JP3536382B2 - Stage apparatus and scanning type exposure apparatus - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a stage device,
For example, it can be applied to a stage device of a scanning type exposure apparatus for manufacturing a liquid crystal display substrate or the like.

[0002]

2. Description of the Related Art Conventionally, in a scanning type exposure apparatus, for example, when a photosensitive substrate is scanned and exposed, a stage device having a structure in which a mask and a photosensitive substrate are placed on a movable stage and the movable stage is moved at a constant speed on a surface plate. Is used. As shown in FIG. 5, in the stage device 1, the movable stage 4 is driven by the drive actuator 3 installed on the surface plate 2. The movable stage 4 is accelerated by the acceleration thrust F _a of the drive actuator 3 and starts moving, and scans and exposes the photosensitive substrate while moving at a constant speed on the surface plate 2, and then decelerates by the deceleration thrust of the drive actuator 3. And stop. The stage device 1 is provided with a vibration isolation device 5 so that vibrations from the floor 6 are not transmitted to the movable stage 4.

[0003]

In the structure of the stage apparatus 1 as described above, when the movable stage 4 is driven, a reaction force generated by the drive actuator 3 with respect to the acting force F _a applied to the movable stage 4 is generated. There was a problem that the force F _a ′ was transmitted to the surface plate 2 and the surface plate 2 shook. When swaying occurs on the surface plate 2 due to the driving of the drive actuator 3, a disturbance corresponding to the swaying component acts on the movable stage 4, and the stability of the scanning speed of the movable stage 4 and the scanning accuracy such as positioning accuracy deteriorate. Atsuta Therefore, the movement distance for accelerating and decelerating the stage is lengthened until the sway of the surface plate 2 is attenuated and becomes small, and the exposure is not performed during this time.

For this reason, it is difficult to increase the driving force of the driving actuator to accelerate or decelerate so as to shorten the rising and falling times when moving the movable stage 4, and there is a problem that the sloping point deteriorates. It was Further, since the stroke until the movable stage 4 can be scanned at a constant speed becomes long, there is a problem that the entire apparatus becomes large and the apparatus cost becomes high.

Further, if the characteristics of the vibration isolator 5 are changed (for example, the viscous damping rate to increase the rigidity is increased) in order to reduce the shaking of the surface plate 2 due to the above-mentioned reaction force, the vibration from the floor 6 is adversely affected. There was a problem when it became difficult to remove. As described above, in order to reduce the sway of the surface plate 2 due to the reaction force, there is no effective measure other than suppressing the action force (that is, acceleration) applied to the movable stage 4 during acceleration / deceleration to be low.

In addition to the above-described example, by supporting the drive actuator by a support portion independent of the surface plate, it is possible to make the reaction force generated by the acceleration / deceleration drive not directly transmitted to the surface plate. Conceivable. However, with such a configuration, it is possible to prevent the reaction force at the time of acceleration / deceleration driving from being transmitted to the surface plate, but, for example, the problem that the disturbance due to the vibration from the floor is transmitted to the movable stage which is moving at a constant speed through the driving actuator. I got it. Furthermore, since the characteristics of the vibration isolator supporting the surface plate are included in the drive control loop, the ability to eliminate vibration during scanning by control is limited by the characteristics of the vibration isolator, and there is a limit to improving control performance. There was a problem that there was.

The present invention has been made in consideration of the above points, and suppresses the vibration generated on the surface plate by the drive actuator during acceleration / deceleration driving, and is not affected by the disturbance due to the vibration from the floor. Is to propose.

[0008]

[Means for Solving the Problems] An anti-vibration table (2) having a mechanism for suppressing the propagation of vibration, a moving stage (17) moving on the anti-vibration table (2) in a predetermined direction, and an anti-vibration table. The moving stage (17) installed independently of (2) and stopped.
Almost substantially barycentric position <br/> acceleration thrust with respect to the center of gravity position (F _a) moving stage which moves together with the moving stage (17) to accelerate to a predetermined moving direction is moved giving (17) of A deceleration thrust (F _b ) is applied to the moving stage (17)
Acceleration / deceleration driving means (20, 21) for decelerating and stopping
Installed on the moving stage (17), the moving stage (1
7) is provided with a constant speed driving means (18) for driving the same at a constant speed.

Further, in the stage device of the present invention,
The acceleration / deceleration driving means (20, 21) is a moving stage (17).
Of the moving stage (1
Apply acceleration / deceleration thrust (F _b ) to 7). Also, the present invention
In the stage device, the acceleration / deceleration driving means (20, 2
The moving stroke of the moving stage (17) according to 1) is
Moving the moving stage (17) by the constant velocity driving means (18)
Shorter than dynamic stroke. Further, the scanning type exposure apparatus of the present invention scans the mask (14) and the substrate (15),
A scanning type exposure apparatus for exposing a pattern of a mask (14) onto a substrate (15) , the mask (14) and the substrate (15).
Preparative a scanning stage for scanning (17), and a surface plate for movably supporting the scan stay <br/> di (17) (2), a support which is provided independently of this surface plate (2) Part (22, 23)
If, as a reaction force generated when the drives the scanning stage (17) is transmitted to the support portion (22, 23), is connected at least partially to the support portion (22, 23), scanning stearyl <br / > Driving means (20, 21) for driving the page (17) and a laser interferometer (31) at least a part of which is provided on the surface plate (2) and detects the position of the scanning stage (17). I am. Moreover, the scanning exposure apparatus of the present invention supports the illumination optical system (11) for illuminating the pattern of the mask (14) by the surface plate (2). Further, the scanning exposure apparatus of the present invention supports the projection optical system (15) for projecting the pattern of the mask (14) on the substrate (15) by the surface plate (2). This projection optical system (15) may be a reduction system.
Yes. Further, in the scanning type exposure apparatus of the present invention, the surface plate (2) is supported by the vibration isolation device (5) for isolating the vibration from the floor.

[0010]

Operation: The acceleration / deceleration driving means (20, 21) is attached to the vibration isolation table (2).
And the weight of the moving stage (17)
By applying thrust to the heart , the moving stage (1
When accelerating and decelerating 7), it is possible to move the moving stage (17) without giving vibration to the vibration isolation table (2) due to the reaction force generated against the acting force of the acceleration thrust (F _a ), Acceleration / deceleration driving means (20, 2) is attached to the moving stage (17).
By installing the constant velocity driving means (18) independent of 1), the moving stage (17) can accelerate and decelerate the driving means (20,
It is possible to move at a constant speed without being affected by 21).

Further, the acceleration / deceleration driving means (20, 21) detects the position of the moving stage (17) in the moving direction, and the moving stage (1) is detected according to the output of the laser interferometer (31).
By applying the deceleration thrust (F _b ) to 7), unnecessary deceleration force is not applied to the moving stage (17) during the exposure. Further, by the acceleration / deceleration driving means (20, 21)
The moving stroke of the moving stage (17)
A moving stroke of the moving stage (17) by means (18)
Since it is shorter than the peak, the acceleration / deceleration drive means (20, 21)
It can be miniaturized. Further, in the scanning type exposure apparatus of the present invention, since at least a part of the laser interferometer (31) is provided on the surface plate (2), the laser interferometer (31) is
It is not affected by the reaction force generated when the mask (14) and the substrate (16) are scanned . Further, in the scanning type exposure apparatus of the present invention, the illumination optical system (11) includes the surface plate (2).
Since it is supported by, the illumination optical system (11) is not affected by the reaction force generated when the stage (17) is driven. Further, in the scanning type exposure apparatus of the present invention, since the projection optical system (15) is supported by the surface plate (2), a reaction that occurs when the projection optical system (15) drives the stage (17). Unaffected by force. Reduction projection if this projection optical system (15) is a reduction system
Can be applied to scanning exposure. Further, in the scanning exposure apparatus of the present invention, the vibration from the floor is isolated by the vibration isolation device (5).

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.

