JP3002142B2 - Moving stage device and semiconductor baking device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving stage device applied to a semiconductor printing apparatus and a machine tool, and more particularly to a moving stage device requiring high-speed and high-precision positioning.

[0002]

2. Description of the Related Art FIG. 10 is a top view showing a conventional example of this type of moving stage device, and FIG. 11 is an enlarged sectional view taken along line EE in FIG.

[0003] This moving stage device comprises a surface plate 1 supported by _two dampers 6 ₁ and 6 ₂ (see FIG. 11), which are low rigid surface plate support means for attenuating vibration from the floor;
And Figure 10 the two guide plates 31 ₁ a guide means provided respectively illustrated upper and lower ends, 31 ₂ on the platen 1, the plurality of fluid static bearing (10 and 11, the fluid static pressure Bearings 32 ₁₁ , 32 ₁₂ , 32 ₁₃ , 32 ₂₁ , 32 ₂₂ , 32 ₂₃
Only shown. ) And the movable stage 2 which is supported on a non-contact by the surface plate 1 and the guide plates 31 _1, 31 ₂ via a base 1
A linear motor 4 (see FIG. 11), which is a driving means for applying a thrust to the movable stage 2, is provided above.

The linear motor 4 includes a yoke 42 having a rectangular hollow portion fixed to the back surface of the movable stage 2 (the surface on the surface plate 1 side) and a moving direction of the movable stage 2 (see FIG. 10). Fixed in a row in the horizontal direction on the surface plate 1,
A hollow drive coil 41 group through the yoke 42, and a pair of permanent magnets 43 _1, 43 ₂ which attached to the hollow portion of the yoke 42 across the driving coil 41 group. Further, the movable stage 2, the guide plates 31 ₁ thrust is provided by a linear motor 4, 31 ₂ moves along the but, the amount of movement of the movable stage 2 in this case, fixed on the movable stage 2 Movable stage 2 measured by laser measuring system consisting of mirror 52 and laser measuring device 51
Is controlled on the basis of the position information. Furthermore, each damper 6
_1, 6 ₂ is provided between the platen 1 and the floor, are less rigid and vibration from the floor is lowered the resonant frequency from being transmitted to the base 1, the base 1 It has characteristics to attenuate the generated vibration.

In this moving stage apparatus, in order to achieve high-speed and high-precision positioning of the movable stage 2, FIG.
As shown in, for example, for a large movement from the stop state to the vicinity of the target position, using speed control capable of high-speed movement,
A driving method using position control is employed for accurate positioning near the target position. Here, in order to achieve a high-speed movement in the speed control, the linear motor 4 is used, and the speed is rapidly increased from a stop state as shown in FIG. As large and as long as possible.

[0006]

However, the above-described conventional moving stage apparatus has the following problems.

(1) The reaction force when the thrust is applied to the movable stage 2 is received by the drive coils 41 of the linear motor 4 on the surface plate 1, and the rigidity of each of the dampers 6 ₁ and 6 ₂ is low. The steeper the acceleration / deceleration of the movable stage 2 during the control, the more the surface plate 1 shakes due to the reaction force. Therefore, at the time of position control, the movable stage 2 is shaken by the vibration of the remaining surface plate 1, and rather, it takes time for final positioning.

(2) The posture of the base 1 changes due to the vibration of the base 1, and the posture of the movable stage 2 changes accordingly. For this reason, when applied to a processing machine or the like, the processing accuracy is deteriorated, and when applied to a semiconductor printing apparatus, the inclination of the stage deviates the focus of the printing light and deteriorates the resolution. There is.

(3) Once the platen 1 has shaken, there is no means to effectively stop the vibration, and there is no other way but to wait for the vibration to attenuate naturally until the influence of the vibration of the platen 1 disappears.

(4) When rapid acceleration / deceleration is performed using the linear motor 4 having a large thrust, the amount of heat generated by the linear motor 4 increases, thereby causing thermal deformation of the movable stage 2 and the like. For this reason, when applied to a processing machine or the like, the distance between the mirror 52 and the processing point changes due to thermal deformation of the movable stage 2, resulting in deterioration of processing accuracy. In addition, when the present invention is applied to a semiconductor printing apparatus, the printing accuracy deteriorates due to a change in the distance between the mirror 52 and the printing position.

(5) Since the thrust of the linear motor 4 is used to swing the surface plate 1, energy is wasted.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an excellent moving stage device capable of achieving high-speed positioning and high accuracy.

[0013]

In order to achieve the above object, a first moving stage device according to the present invention comprises a platen supported via a damper means, and a non-contacting hydrostatic bearing on the platen.
A movable stage which moves being supported by two-dimensionally in the XY direction to touch, a first X linear motor for moving giving thrust in the X direction movable stage, than the first X linear motor A second X linear motor that enables large acceleration and deceleration, and a thrust applied to the movable stage to move in the Y direction.
A first Y linear motor for moving the first Y linear motor;
A second Y-reset that allows for greater acceleration / deceleration than the near motor
And a linear motors, the first X linear motor and the second Y linear motor and a respective drive coils and permanent magnets, said first X linear motor and the 2Y Riniamo
One of the motors is supported by a support means independent of the surface plate with respect to the transmission of vibration, and the acceleration and deceleration of the movable stage by the second X linear motor and the second Y linear motor is suppressed. The force is received by the support means.

A second moving stage apparatus according to the present invention
Is a platen supported via damper means, and
Non-contact supported by hydrostatic bearing, two-dimensional in XY directions
Moving stage, and non-contact with the moving stage
X linear motor for moving in the X direction by applying thrust
And X driving means provided separately from the X linear motor;
Non-contact thrust is applied to the movable stage to move in the Y direction
And a separate Y linear motor
And a Y driving means provided in the
Each of the Y driving means has a movable portion and a fixed portion,
Fixed parts of the X driving means and the Y driving means
Is a support means independent of the surface plate with respect to vibration transmission.
And the X drive means and the Y drive means.
The reaction force of acceleration and deceleration of the movable stage due to
It is characterized by receiving at. Furthermore, the semiconductor firing of the present invention
The attaching device comprises: a platen supported via damper means;
Non-contact supported on the surface plate by hydrostatic bearings in the XY directions
A movable stage that moves two-dimensionally, and
X liner for moving in the X direction by applying thrust without contact
A motor and X drive provided separately from the X linear motor
Means and non-contact thrust to the movable stage
And a Y linear motor for moving the
Y driving means provided separately from the
The means and the Y drive means each include a movable part and a fixed part.
Each of the X drive means and the Y drive means
The fixed part supports the vibration transmission independently of the surface plate.
Holding means, and the X drive means and the Y drive
The reaction force of acceleration and deceleration of the movable stage by the
Equipped with a moving stage device characterized by being received by holding means
It is a thing.

In the present invention configured as described above, of the driving means for moving the movable stage , the first driving means is provided.
The first linear motor and the second linear motor
Is independent of the surface plate for vibration transmission.
In the second invention, the driving means
Is supported by independent support means from the surface plate ,
In the speed control, which requires a large thrust during high speed positioning, the position control, which requires no large thrust upon accurate positioning
The role of the driving means can be shared . As described above, by using an appropriate driving means according to the application, high-speed and high-accuracy positioning is achieved. I
The surface plate is supported via damper means,
The movable stage is non-contact on the surface plate by hydrostatic bearing
Since the supporting means is independent of the surface plate with respect to the vibration transmission, even if the floor vibrates due to the reaction force of acceleration and deceleration of the movable stage, the floor vibration is transmitted to the surface plate because of the damper means. Absent.

[0016]

Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 shows a first embodiment of a moving stage apparatus according to the present invention.
It is a top view showing a reference example of FIG. 2 is an enlarged sectional view taken along line A-A of FIG.

This moving stage device differs from the conventional moving stage device shown in FIG. 10 in the following points.

(1) In addition to the linear motor 4 as a driving means for applying a thrust to the movable stage 2, a second motor attached via a mounting plate 76 above the movable stage 2 in FIG.
, The linear motor 4 is used as a first driving unit, and the second linear motor 7 is used as a second driving unit. Here, the second linear motor 7
As shown in FIG. 2, a second yoke 72 having a rectangular hollow portion and having a left side surface attached to an attachment plate 76 as shown in FIG.
And a second drive coil group 71 and a second drive coil group 71 provided in a row in the moving direction of the movable stage 2 (horizontal direction in FIG. 1) and penetrating the hollow portion of the second yoke 72. and a sandwich at second yoke pair mounted in 72 second permanent magnets 73 _1, 73 _2. As shown in FIG. 1, the illustrated horizontal length of the second drive coil 71 group is substantially equal to the illustrated horizontal length of the drive coil 41 group.
The second driving means can move the movable stage 2 over a range substantially equal to that of the first driving means.

