JPS649737B2 - - Google Patents

Info

Publication number
JPS649737B2
JPS649737B2 JP56042213A JP4221381A JPS649737B2 JP S649737 B2 JPS649737 B2 JP S649737B2 JP 56042213 A JP56042213 A JP 56042213A JP 4221381 A JP4221381 A JP 4221381A JP S649737 B2 JPS649737 B2 JP S649737B2
Authority
JP
Japan
Prior art keywords
voltage
potential source
conductivity type
channel
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56042213A
Other languages
Japanese (ja)
Other versions
JPS57157558A (en
Inventor
Kensaku Wada
Koichi Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56042213A priority Critical patent/JPS57157558A/en
Publication of JPS57157558A publication Critical patent/JPS57157558A/en
Publication of JPS649737B2 publication Critical patent/JPS649737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/085Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
    • H01L27/088Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
    • H01L27/092Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
    • H01L27/0921Means for preventing a bipolar, e.g. thyristor, action between the different transistor regions, e.g. Latchup prevention

Description

【発明の詳細な説明】 本発明は、相補型MIS回路(C MOS回路)
装置に係わり、C MOS集積回路に於て、定電
圧回路装置を付加する事により、C MOS回路
最大の弱点となつているラツチアツプを防止する
ものである。
[Detailed Description of the Invention] The present invention provides a complementary MIS circuit (CMOS circuit)
Regarding devices, by adding a constant voltage circuit device to a CMOS integrated circuit, latch-up, which is the biggest weakness of CMOS circuits, can be prevented.

モノリシツクC MOS集積回路の基本的な回
路図を第1図に示す。C MOSインバータは、
PチヤネルMOSトランジスタTpとNチヤネル
MOSトランジスタTNからなり、Tpのソースは
高電位源VDDに、TNのソースは低電位源VSSに、
双方のトランジスタのドレインは共通に出力端子
OUTに、双方のゲートは共通に入力端子INにそ
れぞれ接続されている。
A basic circuit diagram of a monolithic CMOS integrated circuit is shown in FIG. CMOS inverter is
P channel MOS transistor Tp and N channel
Consisting of a MOS transistor T N , the source of Tp is connected to a high potential source V DD , the source of T N is connected to a low potential source V SS ,
The drains of both transistors are the common output terminal
OUT, both gates are commonly connected to the input terminal IN.

入力が0レベルの時、Tpは導通し、TNは非導
通になるので、出力OUTは1レベルになる。入
力が1レベルになる時、Tpは非導通に、TNは導
通になるので出力OUTは0レベルになる。どち
らの場合も片方のMOSトランジスタが非導通に
なるので、VDD−VSS間には電流が流れず、電流
が流れるのは入力電位が1レベルと0レベルの遷
移領域に於てなので消費電力の少ない利点があ
る。
When the input is at 0 level, Tp is conductive and T N is non-conductive, so the output OUT is at 1 level. When the input becomes 1 level, Tp becomes non-conductive and TN becomes conductive, so the output OUT becomes 0 level. In either case, one MOS transistor becomes non-conductive, so no current flows between V DD and V SS , and current flows only in the transition region between the 1 level and 0 level of the input potential, resulting in low power consumption. There are fewer advantages.

第2図は第1図の素子断面図の一例である。
N-bulkはn型の半導体基板、3,4,5はnチ
ヤネネルMOSトランジスタTNのソース、チヤネ
ル、ドレイン、8,9,10はpチヤネルMOS
トランジスタTpのドレイン、チヤネル、ソース、
2,6,7,11はガードリング、P wellはp
型のウエル層である。
FIG. 2 is an example of a cross-sectional view of the element shown in FIG. 1.
N - bulk is an n-type semiconductor substrate, 3, 4, and 5 are the source, channel, and drain of n-channel MOS transistor T N , and 8, 9, and 10 are p-channel MOS transistors.
Drain, channel, source of transistor Tp,
2, 6, 7, 11 are guard rings, P well is p
This is the well layer of the mold.

一般にモノリシツクC MOS集積回路のVDD
VSS間には、第2図の一点鎖線アに沿つてPNPN
構造のダイオード、すなわち、サイリスタが等価
的に構成されている事は良く知られている。
In general, the V DD − of a monolithic CMOS integrated circuit is
Between V SS , PNPN along the dashed line A in Figure 2.
It is well known that a diode structure, that is, a thyristor structure is equivalently constructed.