In FIG. 1, reference numeral 10 denotes a scanning type exposure apparatus as a whole, and an illumination optical system 11 is supported by a pedestal 12 on a surface plate 2 which suppresses vibration generation. The surface plate 2 is supported on the floor 6 via a vibration isolation device 5 that removes vibrations from the floor 6. Exposure light is emitted from the irradiation unit 13 of the illumination optical system 11 to the mask 14, and the drawing pattern of the mask 14 is projected onto the photosensitive substrate 16 by the projection optical system 15.

The mask 14 and the photosensitive substrate 15 are respectively disposed on the upper portion 17A and the lower portion 17B of the scanning stage 17 having a U-shaped cross section, and the scanning stage 17 is scanned in the Y direction of the drawing with respect to the projection lens 15. Mask 14
The upper pattern is exposed on the photosensitive substrate 16. The scanning stage 17 is supported and guided by a static pressure air bearing (both not shown) on a rail of a linear motor 18 laid on the surface plate 2 along the scanning direction.

The scanning stage 17 is provided with voice coil motors 20 and 21 which are installed so as to face each other in the scanning direction (Y-axis direction) between the scanning stage 17 and to provide driving force for acceleration / deceleration when moving and stopping. Given. Voice coil motor 2
0 and 21 are installed on the floor 6 independently of the surface plate 2 by supports 22 and 23, respectively. When accelerating and decelerating the scanning stage 17, the voice coil motor 20 or 21 applies an acceleration thrust or a deceleration thrust to the position of the center of gravity of the scanning stage 17 only for a short time during acceleration or deceleration. As a result, a factor (reaction force) that causes the scanning stage 17 to swing during acceleration / deceleration can be suppressed to a small level, and stability during scanning can be maintained.

Further, the reaction force generated by the acting force of the acceleration thrust or the deceleration thrust given to the scanning stage 17 at this time is transmitted to the floors 6 through the support portions 22 and 23 and directly to the surface plate 2. Not transmitted. This makes it possible to set the characteristics of the vibration isolation device 5 that supports the surface plate 2 mainly as vibrations transmitted from the floor 6 surface to the surface plate 2 for vibration isolation, which facilitates the setting of the characteristics of the vibration isolation device 5. High vibration isolation performance can be obtained.

FIG. 2 shows the driving of the scanning stage 17 on the surface plate 2 by the voice coil motors 20 and 21, and FIG. 3 shows the speed control by the driving current at that time. First, the scanning stage 17 on the surface plate 2 is the voice coil motor 2 on one side.
The mover 2 is driven by the drive current I _a (FIG. 3 (B)) flowing in 0.
0A is driven and the acceleration thrust F _a is applied to the scanning stage 17.
Is given. Scanning stage 17 enters by the acceleration thrust F _a connexion acceleration region (FIG. 3 (A)), reaches a predetermined speed corresponding to the acceleration thrust F _a. The movement of the scanning stage 17 which has reached a predetermined speed is controlled by a linear motor 18.

In this way, the constant velocity moving area (FIG. 3A)
The scanning stage 17, which has entered, is subjected to a speed feed back by the control system 30 with respect to the moving speed that fluctuates due to disturbance, and is controlled to have a constant speed (FIG. 3C). Here, the laser interferometer 31 arranged on the surface plate 2 is used to detect the position and the moving speed of the scanning stage 17. In the laser interferometer 31, the laser light emitted from the laser oscillator 32 is split by the beam splitter 33 into reference light L1 and measurement light L2. The reference light L1 is applied to the fixed mirror 34 installed on the pedestal 12, while the measurement light L2 is reflected by the fixed mirror 35 and applied to the moving mirror 36. The return light of the reference light L1 and the measurement light L2 is detected by the interferometer receiver 37 to detect the relative position and relative movement speed of the projection optical system 15 and the scanning stage 17. The position and the moving speed of the scanning stage 17 thus measured are fed back to the control system 30, and are applied to the driving timing of the voice coil motors 20 and 21 and the constant speed driving of the linear motor 18.

