adhesion between the particles constituting the fibrillated powder and the adhesion between the fibrillated powder and the resin sheet, at least part of the fibrillated powder is irradiated with ultraviolet (UV) or plasma. Processing may be performed. Note that the surface treatment with ultraviolet rays is more preferable than the surface treatment with plasma because the effect of improving the bonding property is greater.

フィブリル化した粉末は、例えば、2軸配向された熱可塑性樹脂フィルムを凍結粉砕法などを用いて粉砕し、さらに、湿式高圧破砕装置で破砕する方法によって、製造することができる。湿式高圧破砕装置とは、原料粒子の分散液を高圧で狭小なノズル(チャンバー)に通過させ、その時に生じるせん断力等によって原料粒子を破砕する装置である。なお、分散液を狭小なノズルに通過にさせ、かつ、分散液を高圧で何らかのターゲットに衝突させることのできる装置であってもよい。   The fibrillated powder can be produced, for example, by a method in which a biaxially oriented thermoplastic resin film is pulverized using a freeze pulverization method or the like and further crushed with a wet high-pressure crusher. The wet high-pressure crushing device is a device that passes a dispersion of raw material particles through a high-pressure narrow nozzle (chamber) and crushes the raw material particles by a shearing force generated at that time. In addition, the apparatus which makes a dispersion liquid pass through a narrow nozzle and makes a dispersion liquid collide with a certain target at high pressure may be sufficient.

湿式高圧破砕装置としては、例えば、特開2003−10663号公報、特開2001−29776号公報に開示されるような、原料供給口に供給された原料を加圧して装置本体に送り、この本体で原料中の物質を微粒化して取り出すことのできる装置を用いることができる。ここで、加圧流体中の物質は、貫通孔、溝等での合流衝突、分流拡張により所望の粒径(粒度分布により定まる)のものに微粒化される。また、特開2000−448号公報に開示されるような、高圧流体を硬質体に衝突させることにより、流体に隋体する物質を微粒子化するための流体衝突装置を用いることができる。なお、市販の湿式高圧破砕装置としては、例えば、アドバンスト・ナノ・テクノロジィ株式会社製の「湿式キャビテーションミル」が挙げられる。   As a wet high-pressure crushing apparatus, for example, as disclosed in Japanese Patent Application Laid-Open No. 2003-10663 and Japanese Patent Application Laid-Open No. 2001-29776, the raw material supplied to the raw material supply port is pressurized and sent to the apparatus main body. The apparatus which can atomize and take out the substance in a raw material can be used. Here, the substance in the pressurized fluid is atomized to have a desired particle size (determined by the particle size distribution) by merging collision in a through hole, a groove, or the like, or diversion expansion. In addition, a fluid collision device as disclosed in Japanese Patent Application Laid-Open No. 2000-448 can be used for making a substance encased in a fluid into a fine particle by colliding a high-pressure fluid with a hard body. Examples of commercially available wet high-pressure crushing apparatuses include “wet cavitation mill” manufactured by Advanced Nano Technology Co., Ltd.

なお、湿式高圧破砕装置を用いる以外の方法では、パウダーの変形が生じるのみで、フィブリル化粉末はほとんど生じない。例えば、特開2002−348487号公報には、液晶ポリマー(LCP)と反応性を持つ共重合体とLCPの混合物からなる2軸延伸フィルムを粉砕して、平板状の幹部と枝部からなるLCPフィラーを得る方法が記載されている。また、特開2004−043624号公報には、LCPフィルムを切断・粉砕・叩開等の方法によりフレーク化する方法が記載されている。しかし、これらの方法では、いずれも、フィルム状物を出発材料としているが、平板状物やフレーク状物が得られるのみで、多数のフィブリルを有するフィブリル化粉末を得ることは出来ていない。   In the methods other than using the wet high pressure crusher, only the powder is deformed, and the fibrillated powder is hardly generated. For example, Japanese Patent Laid-Open No. 2002-348487 discloses an LCP composed of a plate-shaped trunk and branches by pulverizing a biaxially stretched film composed of a mixture of a copolymer having reactivity with a liquid crystal polymer (LCP) and LCP. A method for obtaining a filler is described. Japanese Patent Application Laid-Open No. 2004-043624 describes a method for flaking an LCP film by a method such as cutting, crushing, and tapping. However, in any of these methods, a film-like material is used as a starting material, but only a flat plate-like material and a flake-like material are obtained, and a fibrillated powder having a large number of fibrils cannot be obtained.