このPNPN構造のVDD−VSS間の電圧電流(V
−I)特性は第3図の様になり、通常の動作モー
ドではO−A間の曲線にある電流の僅少部分で動
作している。しかるに、VDD−VSS間に、ラツチ
アツプ限界電圧VLUを起える電圧が(スパイク状
であれ)印加されると、この素子の動作は大電流
の流れるB−C間に動作モードが移る。このB−
C間が、C MOS回路のラツチアツプ領域であ
る。
The voltage current (V
-I) The characteristics are as shown in FIG. 3, and in the normal operation mode, the device operates with a small portion of the current on the curve between OA and A. However, when a voltage that causes the latch-up limit voltage V LU is applied between V DD and V SS (even if it is spike-like), the operation mode of this element shifts between B and C, where a large current flows. This B-
The area between C and C is the latch-up area of the CMOS circuit.

いつたんラツチアツプが起こると第3図におい
て、VDD−VSS間電圧をVH(最小保持電圧)以下に
するか、電流をIH(最小保持電流)以下にしない
限りその状態は保持される。
Once latch-up occurs, as shown in Figure 3, the state will be maintained unless the voltage between V DD and V SS is lowered below V H (minimum holding voltage) or the current is lowered below I H (minimum holding current). .

従来、ラツチアツプ防止の方法としては、たと
えば第4図の様にVDDとC MOSの高電位源側、
及びVSSとC MOSの低電位源側のいずれかまた
は両方に抵抗を挿入し、ラツチアツプの原因とな
る電流及びラツチアツプによる異常電流を制限
し、素子の劣化または焼損を防止する方法があつ
た。
Conventionally, as a method to prevent latch-up, for example, as shown in Fig. 4, the high potential source side of V DD and C MOS,
There is also a method of inserting a resistor into either or both of V SS and the low potential source side of the CMOS to limit the current that causes latch-up and the abnormal current caused by latch-up, thereby preventing element deterioration or burnout.

しかし、この方法は、C MOS回路のON−
OFFの交替が速く、過渡電流が多く流れる場合
や、C MOS回路から出力に電流を取り出した
い様な場合、これらの抵抗により電圧降下が起き
るという欠点がある。そのためこの様な構造にお
いては、高速動作及びHとLレベルの十分な振幅
が得られない問題がある。
However, this method is not suitable for ON-
These resistors have the disadvantage of causing a voltage drop when switching OFF quickly and a large amount of transient current flows, or when you want to extract current from the CMOS circuit to the output. Therefore, in such a structure, there is a problem that high speed operation and sufficient amplitude of H and L levels cannot be obtained.

本発明の目的は、C MOS集積回路に於て、
電源からの雑音や電源電圧の上昇によるラツチア
ツプを防止し、さらに通常の動作に対し何ら支障
のないようにすることにある。
The object of the present invention is to provide a CMOS integrated circuit with
The purpose is to prevent latch-up due to noise from the power supply or rise in power supply voltage, and to ensure that there is no hindrance to normal operation.

本発明は、一導電型よりなる半導体基板、該半
導体基板中に形成された反対導電型のウエル層、
該半導体基板中に形成された反対導電型のチヤネ
ルのMISトランジスタ及び該ウエル層に設けられ
た一導電型のチヤネルのMISトランジスタを有
し、高電位源VDDと低電位源VSSとの間に該一導
電型のチヤネルのMISトランジスタ及び反対導電
型のチヤネルのMISトランジスタを有する所定の
回路を構成してなる相補型MIS集積回路装置に於
いて、該高電位源VDDと低電位源VSSとの間に挿
入され、前記所定の回路と並列になる定電圧回路
装置を該半導体基板または該ウエル層中に設け、
該定電圧回路装置が作動する電圧を該高電位源
VDDの電圧よりも高く且つラツチアツプ限界電圧
VLUよりも低く設定したことを特徴とする。
The present invention relates to a semiconductor substrate of one conductivity type, a well layer of an opposite conductivity type formed in the semiconductor substrate,
A channel MIS transistor of opposite conductivity type formed in the semiconductor substrate and a channel MIS transistor of one conductivity type provided in the well layer, between a high potential source V DD and a low potential source V SS In a complementary MIS integrated circuit device, the high potential source V DD and the low potential source V a constant voltage circuit device inserted between the SS and the predetermined circuit in parallel with the semiconductor substrate or the well layer;
The voltage at which the constant voltage circuit device operates is set to the high potential source.
V DD voltage higher than the latch-up limit voltage
It is characterized by being set lower than V LU .

第5図は本発明の基本構成図である。定電圧回
路装置の作動電圧を、第3図のラツチアツプ限界
電圧VLUを下回る様に設定しておけば、電源から
のスパイワノイズが加わつたり、電源電圧が上昇
しようとしたりしてもC MOS回路の高電位源
VDDと低電位源VSSの間の電圧は、定電圧回路装
置の作動電圧で押えられるので、ラツチアツプ領
域に移行しない。
FIG. 5 is a basic configuration diagram of the present invention. If the operating voltage of the constant voltage circuit device is set to be lower than the latch-up limit voltage V LU shown in Figure 3, the CMOS circuit will remain stable even if spyer noise from the power supply is added or the power supply voltage attempts to rise. high potential source
Since the voltage between V DD and the low potential source V SS is suppressed by the operating voltage of the constant voltage circuit device, it does not enter the latch-up region.