When one exposure scan on the surface plate 2 is completed and the scanning stage 17 approaches one end of the rail, the control system 30 uses the drive current I _b based on the detection result of the detection system 31. Drive control of the voice coil motor 21 (see FIG.
(D)), through the movable element 21A adds the deceleration thrust F _b to the scanning stage 17. As a result, the scanning stage 17 enters the deceleration region (FIG. 3A) and is decelerated and stopped.

The control system 30 controls the timing at which the scanning stage 17 is decelerated and stopped.
When the scanning stage 17 reaches a position just before the other end of the rail of the scanning axis, the control system 30 drives the voice coil motor 21 based on the relative position and relative moving speed of the stage obtained from the measurement result by the interferometer receiver. When the scanning stage 17 contacts the voice coil motor 21, a deceleration thrust _Fb is generated by controlling the current applied to the voice coil motor, and the thrust decelerates and stops the scanning stage 17. Here, the mover 2 of the voice coil motor 21
1A has a slight stroke allowance, and the mover 2
By driving 1A at a speed almost equal to that of the scanning stage 17, the impact at the time of collision is reduced. As a result, the scanning stage 17 does not give a large disturbance to the surface plate 2 when stopped.

In the above structure, when the mask 14 on the scanning stage 17 and the photosensitive substrate 10 are subjected to scanning exposure, as shown in FIG.
As shown in, the scanning stage 17 is pushed out by the mover 20A of the voice coil motor 20, and the acceleration thrust F _a
In response to this, it starts moving. At this time, the reaction force F _a ′ generated with respect to the acting force of the acceleration thrust F _a is transmitted from the support portion 22 or 23 through the floor 6 and escapes to the ground, and does not directly affect the surface plate 2.

After the scanning stage 17 reaches a predetermined speed by the acceleration thrust F _a , it is controlled at a constant speed by the linear motor 18 and moves on the rail. When the scanning stage 17 starts moving at a constant speed in the scanning direction, the projection pattern of the mask irradiated by the projection light is exposed and scanned on the photosensitive substrate 16 via the projection optical system 15. 1 scanning stage 17
When the exposure scanning of one time is completed and the end of the rail is approached, the other opposite voice coil motor 21 based on the moving speed of the stage measured by the laser interferometer 31.
Deceleration thrust F _b from via the movable element 21A is decelerated receive timed stops. As a result, the scanning stage 17 can be stopped after the exposure scanning is completed without receiving a large impact, so that a large shake does not occur with respect to the surface plate.

According to the above construction, by providing the voice coil motor for driving the scanning stage independently of the surface plate 2, the voice coil motors 20 and 21 are provided to the voice coil motors 20 and 21 when the scanning stage 17 is accelerated or decelerated during scanning exposure. The scanning stage 17 can be controlled to be accelerated or decelerated without directly transmitting the reaction force generated thereby to the surface plate. As a result, the scanning stage 17
No shaking due to the thrust (reaction) of the voice coil motor is generated with respect to the surface plate during acceleration / deceleration, and speed unevenness at the time of scanning is greatly reduced, and scanning accuracy and exposure accuracy can be improved.

Since the linear motor 18 is installed independently of the voice coil motors 20 and 21,
When controlling a heavy object or when sharp acceleration / deceleration is required, the thrust of only the voice coil motor may be increased, and the weight of the scanning stage 17 is accordingly increased without changing the structure of the scanning stage 17. It is possible to improve the scanning performance such as high throughput.

Further, conventionally, when a common actuator was used at the time of acceleration / deceleration and at the same speed, a high-thrust actuator was used over the entire stroke of exposure scanning in order to adjust to acceleration / deceleration. By dividing the actuator into a voice coil motor for acceleration / deceleration and a linear motor for constant velocity, it is sufficient to generate the minimum necessary thrust for the minimum necessary period. As a result, each actuator can be downsized, the weight of the movable part can be reduced, the movable part can be moved efficiently, and the overall cost reduction in terms of the operation of the device can be realized.

