JPWO2012026397A1 - 圧電セラミックスおよびその製造方法 - Google Patents
圧電セラミックスおよびその製造方法 Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 249
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000002245 particle Substances 0.000 claims abstract description 134
- 239000002002 slurry Substances 0.000 claims abstract description 88
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims abstract description 46
- 239000002994 raw material Substances 0.000 claims description 5
- 229910052797 bismuth Inorganic materials 0.000 claims description 4
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000013078 crystal Substances 0.000 abstract description 26
- 238000007569 slipcasting Methods 0.000 abstract description 23
- 238000000465 moulding Methods 0.000 abstract description 9
- 239000010936 titanium Substances 0.000 description 60
- 239000000843 powder Substances 0.000 description 51
- 239000000523 sample Substances 0.000 description 47
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 22
- 230000005484 gravity Effects 0.000 description 19
- 239000002904 solvent Substances 0.000 description 14
- 238000001878 scanning electron micrograph Methods 0.000 description 10
- 230000005415 magnetization Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 7
- 229910000416 bismuth oxide Inorganic materials 0.000 description 7
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 239000011656 manganese carbonate Substances 0.000 description 6
- 229940093474 manganese carbonate Drugs 0.000 description 6
- 235000006748 manganese carbonate Nutrition 0.000 description 6
- 229910000016 manganese(II) carbonate Inorganic materials 0.000 description 6
- XMWCXZJXESXBBY-UHFFFAOYSA-L manganese(ii) carbonate Chemical compound [Mn+2].[O-]C([O-])=O XMWCXZJXESXBBY-UHFFFAOYSA-L 0.000 description 6
- 229910002115 bismuth titanate Inorganic materials 0.000 description 5
- 239000013074 reference sample Substances 0.000 description 5
- 239000002270 dispersing agent Substances 0.000 description 4
- 239000012153 distilled water Substances 0.000 description 4
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 3
- 239000000920 calcium hydroxide Substances 0.000 description 3
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 3
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000011812 mixed powder Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 150000002611 lead compounds Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000484 niobium oxide Inorganic materials 0.000 description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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Abstract
Description
板状セラミック粒子を含む圧電セラミックスであって、
圧電セラミックスの所定の断面におけるX線回折パターンに基づいて、Lotgering(ロットゲーリング)法により算出した第1軸の配向度が0.30以上であり、
第1軸の配向度が最大値を示す断面を基準面とし、基準面に対して直交する断面におけるX線回折パターンに基づいて、Lotgering法により算出した第2軸の配向度が0.20以上であり、
第2軸の配向度は、基準面に対して直交する断面のうち、第2軸の配向度が最大値となるような断面における値であること、
を特徴とする、圧電セラミックスである。
板状セラミック粒子を含むセラミックスラリーを作製する原料工程と、
セラミックスラリーを、シート成形法またはスリップキャスト成形法を用いてシート状に形成する形成工程と、
シート状のセラミックスラリーに磁場を印加する磁場印加工程と、を備え、
磁場を印加する方向は、シート状のセラミックスラリーと略同一平面内の所定の方向であること、
を特徴とする、圧電セラミックスの製造方法である。
10 アルミナ板
12 ろ紙
14 鋳型
20 キャリアフィルム
22 塗布装置
24 磁場印加装置
28a,28b 搬送ローラ
B 磁場
P 延在方向
G 重力方向
本発明に係る圧電セラミックスは、板状セラミック粒子を含むセラミック粒子からなる圧電セラミックスである。そして、圧電セラミックスの所定の断面におけるX線回折(XRD)パターンに基づいて、Lotgering(ロットゲーリング)法により算出した第1軸(例えばc軸)の配向度が0.30以上である。なお、Lotgering法については、後で詳細に説明する。そして、第1軸の配向度が最大値を示す断面を基準面とし、この基準面に対して直交する断面におけるX線回折パターンに基づいて、Lotgering法により算出した第2軸(例えばa軸)の配向度が0.20以上である。第2軸の配向度は、基準面に対して直交する断面のうち、第2軸の配向度が最大値となるような断面における値である。
次に、本発明に係る圧電セラミックスの製造方法の実施形態について、CaBi4Ti4O15セラミックスを例にして説明する。
Claims (5)
- 板状セラミック粒子を含む圧電セラミックスであって、
前記圧電セラミックスの所定の断面におけるX線回折パターンに基づいて、Lotgering法により算出した第1軸の配向度が0.30以上であり、
前記第1軸の配向度が最大値を示す断面を基準面とし、前記基準面に対して直交する断面におけるX線回折パターンに基づいて、Lotgering法により算出した第2軸の配向度が0.20以上であり、
前記第2軸の配向度は、前記基準面に対して直交する断面のうち、第2軸の配向度が最大値となるような断面における値であること、
を特徴とする、圧電セラミックス。 - 前記板状セラミック粒子が、c軸に平行な方向から見たとき、形状異方性が無いことを特徴とする、請求項1に記載の圧電セラミックス。
- 前記板状セラミック粒子が、平均粒径が20μm以下であることを特徴とする、請求項1または請求項2に記載の圧電セラミックス。
- 前記板状セラミック粒子がビスマス層状化合物であることを特徴とする、請求項1ないし請求項3のいずれかに記載の圧電セラミックス。
- 板状セラミック粒子を含むセラミックスラリーを作製する原料工程と、
前記セラミックスラリーを、シート成形法またはスリップキャスト成形法を用いてシート状に形成する形成工程と、
シート状の前記セラミックスラリーに磁場を印加する磁場印加工程と、を備え、
前記磁場を印加する方向は、シート状のセラミックスラリーと略同一平面内の所定の方向であること、
を特徴とする、圧電セラミックスの製造方法。
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JP2002121069A (ja) * | 2000-10-10 | 2002-04-23 | Kyocera Corp | ビスマス層状化合物焼結体およびその製造方法 |
JP2004007406A (ja) * | 2002-03-25 | 2004-01-08 | Murata Mfg Co Ltd | 圧電素子およびその製造方法 |
JP2004006704A (ja) * | 2002-03-25 | 2004-01-08 | Taiyo Yuden Co Ltd | 圧電セラミック部品の製造方法及び圧電セラミック部品 |
WO2006043407A1 (ja) * | 2004-10-21 | 2006-04-27 | Murata Manufacturing Co., Ltd | 非強磁性物質成形体の製造方法、及び非強磁性物質成形体 |
JP2009058378A (ja) * | 2007-08-31 | 2009-03-19 | Murata Mfg Co Ltd | 磁気センサ |
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- 2011-08-19 JP JP2012530646A patent/JPWO2012026397A1/ja active Pending
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JP2002121069A (ja) * | 2000-10-10 | 2002-04-23 | Kyocera Corp | ビスマス層状化合物焼結体およびその製造方法 |
JP2004007406A (ja) * | 2002-03-25 | 2004-01-08 | Murata Mfg Co Ltd | 圧電素子およびその製造方法 |
JP2004006704A (ja) * | 2002-03-25 | 2004-01-08 | Taiyo Yuden Co Ltd | 圧電セラミック部品の製造方法及び圧電セラミック部品 |
WO2006043407A1 (ja) * | 2004-10-21 | 2006-04-27 | Murata Manufacturing Co., Ltd | 非強磁性物質成形体の製造方法、及び非強磁性物質成形体 |
JP2009058378A (ja) * | 2007-08-31 | 2009-03-19 | Murata Mfg Co Ltd | 磁気センサ |
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