JPWO2007032530A1 - Conveying mechanism, conveying apparatus, and vacuum processing apparatus - Google Patents

Abstract

Provided is a transport device capable of preventing a transport target from being contaminated by dust and transporting the transport target to a correct position.
The present invention is constituted by first and second parallelogram linkages (13, 14). The second parallelogram linkage (14) is constructed using the link (10) of the first parallelogram linkage (13), the four sides are equal in length, and linear along the linear guide (12a). Extends and contracts. The links (7a, 9a) of the first parallelogram linkage (13) at the fulcrums (7c, 9c) at both ends of the shared link (10) of the first and second parallelogram linkages (13, 14). And the links (7b, 9b) of the second parallelogram linkage (14) are each configured to rotate in a 90 ° constrained state. An arm (8a) configured to rotate in a 90 ° constrained state with respect to the link (8b) at the fulcrum 2 at the end of the link (8b) facing the link (10) of the first parallelogram linkage 13 Is provided.

Description

  The present invention relates to a transfer apparatus for transferring a substrate to be processed such as a semiconductor wafer, and more particularly, in a substrate processing apparatus having one or a plurality of process chambers for variously processing a substrate to be processed. The present invention relates to a transfer device suitable for performing.

2. Description of the Related Art Conventionally, in a substrate processing apparatus such as a semiconductor manufacturing apparatus, a transport apparatus for putting a substrate in and out of a process chamber for performing various processing processes has been proposed.
Conventionally, as this type of conveying device, for example, the one shown in Japanese Patent No. 253261 is known.

FIG. 33 is a plan view showing a schematic configuration of a conventional transport device.
As shown in FIG. 33, in the transport device 50, the first and second parallel link mechanisms 50A and 50B are connected so as to share the link 51.
The first parallel link mechanism 50A includes links 51, 52, 53, and 54, and the second parallel link mechanism includes links 51, 55, 56, and 57.

Here, the effective lengths of the links 51, 52, and 55 are the same, and the effective lengths of the links 53, 54, 56, and 57 are also the same.
Both end portions of each link 53, 54, 56, 57 are connected in a rotatable state. A gear 63 is fixed to one end of the link 53 on the link 51 side, and a gear 64 is fixed to one end of the link 57 on the link 51 side. The gear 63 and the gear 64 mesh with each other with the same diameter.

  In the conventional conveying apparatus 50 having such a configuration, when the drive shaft 62 of the motor 61 fixed to the link 53 is rotated, the link 53 rotates and the gear 63 rotates together with the link 53.

  In this case, the first parallel link mechanism 50 </ b> A keeps the link 51 and the link 52 in a parallel state, so that the gear 63 rotates with respect to the link 51 at the same angular velocity as the drive shaft 62. When the gear 63 rotates, the gear 64 that meshes with the gear 63 rotates at the angular velocity in the opposite direction with the same size, so the link 57 belonging to the second parallel link mechanism 50B also rotates. As a result, the conveyance table 58 fixed to the link 55 belonging to the second parallel link mechanism 50B goes straight back and forth.

  However, in such a prior art, the gear 63 fixed to one end on the link 51 side of the link 53 and the gear 64 fixed to one end on the link 51 side of the link 57 are configured to mesh with each other. Therefore, the meshing portion of the gear 63 and the gear 64 is rubbed, and dust such as metal is generated therefrom. And this dust will contaminate conveyance objects (not shown), such as a semiconductor wafer mounted in conveyance stand 58.

Further, in the prior art, the meshing portion of the gear 63 and the gear 64 is rubbed and the tooth portion is worn, and the backlash of the meshing portion becomes large. As a result, the first parallel link The power of the mechanism 50A is not correctly transmitted to the second parallel link mechanism 50B, and the object to be transported cannot be transported to the correct position.
Japanese Patent No. 2531261

  The present invention has been made to solve the above-described problems of the prior art, and the object of the present invention is to transfer a semiconductor wafer or the like supported on a transfer table without generating dust such as metal. An object of the present invention is to provide a transport device that can prevent contamination of an object.

  Another object of the present invention is to provide a transport apparatus that can transport the object to be transported to the correct position by properly transmitting the power of the first parallel link mechanism to the second parallel link mechanism without wear of the sliding portion. Is to provide.

The present invention made in order to solve the above problems includes a first link mechanism comprising a parallelogram link mechanism, a shared link sharing a predetermined link of the first link mechanism, and the length of the shared link and the length. And a second link mechanism that is linearly expandable and contractable in a predetermined direction, and a first link mechanism that constitutes the first link mechanism at a fulcrum of at least one end of the shared link. The constraining link and the second constraining link constituting the second link mechanism are configured to rotate in a state constrained at a predetermined angle, and are opposed to the shared link in the first link mechanism. The transport mechanism is provided with a transport arm member configured to rotate in a state of being restrained at a predetermined angle with respect to the opposing link at a fulcrum of a predetermined end of the link.
1st invention of this application is comprised using the predetermined link of the 1st parallelogram link mechanism and the said 1st parallelogram link mechanism, and the length of 4 sides is equal, and it is straight in a predetermined direction The first parallelogram link mechanism at fulcrums at both ends of the shared link shared by the first and second parallelogram link mechanisms. And the second constraining link composing the second parallelogram link mechanism are configured to rotate in a state constrained at a predetermined angle, respectively. In the parallelogram link mechanism, there is provided a transport arm member configured to rotate in a state of being constrained at a predetermined angle with respect to the opposing link at a fulcrum of a predetermined end of the opposing link facing the shared link. Transporting machine It is.
The second invention of the present application is a first link mechanism comprising a parallelogram link mechanism, a shared link sharing a predetermined link of the first link mechanism, the shared link being equal in length, and A second link mechanism having a second constraining link configured to rotate in a state constrained at a predetermined angle together with the first constraining link of the first link mechanism at one end of the shared link And is configured to rotate in a state of being constrained at a predetermined angle with respect to the opposing link at a fulcrum of a predetermined end portion of the opposing link facing the shared link in the first link mechanism. It is the conveyance mechanism provided with the arm member for conveyance.
In this invention, in the said invention, the length of the said 1st restraint link and the length of the said arm member for conveyance can also be made equal.
In the present invention, in the above invention, an angle formed by the first constraint link and the second constraint link may be an angle other than 90 °.
In this invention, in the said invention, it is comprised using the said 1st restraint link, and it rotates in the state restrained at the predetermined angle with respect to the said shared link in the fulcrum of the both ends of the said 1st restraint link. A third parallelogram link mechanism comprising: a first arm member configured as described above; and a second arm member configured to rotate while being constrained at a predetermined angle with respect to the opposed link. It can also be provided.
On the other hand, the present invention includes a first link mechanism composed of a parallelogram link mechanism, a shared link sharing a predetermined link of the first link mechanism, and a link having the same length as the shared link. A second link mechanism that is linearly expandable and contractable in a predetermined direction, and at the fulcrum of at least one end of the shared link, the first constraining link constituting the first link mechanism, and the second A second constraining link constituting the link mechanism is configured to rotate in a state constrained at a predetermined angle, and a predetermined end portion of an opposing link facing the shared link in the first link mechanism. A transport mechanism provided with a transport arm member configured to rotate in a state of being constrained at a predetermined angle with respect to the opposing link at the fulcrum, and a parallel mechanism configured using the transport arm member. A link-type arm mechanism, the driven by the parallel link type arm mechanism, a conveying apparatus having a conveying section for supporting the object to be transported.
The present invention is also a vacuum processing apparatus having a plurality of processing chambers connected to an evacuation system, the first link mechanism comprising a parallelogram link mechanism, and a predetermined link of the first link mechanism. And a second link mechanism that is linearly expandable and contractable in a predetermined direction, and at a fulcrum of at least one end of the shared link. The first constraining link constituting the first link mechanism and the second constraining link constituting the second link mechanism are configured to rotate in a state constrained at a predetermined angle, A transfer arm member configured to rotate in a state of being restrained at a predetermined angle with respect to the opposite link at a fulcrum of a predetermined end portion of the opposite link facing the shared link in the first link mechanism; A transporting mechanism, a parallel link arm mechanism configured using the transport arm member, and a transport unit that is driven by the parallel link arm mechanism and supports a transport target. And a vacuum processing chamber that communicates with the transfer chamber and is configured to deliver an object to be processed using the transfer device.

The operation principle of the present invention will be described below with reference to the drawings. The first and second inventions described below are included in the present invention described above.
FIG. 1 is a schematic configuration diagram (No. 1) showing an operation principle of a transport mechanism according to a first invention, and shows a case where a first parallelogram link mechanism is attached to a rotating shaft (point O). .

In the transport mechanism shown in FIG. 1, links Lad, Lcd, Lco, Lao constitute a first parallelogram link mechanism, and links Lbo, Lbe, Lce, Lco constitute a second parallelogram link mechanism. Here, in relation to the present invention,
Link Lco ... Shared link link Lad ... Opposed link link Lao, Lcd ... First restraint link link Lbo, Lce ... Second restraint link link Laf ... Corresponds to a transport arm member.
Further, it is assumed that a linear guide (indicated by a one-dot chain line in the figure) is provided on a straight line passing through the points O and E of the second parallelogram link mechanism.