以下、本発明の一実施例を図面に従つて詳細に
説明する。
Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

第6図は本発明の一実施例である。本実施例で
は、高電位源VDDと低電位源VSSとの間にpチヤ
ネルMISトランジスタTp及びnチヤネルMISト
ランジスタTNよりなるインバータ回路が設けら
れ、定電圧回路装置としてツエナーダイオードZD
がVDDとVSSの間にインバータ回路と並列に設け
られ、その定電圧特性を利用している。
FIG. 6 shows an embodiment of the present invention. In this embodiment, an inverter circuit consisting of a p-channel MIS transistor Tp and an n-channel MIS transistor T N is provided between a high potential source V DD and a low potential source V SS , and a Zener diode Z D is used as a constant voltage circuit device.
is installed in parallel with the inverter circuit between V DD and V SS to utilize its constant voltage characteristics.

すなわち、VDDとVSSの間にラツチアツプを起
こすようなスパイワノイズが加わるか、過大電圧
が印加されても、VDDとVSSの間の電圧は、ツエ
ナーダイオードZDの逆方向降伏を起こす電圧に押
えられるのでラツチアツプは起こらない。第7図
は第6図の実施例の素子の断面図である。1,2
はツエナーダイオード、3,4,5はNチヤネル
MOSトランジスタのソース、チヤネル、ドレイ
ン、8,9,10はpチヤネルMOSトランジス
タのドレイン、チヤネル、ソース、2,6,7,
11はガードリングである。本方法によれば、電
源にノイズが混入したり電源電圧が大幅に上昇し
ても、ラツチアツプが起きない。また、ツエナー
ダイオードZDを追加するだけなので集積度もほと
んど低下しない。
In other words, even if spyer noise that causes a latch-up is added between V DD and V SS or an excessive voltage is applied, the voltage between V DD and V SS will not exceed the voltage that causes reverse breakdown of the Zener diode Z D. Latch-up does not occur because it is held down by FIG. 7 is a cross-sectional view of the device of the embodiment of FIG. 6. 1,2
is a Zener diode, 3, 4, and 5 are N channels.
MOS transistor source, channel, drain, 8, 9, 10 are p channel MOS transistor drain, channel, source, 2, 6, 7,
11 is a guard ring. According to this method, latch-up does not occur even if noise enters the power supply or the power supply voltage increases significantly. In addition, since only the Zener diode Z D is added, the degree of integration is hardly reduced.

第8図a,bは本発明のC MOS NANDゲ
ート回路への実施例とその真理値表、第9図は本
発明のC MOS NORゲート回路への実施例と
その真理値表で、いずれもTp1,Tp2はPチヤネ
ルトランジスタ、TN1,TN2はNチヤネルトラン
ジスタ、ZDは定電圧回路装置のツエナーダイオー
ド、A,Bは入力端子、Sは出力端子である。
Figures 8a and b show an embodiment of the present invention in a CMOS NAND gate circuit and its truth table, and Figure 9 shows an embodiment of the present invention in a CMOS NOR gate circuit and its truth table. Tp 1 and Tp 2 are P-channel transistors, T N1 and T N2 are N-channel transistors, Z D is a Zener diode of a constant voltage circuit device, A and B are input terminals, and S is an output terminal.

本発明によれば、C MOS集積回路内に小さ
な定電圧回路を付加するだけで、電源からの雑音
や電源電圧上昇によるラツチアツプを防止できる
という効果がある。
According to the present invention, it is possible to prevent latch-up due to noise from the power supply or rise in power supply voltage by simply adding a small constant voltage circuit within the CMOS integrated circuit.

さらに、定電圧回路として基板内に設けたツエ
ナーダイオードを用いれば、集積度を損うことな
くC MOS集積回路を形成することができる。
Furthermore, by using a Zener diode provided in the substrate as a constant voltage circuit, a CMOS integrated circuit can be formed without impairing the degree of integration.

