JPWO2009025162A1 - Cylindrical linear motor armature and cylindrical linear motor - Google Patents

Abstract

Provided are a cylindrical linear motor armature and a cylindrical linear motor that are capable of minimizing thrust ripple and temperature rise of the armature as much as possible, excellent in assemblability, and obtaining good motor characteristics. By arranging several cooling pipes (1d) on the aluminum frame (1c) and flowing an insulating refrigerant such as air or water, oil, florinate, etc., the heat generated in the armature coil is recovered and applied to the load via the table. Heat transfer to the field via the air gap and the air gap is greatly reduced.

Description

  The present invention relates to a cylindrical linear motor armature and a cylindrical linear motor, and more particularly to a structure that suppresses a temperature rise of an armature coil.

As a conventionally known cylindrical linear motor, a linear motor as shown in a sectional side view in FIG. 10 is known. In FIG. 10, a field 92 includes a stainless steel pipe 92c, a plurality of cylindrical magnets 92a magnetized in the axial direction, cylindrical pole pieces 92b made of a magnetic material, and ends provided at both axial ends of the stainless steel pipe 92c. It is composed of block 92d.
The magnets 92a are arranged so that the polarities are alternately different, and pole pieces 92b are provided between the magnets.
Furthermore, in order to suppress the repulsive force generated between the magnets, end blocks 92d are attached to both ends of the stainless steel pipe 92c.
The armature 91 includes a cylindrical coil 91a, a cylindrical yoke 91b made of a magnetic material, and an aluminum frame 91c. A plurality of cylindrical coils 91a arranged in the axial direction are arranged inside the cylindrical yoke 91b, and the outside of the cylindrical yoke 91b is covered with an aluminum frame 91c.
The armature 91 and the field 92 are coaxially arranged via a magnetic gap, and the linear motor is configured so that the armature 91 serves as a mover and the field 92 serves as a stator for relative movement. Is done.

  11 is a side sectional view of the vicinity of the cylindrical coil of the cylindrical linear motor of FIG. In FIG. 11, an armature 91 includes a plurality of cylindrical coils 91a arranged side by side in the axial direction, a cylindrical yoke 91b made of a magnetic material on the outside of the cylindrical coil 91a, an aluminum frame 91c on the outside, and each cylinder. A disc-shaped insulating paper 91d inserted between the coil-like coils is arranged. A resin spacer 91e is disposed inside the cylindrical coil 91a. The coil group connection process is performed in a space between the cylindrical coil 91a and the aluminum frame 91c, and this space is further formed by a molding resin 91f, and the cylindrical coil 91a, the aluminum frame 91c, and the spacer 91e are mechanically fixed. Has been.

However, in the conventional cylindrical linear motor, the heat source is a cylindrical coil, and when the temperature of the entire armature rises due to the heat generated by the coil, the heat that escapes radially outward from the coil passes through the aluminum frame or table. Therefore, it could not be applied to applications that dislike heat transfer to the load, such as liquid crystal / semiconductor manufacturing equipment, precision parts manufacturing / inspection equipment.
Further, the heat escaping from the coil inward in the radial direction is transmitted to the field from four directions through the air gap, and there is a problem that the magnet is likely to be thermally demagnetized due to a temperature rise.
Also, when assembling each cylindrical coil to the cylindrical yoke, if the accuracy of the axial dimension of the coil varies, the cylindrical coils cannot be arranged at equal intervals, and the voltage phase induced in each phase coil There is a problem that the thrust ripple increases because of the deviation.
Further, when the coil is wound around the bobbin, the coil winding start of the cylindrical coil becomes the inner peripheral portion, so that the coil at the start of winding is difficult to wind around the bobbin, and the bobbin size reduces the coil occupation area, and the armature portion There was also a problem that led to an increase in temperature.
And in order to maintain the insulation between the crossover wire connecting each cylindrical coil and each cylindrical coil, there is a problem that the assemblability of arranging the insulating parts on the outer periphery of the cylindrical coil or the outer periphery of the crossover wire is not good. there were.
In addition, when a conventional cylindrical coil is used and a cylindrical yoke is used, a substrate for connecting the coil wire is required for each phase, and it is necessary to provide a substrate space between the coil and the cylindrical yoke. For this reason, there is a problem that the number of coil turns is reduced correspondingly and the motor characteristics are lowered.
The present invention has been made in order to solve the above-described problems, and has a cylindrical linear motor armature that can reduce thrust ripple and temperature increase of the armature as much as possible, is excellent in assemblability, and has good motor characteristics. And it aims at providing a cylindrical linear motor.