In FIG. 1, the rotation angle of the link Lao with respect to the X axis is θa, the fixed angle between the link Lce and the link Lcd is θ ₁ , the fixed angle between the link Lbo and the link Lao is θ ₂ , and the fixed angle between the link Lad and the link Laf. Is θ ₃ , the angle between the rotation axis (point O) and the tip (point F) of the link Laf (indicated by a two-dot chain line) and the X axis is γ, and the angle between the linear guide and the X axis is θe. The coordinates (Xf, Yf) of the point F can be expressed by the following equations (1) and (2) when the following condition A is satisfied.

<Condition A>
1. The long sides of the first parallelogram link mechanism have the same length (Lcd = Lao = Laf≡Lb)
2. The four sides of the second parallelogram link mechanism have the same length (Lbo = Lbe = Lce = Lco≡Ls)
3. The fixed angle between the link Lce and the link Lcd is the same as the fixed angle between the link Lbo and the link Lao (θ ₁ = θ ₂ ≡θ ₁₂ ).
<Mathematical description>
Xf = OF · cosγ, Yf = OF · sinγ ――― (1)
Yf = tanγ · Xf ――― (2)
Where OF = 2Lb · cos β, γ = θe−π− (θ ₁₂ −θ ₃ ) / 2,
β = π− (θ ₁₂ + θ ₃ ) / 2−α, α = θe−θ ₁₂ −θa.

As can be understood from the above relational expression, θe, θ ₁₂ , and θ ₃ are constant angles that do not depend on θa, and therefore γ has a constant value that does not depend on θa.
This indicates that the point F is located on a straight line passing through the point O and intersecting the X axis at a constant angle γ, as described in the equation (2).
In addition, since the length of the straight line OF is a linear function of only θa, when the rotation angle θa of the link Lao changes, the point F moves on the straight line described by the equation (2).

On the other hand, when the length of the link Laf is different from the length of the link Lao, the point F moves on the curve shown in FIG.
FIG. 3 shows the locus of the point F when θ ₁ = θ ₂ = 30 °, θ ₃ = 90 °, θe = 150 °, Lbo = Lco = Lce = Lbe = 30 mm, and Lao = Lcd = 120 mm. The calculation is based on the same idea as the mathematical description.

  As understood from FIG. 3, when Laf = 120 mm, that is, when the length of the link Laf is the same as the length of the link Lao, the point F moves on the straight line represented by the expression (2).

  However, when Laf = 100 mm or Laf = 140 mm, that is, when the length of the link Laf is different from the length of the link Lao, the trajectory of the point F changes in a curved line. It will not move on the line represented.

  FIG. 2 is a schematic configuration diagram (No. 2) showing an operation principle of the transport mechanism according to the present invention, and shows a case where the first parallelogram link mechanism is attached on the fulcrum moving mechanism (point E). .

In the mechanism shown in FIG. 2, links Lad, Lcd, Lce, and Lae constitute a first parallelogram link mechanism, and links Lbo, Lbe, Lce, and Lco constitute a second parallelogram link mechanism. Here, in relation to the present invention,
Link Lce... Shared link link Lad. Opposing link link Lae, Lcd... First constraint link link Lco, Lbe. Second constraint link link Laf.
Further, it is assumed that a linear guide (indicated by a one-dot chain line in the figure) is provided on a straight line passing through the points O and E of the second parallelogram link mechanism.

In FIG. 2, the rotation angle of the link Lbo with respect to the X axis is θb, the fixed angle between the link Lco and the link Lcd is θ ₁ , the fixed angle between the link Lbe and the link Lae is θ ₂ , and the fixed angle between the link Lad and the link Laf. Is θ ₃ , the angle between the rotation axis (point O) and the tip (point F) of the link Laf (indicated by a two-dot chain line) and the X axis is γ, and the angle between the linear guide and the X axis is θe. The coordinates (Xf, Yf) of the point F can be expressed by the following expressions (3) and (4) when the following condition B is satisfied.

<Condition B>
1. The long sides of the first parallelogram link mechanism have the same length (Lcd = Lae = Laf≡Lb)
2. The four sides of the second parallelogram link mechanism have the same length (Lbo = Lbe = Lce = Lco≡Ls)
3. The fixed angle between the link Lco and the link Lcd and the fixed angle between the link Lbe and the link Lae are the same (θ ₁ = θ ₂ ≡θ ₁₂ ).
4). A fixed angle theta ₁ link Lco and link Lcd, that the relationship of the fixed angle theta ₃ links Lad and the link Laf is in phase or antiphase with a size of the same (θ ₁ = ± θ ₃₎
<Mathematical description>
Xf = OF · cosγ, Yf = OF · sinγ ――― (3)
Yf = tanγ · Xf ――― (4)
Here, when θ ₁ = θ ₃
OF = 2A · cos α, γ = θe−cos ⁻¹ {(Ls ² + A ² −Lb ² ) / (2Ls · A)},
A ² = Lb ² + Ls ² −2Lb · Ls · cos θ ₂ , α = θe−θb
When θ ₁ = −θ ₃
OF = 2Ls · cos α−2Lb · cos (α + θ ₁₂ ), γ = θe, and α = θe−θb.

As understood from the above relational expression, when θ ₁ = θ ₃ , Lb, Ls, and θ ₂ are constant values that do not depend on the rotation angle θb of Lbo, and therefore A is a constant value. Since θe is a constant value that does not depend on the rotation angle θb, γ is a constant value that does not depend on θb. Further, when θ ₁ = −θ ₃ , γ = θe (= constant value).

As described in the equation (4), when θ ₁ = ± θ ₃ , the point F is located on a straight line passing through the point O and intersecting the X axis at a certain angle γ. Show.
Further, since the length of the straight line OF is a linear function only of θb, when the rotation angle θb of the link Lbo changes, the point F moves on the straight line described by the equation (4).

On the other hand, when the length of the link Laf is different from the length of the link Lao, the point F moves on the curve shown in FIG.
FIG. 4 shows the locus of the point F when θ ₁ = θ ₂ = θ ₃ = 30 °, θe = 150 °, Lbo = Lco = Lce = Lbe = 30 mm, and Lae = Lcd = 120 mm. It is calculated with the same idea.

  As understood from FIG. 4, when Laf = 120 mm, that is, when the length of the link Laf is the same as the length of the link Lao, the point F moves on the straight line represented by the equation (4).

  However, in the case of Laf = 100 mm or Laf = 140 mm, that is, when the length of the link Laf is different from the length of the link Lae, the point F changes in a curve and is expressed by the equation (4). Will not move on the straight line.

Next, the principle of the second invention will be described with reference to the drawings.
5 to 11 are schematic configuration diagrams showing the operation principle of the transport mechanism according to the second invention.
The configuration conditions of this transport mechanism are as follows.

<Construction Condition [1]> ... See FIGS. 5 and 6 (1) The link 101, the link 102a, the link 103a, the link 103b, and the link 104 can rotate around fulcrums (axes) O, A, B, C, and D. It is connected to. Here, the link 101, the link 102a, the link 103a, and the link 104 constitute a four-link mechanism (first link mechanism).
(2) The link 103b is restrained and fixed at an arbitrary angle (η = ∠BCD) with respect to the link 103a at the fulcrum C, and the link 103a and the link 103b constitute the L-shaped arm 103 (first and first). 2 restraint links).
(3) The fulcrums O, A, B, C, and D are perpendicular to the horizontal plane (the drawing sheet).
(4) The fulcrum O and the fulcrum D move relatively only on a straight line connecting the fulcrum O and the fulcrum D (restraint condition between the fulcrum O and the fulcrum D). There are no restrictions on the movement of other fulcrums.

If this configuration condition [1] is satisfied, if any one of the link 101, the link 102a, the link 103a, the link 103b, and the link 104 rotates around the fulcrum to which the link is directly connected, the fulcrum O And the fulcrum D constraint condition (the above condition (4)), the position of each fulcrum is determined with respect to the rotation angle (if there is no constraint condition for fulcrum O and fulcrum D, fulcrum O, A, B, The positions of C and D are indefinite).
However, since there is a region where the links are stretched and cannot move due to the length of each link, there is a restriction “within the movable range of each link”.

<Construction Condition [2]> ... See FIGS. 5 and 6 The lengths of the link 101 and the link 103a are equal (OA = CB), and the lengths of the link 102a, the link 103b and the link 104 are equal (AB = OC = CD). .
Here, in the relationship with the present invention, the link 103b and the link 104 correspond to the second link mechanism, and the link 104 corresponds to the shared link.

  When the configuration condition [2] is added to the configuration condition [1], any one of the link 101, the link 102a, the link 103a, the link 103b, and the link 104 is angled around the axis to which the link is directly connected. When θ rotates, each inner angle of the quadrangle OABC changes by 2θ.

This operation will be described with reference to FIGS.
Due to the configuration condition [2], the quadrangle OABC is a parallelogram, and the triangle OCD is an isosceles triangle.
5 and 6 show a case where the link is rotated around the fulcrum O. In FIG. 5, the angle (θ) formed by the Y axis and the link 101 and the angle formed by the link 102a and the link 101 (γ = ∠ Γ = −2θ + η between OAB) and β = 2θ + (π−η) between the link 102a and the link 103a (β = ∠ABC), and the angle between the link 104 and the link 103b between the X-axis. Υ = θ + (π / 2−η) holds during (υ = ∠COD = ∠CDO).

  In the case of the link mechanism shown in FIG. 6, γ = 2θ + (π−η), β = −2θ + η, and υ = −θ− (π / 2−η) are established in the same manner. Here, in the case of FIG. 5 and FIG. 6, the expressions representing γ, β, and υ are different, but this is due to the difference in how to take each angle in the figure and is essentially the same. It has become.