湿式高圧破砕装置のノズルをLCPパウダー分散液が通過する際の圧力は、好ましくは20MPa以上、より好ましくは50MPa以上である。ノズルをLCPパウダー分散液が通過する際の圧力がこのような所望の範囲となるようにするためには、ノズルの径や原料供給口における加圧の圧力を適宜調整すればよい。   The pressure when the LCP powder dispersion passes through the nozzle of the wet high-pressure crushing apparatus is preferably 20 MPa or more, more preferably 50 MPa or more. In order for the pressure when the LCP powder dispersion liquid passes through the nozzle to be in such a desired range, the diameter of the nozzle and the pressure applied at the raw material supply port may be appropriately adjusted.

フィブリル化粉末は、多数のフィブリルを有する(フィブリル化された)粒子を含むため、乾燥工程後のフィブリル化粒子同士の接合性を向上させ、ペーストを介した樹脂シートと電子部品との接合性を向上させることができる。   Since the fibrillated powder includes particles having a large number of fibrils (fibrillated), the fibrillated powder improves the bondability between the fibrillated particles after the drying step, and improves the bondability between the resin sheet and the electronic component via the paste. Can be improved.

また、フィブリル化粉末を含むペーストは、フィブリル化していない熱可塑性樹脂粉末を含むペーストと比較して粘度が高く、分散媒と粉末の分離が生じにくいため、接着性を阻害したり、発ガスや電気特性悪化の原因になったりする他のバインダー樹脂成分等を添加する必要がない。また、回路基板材料に用いた場合の吸湿による特性変化や、吸湿によるポップコーン現象の発生などの問題が生じる恐れもなくなる。   In addition, the paste containing the fibrillated powder has a higher viscosity than the paste containing the non-fibrillated thermoplastic resin powder, and the dispersion medium and the powder are less likely to be separated. There is no need to add other binder resin components or the like that cause deterioration of electrical characteristics. Further, there is no possibility of problems such as characteristic changes due to moisture absorption and occurrence of popcorn phenomenon due to moisture absorption when used as a circuit board material.

このようなペーストは、(1)電子部品の一方の主面上の少なくとも一部分、または、(2)樹脂シートの一方の主面上の電子部品と接着される部分の少なくとも一部分に塗布される。なお、(1)の場合において、電子部品の一方の主面は、電子部品の外部電極等が形成された面と反対側の主面(天面)であることが好ましい。   Such a paste is applied to (1) at least a part on one main surface of the electronic component, or (2) at least a part of a portion to be bonded to the electronic component on one main surface of the resin sheet. In the case of (1), it is preferable that one main surface of the electronic component is a main surface (top surface) opposite to the surface on which the external electrodes of the electronic component are formed.

(搭載工程)
搭載工程では、電子部品をペーストを介して樹脂シートの所定の位置に搭載する。電子部品の搭載は、例えば、汎用の部品搭載機を用いて実施することができる。
(Installation process)
In the mounting process, the electronic component is mounted at a predetermined position of the resin sheet via the paste. The electronic component can be mounted using, for example, a general-purpose component mounting machine.

(乾燥工程)
乾燥工程では、ペーストを乾燥させる。乾燥は、電子部品が樹脂シートに固定(仮固定)されるような方法である限り、種々公知の方法により実施でき、加熱を行ってもよいが、必ずしも加熱を行う必要はない。なお、加熱を行う場合の温度は、熱可塑性樹脂が溶融または分解しない温度とすることが好ましい。具体的な乾燥工程での温度は、例えば、100〜200℃であり、好ましくは130〜180℃である。
(Drying process)
In the drying step, the paste is dried. As long as the electronic component is fixed (temporarily fixed) to the resin sheet, the drying can be performed by various known methods, and heating may be performed, but heating is not necessarily performed. In addition, it is preferable that the temperature in the case of performing heating is a temperature at which the thermoplastic resin does not melt or decompose. The temperature in a specific drying process is 100-200 degreeC, for example, Preferably it is 130-180 degreeC.