また、通常の動作状態では、ツエナーダイオー
ドZDは何ら動作を制限するようなことは行なわな
い。
Furthermore, under normal operating conditions, the Zener diode Z D does not do anything that limits its operation.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、C MOSインバータの基本的な回
路図、第2図は、モノリシツクC MOS集積回
路の素子構造図、第3図は、第2図一点鎖線アに
沿つたPNPN構造の電圧・電流特性、第4図は、
従来技術によるラツチアツプ防止方法の一例、第
5図は、本発明の基本構成図、第6図は、本発明
の一実施例を示す回路図、第7図は、第6図の回
路の素子構造図、第8図a,bは、本発明の他の
実施例のNAND回路の回路図とその真理値表、
第9図a,bは、本発明の他のNOR回路の回路
図とその真理値表である。 図中、TpはPチヤネルMISトランジスタ、TN
はNチヤネルMISトランジスタ、一点鎖線アはラ
ツチアツプの跡筋、ZDはツエナーダイオードであ
る。
Fig. 1 is a basic circuit diagram of a CMOS inverter, Fig. 2 is an element structure diagram of a monolithic CMOS integrated circuit, and Fig. 3 is a diagram showing the voltage and current of the PNPN structure along the dashed line A in Fig. 2. The characteristics, Figure 4, are
An example of a latch-up prevention method according to the prior art, FIG. 5 is a basic configuration diagram of the present invention, FIG. 6 is a circuit diagram showing an embodiment of the present invention, and FIG. 7 is an element structure of the circuit of FIG. 6. 8a and 8b are a circuit diagram of a NAND circuit according to another embodiment of the present invention and its truth table,
FIGS. 9a and 9b are a circuit diagram of another NOR circuit according to the present invention and its truth table. In the figure, Tp is a P channel MIS transistor, T N
is an N-channel MIS transistor, the dashed-dotted line A is the trace of a latch-up, and Z D is a Zener diode.

Claims (1)

【特許請求の範囲】 1 一導電型よりなる半導体基板、 該半導体基板中に形成された反対導電型のウエ
ル層、 該半導体基板中に形成された反対導電型のチヤ
ネルのMISトランジスタ及び該ウエル層に設けら
れた一導電型のチヤネルのMISトランジスタを有
し、 高電位源VDDと低電位源VSSとの間に該一導電
型のチヤネルのMISトランジスタ及び反対導電型
のチヤネルのMISトランジスタを有する所定の回
路を構成してなる相補型MIS集積回路装置に於い
て、 該高電位源VDDと低電位源VSSとの間に挿入さ
れ、前記所定の回路と並列になる定電圧回路装置
を該半導体基板または該ウエル層中に設け、該定
電圧回路装置が作動する電圧を該高電位源VDD
電圧よりも高く且つラツチアツプ限界電圧VLU
りも低く設定したことを特徴とする相補型MIS集
積回路装置。
[Claims] 1. A semiconductor substrate of one conductivity type, a well layer of an opposite conductivity type formed in the semiconductor substrate, a channel MIS transistor of an opposite conductivity type formed in the semiconductor substrate, and the well layer. A channel MIS transistor of one conductivity type is provided between the high potential source VDD and a low potential source VSS , and the MIS transistor of the one conductivity type channel and the MIS transistor of the opposite conductivity type channel are provided In a complementary MIS integrated circuit device comprising a predetermined circuit, a constant voltage circuit device is inserted between the high potential source V DD and the low potential source V SS and is in parallel with the predetermined circuit. is provided in the semiconductor substrate or the well layer, and the voltage at which the constant voltage circuit device operates is set higher than the voltage of the high potential source VDD and lower than the latch-up limit voltage VLU . Type MIS integrated circuit device.
JP56042213A 1981-03-23 1981-03-23 Complementary mis integrated circuit device Granted JPS57157558A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56042213A JPS57157558A (en) 1981-03-23 1981-03-23 Complementary mis integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56042213A JPS57157558A (en) 1981-03-23 1981-03-23 Complementary mis integrated circuit device

Publications (2)

Publication Number Publication Date
JPS57157558A JPS57157558A (en) 1982-09-29
JPS649737B2 true JPS649737B2 (en) 1989-02-20

Family

ID=12629749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56042213A Granted JPS57157558A (en) 1981-03-23 1981-03-23 Complementary mis integrated circuit device

Country Status (1)

Country Link
JP (1) JPS57157558A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925261A (en) * 1982-08-02 1984-02-09 Hitachi Ltd Cmos fet integrated circuit device
JPH0770612B2 (en) * 1987-12-14 1995-07-31 株式会社日立製作所 Semiconductor integrated circuit

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146188A (en) * 1975-06-11 1976-12-15 Fujitsu Ltd Diode device
JPS5499584A (en) * 1977-12-20 1979-08-06 Citizen Watch Co Ltd Silicon gate complementary mos integrated circuit
JPS5587391A (en) * 1978-12-22 1980-07-02 Hitachi Ltd Semiconductor memory circuit device

Also Published As

Publication number Publication date
JPS57157558A (en) 1982-09-29

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