[0020] (2) FIG. 1 illustrates the left and right ends of the second driving coil 71 group are respectively supported on the floor by support plates ₈₁ and the support plate _82. Here, each support plate 8 ₁ ,
8 ₂ are as independent of the surface plate 1, and the second driving coil 71 group supported directly on the floor to have a higher stiffness.

In this moving stage device, the linear motor 4 and the second linear motor 7 are
The movable stage 2 is driven based on position information of the movable stage 2 measured by a laser length measuring system including the mirror 1 and the mirror 52.
Here, the drive coil 41 of the linear motor 4 and the yoke 42
Is non-contact, the transmission and non-transmission of force can be switched by providing a means for turning on / off an electric circuit for supplying a current to the drive coil 41. The same applies to the second linear motor 7.

FIG. 3 is a diagram for explaining a method of driving the moving stage device shown in FIG.

This driving method of the moving stage device is based on a method of performing a large movement from a stop position to a position near a target position using speed control capable of moving at a high speed, and then using a position control to accurately perform a movement near the target position. This is the same as the driving method of the conventional moving stage device described with reference to FIG. 12 except that the following positioning is performed.

(1) Only the second linear motor 7 is used for speed control requiring a large thrust at the time of high-speed positioning.

(2) Only the linear motor 4 is used for position control that does not require a large thrust for high-precision positioning.

That is, when the movable stage 2 is moved using speed control requiring a large thrust, the linear motor 4 is not used, and only the second linear motor 7 is used. The movable stage 2 is moved to near the target position according to the determined speed command curve. At this time,
The movable stage 2 has a hydrostatic bearing 32 ₁₁ , 3 shown in FIG.
To the base 1 via a plurality of fluid hydrostatic bearing such 2 ₂₁ with being supported in a non-contact, via four fluid hydrostatic bearing 32 _12, 32 _13, 32 _22, 32 ₂₃ shown in FIG. 1 because Te is supported in non-contact with each guide plates 31 _1, 31 _2, the force of friction force between the movable stage 2 and surface plate 1 and the guide plates 31 _1, 31 ₂ will not work hardly. Further, since the drive coil 41 group of the linear motor 4 and the yoke 42 are also in non-contact, if the linear motor 4 is not used, the force transmitted via the linear motor 4 between the movable stage 2 and the base 1 is rare. Therefore, when the movable stage 2 is driven by using the second linear motor 7 installed separately from the surface plate 1, the surface plate 1 is mechanically separated, and the conventional driving method may cause such a problem. Vibration due to the reaction force of sudden acceleration / deceleration does not occur. At this time, the second drive coil 71 group of the second linear motor 7 is supported with high rigidity by the support plates 8 ₁ and 8 _2. Less waste.

When the movable stage 2 has moved to the vicinity of the target position and has almost stopped, the second linear motor 7 is stopped to end the speed control. At this time, the second drive coil 71 group of the second linear motor 7 and the second yoke 72
The second driving coil 71 vibrates slightly due to the reaction force of acceleration and deceleration during speed control, and the support plates 8 ₁ and 8 ₂ have high rigidity. Vibration is transmitted. However, the vibration of the second drive coil 71 does not affect the surface plate 1 and the movable stage 2 during the subsequent positioning. Further, if position control is performed using the linear motor 4 on the surface plate 1, high-speed and high-accuracy positioning can be performed without being affected by vibration due to conventional acceleration / deceleration. Since the acceleration / deceleration that occurs during positioning is much smaller than that that occurs when moving by speed control,
There is almost no effect of reaction force due to acceleration / deceleration during positioning.

From the above, this driving method has the following advantages.

(1) Since the vibration of the surface plate 1 hardly occurs, the processing accuracy and the printing accuracy due to the change in the posture of the surface plate 1 caused by the conventional driving method do not deteriorate.

(2) Since rapid acceleration / deceleration requiring large thrust is performed using the second linear motor 7 installed outside the surface plate 1, the linear motor 4 on the surface plate 1 used for positioning is Does not require large thrust. For this reason, the linear motor 4
Is much smaller than that of the conventional driving method. In addition, since the second linear motor 7 that generates a large amount of heat is supported separately from the surface plate 1 and the movable stage 2, the amount of heat received by the surface plate 1 and the movable stage 2 is smaller than in the conventional driving method. Therefore, it is possible to prevent processing accuracy and printing accuracy from deteriorating due to thermal deformation.

(3) When the surface plate 1 vibrates for some reason, the linear motor 4 and the second linear motor 7 are used at the same time, so that the support plates 8 ₁ and 8 ₂ are referenced. The vibration of the surface plate 1 can be stopped. As a driving method at this time, a servo lock is simultaneously applied to the linear motor 4 and the second linear motor 7 so that each support plate 8
_1, 8 ₂ thus fixing the movable stage 2 by a servo locked to approach or, one of the linear motor is fixed by a servo lock, there is a method of applying a damping control on the other of the linear motor.