  Since the link 103b is fixed to the link 103a as described above (η = constant angle), when the link 101 is rotated by Δθ around the fulcrum O, the amount of change in the angle formed by the link 102a and the link 101 (Δγ ) And the change amount (Δβ) of the angle formed by the link 102a and the link 103a is twice the change amount (2Δθ) of the angle change (Δθ) of the link 101.

  Further, since Δυ = Δθ, even when the link 104 is rotated by Δθ around the fulcrum O, the change amount (Δγ) of the angle formed by the link 102a and the link 101 is 2 of the rotation angle (Δθ) of the link 104. Double the amount of change (2Δθ).

  The above is a case where the link is rotated around the fulcrum O by Δθ. Since the quadrangle OABC is a parallelogram and the triangle OCD is an isosceles triangle, all the links are around the fulcrum directly connected. The rotation is relatively Δθ.

  Therefore, when any one of the link 101, the link 102a, the link 103a, the link 103b, and the link 104 is rotated by Δθ around a fulcrum to which the link is directly connected, each inner angle of the quadrangle OABC is 2Δθ. Will change.

Configuration Condition [3]... See FIGS. 7 to 9 (1) In link 101, link 102a, link 103a, link 103b, link 104, or any link of L-shaped arm 103 (hereinafter referred to as “link U”). Then, the arm 102b is connected to be rotatable around one fulcrum (hereinafter referred to as “fulcrum S”) of the link U (a transfer arm member).
(2) The length of the arm 102b is equal to the length between the fulcrums of the link U.
(3) The arm 102b is restrained and fixed at an arbitrary angle (ξ) with respect to another link connected to the fulcrum S of the link U.

The configuration condition [3] will be described below with reference to FIGS.
FIG. 7 or FIG. 8 is configured by incorporating the configuration condition [3] into the link mechanism shown in FIG. 5 or FIG. 6, and the arm 102b is rotatably connected around the fulcrum A, and the length of the arm 102b is shown. Is equal to the length of the link 101 and the link 103a (OA = AE), the arm 102b is restrained and fixed at an arbitrary angle (ξ = 任意 BAE) with respect to the link 102a, and the L-shaped arm 102 is composed of the link 102a and the arm 102b. Is configured. Other configurations are the same as those shown in FIGS.

  When the configuration conditions [2] and [3] are added to the configuration condition [1], the arm 102b rotates around the fulcrum A integrally with the link 102a. As a result, the above-described configuration condition [2] As understood from the description, when the link 101 is rotated by Δθ around the fulcrum O, the link 104 is rotated by Δθ around the fulcrum O, or the link 103b is rotated by Δθ around the fulcrum D, the arm 102b The angle (∠OAE) formed by the link 101 rotates around the fulcrum A that is twice the rotation angle (Δθ) of the link 101 (Δθ).

  The triangle OAE is an isosceles triangle, and ∠AOE = ∠AEO. That is, when the angle (∠OAE) formed by the arm 102b and the link 101 increases by 2Δθ, ∠AOE and ∠AEO each decrease by Δθ.

  Therefore, when the link 101 or the link 104 is rotated around the fulcrum O, or the link 103b is rotated around the fulcrum D, the tip (E) of the arm 102b becomes the fulcrum with the tip (E) of the arm 102b. Move on a straight line (L) connecting O.

  On the other hand, FIG. 9 shows an example in which the link 103b is rotated around the fulcrum D in the configuration shown in FIG. 8. Here, the arm 102b (BD = BE) equal to the length of the fulcrum D and the fulcrum B is used. The arm 102b is connected to the link 102a at an arbitrary angle (ξ = ∠ABE) so as to be rotatable around the fulcrum B. The link 102a and the arm 102b constitute the L-shaped arm 102. .

  In the case of this example, when the link 101 or the link 104 is rotated around the fulcrum O, or the link 103b is rotated around the fulcrum D, the tip (E) of the arm 102b becomes the tip of the arm 102b ( E) moves on a straight line (L) connecting fulcrum D.

Configuration condition [4]... See FIGS. 10 and 11. (1) The link 105 and the link 107 are rotatably connected around the fulcrum A and the fulcrum O of the link 101 of the first link mechanism. The link 106 is rotatably connected around the fulcrum F at the end and the fulcrum G at the end of the link 107 to constitute a four-bar linkage mechanism (third link mechanism).
(2) The fulcrum F and the fulcrum G are perpendicular to the horizontal plane (the drawing sheet).
(3) The link 105 is restrained and fixed to the link 102a at a constant angle (角度 BAF), and the link 107 is restrained and fixed to the link 104 at a constant angle (一定 COG). The angle formed between the link 105 and the link 102a (∠BAF) is equal to the angle formed between the link 107 and the link 104 (∠COG), and is an arbitrary angle other than 0 ° and 180 ° (μ = ∠BAF = ∠COG). , Μ ≠ 0, 180 °).
(4) The lengths of the link 105 and the link 107 are equal (AF = OG), and the link 106 is equal to the length of the link 101 (GF = OA).

The configuration condition [4] will be described below with reference to FIGS.
FIGS. 10 and 11 are configured by incorporating the configuration condition [4] into the transport mechanism shown in FIGS. 5 and 6, and the other configurations are the same as those in FIGS. 5 and 6.

  When the configuration conditions [2] and [4] are added to the configuration condition [1], the first link mechanism composed of the links 101, 102a, 103a, and 104 becomes a dead center state (straight line state). Even so, the angle (γ = ∠OAB) formed by the link 102a and the link 101 is the rotation of the link 101, the link 104, and the link 103b by the action of the parallelogram link mechanism constituted by the links 101, 105, 106, and 107. The angle (2θ) changes twice as much as the angle (θ). In addition, when the third link mechanism configured by the links 101, 105, 106, and 107 enters a dead center state, the same operation is performed by the first link mechanism configured by the links 101, 102a, 103a, and 104. It becomes the operation state.

  According to the present invention described above, there is no sliding portion due to meshing of gears as in the prior art, and power can be transferred and conveyed only by a combination of link mechanisms.

Accordingly, dust such as metal is not generated, and contamination of a semiconductor wafer or the like that is a conveyance target can be prevented.
In addition, since there is no backlash caused by wear of the sliding portion, the object to be transported can be transported to the correct position.

  In particular, according to the first invention, since the second parallelogram link mechanism is composed of four links, for example, the point E shown in FIG. A mechanism can be obtained.

On the other hand, according to the second invention, it is possible to obtain a transport mechanism having a simpler configuration with fewer links.
In the present invention, when the length of the first restraining link is equal to the length of the transport arm member, the tip of the transport arm member can be moved linearly.

  In the present invention, if the angle between the opposing link and the transport arm member is 90 °, and the angle between the first restraint link and the second restraint link is 90 °, the transport arm member It is possible to move the distal end portion in the expansion / contraction direction of the second link mechanism.

  In the first invention, when the angle formed by the first restraining link and the second restraining link is an angle other than 90 °, the transport arm member is positioned at the position where the first restraining link overlaps with the first restraining link. Since the two parallelogram link mechanisms are not straight but form a parallelogram, the transport arm member can be stably rotated.

  Moreover, in this invention, it comprised using the 1st restraint link and it was comprised so that it might rotate in the state restrained by the predetermined angle with respect to the shared link in the fulcrum of the both ends of the said 1st restraint link. When a third parallelogram link mechanism having a first arm member and a second arm member configured to rotate in a state of being constrained at a predetermined angle with respect to the opposing link is provided. Since the first parallelogram link mechanism and the third parallelogram link mechanism do not become fixed point positions at the same time, the conveying arm member can be attached without rotating the rotation direction at each fixed point position. It can be rotated stably.

  And according to this invention, while being able to prevent contamination of the semiconductor wafer etc. which are conveyance objects, the vacuum processing apparatus which can convey a conveyance object to the right position and can contribute to the improvement of a throughput. Can be provided.

  According to the present invention, a transfer object such as a semiconductor wafer is not contaminated, and the transfer object can be transferred to a correct position with high accuracy.