加熱は、例えば、オーブンやホットプレートを用いて行うことができる。また、上記の搭載工程での、樹脂シートおよび電子部品が載置されるステージが加熱機構を有している場合、搭載工程と同時に乾燥工程を実施することも可能である。   Heating can be performed using, for example, an oven or a hot plate. Further, when the stage on which the resin sheet and the electronic component are placed in the mounting process has a heating mechanism, the drying process can be performed simultaneously with the mounting process.

<電子部品を内蔵した樹脂多層基板の製造>
本発明の電子部品を内蔵した樹脂多層基板の製造方法は、少なくとも、部品一体型シートと、他の熱可塑性の樹脂シートとを積層する積層工程と、積層工程によって得られた積層体の熱圧着工程とを含む。
<Manufacturing of resin multilayer substrate with built-in electronic components>
The method for producing a resin multilayer substrate incorporating an electronic component according to the present invention includes at least a lamination step of laminating a component-integrated sheet and another thermoplastic resin sheet, and thermocompression bonding of the laminate obtained by the lamination step. Process.

(積層工程)
積層工程では、少なくとも、上記のようにして製造された部品一体型シートと、電子部品を収容するための貫通孔を有する1以上の熱可塑性の樹脂シートとを積層する。この際、電子部品が貫通孔によって形成されるキャビティ内に配置されるように、積層する。
(Lamination process)
In the laminating step, at least the component-integrated sheet manufactured as described above and one or more thermoplastic resin sheets having through holes for accommodating electronic components are laminated. At this time, the electronic components are stacked so as to be disposed in the cavity formed by the through holes.

積層工程では、さらに、キャビティ内に収容された電子部品の露出部分を覆うように熱可塑性樹脂シートを積層してもよい。この場合、熱圧着工程では、この熱可塑性樹脂シートも含めて熱圧着される。   In the lamination step, a thermoplastic resin sheet may be further laminated so as to cover the exposed part of the electronic component housed in the cavity. In this case, in the thermocompression bonding process, this thermoplastic resin sheet is also thermocompression bonded.

このような積層工程は、製造効率や製造コスト面の観点から、一連の操作により、連続して、あるいは、同時に実施されることが好ましい。   Such a lamination process is preferably carried out continuously or simultaneously by a series of operations from the viewpoint of production efficiency and production cost.

なお、通常、樹脂多層基板を構成する樹脂シートの少なくとも一方の主面には、導体配線層が形成されている。導体配線層の構成材料としては、配線基板に用いられる種々公知の材質を使用することができるが、好ましくは金属である。金属としては、例えば、銅、銀、アルミニウム、SUS、ニッケル、金や、それらの合金などが挙げられ、好ましくは銅または銅合金である。   In general, a conductor wiring layer is formed on at least one main surface of the resin sheet constituting the resin multilayer substrate. As a constituent material of the conductor wiring layer, various known materials used for the wiring board can be used, but a metal is preferable. Examples of the metal include copper, silver, aluminum, SUS, nickel, gold, and alloys thereof, and copper or copper alloy is preferable.

(熱圧着工程)
熱圧着工程では、少なくとも積層された部品一体型シートおよび貫通孔を有する1以上の熱可塑性の樹脂シートを、熱可塑性の樹脂シートの軟化開始温度以上の温度によって加熱および加圧を行うことにより熱圧着する。なお、キャビティ内に収容された電子部品の露出部分を覆うための熱可塑性の樹脂シート等も同時に熱圧着してもよい。
(Thermo-compression process)
In the thermocompression bonding step, at least one component-integrated sheet laminated and one or more thermoplastic resin sheets having through holes are heated and pressed by a temperature equal to or higher than the softening start temperature of the thermoplastic resin sheet. Crimp. A thermoplastic resin sheet or the like for covering the exposed part of the electronic component housed in the cavity may be thermocompression bonded at the same time.

熱可塑性の樹脂シートは、熱処理により樹脂が流れ易いため、熱圧着工程での加熱の温度は、比較的低温であることが望ましい。   Since the thermoplastic resin sheet easily flows through heat treatment, it is desirable that the heating temperature in the thermocompression bonding process be relatively low.

このように積層された樹脂シートを一括して熱圧着する樹脂多層基板の製造方法は、従来のビルドアップ工法などに比べて、生産性や積み重ね精度が大幅に改善されている。   In the method for manufacturing a resin multilayer substrate in which the resin sheets thus laminated are collectively thermocompression bonded, productivity and stacking accuracy are greatly improved as compared with a conventional build-up method.

以下、部品一体型シートの製造方法、および、電子部品を内蔵した樹脂多層基板の製造方法の実施形態について、図面を参照して説明する。なお、図面において、同一の参照符号は、同一部分または相当部分を表すものである。また、長さ、幅、厚さ、深さなどの寸法関係は図面の明瞭化と簡略化のために適宜変更されており、実際の寸法関係を表すものではない。   Hereinafter, an embodiment of a method for producing a component-integrated sheet and a method for producing a resin multilayer substrate incorporating an electronic component will be described with reference to the drawings. In the drawings, the same reference numerals represent the same or corresponding parts. In addition, dimensional relationships such as length, width, thickness, and depth are changed as appropriate for clarity and simplification of the drawings, and do not represent actual dimensional relationships.

[実施形態1]
(部品一体型シートの製造)
図1を参照して、まず、電子部品4の外部電極41側の面に、部品搭載機のマウンターノズル6を吸着させ、その状態で、フィブリル化した熱可塑性樹脂を有機溶媒に分散したペーストを、電子部品の天面に塗布する(塗布工程)。このペーストとしては、例えば、フィブリル化液晶ポリマー粉末5〜20重量%、残部が有機溶剤からなるものを用いることができる。ぺーストの塗布方法としては、印刷、ディスペンス、転写などが挙げられる。なお、ペーストは、必ずしも図1のように電子部品4の全面に塗布する必要はなく、樹脂シート1と接触する部分の少なくとも一部分に塗布されていればよい。
[Embodiment 1]
(Manufacture of component-integrated sheets)
Referring to FIG. 1, first, a mounter nozzle 6 of a component mounting machine is adsorbed on the surface of the electronic component 4 on the side of the external electrode 41, and in this state, a paste in which a fibrillated thermoplastic resin is dispersed in an organic solvent is used. Applying to the top surface of the electronic component (application process). As this paste, for example, a fibrillated liquid crystal polymer powder of 5 to 20% by weight and the balance made of an organic solvent can be used. Examples of paste application methods include printing, dispensing, and transfer. Note that the paste does not necessarily have to be applied to the entire surface of the electronic component 4 as shown in FIG. 1, and may be applied to at least a part of the portion in contact with the resin sheet 1.

次に、図2を参照して、別途、銅を主成分とする金属箔2を片面に備え、ビアホール導体3を有する液晶ポリマーを主成分として含む樹脂シート1を準備する。ビアホール導体3は、樹脂シート1にレーザ等により孔を設け、その孔他例えば銀、銅、ニッケル、スズを含む導電性ペーストを付与することによって設けられる。この導電性ペーストは後の熱圧着工程における熱により金属化する。次に、この樹脂シート1の所定の位置に電子部品4の位置決めを行い、電子部品4を上記ペースト5を介して樹脂シート1に搭載する(搭載工程)。なお、電子部品4の搭載前に、金属箔2に対しては予め回路パターンを形成するようにエッチングなどによりパターニングが施されていてもよい。また、金属箔2やビアホール導体3は必ずしも設けられていなくてもよい。   Next, referring to FIG. 2, a resin sheet 1 is prepared which includes a metal foil 2 mainly composed of copper on one side and a liquid crystal polymer having via-hole conductors 3 as a main component. The via-hole conductor 3 is provided by providing a hole in the resin sheet 1 with a laser or the like and applying a conductive paste containing the hole or the like, for example, silver, copper, nickel, tin. This conductive paste is metallized by heat in a subsequent thermocompression bonding process. Next, the electronic component 4 is positioned at a predetermined position of the resin sheet 1 and the electronic component 4 is mounted on the resin sheet 1 via the paste 5 (mounting process). Note that before the electronic component 4 is mounted, the metal foil 2 may be patterned by etching or the like so as to form a circuit pattern in advance. Further, the metal foil 2 and the via-hole conductor 3 are not necessarily provided.