FIG. 4 shows a second embodiment of the moving stage apparatus according to the present invention.
It is a top view showing a reference example of FIG. 5 is an enlarged sectional view taken along line B-B in FIG. 4.

This moving stage device differs from the moving stage device shown in FIG. 1 in the following points.

[0034] (1) as guide means, instead of the guide plates 31 _1, 31 ₂ of the first reference example, the two slide guide grooves 83 respectively provided near the lower end on Figure 4 illustrates the platen 1 ₁ ,
With a 83 _2.

(2) As the second driving means, instead of the second linear motor 7 of the first reference example, two pulleys 84 ₁ , 84 ₂ provided on the left side in FIG. and FIG right in the figure into two provided pulley 84 _3, and 84 _4, the wire 85 is stretched in the pulleys 84 _{1-84 4,} a motor for rotating the pulley 84 ₂ of FIG shown lower left 81. Here, as shown in FIG. 5, the wire 85 is connected to the inner wall of the movable stage 2 having a U-shaped cross section and the yoke 4.
The wire 85 is sandwiched between clampers 86 provided between the inner side wall of the movable stage 2 and the side wall of the yoke 42. Thus, thrust is transmitted to the movable stage 2.

[0036] (3) as supporting means, instead of the support plates _81, 82 of the first embodiment, four support damper 88 ₁ -
With a 88 _4. Here, the pulley 84 ₂ on the lower left side in FIG.
Except for the pulleys 84 ₁ , 84 ₃ , 84 ₄ and the motor 81
Are supported on the floor by the respective support dampers 88 _{1 to} 88 ₄ . Further, each of the support dampers 88 _{1 to} 88 ₄ has a high rigidity against the reaction force of driving, and is provided perpendicularly to the floor so as not to transmit vibration from the floor in other directions.

In the moving stage apparatus of this embodiment, similarly to the first embodiment, the first driving means and the second driving means can move the movable stage 2 over substantially the same range. .

The driving method of the moving stage device is performed as follows.

(1) Only the motor 81 is used for speed control requiring a large thrust at the time of high-speed positioning.

(2) Only the linear motor 4 is used for position control that does not require a large thrust at the time of high-precision positioning.

That is, for speed control requiring a large thrust
When moving the movable stage 2 more,
The motor 4 is not used and only the motor 81 is used.
Movable stage near the target position according to the speed command curve
Move 2 At this time, the movable stage 2 moves in the sliding direction.
Each sliding guide groove 83 with very small friction₁, 83_TwoThrough
Acceleration / deceleration of the movable stage 2 because it is supported by the surface plate 1
The reaction force and the vibration due to are hardly transmitted to the surface plate 1. So
After that, release the clamper 86 and move the wire 85 and the movable stage.
2 to separate the wire 8 by the reaction force of acceleration / deceleration.
5, each pulley 84 ₁~ 84_FourAnd vibration of motor 81
Can be prevented from being transmitted to the moving stage 2 and the surface plate 1.
Wear. At the time of subsequent positioning, the moving stage shown in FIG.
Linear motor installed on the surface plate 1
4, the surface plate 1 can be raised without vibrating.
Fast and accurate positioning is possible.

If the surface plate 1 vibrates for some reason, the motor 81 and the linear motor 4 are used simultaneously with the wire 85 sandwiched by the clamper 86, so that the surface plate 1 Vibration can be effectively stopped.

[0043] Figure 6, the first movable stage device of the present invention
FIG. 7 is an enlarged cross-sectional view taken along line CC of FIG. 6.

This moving stage device is similar to the moving stage device shown in FIG.
The movable stage 2 of the movable stage device of the first embodiment is shown in FIG.
A device that can move freely on the XY plane shown in FIG.
XY stage). In other words,
In the stage apparatus, the movable stage 2 is a linear motor in the X-axis direction.
Data 4_X (Not shown) and a set of second X-axis linear
Motor 7_X1, 7_X2Is moved in the X-axis direction by
Axial linear motor 4 _Y (Not shown) and a set of second
Y-axis direction linear motor 7_Y1, 7_Y2Moves in the Y-axis direction
Is done.

