JPH06254734A - Xy stage device and linear motor used for it - Google Patents

Abstract

PURPOSE:To improve the positioning precision of an XY stage device and accelerate the positioning speed. CONSTITUTION:An XY stage device E1 is constituted of a Y stage 4 reciprocatable along the guide face 8a of a guide member 8 fixed to a base plate 1 and an X stage 7 reciprocatable together with it and reciprocatable along the guide face of a center member 4c. The Y stage 4 is moved by a pair of Y linear motors 2, 3, and the X stage 7 is moved by a pair of X linear motors 5 supported by the Y stage 4 along the center member 4c of the Y stage 4. The Y stage 4 and the X stage 7 are supported on the base plate 1 via individual static pressure bearing pads respectively.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY stage device for positioning a substrate such as a wafer, an object to be processed or an object to be measured in a semiconductor exposure apparatus, a precision measuring device or a precision processing machine, and a linear motor used therefor. It is about.

[0002]

2. Description of the Related Art In a semiconductor exposure apparatus, a precision measuring device, a precision processing machine, etc., a substrate such as a wafer to be exposed, an object to be measured or an object to be processed is exposed to exposure light, illumination light for measurement or a tool High precision positioning is required. For this reason, an XY stage device as shown in FIG. 16 has been developed. The XY stage device includes a base 101 supported by a support (not shown), and a base 101.
A Y stage 104 that is supported on a pair of guide surfaces 108a and 108b provided on the
A pair of guide surfaces 104c, 1 provided on the stage 104
04d, which is composed of an X stage 107 that is slidable along the 04d, is provided with a holding plate such as a suction chuck (not shown), which allows a substrate such as a wafer, an object to be measured, or an object to be measured. Hold the work piece. Guide surfaces 108a and 108b of the base 101 and the Y stage 10
The four guide surfaces 104c and 104d are arranged along two axes (hereinafter, respectively referred to as "Y-axis and X-axis") orthogonal to each other in one plane parallel to the surface of the base 104, and the Y stage. Reference numeral 104 denotes guide surfaces 108a, 108 of the base 101.
It is reciprocally moved in the Y-axis direction by a driving device (not shown) such as a linear motor arranged outside b,
7 is reciprocally moved in the X-axis direction by a driving device such as a linear motor (not shown) provided on the lower surface thereof.

[0003]

However, according to the above-mentioned conventional technique, the Y stage is slidably supported on the guide surface of the base, and the X stage is slidable on the guide surface of the Y stage. Since it is a double structure supported by, an axis perpendicular to a plane including the X axis and the Y axis (hereinafter, referred to as “Z axis”).
In addition to the large dimension in the direction of, the improvement of the positioning accuracy and the speedup of the holding plate are hindered for the following reasons.

(1) As shown in FIGS. 14 (a) and 14 (b), when the X stage 107 reciprocates on the Y stage 104 in the X-axis direction, a load deviation occurs on the Y stage 104. As a result, the Y stage 104 is deformed. As a result, the X stage 107 tilts and the positioning accuracy is impaired.

(2) Since the center of gravity of the entire XY stage device is repeatedly changed by the movement of the X stage and the Y stage, as shown in FIG. 15, pitching (inclination with respect to the axis of the traveling direction) on the X stage and the Y stage, respectively.
Vibration is generated in the rolling (rotation around the axis in the traveling direction) and yawing (rotation around the Z axis), and in the respective directions of the X axis, the Y axis, and the Z axis, and the double structure as described above. Therefore, all the vibration generated in the X stage is transmitted to the Y stage, and the vibration of the Y stage is also transmitted to the X stage. When the X stage and the Y stage are vibrated at high speed, these vibrations are amplified and the positioning accuracy is significantly reduced.

Further, when the driving device for driving the X stage and the Y stage is a linear motor, the amount of heat generated increases as the speed increases, so that the linear motor coil 121 of the linear motor coil 121 as shown in FIGS. Long member 1 at both ends
Only by providing the cooling pipes 123a and 124a only to 23 and 124, the cooling amount becomes insufficient, the coil temperature rises, and the generated heat is released into the atmosphere, not only the linear motor coil 121 and the moving member 120, The entire XY stage device or a substrate such as a wafer mounted on the XY stage device, an object to be measured or an object to be processed may be thermally deformed, and the positioning accuracy may be deteriorated.

The present invention has been made in view of the above-mentioned unsolved problems of the prior art, and provides an XY stage device capable of improving the positioning accuracy and accelerating the positioning, and a linear motor used therefor. That is the purpose.