次に、この電子部品4が搭載された樹脂シート1を180℃以上の温度に保持して、ペースト5を乾燥させる(乾燥工程)。これにより、ペースト5中の有機溶媒が揮発し、残ったフィブリル化した熱可塑性樹脂が接着性を発現することで、電子部品4をペースト5の乾燥物を介して樹脂シート1に固定することが出来る。このようにして、位置決めされた電子部品4が固定された樹脂シート1(部品一体型シート)が作製される。   Next, the resin sheet 1 on which the electronic component 4 is mounted is held at a temperature of 180 ° C. or higher to dry the paste 5 (drying process). As a result, the organic solvent in the paste 5 is volatilized, and the remaining fibrillated thermoplastic resin develops adhesiveness, whereby the electronic component 4 can be fixed to the resin sheet 1 through the dried product of the paste 5. I can do it. Thus, the resin sheet 1 (component integrated sheet) to which the positioned electronic component 4 is fixed is produced.

(電子部品を内蔵した樹脂多層基板の製造)
図3を参照して、上記のようにして作製された部品一体型シート、電子部品4を収納するための開口部(貫通孔)を有する熱可塑性の樹脂シート11、電子部品4の外部電極41と電気的に接続されるランドビア31を有する熱可塑性の樹脂シート12、および、熱可塑性の樹脂シート13を、電子部品4が樹脂シート11の貫通孔によって形成されるキャビティ110内に配置されるように、所定の順序で積層する。複数の樹脂シート11,12,13における、金属箔2による回路パターンやビアホール導体3も樹脂シート1と同様のプロセスで設けられる。なお、樹脂シートの枚数は本実施形態に限定されるものではない。
(Manufacture of resin multilayer substrates with built-in electronic components)
Referring to FIG. 3, the component-integrated sheet manufactured as described above, the thermoplastic resin sheet 11 having an opening (through hole) for housing electronic component 4, and external electrode 41 of electronic component 4 The thermoplastic resin sheet 12 having the land via 31 electrically connected to the thermoplastic resin sheet 12 and the thermoplastic resin sheet 13 are arranged in the cavity 110 in which the electronic component 4 is formed by the through hole of the resin sheet 11. Are stacked in a predetermined order. Circuit patterns and via-hole conductors 3 made of the metal foil 2 in the plurality of resin sheets 11, 12, and 13 are also provided in the same process as the resin sheet 1. The number of resin sheets is not limited to this embodiment.

次に、積層された複数の樹脂シート(樹脂層)1,11,12,13を熱圧着(加熱および真空プレス)する(熱圧着工程)。なお、図4に示されるように、熱圧着工程により、電子部品4の外周側面とキャビティ110の内周側面との間の間隙は、樹脂シートを構成する熱可塑性樹脂の流動によって埋められた状態となっている。   Next, the plurality of laminated resin sheets (resin layers) 1, 11, 12, and 13 are subjected to thermocompression bonding (heating and vacuum pressing) (thermocompression step). 4, the gap between the outer peripheral side surface of the electronic component 4 and the inner peripheral side surface of the cavity 110 is filled by the flow of the thermoplastic resin constituting the resin sheet by the thermocompression bonding process. It has become.

さらに、熱圧着された樹脂多層基板を冷却することで、電子部品4を内蔵した樹脂多層基板が作製される。なお、必要に応じて、この後に、表面電極(図示せず)のめっきや、他の電子部品(実装部品)の積載等を実施してもよい。   Furthermore, by cooling the thermocompression-bonded resin multilayer substrate, a resin multilayer substrate having the electronic component 4 built therein is produced. In addition, after this, you may implement the plating of a surface electrode (not shown), loading of other electronic components (mounting components), etc. as needed.

