JP3603615B2 - XY axis head positioning device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an XY-axis head positioning device that moves and positions a head such as a semiconductor bonder in the XY directions, and is applicable to a device that requires high acceleration / deceleration and high-precision positioning, such as a wire bonder device. is there.
[0002]
[Prior art]
A conventional XY table for high acceleration / deceleration positioning is disclosed in Japanese Patent Application Laid-Open No. 9-123434. FIG. 8 is a side view thereof. FIGS. 9 (a) and 9 (b) are schematic configuration diagrams in which a guide device having low rigidity is represented by a spring in its plan view and side view. In each figure, 1 is an X-axis table, 2 is a Y-axis table, 3 is an output table, 4, 6, and 9 are linear guide devices, 4R, 6R, and 9R are guide rails, 4S, 6S, and 9S are sliders, and B1, B2 is a base, 20 is a linear motor, 22 is a mover, 23 is a stator, 25 and 26 are sensors, 25A and 26A are detectors, 25B and 26B are scales, and 30 is a head.
[0003]
In the conventional apparatus shown in FIGS. 8 and 9, an output table 3 having a head 30 as an object to be conveyed is placed on an X-axis table 1, and the two tables 1 and 3 are configured to apply an X-axis force. Is transmitted via a linear guide device 4 which is a linear motion guide device for transmitting the force. The linear guide device 4 is composed of a pair of linear guide devices. The guide rails 4R are orthogonal to the linear guide devices 6 arranged as a pair of right and left on the base B1 as linear motion guide devices of the X-axis table 1. And is attached to the lower surface of the output table 3.
[0004]
On the other hand, the Y-axis table 2 is supported by a linear guide device 6 on a base B2 that is higher than the base B1, and has the same height as the output table 3. The output table 3 and the Y-axis table 2 are connected via a linear guide device 9 which is a linear motion guide device for transmitting the Y-axis force, and the guide rail 9R of the linear guide device 9 is connected to the Y-axis table 2 And the slider 9S is positioned at the center of the width of the output table 3. That is, the driving force applied to the output table 3 from the Y-axis table 2 via the linear guide device 9 acts on the center of gravity of the output table 3 so that the pitching or yawing moment does not act on the output table 3. .
[0005]
The driving means of the X-axis table 1 and the Y-axis table 2 is generally a servomotor and a ball screw type traveling device in which a screw shaft is connected to the servomotor via a coupling. However, the ball screw and the coupling have a reduced rigidity in the thrust direction. In the conventional example shown in FIG. 8, the linear motor 20 having a structure in which the mover 23 and the stator 22 are opposed to each other is disposed below the two-axis tables 1 and 2 because of the following problem. ing. Reference numerals 25 and 26 denote sensors for detecting the position of the table, and drive the servomotor based on the position information to perform feedback control.
[0006]
[Problems to be solved by the invention]
The conventional XY table is configured as described above. Since the output table 3 is mounted on the X-axis table 1, the pitching moment is applied to the output table 3 and the X-axis table 1 by the motor thrust generated during acceleration / deceleration and the inertia force of the head as shown in FIG. Acts. When the output table 3 is located at a position away from the drive axis of the X-axis table, a yawing moment acts on the X-axis table 1 and the output table 3 as shown in FIG. Since the linear motor 20 has a structure in which the mover 23 and the stator 22 are opposed to each other, a vertical suction force acts on the X-axis table 1 and the Y-axis table 2. In order to support the head 30 and the tables 1, 2, and 3 against these forces, the tables 1, 2, and 3 become heavy, and the linear guide devices 4, 6 are heavy load-bearing and heavy guide devices. . As a result, the inertia further increases and a large moment is generated, resulting in a vicious cycle. In particular, since the inertia on the head side is large, a large yawing moment acts on the X-axis table 1 and the Y-axis table 2, and yaw vibration is generated on both the axis tables. In this vibration, since the phase of the feedback sensor 25 differs from that of the coil, which is the thrust generating portion, the control system becomes unstable.
Further, when the control system becomes unstable and a high feedback gain cannot be obtained, there is a problem that the gantry vibration generated by the movement in the XY axis directions strongly affects the servo system. The degree of influence of the gantry vibration on the servo system can be expressed by linear motion inertia / (linear motion inertia + rotation inertia). In the case of a ball screw mechanism, the disturbance due to the gantry vibration is reduced because the ratio of the rotation inertia is large, but the linear motion inertia is reduced. There is a problem that the linear motor only has the same effect.