In order to solve the above problems, the invention of a cylindrical linear motor armature according to claim 1 is characterized in that a plurality of cylindrical coils are arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and the outside of the cylindrical yoke is arranged. A cylindrical linear motor armature that is covered with an aluminum frame is characterized in that a plurality of cooling pipes are provided on the aluminum frame.
According to a second aspect of the present invention, in the cylindrical linear motor armature according to the first aspect, a table is attached to the aluminum frame, and several cooling pipes are arranged side by side on the table attachment surface side of the aluminum frame. It is characterized by.
According to a third aspect of the present invention, in the cylindrical linear motor armature according to the first aspect, heat pipes are arranged circumferentially in the aluminum frame.

According to a fourth aspect of the invention, the cylindrical linear motor armature includes a plurality of cylindrical coils arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and the outer side of the cylindrical yoke is covered with an aluminum frame. In the cylindrical linear motor armature, the shape of the bobbin in the cross section passing through the axis of the bobbin around which the cylindrical coil is wound is L-shaped, and a notch for starting coil winding is provided in the bobbin. It is a feature.
The invention of a cylindrical linear motor armature according to claim 5 comprises a plurality of cylindrical coils arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and the outside of the cylindrical yoke is covered with an aluminum frame. The cylindrical linear motor armature is characterized in that a cross-sectional shape in a cross section passing through the axis of the bobbin is U-shaped, and the bobbin starts to be wound and is provided with a recess for coil escape.
According to a sixth aspect of the present invention, in the cylindrical linear motor armature according to the fifth aspect, a notch for catching the coil is provided at a position away from the outer periphery of the cylindrical coil of the bobbin by a predetermined distance. A connecting wire between the cylindrical coils is arranged.

In the invention of the cylindrical linear motor armature according to claim 7, a plurality of cylindrical coils are arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and the outside of the cylindrical yoke is covered with an aluminum frame. In the cylindrical linear motor armature, the plurality of coils are wound with one stroke to constitute one phase of the cylindrical coil.
According to an eighth aspect of the present invention, in the cylindrical linear motor armature according to the seventh aspect, the coils of the plurality of phases are alternately arranged and fixed.
According to a ninth aspect of the present invention, in the cylindrical linear motor armature according to the seventh aspect of the present invention, the connecting wire of the coil formed by winding a single stroke around the inner peripheral portion of the cylindrical yoke formed on the outer peripheral portion of the coil is passed. It features a notch groove.
The invention of a cylindrical linear motor according to a tenth aspect of the invention is that a plurality of columnar magnets magnetized in the axial direction are arranged inside a stainless steel pipe so that the magnetization directions are alternately different, and a magnetic material is provided between the magnets. A cylindrical pole piece made of, a field formed by closing both ends of the stainless steel pipe with end blocks, and a plurality of cylindrical coils arranged in an axial direction inside a cylindrical yoke made of a magnetic material, An armature covering an outer side of a cylindrical yoke with an aluminum frame, and the field and the armature are arranged so as to be coaxial with each other via a magnetic gap, and the field is used as a stator. A cylindrical linear motor that is configured to travel relatively with a child as a mover, wherein the armature is the cylindrical linear motor armature according to any one of claims 1 to 9. To have.