Schematic configuration diagram showing the operating principle of the transport mechanism according to the first invention (part 1) Schematic configuration diagram showing the operation principle of the transport mechanism according to the first invention (No. 2) The graph which shows the locus | trajectory of the point F in the conveyance mechanism of FIG. A graph showing the locus of point F in the transport mechanism of FIG. Schematic configuration diagram showing the operating principle of the transport mechanism according to the second invention (configuration conditions [1] [2]) Schematic configuration diagram showing the operating principle of the transport mechanism according to the second invention (configuration conditions [1] [2]) Schematic configuration diagram showing the operating principle of the transport mechanism according to the second invention (configuration condition [3]) Schematic configuration diagram showing the operating principle of the transport mechanism according to the second invention (configuration condition [3]) Schematic configuration diagram showing the operating principle of the transport mechanism according to the second invention (configuration condition [3]) Schematic configuration diagram showing the operating principle of the transport mechanism according to the second invention (configuration condition [4]) Schematic configuration diagram showing the operating principle of the transport mechanism according to the second invention (configuration condition [4]) Schematic which shows the basic composition of embodiment of the conveyance mechanism concerning 1st invention (A)-(d): Explanatory drawing which shows operation | movement of the conveyance mechanism. 1 is a schematic configuration diagram showing an embodiment of a transport apparatus using a transport mechanism according to a first invention. (A)-(d): Explanatory drawing which shows the expansion-contraction operation | movement of the conveying apparatus of the embodiment. Schematic configuration diagram showing a modification of the transport device (A): Explanatory drawing showing the state where the conveying apparatus of the embodiment is in the overlapping position, (b): Explanatory drawing showing the state of the conveying mechanism at that time (A)-(c): The schematic block diagram which shows the structure of other embodiment of the conveyance mechanism which concerns on 1st invention, and its expansion-contraction operation | movement. The schematic block diagram which shows other embodiment of the conveying apparatus which concerns on this invention (A)-(c): The figure for demonstrating the subject in this invention Explanatory drawing which shows the state of the conveyance mechanism in a fixed point position The schematic block diagram which shows other embodiment of the conveyance mechanism which concerns on 1st invention. The schematic block diagram which shows other embodiment of the conveying apparatus which concerns on 1st invention. Schematic which shows the basic composition of embodiment of the conveyance mechanism concerning 2nd invention Schematic which shows the basic composition of embodiment of the conveyance mechanism concerning 2nd invention The schematic block diagram which shows embodiment of the conveying apparatus which concerns on 2nd invention The schematic block diagram which shows embodiment of the conveying apparatus which concerns on 2nd invention The schematic block diagram which shows embodiment of the conveying apparatus which concerns on 2nd invention The schematic block diagram which shows other embodiment of the conveying apparatus which concerns on 2nd invention. The schematic block diagram which shows other embodiment of the conveying apparatus which concerns on 2nd invention. The schematic block diagram which shows other embodiment of the conveying apparatus which concerns on 2nd invention. The top view which shows roughly the structure of embodiment of the vacuum processing apparatus provided with the conveying apparatus by this invention A plan view showing a schematic configuration of a conventional transport device

Explanation of symbols

1, 2, 3, 4, 5, 6 ... fulcrum 7 ... L-shaped arm 7a ... Arm (first restraining link) 7b ... Link (second restraining link) 8 ... L-shaped arm 8a ... Arm (transport arm) Member) 8b ... link 9 ... L-shaped arm 9a ... link (first constraining link) 9b ... link (second constraining link) 12 ... fulcrum moving mechanism 12a ... linear guide (guide part) 13 ... first parallel four sides Linkage (first parallelogram link mechanism) 14 ... Second parallelogram linkage (second parallelogram link mechanism) 15, 15a, 15b, 15c ... Conveying mechanism 16 ... Conveying platform (conveying unit) 26 ... Parallel link type arm mechanism 27 ... Upper arm linkage 28 ... Lower arm linkage 41 ... Vacuum processing devices 60a, 60b, 60c ... Transfer devices 101, 102a, 104 ... Link 102b ... Ar (Carrying arm member) 102 ... L-shaped arm 103 ... L-shaped arm 103a ... link (first constraining link) 103b ... link (second constraining link) 200A, 200B ... transport mechanism 300A～300F ... transporting device

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 12 is a schematic diagram showing the basic configuration of the embodiment of the transport mechanism according to the first invention, and FIGS. 13A to 13D are explanatory views showing the operation of the transport mechanism.

  As shown in FIG. 12, the transport mechanism 15 of the present embodiment is a type in which the first parallelogram link mechanism is attached to the rotation axis (point O) described in FIG. It has a shape linkage (first parallelogram link mechanism) 13 and a second parallelogram linkage (second parallelogram link mechanism) 14.

The first parallelogram linkage 13 includes an arm (link) 7 a, a link 8 b, a link 9 a, and a link 10.
In the case of this embodiment, the arm 7a and the link 9a use members longer than the link 8b and the link 10.

  On the other hand, the second parallelogram linkage 14 is constituted by a link (shared link) 10 of the first parallelogram linkage 13 and links 7b, 11 and 9b having the same length as the link 10, respectively. Has been.

  The link 10 is attached so as to be rotatable around the fulcrum 1 and the fulcrum 4 at both ends thereof, and the link (opposite link) 8b facing the link 10 is rotatable around the fulcrum 2 and the fulcrum 3 at both ends thereof. It is attached.

In the case of the present embodiment, at the fulcrum 7c at one end of the link 10 shared by the first and second parallelogram linkages 13 and 14, the arm 7a (first constraint) constituting the first parallelogram linkage 13 is used. Link) and the link 7b (second constraining link) constituting the second parallelogram linkage 14 are configured to rotate in a constrained state at an angle (θ ₂ ) of 90 °.

  That is, the arm 7a and the link 7b are fastened to form the L-shaped arm 7. The fastening portion 7c of the arm 7a and the link 7b is rotatably attached around the fulcrum 1, and the fastening portion 7c of the arm 7a The opposite end is rotatably attached to the fulcrum 2, and the end opposite to the fastening portion 7 c of the link 7 b is rotatably attached to the fulcrum 5.

The L-arm 7 is configured to give a driving force of a motor (not shown).
In addition, at the fulcrum 9c at the other end of the link 10 shared by the first and second parallelogram linkages 13 and 14, a link 9a (first constraint link) constituting the first parallelogram linkage 13; The link 9b (second constraining link) constituting the second parallelogram linkage 14 is configured to rotate in a constrained state at an angle (θ ₁ ) of 90 °.

  That is, the link 9a and the link 9b are fastened to form the L-shaped link 9, and the fastening portion 9c of the link 9a and the link 9b is attached rotatably around the fulcrum 4, and the fastening portion 9c of the link 9a The opposite end is rotatably attached to the fulcrum 3, and the end opposite to the fastening portion 9 c of the link 9 b is rotatably attached to the fulcrum 6.

  Here, the second parallelogram linkage 14 is configured such that the fulcrum 5 passes below the fulcrum 4 when the fulcrum 4 and the fulcrum 5 have different heights and the L-shaped arm 7 is rotated. Has been.

Further, in the present embodiment, the fulcrum 2 at one end of the link 8b facing the link 10 of the first parallelogram linkage 13 is at an angle (θ ₃ ) of 90 °, for example, with respect to the link 8b. An arm 8a (transport arm member) configured to rotate in a restrained state is provided.

  That is, the arm 8a and the link 8b are fastened to form the L-shaped arm 8, and the fastening portion 8c of the arm 8a and the link 8b is rotatably attached around the fulcrum 2 and the fastening portion 8c of the link 8b The opposite end is rotatably attached to the fulcrum 3.

  In the case of the present embodiment, the arm 8a is configured to have the same length as the arm 7a and the link 9a. Line).

On the other hand, in the present embodiment, the fulcrum 1 described above is provided at one end of the long base plate 29.
On the base plate 29, a linear guide (guide portion) 12a is provided which extends in the longitudinal direction and is configured so that the relative positional relationship with the fulcrum 1 does not change.

  The fulcrum 6 of the second parallelogram linkage 14 is attached to a fulcrum moving mechanism 12 configured to move along the linear guide 12a, whereby the second parallelogram linkage 14 becomes linear. The fulcrum 6 moves along a one-dot chain line that passes through the fulcrum 1 in the figure by linearly expanding and contracting along the guide 12a.

FIGS. 13A to 13D are explanatory diagrams showing the operation principle of the present embodiment.
FIG. 13A is an initial state. This state is the same as the state shown in FIG.
Now, when the L-shaped arm 7 is rotated in the CW (clockwise) direction about the fulcrum 1 by an angle θ, the link 7b rotates with the arm 7a in the CW direction about the fulcrum 1 by an angle θ.

At this time, the fulcrum 6 moves linearly in a direction away from the fulcrum 1 along the linear guide 12a in synchronization with the operations of the link 7b and the link 11 by the fulcrum moving mechanism 12.
Thus, the second parallelogram linkage 14 changes its shape while maintaining the parallelogram shape, and the link 10 rotates about the fulcrum 1 in the CCW (counterclockwise) direction by an angle θ.

  In the case of the present embodiment, the arm 7a, the link 8b, the link 9a, and the link 10 constitute the first parallelogram linkage 13, so when the link 10 rotates about the fulcrum 1 in the CCW direction by an angle θ, The link 8b rotates about the fulcrum 2 in the CCW direction by the angle θ, and the arm 8a rotates together with the link 8b about the fulcrum 2 in the CCW direction by the angle θ.

  Considering a series of these operations based on the fulcrum 2, the arm 7 a rotates about the fulcrum 2 in the CW direction by the angle θ, and at the same time, the arm 8 a rotates about the fulcrum 2 in the CCW direction by the angle θ. The arm 8a is rotated by an angle 2θ in the CCW direction around the fulcrum 2 with respect to the arm 7a (the state shown in FIG. 13B).

In the present embodiment, since the length of the arm 8a is the same as the length of the arm 7a, the distal end portion 80 of the arm 8a moves on the nilia guide 12a (conveying line) toward the fulcrum 1 by the rotation of the arm 8a. Moving.
Furthermore, in this embodiment, since the heights of the fulcrum 4 and the fulcrum 5 are different, when the L-arm 7 is rotated in the CW direction, the fulcrum 5 passes below the fulcrum 4 and FIG. ), The fulcrum 4 and fulcrum 5 positional relationship is reversed.

Here, in the present embodiment, since the length of the arm 8a is equal to the length of the arm 7a, the distal end portion 80 of the arm 8a moves along the transport line and passes over the fulcrum 1.
When the L-shaped arm 7 is continuously rotated in the CW direction, the tip 80 of the arm 8a moves away from the fulcrum 1 as shown in FIG. 13 (d).