[0008]

In order to achieve the above object, the XY stage device of the present invention is a first and second movable XY stage device which is movable back and forth along a base and a first guide surface which is integral with the base. Moving body, first driving means for moving the moving body, and the first
Second moving body that is movable together with the moving body and that is reciprocable along a second guide surface provided on the moving body, and the second moving body on the second guide surface. It is characterized in that it comprises a second driving means for moving along, and the first and second moving bodies are individually supported on the base.

Further, the first driving means is composed of a pair of driving devices which are respectively coupled to both sides of the first moving body, and the second driving means is different in the width direction of the second moving body. It is composed of a plurality of driving devices coupled to each other.

Further, the first and second moving bodies are held in non-contact with the base and the first and second guide surfaces by hydrostatic bearing means, respectively.

The linear motor used in each XY stage device of the present invention is a linear motor used in an XY stage device, and has a fixed member and a movable member that is movable facing the fixed member. And at least one of the magnetic means of the moving member has a cooling means on the surface facing the other.

[0012]

According to the above apparatus, since the first moving body and the second moving body are individually supported on the base, when they are moved by the first and second means, respectively. It is possible to reduce the bias of the load generated on the base and prevent vibration. Further, since the structure is not double, the size can be easily reduced.

Further, the first driving means is composed of a pair of driving devices which are respectively coupled to both sides of the first moving body, and the second driving means is different in the width direction of the second moving body. If it is composed of a plurality of driving devices coupled to each other, it is possible to effectively prevent pitching or yawing of each of the first and second moving bodies.

If the first and second moving bodies are held in non-contact with the base plate and the first and second guide surfaces by the hydrostatic bearing means, respectively, the first and second moving bodies can be moved. It is possible to prevent or reduce the transmission of vibration between the body and between these and the base.

Further, the linear motor prevents thermal deformation of the moving member and fixed member, and also prevents thermal deformation of surrounding devices by reducing the amount of heat released to the atmosphere.

[0016]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment. An XY stage device E ₁ of the present embodiment has a base 1 fixed on a support plate (not shown) and both ends of the base 1. A pair of Y linear motors 2 and 3 which are the first driving means provided.
And a first movement including a substantially H-shaped frame reciprocally moved in the Y-axis direction, which is one of two axes (hereinafter, referred to as “X-axis and Y-axis”, respectively) orthogonal to each other. A Y stage 4 which is a body, and a pair of X linear motors 5 and 6 (second X linear motor 6 shown below is shown in FIG. 3) which are second driving means and which are supported by the Y stage 4 so as to overlap each other in the vertical direction in the figure. The X stage 7 is a second moving body that is reciprocally moved in the X axis direction by these elements. X stage 7
Has a plate-shaped body 7a having a surface parallel to a plane including the X-axis and the Y-axis, and a holding plate such as a suction chuck (not shown) is placed on the plate-shaped body 7a.

The base 1 has a surface 1a parallel to the surface of the plate-shaped body 7a of the X stage 7, and a guide member 8 extending in the Y-axis direction is provided at one end of the base 1a. One of the pair of end edges 1b and 1c is integrally coupled, and one of the side surfaces thereof is orthogonal to the plane including the X axis and the Y axis from the end edge of the surface 1a of the base 1. Axis (hereinafter "Z
Axis. ), The guide surface 8a which is the first guide surface is provided.

One Y linear motor 2 comprises a Y linear motor coil 2a integrally provided outside the guide member 8 and a moving member 2b which moves along the Y linear motor coil 2a, and the other Y linear motor 3 is the base 1 The Y linear motor coil 3a integrally provided on the other end edge 1c of the above and a moving member 3b moving along the Y linear motor coil 3a. The moving members 2b and 3b of the Y linear motors 2 and 3 are connected to the connecting plate 2c, It is integrally connected to the parallel members 4a and 4b of the Y stage 4 by 3c.

As shown in FIG. 2, of the parallel members 4a and 4b of the Y stage 4, the parallel member 4a on the side adjacent to the guide member 8 is a hydrostatic bearing means facing the guide surface 8a of the guide member 8. It has a hydrostatic bearing pad 9 and also each parallel member 4
The a and 4b have hydrostatic bearing pads 10a and 10b which are hydrostatic bearing means facing the surface 1a of the base 1 at the lower end of the figure. The Y stage 4 is composed of the parallel members 4a and 4b and a central member 4c whose both ends are integrally connected to each other. The central member 4c has a U-shaped cross section as shown in FIG.