According to the first aspect of the present invention, by providing a plurality of cooling pipes on the aluminum frame, the heat generated in the cylindrical coil can be generated by flowing an insulating refrigerant such as air, water, oil, or fluorinate through the aluminum pipe. It is possible to reduce heat transfer to the load and to the magnetic field, and to transfer heat to the atmosphere around the armature, such as liquid crystal / semiconductor manufacturing equipment and precision parts manufacturing / inspection equipment. Application to disliked use is possible.
Further, according to the invention described in claim 2, by adopting a structure in which several cooling pipes are arranged side by side on the table mounting surface side in the aluminum frame, the cylindrical coil which is a heat source and the table are insulated from each other, to the load. Heat transfer can be extremely reduced, and can be applied to applications such as liquid crystal / semiconductor manufacturing devices and precision component manufacturing / inspection devices that dislike heat transfer to loads.
Furthermore, according to the invention described in claim 3, by adopting a structure in which the heat pipe is circumferentially arranged on the aluminum frame, the heat generated from the cylindrical coil is recovered by the heat pipe, Heat transfer and heat transfer to the field can be greatly reduced, and it can be applied to liquid crystal / semiconductor manufacturing equipment, precision parts manufacturing / inspection equipment, and the like.
According to the fourth and fifth aspects of the present invention, a plurality of cylindrical coils wound around the bobbin can be arranged side by side at equal intervals in the axial direction, so that thrust ripple and temperature rise can be reduced as much as possible. it can.
According to the invention described in claim 6, since the connecting wire between the cylindrical coils can be positioned, the assemblability can be improved.
According to the seventh to ninth aspects of the invention, by making the coil wound by one stroke, the necessary space of the cylindrical linear motor armature can be minimized, and the conventional linear cylindrical motor of the same size can be achieved. A cylindrical linear motor with excellent motor characteristics can be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS It is a cylindrical linear motor provided with the armature based on Example 1 of this invention, Comprising: (a) is a perspective view, (b) is sectional drawing cut | disconnected by the perpendicular surface containing an axis | shaft, (c) is an armature part. FIG. It is a perspective view of the armature which concerns on Example 2 of this invention. It is a front view of the armature which concerns on Example 3 of this invention. It is a sectional side view of the cylindrical coil vicinity of the cylindrical linear motor which concerns on Example 4 of this invention. It is the cylindrical coil and bobbin which concern on Example 4 of this invention, Comprising: (a) is a front view of a cylindrical coil and a bobbin, (b) is a sectional side view. It is the cylindrical coil and bobbin which show Example 5 of this invention, Comprising: (a) is a top view, (bA) is a front view, (bb) is a sectional side view. It is a longitudinal cross-sectional view of the cylindrical linear motor which shows Example 6 of this invention. It is a coil perspective view of the linear motor of FIG. FIG. 8 is a cross-sectional view of the back yoke of the linear motor in FIG. 7. It is a sectional side view of the whole conventionally well-known cylindrical linear motor. It is side sectional drawing of the cylindrical coil vicinity of a conventionally well-known cylindrical linear motor.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Armature 1a Cylindrical coil 1b Cylindrical yoke 1c Aluminum frame 1d Cooling pipe 1e Refrigerant inlet 1f Refrigerant outlet 1g Heat pipe 2 Field 2a Magnet 2b Pole piece 2c Stainless steel pipe 2d End block 3 Table 41a Cylindrical coil 41c Cylindrical yoke 41d Aluminum frame 41f Mold resin 41g Bobbin 41h Notch 41i Escape recess 41j Notch 71 Cylindrical coil 72 Aluminum frame 73 Back yoke 74 Ring-shaped coil 75 Coil jumper wire 76 Notched groove 91 Armature 91a Cylindrical coil 91b Cylindrical Yoke 91c Aluminum frame 91d Insulating paper 91e Resin spacer 91f Mold resin 92 Field pole 92a Magnet 92b Pole piece 92c Stainless steel pipe 92d End block

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In addition, about the same component as this invention, the same code | symbol is attached | subjected and description is abbreviate | omitted, and only a different point is demonstrated.

1 is a cylindrical linear motor including an armature according to a first embodiment of the present invention, where (a) is a perspective view, (b) is a cross-sectional view taken along a vertical plane including an axis, and (c) is a cross-sectional view. It is an expansion perspective view of an armature part. In FIG. 1, the first embodiment is characterized in that a plurality of cooling pipes 1d are disposed on an aluminum frame 1c.
As shown in FIGS. 1 (a) and 1 (b), a plurality of cooling pipes 1d are arranged on the aluminum frame 1c, and an insulating refrigerant such as air, water, oil, or florinate is flowed from the refrigerant inlet 1e to the cooling pipe 1d. By recovering from the refrigerant outlet 1f, heat generated in the cylindrical coil 1a is recovered, and heat transfer to the load via the table 3 and heat transfer to the field 2 via the air gap are extremely reduced. It becomes possible to do. As shown in FIG. 1 (c), in the armature cross section, when the four cooling pipes 1d are arranged symmetrically on the diagonal line, heat is evenly released to the upper and lower surfaces and the four sides of the aluminum frame 1c. It is possible to evenly reduce the temperature rise on the surface of the aluminum frame 1c.

  As described above, according to the first embodiment, a large cooling capacity can be obtained by the cooling pipe. Therefore, heat transfer to the load and heat transfer to the atmosphere, such as a cylindrical liquid crystal / semiconductor manufacturing apparatus, a precision part manufacturing / inspection apparatus, etc. Application to usage is possible.