  To return from the state of FIG. 13D to the state of FIG. 13A, the L-shaped arm 7 is rotated in the reverse direction (CCW) to the operation described above. In this way, the rotational power of the L-shaped arm 7 is transmitted to the L-shaped arm 8, and the operation can be controlled so that the L-shaped arm 8 rotates by an angle twice the rotational angle of the L-shaped arm 7. .

FIG. 14 is a schematic configuration diagram showing an embodiment of a transport apparatus using the transport mechanism of the first invention, which is a transport apparatus using a parallel link arm mechanism.
As shown in FIG. 14, the transport device 60 a of the present embodiment uses a transport mechanism 15 a having the same configuration as the transport mechanism 15 described above, and has a parallel link arm mechanism 26. Hereinafter, detailed description of portions corresponding to the above-described embodiment will be omitted.

  The parallel link type arm mechanism 26 includes an upper arm linkage 27 composed of upper arms 17a and 17b and links 23 and 24, which are opposed to each other in parallel, lower arms 18a and 18b, links 24, a carriage 24, ) 16 and lower arm linkage 28.

  The upper arm 17a of the upper arm linkage 27 corresponds to the arm 7a, and the links 23 and 24 are rotatably attached to the fulcrums 1 and 2 at both ends thereof. Further, the fulcrum 1 of the links 23 and 24, The link 17b is rotatably attached to the fulcrums 22 and 19 on the opposite side to 2.

Here, the fulcrum 22 is provided on an extension line of the linear guide 12 a on the base plate 29.
The lower arm 18a of the lower arm linkage 28 corresponds to the arm 8a. The lower arm 18a is fastened to the link 8b to form an L-shaped arm 18. The fastening portion is rotatably attached to the fulcrum 2. .

  The lower arm 18b facing the lower arm 18a is rotatably attached to the fulcrum 19 of the upper arm linkage 27, and the lower arms 18a and 18b are rotatably attached to the fulcrums 20 and 21 provided on the transport table 16. It has been.

In the case of the present embodiment, the lengths of the links 23 and 24 (distance between fulcrums) and the distance between fulcrums of the transport table 16 (length between the fulcrums 20 and 21) are configured to be the same. . Further, the lengths (distance between fulcrums) of the upper arms 17a and 17b and the lower arms 18a and 18b are also configured to be the same.
An end effector 25 for mounting a transfer object (not shown) such as a wafer is attached to one tip of the transfer table 16.

  In the case of the conveyance device 60a of the present embodiment, the linear guide 12a, the fulcrum 1, the link 23, and the fulcrum 22 are respectively attached to the common base plate 29. The relative positional relationship among the fulcrum 1, the link 23, and the fulcrum 22 does not change.

  In the transport device 60a of the present embodiment, the fulcrum 1 and the fulcrum 22 are connected by the link 23, but the fulcrum 1 and the fulcrum 22 may be provided directly on the common base plate 29. In this case, the link 23 becomes unnecessary, but the telescopic operation and the turning operation as the transport device can be performed in the same manner as the transport device 60a of the present embodiment.

FIGS. 15A to 15D are explanatory views showing the expansion / contraction operation of the transport apparatus according to the present embodiment, and FIG. 15A shows the contracted state in the initial state.
In the case of the present embodiment, since the upper arm 17a, 17b and the links 23, 24 constitute the parallelogram upper arm linkage 27, when the upper arm 17a is rotated around the fulcrum 1 by the angle θ in the CCW direction, The upper arm 17b also rotates about the fulcrum 22 in the CCW direction by an angle θ, whereby the link 24 moves while maintaining a parallel state with the link 23.

At the same time, as described in the operation principle of FIG. 13, the lower arm 18a rotates about the fulcrum 2 in the CCW direction by an angle 2θ by the action of the transport mechanism 15a.
As described above, when the upper arm 17a rotates about the fulcrum 1 in the CCW direction by an angle θ, the positions of the lower arm 18a and the link 24 are determined, and the parallelogram shape of the lower arm linkage 28 is uniquely determined. As shown in FIG. 15 (b) → FIG. 15 (c) → FIG. 15 (d), the apparatus performs an extending operation. Thereby, the end effector 25 moves in the direction (right direction in the figure) from the fulcrum 1 to the fulcrum 22 on the extension line (conveyance line) of the linear guide 12a.

When returning from the extended state shown in FIG. 15 (d) to the contracted state shown in FIG. 15 (a), the upper arm 17a is rotated in the opposite direction (CCW direction) to the aforementioned movement.
In this way, by rotating the upper arm 17a to perform the telescopic operation of the transport device, the transport base 16 and the end effector 25 can be translated on the transport line.

  As described above, in the transfer device 60a of the present embodiment, the second parallelogram linkage 14 is configured by sharing the link 10 constituting the first parallelogram linkage 13, and the first parallelogram linkage 14 is shared. The fulcrum 6 of the two parallelogram linkages 14 is translated by the fulcrum moving mechanism 12. Accordingly, the rotational motion of the upper arm 17a is transmitted to the lower arm 18a, and the lower arm 18a rotates by an angle twice the rotational angle of the upper arm 17a, so that the movement of the upper arm linkage 27 is correctly transmitted to the lower arm linkage 28.

As described above, according to the present embodiment, there is no sliding portion due to meshing of gears as in the prior art, and it is possible to transfer and transmit power only by a combination of link mechanisms.
Therefore, dust such as metal is not generated, and contamination of a semiconductor wafer or the like that is a conveyance target can be prevented.

  Further, according to the present embodiment, there is no backlash caused by wear of the sliding portion, and power is correctly transmitted between the upper arm linkage 27 and the lower arm linkage 28 to convey the object to be conveyed to the correct position. can do.

  In the above-described embodiment, the expansion / contraction operation of the transport device 60a has been described by taking the case where the upper arm 17a is rotated around the fulcrum 1 as an example, but the upper arm 17b is rotated around the fulcrum 22 as an example. Even in such a case, the telescopic operation can be performed. Since this operation is the same as when the upper arm 17a is rotated, detailed description thereof is omitted.

  In the above-described embodiment, the expansion / contraction operation of the transfer device 60a has been described by taking the case where the upper arm 17a is rotated around the fulcrum 1 as an example. However, the drive shaft 32 is installed at the fulcrum 1 and the drive is performed. It is also possible to attach the upper arm 17 a to the shaft 32 and rotate the drive shaft 32 to rotate the upper arm 17 a around the fulcrum 1.

  On the other hand, when the transport device 60a of the present embodiment is turned, the relative position between the base plate 29 and the upper arm 17a is not changed in the contracted state of the parallel link arm mechanism 26 shown in FIG. This is done by rotating the base plate 29 around the fulcrum 1. Alternatively, in the same contracted state, the base plate 29 and the drive shaft 32 are simultaneously rotated in the same direction by the same angle.

  On the other hand, in the transfer device 60a described above, the end effector 25 is attached to only one of the transfer tables 16. However, the present invention is not limited to this. For example, as shown in FIG. End effectors 25a and 25b may be attached.

  According to such a structure, the conveyance efficiency of a conveyance target object can be improved. The expansion / contraction operation of the transfer device is basically the same as that of the transfer device 60a shown in FIGS.

By the way, in the substrate processing apparatus provided with the transfer apparatus as in the present invention, there is a request for simultaneously holding two transfer objects such as wafers and a request for reducing the turning radius of the transfer apparatus.
In order to meet such a demand, it is necessary to move the lower arm linkage 28 of the transfer device 60a shown in FIG. 14 beyond the position where it overlaps with the upper arm linkage 27 (hereinafter referred to as “overlapping position”).

FIG. 17A is an explanatory view showing a state in which the transport apparatus of the present embodiment is in the overlapping position, and FIG. 17B is an explanatory view showing a state of the transport mechanism at that time.
As understood from FIGS. 17A and 17B, here, the link 7b, the link 11, the link 9b, and the link 10 constituting the second parallelogram linkage 14 are in a straight line ( In FIG. 17B, the fulcrums 1, 2, and 6 are divided into two parts so that the positional relationship of the links can be understood.

  As shown in FIG. 17B, when the upper arm 17a is rotated in the CW direction around the fulcrum 1 in this state, the rotation direction of the link 10 cannot be forcibly determined. The direction of rotation in the CW direction or CCW direction is not determined.

  As a result, since the rotation direction of the link 8b constituting the first parallelogram linkage 13 is not determined, the rotation direction of the lower arm 18a is also not determined, and the lower arm linkage 28 may not be able to move beyond the overlapping position. Thus, the operation of each linkage at the overlapping position becomes unstable.

FIGS. 18A to 18C are schematic configuration diagrams showing the configuration of the transport mechanism according to another embodiment of the first invention and the expansion and contraction operation thereof, and are for solving the above-described problems.
Figure 18 (a) ~ (c) , in particular as shown in FIG. 18 (b), the conveying mechanism 15b in this embodiment, the mounting angle of the link 9b for fitting angle theta ₂ and the link 9a of the link 7b relative to the arm 7a θ ₁ is configured to be an angle other than 90 ° and equal to each other (in FIG. 18B, the fulcrum 2 and the fulcrum 3 are divided into two so that the positional relationship of the links can be understood. Represent).

Accordingly, the attachment angle θ ₄ of the linear guide 12a with respect to the transport line (X-axis direction) is not 0 °, in particular, in this embodiment, the attachment angle θ ₂ of the link 7b with respect to the arm 7a (= link 9a). The attachment angle θ ₁ ) of the link 9b with respect to
And by this structure, the front-end | tip part 80 of the link 8a and the fulcrum moving mechanism 12 (fulcrum 6) move relatively with the angle which is not 0 degree.