Here, inside the movable stage 2, FIG.
Two with rectangular hollow parts that cross each other at the top and bottom in the figure
Yoke (X-axis direction yoke 42)_X And Y-axis direction yoke 42
_Y ) Is provided, and the X-axis direction yoke 42 on the upper side in the figure is provided.
_X Is the X-axis direction linear motor 4 _X Function as a yoke,
Also, the Y-axis direction yoke 42 on the lower side in the figure is shown._Y Is Y-axis linear
Armor 4_Y Function as a yoke. Therefore, X
Axial linear motor 4 _X Is the X-axis direction yoke 42_X When,
X-axis direction yoke 42 fixed in a row in the X-axis direction_X of
X-axis direction driving coil 41 penetrating the hollow_X Group and X
Axial drive coil 41_X X-axis so that they face each other across the group
Yoke 42_X A pair of X-axis direction permanent magnets 4 attached to
3_X1, 43_X2Consists of

X-axis direction drive coil 41_X Groups are shown in FIG.
As shown in FIG. _X Both in the X-axis direction of the group
Each foot 96 on the end side_X1, 96_X2And each foot 9
6_X1, 96_X2Are placed at both ends in the X-axis direction on the surface plate 1.
A set of fixed and fixed parallel Y-axis guide plates 31_Y1, 31
_Y2And supported on the surface plate 1 via a hydrostatic bearing described later.
Have been. That is, the left leg 96_X1And Y axis direction plan
Inner plate 31_Y1Between the two hydrostatic bearings 32₁₁, 32
₁₂Are provided, and the right foot 96 shown in the figure is provided._X2And Y axis direction plan
Inner plate 31_Y2Between the two hydrostatic bearings 32₁₃, 32
₁₄Is provided. Also, as shown in FIG.
Side feet 96_X1Two fluid hydrostatic bearings between
32₃₁, 32₃₂(Hydrostatic bearing 32₃₂(Not shown) is provided
And the right foot 96 shown in the drawing._X2And between surface plate 1
Two hydrostatic bearings 32₃₃, 32₃₄(Hydrostatic bearing 32
₃₄(Not shown) are provided. In addition, not shown
However, the X-axis direction driving coil 41_X Group and X-axis direction yoke 4
2_X Two hydrostatic bearings are also provided between the right and left
Have been killed.

The Y-axis direction linear motor 4 _Y includes a Y-axis direction yoke 42 _Y and a Y-axis direction drive coil 4 provided in a row in the Y-axis direction and penetrating through the hollow portion of the Y-axis direction yoke 42 _Y.
The first _Y group includes a pair of Y-axis permanent magnets 43 _Y1 and 43 _Y2 attached to the Y-axis direction yoke 42 _Y so as to face each other with the Y-axis direction drive coil 41 _Y group therebetween. Here, the Y-axis direction drive coil 41 _Y group, as shown in FIG. 6, has a Y-axis direction drive coil 41 _Y group in the Y-axis direction of the opposite ends to the side foot 96 _Y1, 96 _Y2, each foot 96 _Y1 and 96 _Y2 are a pair of parallel X-axis direction guide plates 31 _X1 and 31 _X2 fixed to both ends in the Y-axis direction on the surface plate 1 and a hydrostatic bearing described later on the surface plate 1. Supported through. That is,
Two fluid hydrostatic bearing 32 _21, 32 ₂₂ are provided, the right side of the foot 96 _X2 and X-axis direction guide plate 31 is provided between the drawing shown above the foot 96 _Y1 and X-direction guide plate 31 _X1 Two hydrostatic pressure bearings 32 ₂₃ and 32 ₂₄ are provided between the bearings _{X 2} and _{X 2} . Although not shown, the upper leg 96 _X1
Two fluid hydrostatic bearings are provided between the base plate 1 and the lower plate _96X2 and the base plate 1 respectively. Further, two hydrostatic bearings 32 ₅₁ and 32 ₅₂ are also provided between the Y-axis direction drive coil 41 _Y group and the Y-axis direction yoke 42 _Y between the left and right in FIG.

Each second X-axis direction linear motor 7 _X1 , 7 _X2
Is the second linear motor 7 of the first reference example shown in FIG.
And each yoke has a Y-axis direction driving coil 4.
1 It is attached to both ends of the _Y group, respectively. The left end in the drawing of the second X-axis direction linear motor 7 _{X1 on} the upper side in FIG. 6 is supported by a support plate 8 _X11 , and the right end in the drawing is supported by a support plate 8 _X12 . Also, shown left end of the second X-axis direction linear motors 7 _X2 shown lower is supported by a support plate 8 _X21, it illustrated right end is supported by a supporting plate 8 _X22.