なお、電子部品を樹脂シートに固定するための接着成分が樹脂シートと異なる場合、たとえば公知の接着剤によって樹脂シートと電子部品を接着するような場合を想定すると、積層後の樹脂シートを熱処理した際に、接着成分からガスが発生したり、接着成分が膨張することによって特性劣化を引き起こす恐れがあるが、本発明では、接着成分が樹脂シートと同じ成分(熱可塑性樹脂)であるため、このような特性劣化が抑制される。また、樹脂シートとは異なる材料を含まないため、樹脂多層基板の特性が変化しにくい。したがって、基板における回路設計等を容易にすることが可能になる。以上から、樹脂多層基板を構成する樹脂シートと同じ樹脂シートを粉砕してなる粉末を用いたペーストをペースト5として用いることが最も好ましい。   When the adhesive component for fixing the electronic component to the resin sheet is different from that of the resin sheet, for example, assuming that the resin sheet and the electronic component are bonded with a known adhesive, the laminated resin sheet is heat-treated. At this time, gas may be generated from the adhesive component or the adhesive component may be expanded to cause deterioration of characteristics. However, in the present invention, the adhesive component is the same component (thermoplastic resin) as the resin sheet. Such characteristic deterioration is suppressed. Moreover, since the material different from a resin sheet is not included, the characteristic of a resin multilayer substrate does not change easily. Therefore, circuit design and the like on the substrate can be facilitated. From the above, it is most preferable to use as the paste 5 a paste using a powder obtained by pulverizing the same resin sheet as the resin sheet constituting the resin multilayer substrate.

また、本発明においては、電子部品があらかじめ樹脂シートに固定されているため、キャビティ内での固定構造を必要とせずに、電子部品の位置ずれを防止することが可能となる。また、部品一体型シートを構成する樹脂シートが面として電子部品をキャビティ側へ抑え付けるため、電子部品のみを搬送機器で搬送してキャビティ内に収めるような場合と比べて、電子部品が弾かれることが抑制される。したがって、キャビティを狭くしても安定して電子部品をキャビティに配置することができる。これにより、突起などの部材を設けなくても電子部品を安定してキャビティ内に保持できる。また、キャビティを狭くできるので、電子部品の位置ずれや、電子部品周囲の回路パターンの形状の変化などを抑制することができる。   In the present invention, since the electronic component is fixed to the resin sheet in advance, it is possible to prevent displacement of the electronic component without requiring a fixing structure in the cavity. In addition, since the resin sheet constituting the component-integrated sheet is used as a surface to hold the electronic component toward the cavity, the electronic component is repelled compared to the case where only the electronic component is conveyed by a conveying device and placed in the cavity. It is suppressed. Therefore, the electronic component can be stably disposed in the cavity even if the cavity is narrowed. Thus, the electronic component can be stably held in the cavity without providing a member such as a protrusion. In addition, since the cavity can be narrowed, it is possible to suppress the positional deviation of the electronic component and the change in the shape of the circuit pattern around the electronic component.

また、部品一体型シートを事前に作製しない場合は、まず貫通孔を有する複数の樹脂シートを積層して、電子部品を収容するためのキャビティを形成した後に、そのキャビティ内に電子部品を収容し、その後さらに電子部品を被覆するための樹脂シートを積層するといった複雑な積層工程が必要となるが、本発明のように、あらかじめ部品一体型シートを作製しておくことで、この部品一体型シートを他の樹脂シートと同様に積層することができるため、製造効率や製造コスト面で有利となる。   If the component-integrated sheet is not prepared in advance, a plurality of resin sheets having through holes are first laminated to form a cavity for accommodating the electronic component, and then the electronic component is accommodated in the cavity. Then, a complicated laminating process such as laminating a resin sheet for further coating an electronic component is required. However, by preparing a component-integrated sheet in advance as in the present invention, this component-integrated sheet Can be laminated in the same manner as other resin sheets, which is advantageous in terms of production efficiency and production cost.