Further, since the inertia of the movable portion is large, there is also a problem that the device is largely shaken by the reaction force generated at the time of high acceleration / deceleration.
[0007]
SUMMARY OF THE INVENTION An object of the present invention is to solve the problems of the conventional XY table as described above, and to provide an XY-axis head positioning device that is lightweight and has high rigidity and high feedback controllability. It is to enable positioning.
[0008]
[Means for Solving the Problems]
An XY-axis head positioning device according to a first configuration of the present invention includes a head, which is an object to be conveyed, installed on an XY plane guide device movable in the XY directions, and an X-axis direction guide capable of linearly moving in the X-axis direction. A flat X-axis table provided with a flat drive coil and driving the head in the X-axis direction with a flat drive coil, and a flat drive coil mounted on a Y-axis direction guide device capable of linearly moving in the Y-axis direction. comprising a flat Y-axis table for driving the head in the Y-axis direction, the X, and an electromagnetic drive device for the movable element driving coils of the Y-axis table and the X-axis table and the head is the head and the a coupling guide device slidably coupled to the Y-axis direction along the end face of the X-axis table, the head and the Y-axis table and the head is the Y-axis sliding along the end face of the table in the X-axis direction Linking to move freely Comprising an inner device, the X-axis table through the connection guide device in the X-axis direction next to the head, as well as arranged in the Y-axis table through the connection guide device in the Y-axis direction next to the head the center of gravity of the head and the X-axis table and the Y-axis table and the coupling guide device is arranged on substantially the same plane, and applied to the head from the X-axis table through the connection guide device driving force And a driving force applied to the head from the Y-axis table via the connection guide device acts on the center of gravity of the head .
[0009]
In the XY-axis head positioning device according to the second configuration of the present invention, the end face of the head intersects a line passing through the center of gravity of the head and parallel to the X-axis with the slider of the connection guide device connecting the head and the X-axis table. The slider of the connection guide device for connecting the head and the Y-axis table, which is fixed to the vicinity of the head, is fixed to the vicinity of where the line passing through the center of gravity of the head and parallel to the Y-axis intersects the end face of the head.
[0010]
An XY-axis head positioning device according to a third configuration of the present invention is a connection guide device that connects between the slider of the connection guide device that connects the head and the X-axis table and the head, or connects the head and the Y-axis table. And a coupling whose rigidity in the thrust direction can be adjusted between the slider and the head.
[0011]
In the XY-axis head positioning device according to a fourth configuration of the present invention, the drive coil is wound in parallel with the moving direction, and a heat sink is directly attached to a winding portion that does not contribute to thrust.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiment 1 FIG.
The XY axis head positioning device of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing an XY-axis head positioning device according to an embodiment of the present invention, FIG. 2 is a side view seen from an arrow A in FIG. 1, FIG. 3 is a cross-sectional configuration view taken along line BB in FIG. 4 is a sectional view taken along line CC of FIG. 2, FIG. 5 is a sectional view taken along line DD of FIG. 2, and FIGS. FIG. 7 is a schematic configuration diagram illustrating a low guide device by a spring, and FIG. 7 is a cross-sectional configuration diagram illustrating a coupling unit according to an embodiment of the present invention.
In each figure, 1 is an X-axis table, 2 is a Y-axis table, 30 is a head, 6, 31, and 32 are linear motion guide devices, 6R, 31R, and 32R are guide rails, 6S, 31S, and 32S are sliders, and 40 is a slider. A connection guide device for slidably connecting the head 30 to the X-axis table 1 and the Y-axis table 2, 40R is a guide rail, 40S is a slider, 41 is an XY plane guide device, B1, B2, and B3 are bases, and 26 is a position. A detecting unit, 26A is a detecting unit, 26B is a scale, 34 is a flat driving coil (hereinafter simply referred to as a flat coil) of an electromagnetic drive device, 35, 36, 35A, 36A, 35B, 36B are permanent magnets, and 37 is a permanent magnet. A yoke, 38 is a heat sink, 39 is a coupling, 39A and 39B are U-shaped members, and 39C is a rubber flat plate.