FIG. 2 is a perspective view of an armature according to the second embodiment of the present invention.
In FIG. 2, only the aluminum frame of the cylindrical linear motor armature of Example 2 is shown. In FIG. 2, with respect to the arrangement of the cooling pipes 1d, several cooling pipes 1d are arranged on the mounting surface side of the table 3 of the aluminum frame 1c, and are connected to each other to form a single cooling pipe.
Thus, several cooling pipes (four in FIG. 2) are arranged side by side on the table mounting surface side in the aluminum frame, and an insulating refrigerant such as air, water, oil, or florinate is flowed from the refrigerant inlet 1e to the cooling pipe 1d. By recovering from the refrigerant outlet 1f, the heat generated in the cylindrical coil can be recovered, and the heat transfer to the load via the table and the heat transfer to the field via the air gap can be greatly reduced. It becomes possible.
As described above, according to the second embodiment, a large cooling capacity can be obtained by the cooling pipe, so that it can be applied to applications such as liquid crystal / semiconductor manufacturing equipment, precision parts manufacturing / inspection equipment, etc. that dislike heat transfer to the load. Become.

FIG. 3 is a front view of an armature according to Embodiment 3 of the present invention.
In FIG. 3, only the aluminum frame 1c is shown. In FIG. 3, the heat pipe 1g is continuously arranged on the circumference of the aluminum frame 1c with respect to the cooling structure of the cylindrical linear motor.
As shown in FIG. 3, heat pipes are continuously arranged on the circumference of an aluminum frame cross section, and the heat generated in the cylindrical coil is quickly carried out to the outside by the heat pipe. Can be collected efficiently, and heat transfer to the load via the table and heat transfer to the field via the air gap can be extremely reduced.

FIG. 4 is a side sectional view of the vicinity of the cylindrical coil of the cylindrical linear motor according to the fourth embodiment of the present invention. In FIG. 4, a plurality of cylindrical coils 41a wound around a bobbin 41g are arranged side by side in the axial direction. Since the bobbin 41g is manufactured by resin molding, there is no dimensional variation, and the cylindrical coils 41a are arranged at equal intervals in the axial direction. A cylindrical yoke 41c made of a magnetic material is disposed outside the cylindrical coil 41a, and an aluminum frame 41d is disposed further outside. The coil group connection process is performed in a space between the cylindrical coil 41a and the cylindrical yoke 41c, and this space is further formed by the molding resin 41f, and the cylindrical coil 41a and the cylindrical yoke 41c are mechanically fixed. ing.
5A and 5B are a cylindrical coil and a bobbin according to a fourth embodiment of the present invention, in which FIG. 5A is a front view of the cylindrical coil and bobbin, and FIG. 5B is a side sectional view.
In the figure, the bobbin 41g has an L-shaped cross-section and is provided with a notch 41g for starting coil winding. The coil starts to be hooked from the notch 41g. After the coil has been wound, the coil is bent so as to fit in the bobbin cutout 41h as shown in the figure. A plurality of coils are arranged in the axial direction to constitute an armature portion.
Thus, according to the fourth embodiment, a plurality of cylindrical coils 41a wound around the bobbin 41g can be arranged side by side at equal intervals in the axial direction, so that thrust ripple can be reduced. Moreover, since the cross-sectional shape of the bobbin 41g is L-shaped, the area occupied by the coil is improved and the temperature rise is suppressed.

6A and 6B are a cylindrical coil and a bobbin showing Embodiment 5 of the present invention, in which FIG. 6A is a plan view, FIG. 6B is a front view, and FIG. 6B is a side sectional view.
In the figure, the bobbin 41g has a U-shaped cross section, and a relief recess 41i is provided for starting coil winding. Further, the coil is wound around the bobbin 41g after being hooked on a notch 41j disposed at a certain distance from the outer periphery of the cylindrical coil of the bobbin.
The notches 41j are arranged on both sides of the winding start portion and the winding end portion, and are also used for arranging the connecting wires of the respective cylindrical coils 41a.
As described above, according to the fifth embodiment, a plurality of cylindrical coils 41a wound around the bobbin 41g can be arranged at equal intervals in the axial direction, and thrust ripple can be reduced. Further, the connecting wire between the cylindrical coils 41a can be positioned, and the assemblability can be improved.

7 is a longitudinal sectional view of a cylindrical linear motor showing Embodiment 6 of the present invention, FIG. 8 is a perspective view of a coil of the linear motor of FIG. 7, and FIG. 9 is a sectional view of a back yoke of the linear motor of FIG.
The coil shown in FIG. 7 includes a coil 71 wound with a single stroke and a back yoke 73 provided with a notch. Thereby, the cylindrical linear motor of Example 6 can minimize the space between the coil and the back yoke. That is, as can be seen from FIG. 8, in this coil, a ring-shaped coil 74 wound by one stroke is arranged so as to be staggered for a plurality of phases, and the coil connecting wires 75 are concentrated in one place, and an adhesive is applied. It has been cured. In order to insert the coil configured as shown in FIG. 8 into the back yoke shown in FIG. 9, a notch groove 76 having a dimension capable of securing a space for passing the coil connecting wire is provided in the inner diameter portion of the back yoke.