The X stage 7 is composed of the above-mentioned plate-like body 7a and a lower frame 7b having a U-shaped cross section integrally connected to the lower surface thereof, and the lower frame 7b is provided between the plate-like body 7a and the Y stage. 4 forms a space through which the central member 4c can be inserted, and the inner surfaces of the lower frame 7b are guide surfaces 4d and 4e, which are second guide surfaces provided on both side surfaces of the central member 4c of the Y stage 4, respectively. Hydrostatic bearing pad 1 which is a hydrostatic bearing means facing each other
1a and 11b are provided. That is, the lower frame 7b of the X stage 7 is biased in the opposite direction toward each side surface of the central member 4c of the Y stage 4 by the static pressure of the gas, and as a result, the X stage 7 moves the Y stage 4 in the Y axis direction. When moving in the same direction, it moves in the same direction. Also, the lower frame 7
Hydrostatic bearing pads 12a and 12b, which are a pair of hydrostatic bearing means facing the surface 1a of the base 1, are held on the lower surface of b.

Each of the X linear motors 5 and 6 comprises X linear motor coils 5a and 6a whose both ends are integrally connected to the central member 4c of the Y stage 4, and moving members 5b and 6b which move along the X linear motor coils 5a and 6a. , One of which is directly fixed to the lower surface of the plate-shaped body 7a of the X stage 7, and the other is the support member 7
It is suspended from the plate 7a by c.

When both Y linear motors 2 and 3 are driven,
The Y stage 4 moves in the Y-axis direction along with the X stage 7 along the guide surface 8a of the guide member 8, and when both X linear motors 5 and 6 are driven, the X stage 7 will move to the Y stage 4
The central member 4c moves in the X-axis direction along the guide surfaces 4d and 4e. The Y stage 4 and the X stage 7 are individually supported by the hydrostatic bearing pads 10a, 10b and 12a, 12b provided at the lower ends of the Y stage 4 and the X stage 7 on the surface 1a of the base 1 in a non-contact manner. , 3 and both X linear motors 5 and 6 are simultaneously driven, so that a holding plate such as a suction chuck held by the plate-shaped body 7a of the X stage 7 can be positioned at high speed.

As described above, since the Y stage 4 and the X stage 7 are individually supported on the base 1,
Due to the movement of the X stage 7 in the X-axis direction, a large load deviation occurs in the Y stage 4, so that there is no possibility that the Y stage 4 deforms and the X stage 7 tilts.

Further, the movement of the Y stage 4 and the X stage 7 causes the position of the center of gravity of the entire XY stage apparatus to fluctuate, which causes various vibrations.
In the axial and Z-axis vibrations and pitching, the X stage 7 uses the hydrostatic bearing pads 11a, 1 on the inner surface of the lower frame 7c thereof.
Since the central member 4c of the Y stage 4 is sandwiched by 1b, there is no possibility of being transmitted to the Y stage 4.
Further, the rolling of the X stage 7 is mostly absorbed by the hydrostatic bearing pads 12a and 12b at the lower end of the lower frame 7a and immediately damped, and the pitching and yawing of the X stage 7 are performed by the pair of X linear motors 5 and 6. By disposing the Y stage 4, the yawing of the Y stage 4 is greatly reduced by disposing the Y linear motors 2 and 3 on both side edges of the Y stage 4. Further, the pitching of the Y stage is greatly reduced by the hydrostatic bearing pads 11a and 11b and transmitted to the X stage.

Needless to say, a known hydraulic DC motor or the like can be used instead of the Y linear motors 2 and 3 and the X linear motors 5 and 6.

FIG. 4 shows a modification of this embodiment.
In this modification, instead of arranging a pair of X linear motors vertically on top of each other, a pair of X linear motors 15 and 16 are arranged.
The moving members 15b and 16b of the
While being directly fixed to the lower surface of the plate-shaped body 17a, the moving member 18b of the third X linear motor 18 is passed between the plate-shaped body 17a of the X stage 17 and the X linear motors 15 and 16 by the support member 17c. To hang. By this, X
A uniform propulsion force is generated over almost the entire width of the stage 17, and X
The pitching and yawing of the stage 17 can be reduced more effectively. In addition, each X linear motor 15,
16, 18 X linear motor coils 15a, 16a, 1
Both ends of 8a are connected to the central member 14c of the Y stage.