In the case of the present invention, the attachment angle θ ₂ of the link 7b with respect to the arm 7a, the attachment angle θ ₁ of the link 9b with respect to the link 9a, and the attachment angle θ ₄ of the linear guide 12a with respect to the transport line should satisfy θ ₁ = θ _2. Other than that, there is no particular limitation, and an optimum angle may be set according to the requirements of each device configuration, movable range, and the like.

  FIG. 18A shows a contracted state of the initial state of the present embodiment. In this state, when the arm 7a is rotated about the fulcrum 1 by an angle θ in the CW direction, the principle explained in FIG. The arm 8a rotates about the fulcrum 2 about the fulcrum 2 with respect to the arm 7a by an angle 2θ in the CCW direction.

Then, as shown in FIG. 18B, the arm 8a reaches just above the arm 7a.
In this case, although the arm 8a and the arm 7a in overlapping position, in the present embodiment, the attachment angle theta ₁ of the link 9b for fitting angle theta ₂ and the link 9a of the link 7b relative to the arm 7a is at an angle other than 90 ° Therefore, unlike the transport mechanism 15 shown in FIG. 13, the links 7b, links 11, links 9b, and links 10 constituting the second parallelogram linkage 14 are not straight but parallel sides. Form a shape.

  Therefore, when the arm 7a is rotated in the CW direction around the fulcrum 1, the link 7b rotates in the CW direction around the fulcrum 1 and the link 10 rotates in the CCW direction around the fulcrum 1, so that the arm 8a Passing right above, the arm 8a reaches a position away from the fulcrum 1 as shown in FIG.

  On the other hand, when returning from the state shown in FIG. 18C to the state shown in FIG. 18A, the arm 7a is rotated in a direction (CCW) opposite to the above-described movement. By such an operation, the arm 8a can stably pass directly above the arm 7a without the rotation direction becoming indefinite at the overlapping position.

FIG. 19 is a schematic configuration diagram showing another embodiment of the transport apparatus according to the first invention, which is a transport apparatus using a parallel link arm mechanism.
As shown in FIG. 19, the transport device 60 b of the present embodiment uses the transport mechanism 15 b described above, and has a parallel link type arm mechanism 26.

  Here, the parallel link type arm mechanism 26 is configured by using the upper arm linkage 27, the lower arm linkage 28, the transport base 16, and the end effector 25, as in the transport device 60a shown in FIG. Omitted.

  Further, the transport mechanism 15b is configured such that the arm 7a described in FIG. 16 corresponds to the upper arm 17a, and the arm 8a corresponds to the lower arm 18a. Further, the configuration of the other parts of the transport mechanism 15b is the same as the description in FIG.

  The operation of the transport device 60b of this embodiment is the same as that of the transport device 60a shown in FIG. 14 except for the operation of the transport mechanism 15b described above, and the operations of the transport mechanism 15b are shown in FIGS. ). Therefore, detailed description of the telescopic operation and the turning operation of the present embodiment is omitted.

  As described above, in the transfer device 60b according to the present embodiment, the second parallelogram linkage 14 is configured by sharing the link 10 constituting the first parallelogram linkage 13, and the first parallelogram linkage 14 is shared. The fulcrum 6 of the two parallelogram linkages 14 is translated by the fulcrum moving mechanism 12. Accordingly, the rotational motion of the upper arm 17a is transmitted to the lower arm 18a, and the lower arm 18a rotates by an angle twice the rotational angle of the upper arm 17a, so that the movement of the upper arm linkage 27 is correctly transmitted to the lower arm linkage 28.

  As described above, according to the present embodiment, as in the above-described embodiment, dust such as metal in the sliding portion is not generated, and contamination of a semiconductor wafer or the like that is a conveyance target can be prevented. Power can be correctly transmitted between the upper arm linkage 27 and the lower arm linkage 28 to convey the object to be conveyed to the correct position.

  Further, in the present embodiment, the attachment angle of the link 7b with respect to the upper arm 17a and the attachment angle of the link 9b with respect to the link 9a are not equal to 90 °, and the fulcrum moving mechanism 12 is Since it is attached so as to move at an angle other than 0 ° with respect to the expansion / contraction movement direction (conveyance line), the lower arm 18a can be stabilized immediately above the upper arm 17a without the rotational direction becoming indefinite at the overlapping position. Thus, the lower arm linkage 28 can be stably moved beyond the overlapping position.

On the other hand, in a substrate processing apparatus provided with a transfer apparatus as in the present invention, there is a demand for transferring an object to be transferred such as a wafer further away.
For such a request, the upper arm 17a is rotated in the CW direction so that the angle formed by the lower arm linkage 28 and the upper arm linkage 27 of the parallel link arm mechanism 26 shown in FIG. As shown in FIG. 20C, it is conceivable to increase the reach distance of the end effector 25.

  In this operation, the upper arm 17a, the link 10, the link 9a, as shown in FIG. 20 (b), while the parallel link type arm of the transport device is in the state of FIG. 20 (a) to FIG. 20 (c), A state occurs in which the link 8b is in a straight line (this position is hereinafter referred to as a “fixed point position”).

FIG. 21 shows the state of the transport mechanism 15a at the fixed point position (in FIG. 21, the fulcrums 2 and 4 are divided into two parts so that the positional relationship of the links can be understood).
In FIG. 21, when the upper arm 17a is rotated in the CW direction around the fulcrum 1, the link 10 rotates in the CCW direction by the operation of the fulcrum moving mechanism 12, but in this state, the rotation direction of the link 8b is forcibly changed. Since the link 8b cannot be determined, it cannot be determined whether the link 8b rotates around the fulcrum 2 in the CW or CCW direction.

  As a result, since the rotation direction of the link 8b constituting the first parallelogram linkage 13 is not determined, the rotation direction of the lower arm 18a is also not determined, and the lower arm linkage 28 may not move beyond the fixed point position. . Thus, the operation of each linkage at the fixed point position becomes unstable.

FIG. 22 is a schematic configuration diagram showing another embodiment of the transport mechanism according to the first invention, and is for solving the above-described problem.
In the transport mechanism 15 c of the present embodiment, a link 8 d that can rotate integrally with the link 8 b around the fulcrum 2 is attached to the fastening portion 8 c of the L-shaped arm 8, and further, the link 10 around the fulcrum 1. And a link 30 that is rotatable together with it.

Here, the attachment angle of the link 30 with respect to the link 10 and the attachment angle of the link 8d with respect to the link 8b are configured to be the same (θ ₅ ).
Further, the link 9d is rotatably attached to the end portion 33 of the link 8d opposite to the fulcrum 2 and the end portion 34 of the link 30 opposite to the fulcrum 1 respectively. The length of the link 9d is the same as the length of the arm 7a (the distance between the fulcrums is the same).

  The link 8d, the link 9d, the link 30, and the arm 7a constitute a third parallelogram linkage 31. Since the other configuration is the same as that of the transport mechanism 15 shown in FIG.

In the transport mechanism 15c in the present embodiment, the mounting angle theta ₅ of the link 30 to the link 10, the mounting angle theta ₅ links 8d to the link 8b, but is about 60 °, device configuration, a movable range, etc. The most suitable mounting angle is desirable.

In particular, the mounting angle theta ₅ of the link 30 to the link 10, the smaller fitting angle theta ₅ links 8d to the link 8b, a first parallelogram linkage 13 fixed point position of the third parallelogram linkage 31 Since they are close to each other and cannot pass through the fixed point position stably, from this point of view, it is preferable that the mounting angle θ ₅ is about 30 ° to about 60 °.

The operation principle of the transport mechanism 15c of this embodiment will be described with reference to FIG.
22 shows a state in which the arm 7a, the link 10, the link 9a, and the link 8b are in a straight line as in the case shown in FIG. 21 (the fulcrum 2 is shown in FIG. 22 so that the positional relationship of the links can be understood). 4 is divided into two parts).
In FIG. 22, when the arm 7a is rotated around the fulcrum 1 in the CW direction, the link 10 rotates in the CCW direction by the action of the fulcrum moving mechanism 12 as in the case of the transport mechanism 15a shown in FIG. Since the rotation direction of the link 8b cannot be forcibly determined, it is not determined whether the link 8b rotates in the CW or CCW direction around the fulcrum 2.

However, in the case of the present embodiment, the link 30 rotates in the CCW direction around the fulcrum 1 integrally with the operation of the link 10, so the link 8d constituting the third parallelogram linkage 31 is Rotate around the fulcrum 2 in the CCW direction.
As a result, the link 8b is integral with the link 8d and rotates in the CCW direction around the fulcrum 2 so that the fixed point position can be escaped.

Similarly, when the link 8d, link 9d, link 30, and arm 7a constituting the third parallelogram linkage 31 are in a straight line (fixed point position), the first parallelogram linkage 13 is The link 8d can escape from the fixed point position by the operations of the link 8b, the link 9a, the link 10, and the arm 7a.
Thus, according to the present embodiment, the arm 8a can stably rotate around the fulcrum 2 without the rotation direction becoming indefinite at the fixed point position.

FIG. 23 is a schematic configuration diagram showing another embodiment of the transport apparatus according to the first invention, which is a transport apparatus using a parallel link arm mechanism.
As shown in FIG. 23, the transport device 60c of the present embodiment uses the transport mechanism 15c described above, and includes the parallel link arm mechanism 26 described above.