Each second Y-axis direction linear motor 7 _Y1 , 7 _Y2
Is the second linear motor 7 of the first reference example shown in FIG.
And each yoke is provided with an X-axis direction driving coil 4.
Each is attached to both ends of the _X group. The upper end of the second Y-axis direction linear motor _7Y1 shown in FIG. 6 is supported by a support plate _8Y11 , and the lower end thereof is supported by a support plate _8Y12 . The upper end of the second Y-axis direction linear motor _7Y2 on the right side in the drawing is supported by a support plate _8Y21 , and the lower end in the drawing is supported by a support plate _8Y22 .

The first driving means and the second driving means provided in the X-axis direction and the Y-axis direction can move the movable stage 2 over substantially the same range in each direction.

The driving method of the moving stage device is performed as follows.

(1) For speed control requiring a large thrust at the time of high-speed positioning, a set of second X-axis linear motors 7 _X1 and 7 _X2 and a set of second Y-axis linear motors are used. 7 _Y1 ,
7 Use _Y2 .

(2) For position control that does not require a large thrust at the time of high-precision positioning, the X-axis direction linear motors 4 _X and Y
An axial linear motor _4Y is used.

That is, when the movable stage 2 is moved in the X-axis direction and the Y-axis direction by speed control requiring a large thrust, the X-axis direction linear motor _4X and the Y-axis direction linear motor _4Y are not used. Then, using a set of second X-axis direction linear motors 7 _X1 , 7 _X2 and a set of second Y-axis direction linear motors 7 _Y1 , 7 _Y2 , the target position is determined according to a predetermined speed command curve. The movable stage 2 is moved to the vicinity. At the time of subsequent positioning, the X-axis direction linear motor 4
_{By using the X} and Y axis direction linear motors 4 _Y , high-speed and high-accuracy positioning can be performed without vibrating the surface plate 1.

If the base 1 vibrates for some reason, the X-axis linear motor 4 _X and the Y-axis linear motor 4 _Y are paired with a second X-axis linear motor 7 _X1. , 7 _X2 and a set of second Y-axis linear motors 7 _Y1 ,
By using _7Y2 at the same time, the vibration of the surface plate 1 can be stopped.

In this moving stage device,
The X-axis direction linear motor 4 _X and the pair of second X-axis direction linear motors 7 _X1 and 7 _X2 are connected to the X-axis direction laser length measuring device 51 _X.
It is driven based on the X-axis direction position information of the movable stage 2 measured by the X-axis direction laser measuring system consisting of the X-axis direction mirror 52 _X and. The second Y-axis direction linear motor 7 in the Y-axis direction linear motor 4 _Y a set _Y1, 7 _Y2
Means the Y-axis direction laser length measuring device 51 _Y and the Y-axis direction mirror 5
It is driven based on 2 _Y and Y-axis direction laser measuring of the movable stage 2 measured by the length-based position information in the Y-axis direction consists.

[0057] Figure 8 is a second movable stage device of the present invention
FIG. 9 is an enlarged cross-sectional view taken along line DD of FIG. 8.

This moving stage device is different from the moving stage device shown in FIG. 6 in the following points.

(1) X-axis direction drive coil 4 shown in FIG.
1_X And Y-axis drive coil 41 _Y Instead of the X axis
Direction beam 101_X And Y-axis beam 101_Y Are set
Have been killed.

[0060] (2) and the Y-axis direction beam 101 _Y 8 set of attached one by one respectively shown on the bottom X-axis direction linear motors 4 of _X1, 4 _X2, shown left and right X-axis direction beam 101 _X It has a set of Y-axis direction linear motors 4 _Y1 and 4 _Y2 attached one at each end. Although not shown in detail in FIG. 8, each of the X-axis direction linear motors 4 _X1 and 4 _X2 is configured such that each support plate is provided between the left end and right end of the X-axis direction drive coil shown in the drawing and the surface plate 1. , And the platen 1 respectively. Each Y-axis direction linear motor 4 _Y1 ,
The same applies to _4Y2 .

In the moving stage apparatus of this embodiment, as in the first embodiment, the first driving means and the second driving means provided in the X-axis direction and the Y direction, respectively, Can move the movable stage 2 over substantially the same range.

The driving method of the moving stage device is performed as follows.

(1) For speed control requiring a large thrust at the time of high-speed positioning, a set of second X-axis linear motors 7 _X1 and 7 _X2 and a set of second Y-axis linear motors are used. 7 _Y1 ,
7 Use _Y2 .

(2) One set of X-axis linear motors 4
_X1 and _X2 and a set of Y-axis direction linear motors _4Y1 and _4Y2 are used.

That is, when the movable stage 2 is moved in the X-axis direction and the Y-axis direction by speed control requiring a large thrust, one set of the X-axis direction linear motors 4 _X1 , _X2 and one set of the Y-axis direction linear motors are used. Not used with motors _4Y1 and _4Y2 ,
Using a set of second X-axis linear motors 7 _X1 , 7 _X2 and a set of second Y-axis linear motors 7 _Y1 , 7 _Y2 ,
The movable stage 2 is moved to near the target position according to a predetermined speed command curve. At the time of subsequent positioning, high-speed and high-precision positioning is performed without vibrating the surface plate 1 by using a set of X-axis linear motors 4 _X1 and _{X 2} and a set of Y-axis linear motors 4 _Y1 and 4 _Y2. Becomes possible.

If the base 1 vibrates for some reason, a set of X-axis linear motors 4 _X1 , _{X 2}
And one set of Y-axis direction linear motors 4 _Y1 and 4 _Y2 and one set of second motors
By using the X-axis direction linear motors 7 _X1 and 7 _X2 and a pair of second Y-axis direction linear motors 7 _Y1 and 7 _Y2 at the same time, the vibration of the surface plate 1 can be stopped.

In this moving stage device,
A set of X-axis linear motors 4_X1, _X2And a set of second X
Axial linear motor 7_X1, 7_X2Means laser measurement in the X-axis direction
Long arm 51_X And X-axis direction mirror 52_X X-axis direction consisting of
X-axis of movable stage 2 measured by laser length measurement system
It is driven based on the direction position information. Also, a set of Y
Axial linear motor 4_Y1, 4_Y2And a set of second Y-axis directions
Linear motor 7_Y1, 7 _Y2Is a Y-axis direction laser measuring device 5
1_Y And Y-axis direction mirror 52_Y Y-axis direction laser
In the Y-axis direction of the movable stage 2 measured by the length measuring system
Driven based on position information.

In the above description, the movable stage moves in a plane parallel to the floor. For example, an X-ray exposure apparatus using synchrotron radiation as a light source (Japanese Patent Laid-Open No.
The movable stage used in Japanese Patent Application Laid-Open No. 10000311) may move in a plane perpendicular to the floor.

[0069]

The present invention has the following effects.

[0070] movable stage device of the present invention, known by different suitable drive means depending on the application. In addition , the support means is independent of the surface plate with respect to vibration transmission ,
Vibration due to the reaction force of the acceleration and deceleration of the stage can and benzalkonium be prevented from being transmitted to the platen. This makes it possible to provide an excellent stage device that can achieve high-speed and high-accuracy positioning.

[Brief description of the drawings]

FIG. 1 is a top view showing a first reference example of a moving stage device according to the present invention.

FIG. 2 is an enlarged sectional view taken along the line AA of FIG.

FIG. 3 is a diagram illustrating a driving method of the moving stage device shown in FIG.

FIG. 4 is a top view showing a second reference example of the moving stage device of the present invention.

FIG. 5 is an enlarged sectional view taken along the line BB of FIG. 4;

FIG. 6 is a top view showing a first embodiment of the moving stage device of the present invention.

FIG. 7 is an enlarged sectional view taken along line CC of FIG. 6;

FIG. 8 is a top view showing a moving stage apparatus according to a second embodiment of the present invention.

FIG. 9 is an enlarged sectional view taken along line DD of FIG. 8;

FIG. 10 is a top view showing one conventional example of this type of moving stage device.

11 is an enlarged sectional view taken along line EE of FIG.

FIG. 12 is a diagram illustrating a driving method of the moving stage device shown in FIG.

[Explanation of symbols]