[実施形態2]
本実施形態は、部品一体型シートの製造において、ペースト塗布工程で、図5にしめされるように、樹脂シート1の一方の主面上の電子部品4と接着される部分にペースト5を塗布する点が実施形態1とは異なっている。
[Embodiment 2]
In the present embodiment, in the production of the component-integrated sheet, the paste 5 is applied to the part to be bonded to the electronic component 4 on one main surface of the resin sheet 1 in the paste application process as shown in FIG. This is different from the first embodiment.

それ以外の点は、実施形態1と同様にして、部品一体型シートを製造し、電子部品を内蔵した樹脂多層基板を製造する。なお、本実施形態においても、実施形態1と同様の効果が奏される。   In other respects, the component-integrated sheet is manufactured in the same manner as in the first embodiment, and the resin multilayer substrate incorporating the electronic component is manufactured. In the present embodiment, the same effect as that of the first embodiment is obtained.

なお、いずれの実施形態においても、ペースト塗布工程において樹脂シートに含まれる熱可塑性樹脂と同じ熱可塑性樹脂を含むペーストを用いる場合、電子部品の一方の主面上の少なくとも一部分において、樹脂シート(樹脂層)に含まれる熱可塑性樹脂と同じ熱可塑性樹脂からなる接着層を含む樹脂多層基板が得られる。かかる接着層は、樹脂シートと同じ材料であるが、例えば、多層樹脂基板の断面を確認することで、接着層を含むことを確認することができる。   In any of the embodiments, when a paste containing the same thermoplastic resin as the thermoplastic resin contained in the resin sheet is used in the paste application step, at least a part of one main surface of the electronic component has a resin sheet (resin A resin multilayer substrate including an adhesive layer made of the same thermoplastic resin as the thermoplastic resin contained in the layer) is obtained. Such an adhesive layer is made of the same material as the resin sheet. For example, it can be confirmed that the adhesive layer is included by confirming the cross section of the multilayer resin substrate.

また、各実施の形態においてキャビティに配置される電子部品とは、ICチップのような能動部品、チップコンデンサ,チップインダクタ,チップ抵抗等の受動部品、またはフェライト基板のような樹脂多層基板とは異なる材料からなる異種基板もすべて含む概念である。   In each embodiment, the electronic component disposed in the cavity is different from an active component such as an IC chip, a passive component such as a chip capacitor, a chip inductor, and a chip resistor, or a resin multilayer substrate such as a ferrite substrate. It is a concept that includes all different types of substrates made of materials.

今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて請求の範囲によって示され、請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。   The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

1,11,12,13 樹脂シート(樹脂層)、110 キャビティ、2 導体配線層(導体箔)、3 ビアホール導体、31 ランドビア、4 電子部品、41 外部電極、5 ペースト、6 マウンターノズル。   1, 11, 12, 13 Resin sheet (resin layer), 110 cavity, 2 conductor wiring layer (conductor foil), 3 via hole conductor, 31 land via, 4 electronic component, 41 external electrode, 5 paste, 6 mounter nozzle.

Claims (5)

