JPS6490053A - Thermal plasma jet generator - Google Patents

Thermal plasma jet generator

Info

Publication number
JPS6490053A
JPS6490053A JP62245853A JP24585387A JPS6490053A JP S6490053 A JPS6490053 A JP S6490053A JP 62245853 A JP62245853 A JP 62245853A JP 24585387 A JP24585387 A JP 24585387A JP S6490053 A JPS6490053 A JP S6490053A
Authority
JP
Japan
Prior art keywords
nozzle
wall
plasma jet
thermal plasma
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62245853A
Other languages
Japanese (ja)
Other versions
JPH0775689B2 (en
Inventor
Kenichi Sasaki
Kazuaki Kurihara
Motonobu Kawarada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62245853A priority Critical patent/JPH0775689B2/en
Priority to DE88302836T priority patent/DE3884653T2/en
Priority to EP88302836A priority patent/EP0286306B1/en
Priority to SU884355493A priority patent/RU2032765C1/en
Priority to KR1019880003737A priority patent/KR910006784B1/en
Priority to US07/177,504 priority patent/US5368897A/en
Publication of JPS6490053A publication Critical patent/JPS6490053A/en
Priority to US07/905,226 priority patent/US5403399A/en
Publication of JPH0775689B2 publication Critical patent/JPH0775689B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To form a chemical vapor deposition film or a plasma spray film on a large area by opening a plurality of nozzles, providing the inner wall of each nozzle with the same polarity and arranging a plurality of electrodes having the other polarity facing the inner wall in the inner part of an encircling body. CONSTITUTION:This generator is provided with a discharge gas conduit 3, a gas conduit 4 for carrying stock gas or solid powder and a DC lead wire 5 and is composed of an encircling body 1 opening a nozzle 6 for spraying thermal plasma jet 8. A plurality of nozzles 6 are opened, the inner wall of each nozzle 6 forms respectively an electrode having the same polarity, and a plurality of electrodes 2 having the other polarity facing the inner wall of each nozzle 6 are located inside an encircling body 1. As a result, a chemical vapor deposition film or a plasma thermally sprayed film can be formed in a uniform thickness in a wide area.
JP62245853A 1987-04-03 1987-10-01 Thermal plasma jet generator Expired - Lifetime JPH0775689B2 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP62245853A JPH0775689B2 (en) 1987-10-01 1987-10-01 Thermal plasma jet generator
DE88302836T DE3884653T2 (en) 1987-04-03 1988-03-30 Method and device for the vapor deposition of diamond.
EP88302836A EP0286306B1 (en) 1987-04-03 1988-03-30 Method and apparatus for vapor deposition of diamond
SU884355493A RU2032765C1 (en) 1987-04-03 1988-04-01 Method of diamond coating application from vapor phase and a device for it realization
KR1019880003737A KR910006784B1 (en) 1987-04-03 1988-04-02 Method and apparatus for vapor deposition of diamond
US07/177,504 US5368897A (en) 1987-04-03 1988-04-04 Method for arc discharge plasma vapor deposition of diamond
US07/905,226 US5403399A (en) 1987-04-03 1992-06-29 Method and apparatus for vapor deposition of diamond

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62245853A JPH0775689B2 (en) 1987-10-01 1987-10-01 Thermal plasma jet generator

Publications (2)

Publication Number Publication Date
JPS6490053A true JPS6490053A (en) 1989-04-05
JPH0775689B2 JPH0775689B2 (en) 1995-08-16

Family

ID=17139815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62245853A Expired - Lifetime JPH0775689B2 (en) 1987-04-03 1987-10-01 Thermal plasma jet generator

Country Status (1)

Country Link
JP (1) JPH0775689B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1171681A (en) * 1997-06-26 1999-03-16 General Electric Co <Ge> Protective coating film by high speed arc plasma coating formation
JP2002539332A (en) * 1999-03-17 2002-11-19 ゼネラル・エレクトリック・カンパニイ Multilayer article and method of manufacturing by arc plasma deposition
JP2013216948A (en) * 2012-04-10 2013-10-24 Kojima Press Industry Co Ltd Plasma cvd apparatus
JP2014013769A (en) * 2011-07-12 2014-01-23 Shinwa Kogyo Kk Axial feed type plasma spray apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4722213U (en) * 1971-04-09 1972-11-13
JPS5976568A (en) * 1982-09-09 1984-05-01 エンゲルハ−ド・コ−ポレ−シヨン Electric field discharge apparatus having high treating amount and high uniformity

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4722213U (en) * 1971-04-09 1972-11-13
JPS5976568A (en) * 1982-09-09 1984-05-01 エンゲルハ−ド・コ−ポレ−シヨン Electric field discharge apparatus having high treating amount and high uniformity

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1171681A (en) * 1997-06-26 1999-03-16 General Electric Co <Ge> Protective coating film by high speed arc plasma coating formation
JP2002539332A (en) * 1999-03-17 2002-11-19 ゼネラル・エレクトリック・カンパニイ Multilayer article and method of manufacturing by arc plasma deposition
JP2011208282A (en) * 1999-03-17 2011-10-20 Sabic Innovative Plastics Ip Bv Method of making multilayer article by arc plasma deposition
JP2014013769A (en) * 2011-07-12 2014-01-23 Shinwa Kogyo Kk Axial feed type plasma spray apparatus
JP2013216948A (en) * 2012-04-10 2013-10-24 Kojima Press Industry Co Ltd Plasma cvd apparatus

Also Published As

Publication number Publication date
JPH0775689B2 (en) 1995-08-16

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