In order to speed up the positioning of the XY stage device of this embodiment, it is necessary to drive the Y linear motor and the X linear motor at a high speed. Therefore, in each Y linear motor and each X linear motor, as shown in FIG.
It is desirable to use a linear motor M ₁ having enhanced cooling of the linear motor coil as shown in FIG. As shown in the cross section of FIG. 5, the linear motor M ₁ includes a box-shaped moving member 20 having a rectangular cross section and a linear motor coil 21 that is a fixed member that penetrates the box-shaped moving member 20. The moving members 20 face each other. As shown in FIG. 7, the linear motor coil 21 has a plurality of surfaces 22a, 22b parallel to the permanent magnets 20a, 20b. A coil body 25 including an annular member 22 which is a magnetic means and a pair of long members 23 and 24 which hold both side edges of each annular member 22, respectively.
And a cooling jacket 26 covering both sides of the coil body 25. The cooling jacket 26 has a pair of cooling plates 27 and 28 respectively covering both surfaces of the coil body 25, and a pair of flow distribution plates 29 and 30 arranged at each end of both, and each cooling plate 27, 28 is plural. Internal flow paths 27a, 2 parallel to each other
8a, and both sides of the coil body 25 are cooled by the refrigerant flowing through the internal flow paths 27a and 28a. Also,
Each of the elongated members 23, 24 also has internal flow paths 23a, 24a, and the refrigerant flowing therein cools the end surface of each annular member 22. One of the flow dividing plates 29 has a pair of flow dividing chambers 29a and 29b.
And the other flow dividing plate 30 also has a similar flow dividing chamber. Further, one flow dividing plate 29 has a supply pipe 29c that communicates with both the flow dividing chambers 29a and 29b, and the other flow dividing plate 30 has an exhaust pipe 30c that communicates with both the flow dividing chambers.

The refrigerant supplied from the supply pipe 29c to one of the flow dividing plates 29 is supplied to the internal flow passages 27a and 28a of the cooling plates 27 and 28 through the flow dividing chambers 29a and 29b, and the respective annular shapes of the coil body 25. After cooling both sides of the member 22,
Collected in the flow dividing chambers 30a and 30b of the other flow dividing plate 30,
It is discharged from the discharge pipe 30c.

The linear motor M ₁ includes a linear motor coil 21 facing the permanent magnets 20a and 20b of the moving member 20.
Since it is cooled by the cooling jacket 26 that covers both surfaces of the above, most of the heat generated in the linear motor coil 21 is effectively recovered. Therefore, there is no possibility that the temperature of the coil body 25 of the linear motor coil 21 or the moving member 20 will rise significantly. In addition, the amount of heat released to the atmosphere around the coil body 25 can be reduced, and the temperature rise of the XY stage, the substrate held by the XY stage, the workpiece, the workpiece, and the like can be prevented.

In place of the cooling plates 27, 28 having the internal flow paths 27a, 28a, as shown in FIG.
A cooling plate 47 formed by bundling 7a in a flat plate shape, a hollow cooling plate 57 having one flat plate-shaped internal flow path 57a as shown in FIG. 9A, and a cooling plate shown in FIG. 9B. As described above, it is possible to use the cooling plate 58 which has the recess 58a on one surface and which, when mounted on each surface of the coil body 25, forms the internal flow path together with the recess 58a.

Further, instead of covering both sides of the coil body of the linear motor coil with the cooling jacket, the surface of each permanent magnet of the moving member with respect to the linear motor coil may be covered with the cooling jacket.

As shown in FIGS. 10 and 11,
By providing the transverse Gill cooling jacket a magnetic field similar to the voice coil motor B ₁ coil linear motor M _1, can also enhance the cooling of the coil and the linear motor M _1. The voice coil motor B ₁ includes a central shaft 61 and a cylindrical member 62 made of a magnetic material, a moving member 64 made of an annular magnet 63, and a cylindrical coil arranged in an annular space between the central shaft 61 and the cylindrical member 62. Consisting of 65, cylindrical coil 6
5 has its surface covered with a cooling jacket 66, and the cooling jacket 66 includes a pair of cylindrical cooling plates 6
7, 68 and a pair of flow dividing plates 69 arranged at both ends thereof,
70, one flow dividing plate 69 has a supply pipe 69c, and the other flow dividing plate 70 has a discharge pipe 70c. The other points of the cooling plates 67, 68 and the flow dividing plates 69, 70 are the same as those of the cooling plates 27, 28 and the flow dividing plates 29, 30 described above, and thus the description thereof will be omitted.