  Here, the configurations of the upper arm linkage 27, the lower arm linkage 28, the transport base 16, and the end effector 25 of the parallel link arm mechanism 26 are the same as those of the transport device 60a shown in FIG. 14, and a detailed description thereof will be omitted.

  The transport mechanism 15c is configured such that the arm 7a described in FIG. 22 corresponds to the upper arm 17a, and the arm 8a corresponds to the lower arm 18a. Further, the configuration of the other parts of the transport mechanism 15c is the same as the description in FIG.

  The operation of the transfer device 60c of the present embodiment is the same as that of the transfer device shown in FIG. 14 except for the operation of the transfer mechanism 15c described above, and the operation of the portion of the transfer mechanism 15c is as described in FIG. Therefore, detailed description of the telescopic operation and the turning operation of the present embodiment is omitted.

  As described above, according to the transport device 60c of the present embodiment, the rotational motion of the upper arm 17a is transmitted to the lower arm 18a and is twice the rotational angle of the upper arm 17a, as in the above-described embodiment. Therefore, the movement of the upper arm linkage 27 is correctly transmitted to the lower arm linkage 28.

  As described above, according to the present embodiment, as in the above-described embodiment, dust such as metal in the sliding portion is not generated, and contamination of a semiconductor wafer or the like that is a conveyance target can be prevented. Power can be correctly transmitted between the upper arm linkage 27 and the lower arm linkage 28 to convey the object to be conveyed to the correct position.

  Further, in the present embodiment, since the third parallelogram linkage 31 is configured by sharing the upper arm 17a configuring the first parallelogram linkage 13, the lower arm 18a is The rotation is stable around the fulcrum 2 without indefinite rotation at the fixed point position, and as a result, the lower arm linkage 28 can be stably moved beyond the fixed point position.

  In the transport mechanism 15c of the present embodiment, the fulcrum moving mechanism 12 is disposed at an angle of 0 ° with respect to the expansion / contraction direction of the transport table 16 in the same manner as the fulcrum moving mechanism 12 shown in FIG. However, similarly to the embodiment shown in FIG. 18, it may be configured to be attached at an angle other than 0 ° with respect to the expansion / contraction direction of the transport table 16. Even in this case, there is no problem in the movement of the arm 8a or the lower arm 18a at the fixed point position.

Next, an embodiment of the second invention will be described with reference to the drawings. In the following, the description of the same parts as those described above will be omitted unless otherwise required.
24 and 25 are schematic views showing the basic configuration of the embodiment of the transport mechanism according to the second invention.

The transport mechanism 200A of the present embodiment incorporates all the basic configurations [1] to [4] described above. For example, a third link mechanism is added to the configuration shown in FIG. 7 or FIG. It is.
Here, the link 101, the link 102a, the link 103a, and the link 104 are connected so as to be rotatable around the fulcrums O, A, B, and C, thereby forming a first link mechanism 201 that is a parallelogram link mechanism. .

  The link 103b, which is the second constraint link, is restrained and fixed at an arbitrary angle (η = ∠BCD) with respect to the link 103a, which is the first constraint link, at the fulcrum C. The links 103a and 103b are fulcrums. The L-shaped arm 103 rotates as a unit around C.

  The link 103b has the same length as the shared link 104 and is rotatably connected around the fulcrum D. The second link mechanism 202 is configured by the link 103b and the link 104b.

  Further, around the fulcrum A, an arm 102b which is a transfer arm member having the same length as the link 101 is restrained and fixed at an arbitrary angle (ξ) with respect to the link 102a at the fulcrum A, and the link 102a and the arm 102b are fixed. Are integrally rotated around the fulcrum A as an L-shaped arm 102.

  Further, the link 105 and the link 107 are rotatably connected around the fulcrum A and the fulcrum O at both ends of the link 101 of the first link mechanism 201, and the fulcrum F at the end of the link 105 and the end of the link 107 are connected. A link 106 is rotatably connected around the fulcrum G to constitute a third link mechanism 203 which is a parallelogram link mechanism composed of links having the same length as the first link mechanism 201.

  Here, the link 105 is restrained and fixed with respect to the link 102a at a constant angle (∠BAF), and the link 107 is restrained and fixed with respect to the link 104 at a constant angle (∠COG). The angle formed between the link 105 and the link 102a (∠BAF) is equal to the angle formed between the link 107 and the link 104 (∠COG), and is an arbitrary angle other than 0 ° and 180 ° (μ = ∠BAF = ∠COG). , Μ ≠ 0, 180 °).

  The angle μ is preferably the most suitable mounting angle depending on the device configuration, the movable range, etc., but if the angle μ is too small, the fixed point positions of the first link mechanism 201 and the third link mechanism 203 are the same. Are close to each other and cannot pass through the fixed point position stably. From this viewpoint, it is preferable to set the angle μ to 30 ° to 60 °.

  In the transport mechanism 200A of the present embodiment, when the link 101 or the link 104 is rotated around the fulcrum O, or the link 103b is rotated around the fulcrum D, the tip (E) of the arm 102b is It moves on a straight line (L) connecting the tip (E) of the arm 102b and the fulcrum O.

  And according to this Embodiment, since the 3rd link mechanism 203 is provided and it can escape from the said fixed point position similarly to the case demonstrated in embodiment shown in FIG.21 and FIG.22, The arm 102b can stably rotate around the fulcrum A without the rotation direction becoming indefinite at the fixed point position.

FIG. 26 to FIG. 28 are schematic configuration diagrams showing an embodiment of a transport apparatus according to the second invention, which is a transport apparatus using the transport mechanism 200A and the parallel link arm mechanism described above.
Here, the transport apparatuses 300A and 300B shown in FIGS. 26 and 27 have a configuration in which, for example, in the transport mechanism 200A shown in FIG. 24, η = 90 °, μ = 60 °, and ξ = 90 °.
Hereinafter, the transfer device 300A illustrated in FIG. 26 will be described as an example. The transfer device 300A includes a parallel link arm mechanism 126 similar to the parallel link arm mechanism 26 illustrated in FIG.

  The parallel link type arm mechanism 126 includes an upper arm linkage 127 composed of an upper arm and a link that face each other in parallel, and a lower arm linkage 128 composed of a lower arm, a link, and a carriage that face each other in parallel. .

  The upper arm of the upper arm linkage 127 corresponds to the link 101, and the links 123 and 124 are rotatably attached to the fulcrums O and A at both ends of the upper arm linkage 127, respectively, and are opposite to the fulcrums O and A of the links 123 and 124. A link 117 is rotatably attached to the fulcrums 122 and 119 on the side.

Here, the fulcrum 122 is provided on an extension line of a straight line (X axis) connecting the fulcrum D and the fulcrum O.
A lower arm of the lower arm linkage 128 corresponds to the arm 102b, is fastened to the link 102a, and the fastening portion is rotatably attached to the fulcrum A.

  The lower arm 118 facing the arm 102b is rotatably attached to a fulcrum 119 of the upper arm linkage 127, and these arms 102b and 118 are rotatably attached to fulcrums 120 and 121 connected to the transport table 116. Yes.

  In the case of the present embodiment, the length of the links 123 and 124 (distance between fulcrums) and the distance between the fulcrums of the transport table 116 (length between the fulcrums 120 and 121) are configured to be the same. . Further, the lengths (distances between fulcrums) of the link 101, the arm 102b, and the arm 118 are also configured to be the same.

  The operations of the conveying apparatuses 300A and 300B of the present embodiment are the same as those of the conveying apparatus 60c shown in FIG. 23 except for the operations of the conveying mechanisms 200A and 200B described above, and the operation of the portion of the conveying mechanism 200A is as described above. is there.

  26 and 27 is different in the structure of the link 101 and the arm 102b of the mechanism shown in FIG. 26 from the link 124 or 123 of the upper arm linkage 127 of the parallel link arm mechanism 126. It is only attached to the end of the side. Therefore, the expansion / contraction operation of the parallel link type arm mechanism 126 when the link 101 is rotated around the fulcrum O is the same.

On the other hand, FIG. 28 is a schematic configuration diagram showing another embodiment of the transport apparatus according to the second invention.
A transfer device 300C illustrated in FIG. 28 is obtained by changing the attachment position of the third link mechanism described in the above-described configuration condition [4].

  That is, in the transport apparatus 300C, unlike the configuration shown in FIG. 26, the links 105, 106, and the links 105, 106, and the opposite ends (fulcrums 119, 122) of the links 124, 123 of the upper arm linkage 127 of the parallel link arm mechanism 126 are provided. A third link mechanism 203 composed of 107 and 117 is attached.

Further, in this example, the link 107 and the link 151 are restrained and fixed around the fulcrum 122 at an angle μ, and the ends of the link 152 are rotatably attached to the fulcrum C and the fulcrum 153, respectively. The part is rotatably attached to the fulcrum 153.
Also in this example, the expansion and contraction operation of the parallel link arm mechanism 126 when the link 101 is rotated around the fulcrum O is the same.

FIGS. 29 to 31 are schematic configuration diagrams showing another embodiment of the transport apparatus according to the second invention, which is a transport apparatus using the transport mechanism 200B and the parallel link arm mechanism 126 described above.
Here, the transport apparatuses 300D and 300E shown in FIGS. 29 and 30 are configured when η = 210 °, μ = 60 °, and ξ = 10 ° in the transport mechanism 200B shown in FIG. 25, for example. The operation of the transport mechanism 200B is as described above.