[0013]
In the apparatus of the present invention shown in FIGS. 1 to 7, the head 30 to be transferred is mounted on the base B1 via the XY plane guide device 41 for moving the XY plane, and the vertical / pitching It is restrained and supported in the yawing direction, and can be displaced to an arbitrary position on a plane including the X direction and the Y direction. In the XY plane guide device 41, for example, two linear motion guide devices 31 are disposed on a base B1, and the two guide rails 31R are attached to the base B1 side in parallel with the Y axis. A guide rail 32R of a linear guide device 32 for guiding movement in the X-axis direction is mounted on the slider 31S in a direction orthogonal to the guide rail 31R in the Y-axis direction. The head 30, which is the object to be conveyed, is mounted on the slider 32S.
[0014]
A flat X-axis table 1 is mounted on a base B2 via a linear motion guide device 6 next to the head 30 which is a conveyed object in the X-axis direction. Two guide rails 6R are fixed on the base B2 in parallel in the X-axis direction. A total of four sliders 6S, two for each guide rail 6R, are mounted on the lower surface of the X-axis table 1 so as to be almost the same height as the flat X-axis table 1. The X-axis table is configured as thin as possible, including the flat coil 34 and the slider 6S. In this case, one end surface of the X-axis table 1 is opposed to one end surface of the head 30, and both are connected by the connection guide device 40 . The guide rail 40R of the connection guide device 40 is fixed to the end surface on the X-axis table 1 side so as to be at the same height as the flat plate of the X-axis table 1, and the slider 40S is fixed to the end surface of the head 30.
[0015]
As a driving device of the X-axis table 1, an in-plane driving motor (voice coil motor) using the flat coil 34 is employed. The coil 34, which is a mover, is formed in a flat shape and is mounted on the surface of the flat X-axis table 1, and is wound in the flat coil 34 in a direction orthogonal to the moving direction to generate a thrust. The portion and the flat plate of the X-axis table 1 are on the same plane. It is desirable that the X-axis table 1 be made of a non-magnetic material and have high rigidity. In the present embodiment, for example, ceramic is used.
[0016]
Below the flat coil 34, a permanent magnet 35 as a stator is fixed on a base B2 also serving as a yoke via a predetermined gap, and above the flat coil 34, another stator is provided. Are fixed on the base B2. The flat coil 34 as a mover generates a driving force only in the X-axis direction. Reference numeral 26 denotes an X-axis position detecting device that detects the position of the X-axis table 1, for example, as an optical sensor. The detecting unit 26A is mounted on a base B2, and the scale 26B is mounted on an end of the X-axis table 1. I have. Although not shown, a drive system is provided with a control power supply (driver), a control device (servo controller), and the like.
[0017]
On the other hand, a Y-axis table 2 having the same structure as the X-axis table 1 is attached to the base B3 next to the head 30 in the Y-axis direction, and the X-axis table 1 and the Y-axis table 2 are arranged on substantially the same plane. You. The drive and control system is the same as that of the X-axis table 1.
[0018]
As described above, the X-axis table 1 and the Y-axis table 2 are arranged on substantially the same plane, and the driving device is also an in-plane drive motor using the flat coil 34. Then, the action points and directions of all the acting forces are substantially on the same plane.
The X-axis table 1, the Y-axis table 2, the head 30, and the connection guide device 40 have their centers of gravity arranged on the same plane as the above-mentioned plane. By doing so, no pitching moment or vertical force is generated in any of the X-axis table 1, the Y-axis table 2, and the head 30.
Further, in such a configuration, since the rigidity required for the X-axis table 1 and the Y-axis table 2 is only in the plane direction, rigidity in other directions is not required, and the weight can be reduced.
Further, since no useless force is applied to the linear motion guide device 6, the size and weight can be reduced. In addition, the life of the linear motion guide device 6 is extended.
Similarly, the size and weight of the head 30 can be reduced.
[0019]
Next, the connection guide device 40 for connecting the head 30 to the X-axis table 1 and the head 30 to the Y-axis table 2 will be described.