As described above, according to the present invention, by providing a plurality of cooling pipes on the aluminum frame, the heat generated in the cylindrical coil is recovered by flowing an insulating refrigerant such as air, water, oil, or fluorinate through the aluminum pipe. , Heat transfer to the load and heat transfer to the field can be extremely reduced, and applications that dislike heat transfer to the atmosphere around the armature, such as liquid crystal / semiconductor manufacturing equipment and precision parts manufacturing / inspection equipment Application to is possible.
Further, since a plurality of cylindrical coils wound around the bobbin can be arranged in the axial direction and arranged at equal intervals, the temperature rise can be reduced as much as possible, and the thrust ripple can be reduced.
Furthermore, since the crossover between the cylindrical coils can be positioned, the assemblability can be improved, and the coil linearly wound armature can be minimized by making the coil wound by one stroke. Therefore, a cylindrical linear motor having superior motor characteristics as compared with a conventional cylindrical linear motor of the same body size can be obtained.

  According to the cylindrical linear motor of the present invention, it is possible to obtain a cylindrical linear motor armature having extremely small thrust ripple and temperature increase of the armature, excellent assemblability, and good motor characteristics. It is useful to apply to applications such as liquid crystal / semiconductor manufacturing equipment that requires precise positioning and fine feed, and precision parts manufacturing / inspection equipment.

Claims (10)

In a cylindrical linear motor armature in which a plurality of cylindrical coils are arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and an outer side of the cylindrical yoke is covered with an aluminum frame.
A cylindrical linear motor armature, wherein a plurality of cooling pipes are disposed on the aluminum frame.   The cylindrical linear motor armature according to claim 1, wherein a table is attached to the aluminum frame, and a plurality of the cooling pipes are arranged side by side on the table attachment surface side of the aluminum frame.   The cylindrical linear motor armature according to claim 1, wherein heat pipes are circumferentially arranged in the aluminum frame. In a cylindrical linear motor armature in which a plurality of cylindrical coils are arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and an outer side of the cylindrical yoke is covered with an aluminum frame.
A cylindrical linear motor electric machine characterized in that the shape of the bobbin in a cross section passing through the axis of the bobbin around which the cylindrical coil is wound is L-shaped, and a notch for starting coil winding is provided in the bobbin. Child. In a cylindrical linear motor armature in which a plurality of cylindrical coils are arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and an outer side of the cylindrical yoke is covered with an aluminum frame.
A cylindrical linear motor armature characterized in that a cross-sectional shape in a cross section passing through an axis of the bobbin is U-shaped, and a recess for starting coil winding is provided on the bobbin.   6. A notch for catching a coil is provided at a position away from the outer circumference of the cylindrical coil of the bobbin, and a jumper between the cylindrical coils is arranged in the notch. The cylindrical linear motor armature described. In a cylindrical linear motor armature in which a plurality of cylindrical coils are arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and an outer side of the cylindrical yoke is covered with an aluminum frame.
A cylindrical linear motor armature, wherein the plurality of coils are wound with one stroke to constitute one phase of the cylindrical coil.   The cylindrical linear motor armature according to claim 7, wherein the plurality of coils are alternately arranged and fixed.   8. A cylindrical linear motor electric machine according to claim 7, wherein a notch groove is formed in the inner peripheral portion of the cylindrical yoke configured on the outer peripheral portion of the coil to pass a connecting wire of the coil configured by one stroke. Child. A plurality of cylindrical magnets magnetized in the axial direction are arranged inside the stainless steel pipe so that the magnetization directions are alternately different, and a cylindrical pole piece made of a magnetic material is interposed between the magnets. An electric machine comprising a field magnet in which both ends of a pipe are closed by end blocks, and a plurality of cylindrical coils arranged in an axial direction inside a cylindrical yoke made of a magnetic material, and the outside of the cylindrical yoke is covered with an aluminum frame. The field and the armature are arranged so as to be coaxial with each other via a magnetic gap, and the field is used as a stator and the armature is used as a mover. In cylindrical linear motor,
A cylindrical linear motor, wherein the armature is the cylindrical linear motor armature according to any one of claims 1 to 9.

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