Reference Signs List 1 surface plate 2 movable stage 4 linear motor 6 ₁ , 6 ₂ damper 7 second linear motor 7 _X1 , 7 _X2 second X-axis linear motor 7 _Y1 , 7 _Y2 second Y-axis linear motor 8 ₁ , 8 ₂ , 8 _X11 , 8 _X12 , 8 _X21 , 8 _X22 , 8 _Y11 ,
8 _Y12, 8 _Y21, 8 _Y22 supporting plates 31 _1, 31 ₂ guide plate 31 _X1, 31 _X2 X-axis direction guide plate 31 _Y1, 31 _Y2 Y-axis direction guide plate 32 _{11-32 13,} 32 _{21-32 23,} 32 ₃₁ , 32 ₃₃ , 3
2 ₄₁ , 32 ₄₂ , 32 ₅₁ , 32 ₅₂ Hydrostatic bearing 41 Drive coil 41 _X X axis drive coil 41 _Y Y axis drive coil 42 Yoke 42 _X X axis direction yoke 42 _Y Y axis direction yoke 43 ₁ , 43 ₂ , 43 _X1 , 43 _X2 , 43 _Y1 , 43 _Y2 Permanent magnet 51 Laser length measuring device 51 _X X axis direction laser length measuring device 51 _Y Y axis direction laser length measuring device 52 Mirror 52 _X X axis direction mirror 52 _Y Y axis Directional mirror 71 Second drive coil 72 Second yoke 73 ₁ , 73 ₂ Second permanent magnet 81 Motor 83 ₁ , 83 ₂ Sliding guide groove 84 ₁ -84 ₄ Pulley 85 Wire 86 Clamper 88 ₁ -88 ₄ Support Damper 96 _X1 , 96 _X2 , 96 _Y1 , 96 _Y2 Foot 101 _X X-axis beam 101 _Y Y-axis beam

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-254681 (JP, A) JP-A-3-142136 (JP, A) JP-A-59-115138 (JP, A) 20014 (JP, B2) US Patent 4,987,526 (US, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B23Q 1/00-1/76 B23Q 5/28 B23Q 11/00 H01L 21/68

Claims (8)

(57) [Claims] A platen supported via a damper means;
A movable stage supported on the surface plate by a hydrostatic bearing in a non-contact manner and moving two-dimensionally in the XY directions, and a first X linear motor for applying a thrust to the movable stage and moving the movable stage in the X direction And a second X linear motor that enables greater acceleration and deceleration than the first X linear motor, a first Y linear motor for applying a thrust to the movable stage to move the movable stage in the Y direction, and the first X linear motor. A second Y linear motor that enables acceleration and deceleration greater than that of the Y linear motor, the second X linear motor and the second Y linear motor each include a drive coil and a permanent magnet, One of the supports is supported by a support means independent of the surface plate with respect to the vibration transmission, and the reaction force of acceleration and deceleration of the movable stage by the second X linear motor and the second Y linear motor is supported by the support means. receive The movable stage apparatus according to claim and. 2. The moving stage device according to claim 1, wherein fixed portions of the first X linear motor and the first Y linear motor are supported by the surface plate. 3. The fixed portion of the first X linear motor,
Movable stage apparatus according to claim 1, characterized in that it is supported on the movable portion of the second Y linear motors. Wherein the fixing portion of the second X linear motor has the driving coil, the movable portion of the second X linear motor according to claim 1 to 3, characterized in that it has the permanent magnet The moving stage device according to claim 1. 5. A surface plate supported via a damper means,
A movable stage that is supported in a non-contact manner on the surface plate by a hydrostatic bearing and moves two-dimensionally in the X and Y directions, and an X linear motor that applies a thrust to the movable stage in a non-contact manner to move the movable stage in the X direction And X driving means provided separately from the X linear motor,
A Y linear motor for moving in the direction, and a Y driving means provided separately from the Y linear motor. The X driving means and the Y driving means each have a movable portion and a fixed portion, and the X The fixed portions of the driving means and the Y driving means are supported by supporting means independent of the surface plate with respect to the transmission of vibration, and the X driving means and the Y driving means are fixed.
A moving stage device, wherein a reaction force of acceleration / deceleration of the movable stage by a driving unit is received by the supporting unit. 6. A surface plate supported via a damper means,
A movable stage that is supported in a non-contact manner on the surface plate by a hydrostatic bearing and moves two-dimensionally in the X and Y directions, and an X linear motor that applies a thrust to the movable stage in a non-contact manner to move the movable stage in the X direction And X driving means provided separately from the X linear motor,
A Y linear motor for moving in the direction, and a Y driving means provided separately from the Y linear motor. The X driving means and the Y driving means each have a movable portion and a fixed portion, and the X The fixed portions of the driving means and the Y driving means are supported by supporting means independent of the surface plate with respect to the transmission of vibration, and the X driving means and the Y driving means are fixed.
A semiconductor printing apparatus comprising a moving stage device, wherein a reaction force of acceleration and deceleration of the movable stage by a driving unit is received by the supporting unit. 7. The moving stage device according to claim 5 , wherein the fixed portion of the X linear motor is supported by the surface plate. 8. A fixing portion of the X linear motor, said Y
The moving stage device according to claim 5 , wherein the moving stage device is supported by a movable portion of the driving means.