Further, the voice coil motor and the linear motor generate heat when high thrust is generated, but the voice coil motor installed independently of the vibration isolation table can dissipate this heat to the floor, and the surface plate and It is possible to prevent thermal deformation of the scanning stage 17 in advance. Furthermore, since the vibration isolator only needs to damp vibrations from the floor, it is possible to improve the performance of the vibration isolator by limiting the characteristics of the vibration isolator to only damping floor vibrations. At this time, the cost reduction may be selected by setting the performance of the vibration isolation device to a predetermined value.

In the above-described embodiment, the case where the voice coil motor capable of obtaining a high thrust with a small stroke is used as the actuator for acceleration / deceleration control has been described. However, the present invention is not limited to this, and for example, a hydraulic pressure is used as the actuator. Alternatively, a pneumatic cylinder or a cam may be used, which can further reduce the device cost. Further, in the above-mentioned embodiment, the case of performing the same size projection has been described.
The present invention is not limited to this, and can be applied to scanning exposure of reduced projection. In this case, the drive position of the reticle or the like is often at a high position apart from the vibration isolator support portion. Even when it is necessary to accelerate or decelerate the part away from the vibration isolator in this way, with this method, the reaction force that causes the entire device to shake can be released to the outside, so that exposure accuracy is degraded. It can be prevented.

Further, in the above-mentioned embodiments, the case where the linear motor is used for the constant velocity control of the scanning stage has been described, but the present invention is not limited to this, and for example, a ball screw, a capstan drive, a belt drive, or the like. Even if the actuator is used, the same effect as that of the above-described embodiment can be obtained. Further, in the above-mentioned embodiment, the case where the driving timing of the voice coil motor is controlled during the deceleration of the scanning stage to reduce the impact when the scanning stage contacts the voice coil motor has been described, but the present invention is not limited to this. Instead, the moment of inertia of the mover of the voice coil motor may be reduced, or a shock absorber may be added to the mover side.

Further, in the above-mentioned embodiment, the case of the scanning device of the one-axis stage has been described, but the present invention is not limited to this, and as shown in FIG. 4, for example, with respect to the axis of the two-axis stage in the scanning direction. You may use it. Ie 2
The scanning direction of the axis stage 40 is set in the Y-axis direction that is orthogonal to the movement axis in the X-axis direction on the surface of the surface plate 2. In this biaxial stage 40, the scanning stage 41
Is moved in the X-axis direction by a voice coil motor 42 installed independently of the surface plate 2 and a pair of voice coil motors (not shown) to accelerate and decelerate the linear plate laid on the surface plate 2. It is moved at a constant speed along the motor 44. Further, the scanning stage 41 has rails 45A and 4 in the X-axis direction.
Move on 5B. Thus, even if the stage has multiple axes, the same effect as the above-described embodiment can be obtained by installing an actuator such as a voice coil motor directly outside the surface plate with respect to the axis for scanning the scanning stage. To be

[0030]

According According to the present invention as described above in the stage apparatus of the present invention, when installing the deceleration driving means independently of the anti-vibration table bets
When the moving stage is accelerated / decelerated by applying thrust to the center of gravity of the moving stage, the moving stage is moved without giving sway to the surface plate due to the reaction force generated against the acting force of the acceleration thrust. It is possible to realize a stage device in which the moving stage can be moved at a constant speed without being influenced by the acceleration / deceleration driving means by installing the constant speed driving means independent of the acceleration / deceleration driving means on the moving stage. Further, according to the scanning type exposure apparatus of the present invention, since at least a part of the laser interferometer is provided on the surface plate, the influence of the reaction force generated when the laser interferometer scans the mask and the substrate. The position of the stage can be detected without being affected. Further, in the scanning type exposure apparatus of the present invention, since the illumination optical system is supported by the surface plate, the pattern is not affected by the reaction force generated when the illumination optical system drives the stage. Can be illuminated. Further, in the scanning type exposure apparatus of the present invention, since the projection optical system is supported by the surface plate, the pattern is not affected by the reaction force generated when the projection optical system drives the stage. It can be projected onto a substrate. Further, in the scanning exposure apparatus of the present invention, the vibration from the floor can be isolated by the vibration isolation device.