電子部品と、熱可塑性樹脂を含む熱可塑性の樹脂シートとが一体化された部品一体型シートの製造方法であって、
前記電子部品の一方の主面上の少なくとも一部分、または、前記樹脂シートの一方の主面上の前記電子部品と接着される部分の少なくとも一部分に、前記樹脂シートに含まれる熱可塑性樹脂と同じ熱可塑性樹脂を含むペーストを塗布するペースト塗布工程と、
前記電子部品を前記ペーストを介して前記樹脂シートに搭載する搭載工程と、
前記ペーストを乾燥させる乾燥工程と
を含む、部品一体型シートの製造方法。
A method for producing a component-integrated sheet in which an electronic component and a thermoplastic resin sheet containing a thermoplastic resin are integrated,
The same heat as the thermoplastic resin contained in the resin sheet is applied to at least a part of one main surface of the electronic component or at least a part of a portion bonded to the electronic component on one main surface of the resin sheet. A paste application step of applying a paste containing a plastic resin;
A mounting step of mounting the electronic component on the resin sheet via the paste;
A method for producing a component-integrated sheet, comprising a drying step of drying the paste.
前記ペーストは、前記樹脂シートに含まれる熱可塑性樹脂と同じ熱可塑性樹脂からなるフィブリル化した粉末を含む、請求項1に記載の製造方法。   The manufacturing method according to claim 1, wherein the paste includes fibrillated powder made of the same thermoplastic resin as the thermoplastic resin included in the resin sheet. 前記樹脂シートに含まれる熱可塑性樹脂は、液晶ポリマーを主成分として含むものである、請求項1または2に記載の製造方法。   The manufacturing method according to claim 1, wherein the thermoplastic resin contained in the resin sheet contains a liquid crystal polymer as a main component. 電子部品を内蔵した樹脂多層基板の製造方法であって、
請求項1に記載の製造方法によって製造された部品一体型シートと、前記電子部品を収容するための貫通孔を有する1以上の熱可塑性樹脂シートとを、前記電子部品が前記貫通孔によって形成されるキャビティ内に配置されるように積層する積層工程と、
積層された前記部品一体型シートおよび1以上の前記熱可塑性樹脂シートを熱圧着する熱圧着工程とを含む、製造方法。
A method for producing a resin multilayer substrate incorporating electronic components,
A component-integrated sheet manufactured by the manufacturing method according to claim 1 and at least one thermoplastic resin sheet having a through-hole for accommodating the electronic component, wherein the electronic component is formed by the through-hole. A laminating process for laminating so as to be disposed in the cavity;
And a thermocompression bonding step of thermocompression bonding the laminated component-integrated sheet and the one or more thermoplastic resin sheets.
熱可塑性樹脂を含む熱可塑性の樹脂層と、内蔵された電子部品とを含む樹脂多層基板であって、
前記電子部品の一方の主面上の少なくとも一部分において、前記樹脂層に含まれる熱可塑性樹脂と同じ熱可塑性樹脂からなる接着層を含む、樹脂多層基板。
A resin multi-layer substrate including a thermoplastic resin layer containing a thermoplastic resin and a built-in electronic component,
A resin multilayer substrate comprising an adhesive layer made of the same thermoplastic resin as the thermoplastic resin contained in the resin layer, at least in a part on one main surface of the electronic component.
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1037054A (en) * 1996-07-19 1998-02-10 Matsushita Electric Ind Co Ltd Base material for circuit board, prepreg and printed circuit board using the same
JP2010141029A (en) * 2008-12-10 2010-06-24 Fujikura Ltd Printed wiring board and method of manufacturing the same
JP2011222555A (en) * 2010-04-02 2011-11-04 Denso Corp Method for manufacturing wiring board with built-in semiconductor chip
JP2012019247A (en) * 2007-06-15 2012-01-26 Murata Mfg Co Ltd Method of manufacturing component built-in substrate
JP2012089568A (en) * 2010-10-15 2012-05-10 Murata Mfg Co Ltd Organic multilayer substrate and manufacturing method therefor
JP2013038361A (en) * 2011-08-11 2013-02-21 Fujikura Ltd Component built-in printed board and manufacturing method of the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006073763A (en) * 2004-09-01 2006-03-16 Denso Corp Manufacturing method for multilayer board
JP5378380B2 (en) * 2008-07-23 2013-12-25 ルネサスエレクトロニクス株式会社 Semiconductor device and manufacturing method thereof
US8766440B2 (en) * 2010-03-04 2014-07-01 Nec Corporation Wiring board with built-in semiconductor element

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1037054A (en) * 1996-07-19 1998-02-10 Matsushita Electric Ind Co Ltd Base material for circuit board, prepreg and printed circuit board using the same
JP2012019247A (en) * 2007-06-15 2012-01-26 Murata Mfg Co Ltd Method of manufacturing component built-in substrate
JP2010141029A (en) * 2008-12-10 2010-06-24 Fujikura Ltd Printed wiring board and method of manufacturing the same
JP2011222555A (en) * 2010-04-02 2011-11-04 Denso Corp Method for manufacturing wiring board with built-in semiconductor chip
JP2012089568A (en) * 2010-10-15 2012-05-10 Murata Mfg Co Ltd Organic multilayer substrate and manufacturing method therefor
JP2013038361A (en) * 2011-08-11 2013-02-21 Fujikura Ltd Component built-in printed board and manufacturing method of the same

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