The slider 40S that transmits the thrust in the X-axis direction to the head 30 is mounted at a position where a line passing through the center of gravity of the head 30 and parallel to the X-axis intersects an end face of the head 30. The slider 40S that transmits the thrust in the Y-axis direction to the head 30 is mounted at a position where a line passing through the center of gravity of the head 30 and parallel to the Y-axis and an end face of the head 30 intersect. That is, the driving force applied from the X-axis table 1 to the head 30 via the connection guide device 40 and the driving force applied from the Y-axis table 2 to the head 30 via the connection guide device 40 act on the center of gravity of the head 30. It is like that. As a result, no pitching and yawing moments are applied to the head 30. In addition, since no useless force acts on the XY plane guide device 41 of the head 30, the size and weight can be significantly reduced.
In addition, the yawing moment acting on the other X-axis table 1 or Y-axis table 2 when one axis is at the end of the movable range is reduced by the decrease in the inertia on the head side, and the two-axis tables 1 and 2 Since the yawing support rigidity is improved, it is possible to reduce the occurrence of yawing vibration of the biaxial tables 1 and 2, which makes the control system unstable.
When the X-axis table 1 and the Y-axis table 2 interfere with each other, the heights of the bases B2 and B3 may be made different by the thickness of the plate-shaped table so as to avoid the interference. In this case, since the rail 32R is added to the inertial weight of the head 30 in the Y direction and the center of gravity is equivalently lowered, the Y-axis table may be disposed below the X-axis table.
[0020]
In the present embodiment shown in FIGS. 1 to 7, the connection between the slider 40S and the head 30 of the connection guide device 40 for connecting the head 30 and the X-axis table 1 and the connection between the head 30 and the Y-axis table 2 are provided. A coupling 39 whose rigidity can be adjusted is attached between the slider 40S of the guide device 40 and the head 30. An enlarged view of the coupling 39 is shown in FIG. A rubber plate 39C is sandwiched between a U-shaped member 39A attached to the slider 40S and a U-shaped member 39B attached to the head 30 under a predetermined preload. By changing the area of the rubber flat plate 39C, the rigidity between the slider 40S and the head 30 can be adjusted. As a result, the resonance frequency can be adjusted so that the servo system does not become unstable due to vibration at which the coupling guide device 40 transmitting the thrust to the head 30 becomes a node.
[0021]
In the present embodiment shown in FIGS. 1 to 7, the flat coil 34 is wound in parallel with the moving direction, and the heat sink 38 is directly attached to a winding portion that does not contribute to thrust. Therefore, high heat dissipation can be obtained.
[0022]
【The invention's effect】
As described above, in the first configuration of the present invention, the head which is the object to be transported installed in the XY plane guide device movable in the XY directions, and the X-axis direction guide device capable of linearly moving in the X-axis direction A flat X-axis table provided with a flat drive coil and driving the head in the X-axis direction, and a flat drive coil mounted on a Y-axis direction guide device capable of linearly moving in the Y-axis direction. and flat Y-axis table for driving the head in the Y-axis direction Te, the X, and an electromagnetic driving device according to the drive coil of the Y-axis table movable element, and the said head X-axis table the head and the X a coupling guide device slidably coupled to the Y-axis direction along the end face of the shaft table, slides and the said head Y-axis table in the X-axis direction along the end face of the head is the Y-axis table Linking guide device that connects freely The provided, the X-axis table through the connection guide device in the X-axis direction next to the head, as well as arranged in the Y-axis table through the connection guide device in the Y-axis direction next to the head, the head and substantially arranged on the same plane, and the X-axis through the connecting guide device from the table is added to the head driving force centroid and the X-axis table and the Y-axis table and the connection guide device, the Since the driving force applied to the head from the Y-axis table via the connection guide device is configured to act on the center of gravity of the head, the pitching moment or the pitching moment is applied to any of the X-axis table, the Y-axis table, and the head. No vertical force is generated. Further, since the rigidity required for the X-axis table and the Y-axis table is only in the plane direction, rigidity other than the direction is unnecessary, and the weight can be reduced.
[0023]
Further, in the second configuration of the present invention, the slider of the connection guide device that connects the head and the X-axis table is fixed near the intersection of a line passing through the center of gravity of the head and parallel to the X-axis and the end face of the head. Since the slider of the connection guide device for connecting the head and the Y-axis table is fixed in the vicinity of the intersection of a line passing through the center of gravity of the head and parallel to the Y-axis with the end face of the head, the head is not subject to pitching and yawing moments. And the guide device can be reduced in weight. As a result, the X-axis table and the Y-axis table are reduced in thickness and weight, and the guide device is reduced in size, weight, and life. In addition, the occurrence of vibration that makes the control system unstable due to low inertia can be reduced, and high controllability can be obtained.