[Brief description of drawings]

FIG. 1 is a schematic side view showing an overall configuration of an embodiment according to the present invention.

FIG. 2 is a schematic side view showing driving of a scanning stage by a voice coil motor.

FIG. 3 is a graph showing speed control of a scanning stage.

FIG. 4 is a schematic perspective view showing a stage device having a biaxial mechanism.

FIG. 5 is a schematic side view showing the occurrence of shaking in a conventional stage device.

[Explanation of symbols]

1, 40 ... Stage device, 2 ... Surface plate, 5 ... Vibration isolation device, 10 ... Scanning exposure device, 11 ... Illumination optical system, 1
2 ... Frame, 13 ... Irradiation part, 14 ... Mask, 15 ...
... Projection optical system, 16 ... Photosensitive substrate, 17, 41 ... Scanning stage, 18 ... Linear motor, 20, 21, 42 ...
... Voice coil motor, 20A, 21A ... Mover, 2
2, 23 ... Supporting unit, 30 ... Control system, 31 ... Laser interferometer, 32 ... Laser oscillator, 33 ... Beam splitter, 34, 35 ... Fixed mirror, 36 ... Moving mirror, 37 ... ... interferometer receiver.

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-10-328962 (JP, A) JP-A-8-86611 (JP, A) JP-A-7-254555 (JP, A) JP-A-6- 163354 (JP, A) JP 6-163353 (JP, A) JP 5-121294 (JP, A) JP 5-77126 (JP, A) JP 4-129209 (JP, A) JP-A-3-125048 (JP, A) JP-A-2-307091 (JP, A) JP-A-2-199814 (JP, A) JP-A-2-1585 (JP, A) JP-A-1-179419 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01L 21/027 G03F 9/00 G05D 3/00

Claims (8)

(57) [Claims] 1. An anti-vibration table having a mechanism for suppressing the propagation of vibration, a moving stage that moves on the anti-vibration table in a predetermined direction, and is installed and stopped independently of the anti-vibration table. An acceleration thrust is applied to a position of substantially the center of gravity of the moving stage to accelerate and move the moving stage in a predetermined moving direction, and a deceleration thrust is applied to the position of the center of gravity of the moving stage that is moving to move the moving stage. A stage apparatus comprising: an acceleration / deceleration driving unit that decelerates and stops the stage; and a constant velocity driving unit that is installed on the moving stage and drives the moving stage at a constant speed. 2. The acceleration / deceleration driving means detects a position of the moving stage in the moving direction, and applies the decelerating thrust force to the moving stage according to the position. Stage equipment. 3. The moving step by the acceleration / deceleration driving means.
The moving stroke of the
Characterized by being shorter than the moving stroke of the moving stage
The stage device according to claim 1 or 2. 4. A scanning type exposure apparatus which scans a mask and a substrate to expose the pattern of the mask onto the substrate, and a scanning stage which scans the mask and the substrate, and the scanning stage is moved. A surface plate that supports the surface plate, a support portion that is provided independently of the surface plate, and at least a part of the support portion so that a reaction force generated when the scanning stage is driven is transmitted to the support portion. connected to the support portion, and a drive means for driving the scanning stage, at least a portion is provided in the surface plate, characterized in that it comprises a laser interferometer for detecting a position of the scanning stay <br/> di Scanning exposure device. 5. An illuminating optical system for illuminating the pattern of the mask is supported by the surface plate.
4. The scanning exposure apparatus according to 4 . 6. The scanning exposure apparatus according to claim 4 , wherein a projection optical system for projecting the pattern of the mask on the substrate is supported by the surface plate. 7. The projection optical system is a reduction system.
The scanning exposure apparatus according to claim 6, which is a characteristic of the scanning exposure apparatus. 8. The surface plate is supported by an anti-vibration device for isolating vibrations from the floor .
8. The scanning type exposure apparatus according to any one of 7 to 7 .