[0034]

Since the present invention is configured as described above, it has the following effects. When positioning a substrate such as a wafer, an object to be processed or an object to be measured with respect to an exposure apparatus, a precision processing machine or a precision measuring instrument, it is easy to improve the positioning accuracy and speed up the positioning.

The invention described in claim 1 improves the positioning accuracy by reducing the bias of the load of the XY stage device, and facilitates the speeding up of the positioning by preventing vibration.

The invention described in claim 5 improves the positioning accuracy and speeds up the positioning by preventing thermal deformation of the XY stage device and its surrounding devices due to heat generation of the linear motor that drives the XY stage device. Facilitate.

[Brief description of drawings]

FIG. 1 is a perspective view showing an XY stage device of an embodiment.

FIG. 2 is a schematic elevational view showing the device of FIG. 1 with both Y linear motors removed.

3 is a partial cross-sectional view taken along the line AA of FIG.

FIG. 4 is a partial cross-sectional view showing a modified example of the present embodiment.

FIG. 5 is a schematic cross-sectional view showing a linear motor of one embodiment.

6 is a perspective view showing a linear motor coil of the linear motor of FIG.

7 is an exploded perspective view of the linear motor coil of FIG.

FIG. 8 is a perspective view showing a modified example of the cooling plate.

FIG. 9 shows another two modified examples of the cooling plate,
FIG. 3A is a perspective view showing a cooling plate made of a hollow plate-shaped body, and FIG. 6B is a perspective view showing a cooling plate made of a plate-shaped body having a recess on one surface.

FIG. 10 is a schematic cross-sectional view showing a voice coil motor.

11 is an exploded perspective view showing a moving member of the voice coil motor of FIG.

FIG. 12 is a schematic perspective view showing a conventional example of a linear motor.

13 is a sectional view of the linear motor of FIG.

14A and 14B are diagrams for explaining the reason why the X stage of the conventional example is tilted. FIG. 14A shows the case where the X stage is in the center of the Y stage, and FIG. 14B shows the case where the X stage moves to one end of the Y stage. It is an explanatory view shown.

FIG. 15 is a diagram illustrating vibration of the X stage.

FIG. 16 is a schematic perspective view showing an XY stage device of a conventional example.

[Explanation of symbols]

1 platform 2,3 Y linear motor 4 Y stage 4c, 14c central member 4d, 4e, 8a guide surface 5,6,15,16,18 X linear motor 7,17 X stage 8 guide member 9,10a, 10b, 11a, 11b, 12a, 12b
Hydrostatic bearing pad 20 Moving member 20a, 20b Permanent magnet 21 Linear motor coil 22 Annular member 23, 24 Long member 25 Coil body 26,66 Cooling jacket 27,28,47,48,57,58,67,68
Cooling plate 29, 30, 69, 70 Flow distribution plate 63 Magnet 64 Moving member

Continuation of the front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI Technical display location B65G 49/07 9244-3F G03F 9/00 H 7316-2H H01L 21/027 21/68 K 8418-4M H02K 41 / 02 C 7346-5H // B65G 47/90 A 8010-3F

Claims (6)

[Claims] 1. A base, a first movable body that is reciprocally movable along a first guide surface that is integral with the base, a first drive unit that moves the movable body, and the first movable body. A second movable body that is movable together with the movable body and is reciprocally movable along a second guide surface provided on the movable body; and the second movable body along the second guide surface. An XY stage apparatus comprising a second driving unit for moving the first and second moving bodies, each of which is individually supported on the base. 2. The first driving means is composed of a pair of driving devices respectively coupled to both sides of the first moving body, and the second driving means is different in the width direction of the second moving body. The XY stage apparatus according to claim 1, wherein the XY stage apparatus comprises a plurality of driving devices coupled to each other. 3. The first and second moving bodies are held in non-contact with the base and the first and second guide surfaces by hydrostatic bearing means, respectively. The XY stage device according to 2. 4. The second guide surface is provided on a side surface of the first moving body, and the second moving body is urged toward the side surface of the first moving body. An XY stage device according to the item 1. 5. A linear motor used in an XY stage apparatus, comprising: a fixed member and a moving member facing the movable member, the magnetic means of the fixed member and the magnetic means of the moving member. A linear motor, characterized in that at least one of them has a cooling means on the surface facing the other. 6. The linear motor according to claim 5, wherein the cooling means is a cooling jacket.