  It should be noted that the difference between the configurations of the transfer apparatuses 300D and 300E shown in FIGS. 29 and 30 is that the transfer mechanism 200B is attached to the end of the link 124 or 123 of the upper arm linkage 127 of the parallel link arm mechanism 126. Only. Therefore, the expansion and contraction operation of the parallel link arm mechanism 126 when the link 101 is rotated around the fulcrum O is the same as that in the above embodiment.

A transfer device 300F illustrated in FIG. 31 is obtained by changing the attachment position of the third link mechanism described in the above-described configuration condition [4].
That is, in the transport device 300F, unlike the configuration shown in FIG. 29, the links 105, 106, and the links 105, 106, and the opposite ends (fulcrums 119, 122) of the links 124, 123 of the upper arm linkage 127 of the parallel link arm mechanism 126 are provided. A third link mechanism 203 composed of 107 and 117 is attached.

Further, in this example, the link 107 and the link 151 are restrained and fixed around the fulcrum 122 at an angle μ, and the ends of the link 152 are rotatably attached to the fulcrum C and the fulcrum 153, respectively. The part is rotatably attached to the fulcrum 153.
Also in this example, the expansion and contraction operation of the parallel link arm mechanism 126 when the link 101 is rotated around the fulcrum O is the same.

In the above embodiment, the link 102a, the link 102b, the link 104, the link 105, and the link 107 are separate members. However, in the present invention, for example, in the transfer device 300D shown in FIG. The same member may be used, and the link 102a and the link 105 may be the same member.
Here, when η = 180 °, μ = 30 °, and ξ = 0 °, the fulcrum B can be arranged on the link 102b, and the link 102b can be the same member.

  As described above, according to the second embodiment of the present invention, dust such as metal in the sliding portion is not generated, and contamination of the semiconductor wafer or the like that is the transfer object can be prevented and the upper arm linkage can be prevented. Power can be correctly transmitted between the 127 and the lower arm linkage 128 to convey the object to be conveyed to the correct position.

FIG. 32 is a plan view schematically showing a configuration of an embodiment of a vacuum processing apparatus provided with a transfer apparatus according to the present invention.
As shown in FIG. 32, the vacuum processing apparatus 41 according to the present embodiment includes three process chambers P1, P2, which can perform three parallel processing processes around the transfer chamber T1 including the transfer apparatus 42 according to the present invention described above. P3, a loading chamber C1 for loading the wafer 43 (43a, 43b), and a loading chamber C2 for unloading the wafer 43 are arranged.

The process chambers P1 to P2, the carry-in chamber C1, and the carry-out chamber C2 are connected to a vacuum exhaust system (not shown), and gate valves G1 to G5 that open and close when the wafer 43 is replaced are respectively connected to the transfer chamber T1. Is provided.
The loading chamber C1 is provided with a gate valve G6 that opens and closes when the wafer 43 is loaded from outside the apparatus, and the unloading chamber C2 is provided with a gate valve G7 that opens and closes when the wafer is unloaded from the apparatus.

In the vacuum processing apparatus 41 having such a configuration, the unprocessed wafer 43a stored in the carry-in chamber C1 is taken out by the transfer apparatus 41, held, and transferred to, for example, the process chamber P1.
At this time, the transfer apparatus 41 receives the processed wafer 43b from the process chamber P1 by performing the above-described operation, and transfers it to the other process chambers P2 and P3.

  Similarly, the unprocessed wafer 43a and the processed wafer 43b are transferred between the process chambers P1 to P3, the carry-in chamber C1, and the carry-out chamber C2 using the transfer device 41.

  According to the present embodiment having such a configuration, it is possible to provide a vacuum processing apparatus that can prevent contamination of a conveyance target and can contribute to an improvement in throughput by conveying the conveyance target to a correct position. be able to.

The present invention is not limited to the above-described embodiment, and various changes can be made.
For example, in the embodiment of the first invention described above, the length of the arm 8a as the transfer arm member is configured to be the same as the length of the link 7a as the first restraining link. However, the lengths of the arm 8a and the link 7a may be different from each other.

However, in order to move the distal end portion 80 of the arm 8a linearly, it is preferable to configure as in the above embodiment.
Also, the angle formed by the arm 8a and the link 8b can be set to an angle other than 90 °.

Furthermore, in the above-described embodiment, the transport mechanism of the type in which the first parallelogram linkage is attached to the rotation shaft (point O) shown in FIG. 1 has been described as an example, but the present invention is not limited to this, As shown in FIG. 2, it is also possible to use a transport mechanism of the type in which the first parallelogram linkage is attached on the fulcrum moving mechanism (point E).
In this case, the conditions described for the transport mechanism shown in FIG.

Furthermore, in the embodiment of the first invention, as shown in FIGS. 1 and 2, the conveyance is of a type in which linear guides are provided on a straight line passing through points O and E of the second parallelogram link mechanism. Although the mechanism has been described as an example, the present invention is not limited to the one using such a linear guide, and the point E can be moved linearly toward the point O as is apparent from the operation principle described above. Any mechanism may be used. Also in this case, since the point E moves linearly toward the point O, the operation principle and operation method of the transport mechanism are in accordance with the conditions described for the above-described embodiment.
This is the same in the second invention, and any linear guide may be used as long as the mechanism can move the point D linearly toward the point O.

Claims (8)

A first link mechanism comprising a parallelogram link mechanism;
A shared link that shares a predetermined link of the first link mechanism, and a second link mechanism that is composed of a link having the same length as the shared link, and is linearly expandable and contractable in a predetermined direction,
At a fulcrum of at least one end of the shared link, the first restraining link constituting the first link mechanism and the second restraining link constituting the second link mechanism are restrained at a predetermined angle. Configured to rotate in a state,
A transfer arm member configured to rotate in a state of being restrained at a predetermined angle with respect to the opposite link at a fulcrum of a predetermined end portion of the opposite link facing the shared link in the first link mechanism; A transport mechanism provided. A first parallelogram linkage;
A second parallelogram link mechanism that is configured using a predetermined link of the first parallelogram link mechanism and that has the same length of four sides and linearly expandable and contractable in a predetermined direction. ,
The first constraining link constituting the first parallelogram link mechanism and the second parallelogram link at fulcrums at both ends of the shared link shared by the first and second parallelogram link mechanisms The second restraining links constituting the mechanism are configured to rotate while being restrained at a predetermined angle,
In the first parallelogram link mechanism, for transportation, the fulcrum of a predetermined end portion of the opposed link facing the shared link is configured to rotate while being constrained at a predetermined angle with respect to the opposed link. A transport mechanism provided with arm members. A first link mechanism comprising a parallelogram link mechanism;
A shared link that shares a predetermined link of the first link mechanism, and the length of the shared link is equal to that of the shared link, and together with the first constraining link of the first link mechanism at one end of the shared link A second link mechanism having a second constraining link configured to rotate in a constrained state at a predetermined angle;
A transfer arm member configured to rotate in a state of being restrained at a predetermined angle with respect to the opposite link at a fulcrum of a predetermined end portion of the opposite link facing the shared link in the first link mechanism; A transport mechanism provided.   4. The transport mechanism according to claim 1, wherein a length of the first restraining link is equal to a length of the arm member for transport. 5.   4. The transport mechanism according to claim 1, wherein an angle formed by the first constraint link and the second constraint link is an angle other than 90 °. 5.   A first arm configured using the first constraining link and configured to rotate at a fulcrum at both ends of the first constraining link while being constrained at a predetermined angle with respect to the shared link. 4. A third parallelogram link mechanism comprising a member and a second arm member configured to rotate in a state of being constrained at a predetermined angle with respect to the opposing link. The conveyance mechanism of any one term. A first link mechanism composed of a parallelogram link mechanism, a shared link sharing a predetermined link of the first link mechanism, and a link having the same length as the shared link, and linear in a predetermined direction A second link mechanism that can be extended and contracted, and at the fulcrum of at least one end of the shared link, the first constraining link that constitutes the first link mechanism and the second link mechanism. The second constraining link is configured to rotate in a constrained state at a predetermined angle, and is connected to the opposing link at a fulcrum of a predetermined end portion of the opposing link facing the shared link in the first link mechanism. A transport mechanism provided with a transport arm member configured to rotate while being constrained at a predetermined angle with respect to the
A parallel link arm mechanism configured using the arm member for conveyance;
A transport unit that is driven by the parallel link arm mechanism and supports a transport target. A vacuum processing apparatus having a plurality of processing chambers connected to an evacuation system,
A first link mechanism composed of a parallelogram link mechanism, a shared link sharing a predetermined link of the first link mechanism, and a link having the same length as the shared link, and linear in a predetermined direction A second link mechanism that can be extended and contracted, and at the fulcrum of at least one end of the shared link, the first constraining link that constitutes the first link mechanism and the second link mechanism. The second constraining link is configured to rotate in a constrained state at a predetermined angle, and is connected to the opposing link at a fulcrum of a predetermined end portion of the opposing link facing the shared link in the first link mechanism. A transport mechanism provided with a transport arm member configured to rotate while being constrained at a predetermined angle, and a parallel link type arm machine configured using the transport arm member When, with the driven by the parallel link type arm mechanism, transfer chamber having a transfer apparatus having a conveying section for supporting the object to be transported,
A vacuum processing apparatus comprising: a vacuum processing chamber that communicates with the transfer chamber and is configured to deliver an object to be processed using the transfer device.

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