[0024]
Further, in the third configuration of the present invention, the slider and the head of the connection guide device for connecting the head and the Y-axis table may be provided between the slider and the head of the connection guide device for connecting the head and the X-axis table. Since couplings capable of adjusting the rigidity in the thrust direction are mounted between the head and the head, the resonance frequency can be adjusted so that the vibration that causes the connection guide device to be a node does not make the servo system unstable.
[0025]
Further, in the fourth configuration of the present invention, the drive coil is wound in parallel with the moving direction, and the heat sink is directly attached to the winding portion that does not contribute to the thrust, so that high heat dissipation can be obtained.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an XY axis head positioning device according to an embodiment of the present invention.
FIG. 2 is a side view as viewed from an arrow A in FIG.
FIG. 3 is a cross-sectional configuration diagram taken along line BB of FIG. 2;
FIG. 4 is a cross-sectional configuration diagram taken along line CC of FIG. 2;
FIG. 5 is a sectional configuration view taken along line DD of FIG. 2;
FIG. 6 is a schematic configuration diagram in which a guide device having low rigidity is represented by a spring in FIGS. 3 and 4;
FIG. 7 is a cross-sectional configuration diagram illustrating a coupling unit according to an embodiment of the present invention.
FIG. 8 is a side view showing a conventional XY-axis head positioning device.
FIG. 9 is a schematic configuration diagram in which a guide device having low rigidity in a conventional XY-axis head positioning device is represented by a spring.
[Explanation of symbols]
1 X-axis table, 2 Y-axis table, 3 output tables, 4, 6, 9, 31, 32 linear motion guide device, 4R, 6R, 9R, 31R, 32R, 40R guide rail, 4S, 6S, 9S, 31S, 32S, 40S slider, 40 connection guide device, 41 XY plane guide device, B1, B2, B3 base, 20 linear motor, 22 mover, 23 stator, 25, 26 position detector, 25A, 26A detector, 25B, 26B scale, 30 heads, 34 flat coils, 35, 36, 35A, 36A, 35B, 36B permanent magnets, 37 yokes, 38 heat sinks, 39 couplings, 39A, 39B U-shaped members, 39C rubber flat plate.

Claims (4)

A head, which is an object to be transported, installed on an XY plane guide device movable in the XY directions, and an X-axis direction guide device, which is linearly movable in the X-axis direction, is provided with a flat driving coil, and the head is provided with X A flat X-axis table driven in the axial direction, and a flat Y-axis table installed on the Y-axis direction guide device capable of linearly moving in the Y-axis direction and having a flat drive coil for driving the head in the Y-axis direction When the X, slidably driving coils of the Y-axis table and the electromagnetic drive device for the movable element, and said X-axis table and the head said head along the end face of the X-axis table in the Y-axis direction And a connection guide device that connects the head and the Y-axis table slidably in the X-axis direction along the end surface of the Y-axis table .
The X-axis table is arranged next to the head in the X-axis direction via the connection guide device, and the Y-axis table is arranged next to the head in the Y-axis direction via the connection guide device. said X-axis table and the Y-axis table and the connection guide device is arranged on substantially the same plane, and the X-axis through the connecting guide device from the table is added to the head driving power, the Y-axis table An XY-axis head positioning device configured so that a driving force applied to the head via the connection guide device acts on the center of gravity of the head. A connection guide for connecting the head and the Y-axis table by fixing a slider of a connection guide device for connecting the head and the X-axis table near a crossing of a line passing through the center of gravity of the head and parallel to the X-axis with an end face of the head. 2. The XY-axis head positioning apparatus according to claim 1, wherein the slider of the apparatus is fixed near a point where a line passing through the center of gravity of the head and parallel to the Y-axis intersects an end face of the head. The rigidity in the thrust direction is between the slider of the connection guide device for connecting the head and the X-axis table and the head, or between the slider of the connection guide device for connecting the head and the Y-axis table and the head, respectively. The XY-axis head positioning device according to claim 1, further comprising an adjustable coupling. 2. The XY-axis head positioning device according to claim 1, wherein the drive coil is wound in parallel with the moving direction, and a heat sink is directly attached to a winding portion that does not contribute to thrust.

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