JPS649683A - Formation of outside inclined mirror of semiconductor laser - Google Patents
Formation of outside inclined mirror of semiconductor laserInfo
- Publication number
- JPS649683A JPS649683A JP16569387A JP16569387A JPS649683A JP S649683 A JPS649683 A JP S649683A JP 16569387 A JP16569387 A JP 16569387A JP 16569387 A JP16569387 A JP 16569387A JP S649683 A JPS649683 A JP S649683A
- Authority
- JP
- Japan
- Prior art keywords
- groove
- substrate
- fine
- resist
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Semiconductor Lasers (AREA)
Abstract
PURPOSE:To make it possible to form a desired angle of inclination with good reproducibility and with good uniformity by a method wherein a groove processing consists of a fine groove processing for forming a vertical end surface and a fine groove processing, which makes the desired angle of inclination with a substrate for forming an outside inclined end surface, and when two fine grooves cross each other at a bottom part, the region pinched by the two grooves is removed from the substrate. CONSTITUTION:In a resist forming process, a vertical groove 15 is filled with a resist material. Then, a reactive ion beam etching is performed by the same method as a method wherein an etching is performed. At this time, as a substrate 11 is arranged in such a way as to make an angle of 45 deg. to a reactive plasma shower 17, an oblique etching is performed using a resist pattern 16 as a mask to form an inclined groove 18. At this time, the groove 15 and the groove 18 cross each other at a bottom part 19. Accordingly, a part 25 surrounded with both of the fine grooves 15 and 18 is separated from the substrate 11 when the resist mask 16 is removed and such an asymmetrical groove as to have a vertical sidewall 21 and an inclined surface 22 can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16569387A JPH0644664B2 (en) | 1987-07-01 | 1987-07-01 | Semiconductor laser external tilt mirror formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16569387A JPH0644664B2 (en) | 1987-07-01 | 1987-07-01 | Semiconductor laser external tilt mirror formation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS649683A true JPS649683A (en) | 1989-01-12 |
JPH0644664B2 JPH0644664B2 (en) | 1994-06-08 |
Family
ID=15817249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16569387A Expired - Fee Related JPH0644664B2 (en) | 1987-07-01 | 1987-07-01 | Semiconductor laser external tilt mirror formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0644664B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0428390A2 (en) * | 1989-11-13 | 1991-05-22 | Sharp Kabushiki Kaisha | Manufacturing method of optical diffraction grating element |
US5279924A (en) * | 1989-04-04 | 1994-01-18 | Sharp Kabushiki Kaisha | Manufacturing method of optical diffraction grating element with serrated gratings having uniformly etched grooves |
US20100102026A1 (en) * | 2008-10-29 | 2010-04-29 | Hyundai Motor Company | Method of forming nanostructured surface on polymer electrolyte membrane of membrane electrode assembly for fuel cell |
DE102008051625B4 (en) * | 2008-10-02 | 2015-08-13 | Erich Kasper | Method for producing a component with an optical coupling window |
US11119405B2 (en) * | 2018-10-12 | 2021-09-14 | Applied Materials, Inc. | Techniques for forming angled structures |
-
1987
- 1987-07-01 JP JP16569387A patent/JPH0644664B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5279924A (en) * | 1989-04-04 | 1994-01-18 | Sharp Kabushiki Kaisha | Manufacturing method of optical diffraction grating element with serrated gratings having uniformly etched grooves |
EP0428390A2 (en) * | 1989-11-13 | 1991-05-22 | Sharp Kabushiki Kaisha | Manufacturing method of optical diffraction grating element |
DE102008051625B4 (en) * | 2008-10-02 | 2015-08-13 | Erich Kasper | Method for producing a component with an optical coupling window |
US20100102026A1 (en) * | 2008-10-29 | 2010-04-29 | Hyundai Motor Company | Method of forming nanostructured surface on polymer electrolyte membrane of membrane electrode assembly for fuel cell |
US8486280B2 (en) * | 2008-10-29 | 2013-07-16 | Hyundai Motor Company | Method of forming nanostructured surface on polymer electrolyte membrane of membrane electrode assembly for fuel cell |
US11119405B2 (en) * | 2018-10-12 | 2021-09-14 | Applied Materials, Inc. | Techniques for forming angled structures |
Also Published As
Publication number | Publication date |
---|---|
JPH0644664B2 (en) | 1994-06-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |