JPS6489578A - Laser power supply device - Google Patents
Laser power supply deviceInfo
- Publication number
- JPS6489578A JPS6489578A JP24768187A JP24768187A JPS6489578A JP S6489578 A JPS6489578 A JP S6489578A JP 24768187 A JP24768187 A JP 24768187A JP 24768187 A JP24768187 A JP 24768187A JP S6489578 A JPS6489578 A JP S6489578A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- voltage
- capacitor
- charging
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
PURPOSE:To provide the starting timing of an integrating circuit to prevent a malfunction, by a method wherein a voltage at a charging power supply is applied to an integrating circuit via a waveform shaping circuit when a switch means is conducted to allow a reference voltage to rise and a capacitor is charged at a charging voltage which is in proportion to the reference voltage. CONSTITUTION:When an on-signal is supplied to a switch 4 from a driving circuit 6, a capacitor 3 is discharged to momentarily pass a large current to a laser tube 5. This abruptly reduces the output voltage of a detection circuit 8 to zero to generate a pulse waveform at an output point C of a waveform shaping circuit 13. A capacitor C1 in an integrating circuit 12 is charged by a reference voltage power supply 11. An output pulse from the circuit 13 is fed to the base of a transistor Q1 to decrease the charging charge of the capacitor C1 to a low level, at which charging is started to again raise the output voltage of the integrating circuit 12. A comparator 10 compares this output voltage with a detection voltage from the detection circuit 8, and a generated error signal is supplied to a charging power supply 1. The signal is allowed to rise as an output in proportion to the reference voltage to obtain required capacitor charging characteristics.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24768187A JPH0783151B2 (en) | 1987-09-30 | 1987-09-30 | Laser power supply |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24768187A JPH0783151B2 (en) | 1987-09-30 | 1987-09-30 | Laser power supply |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6489578A true JPS6489578A (en) | 1989-04-04 |
JPH0783151B2 JPH0783151B2 (en) | 1995-09-06 |
Family
ID=17167068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24768187A Expired - Lifetime JPH0783151B2 (en) | 1987-09-30 | 1987-09-30 | Laser power supply |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0783151B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016149573A (en) * | 2007-11-08 | 2016-08-18 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Pulse train annealing method and apparatus |
US11040415B2 (en) | 2007-11-08 | 2021-06-22 | Applied Materials, Inc. | Pulse train annealing method and apparatus |
-
1987
- 1987-09-30 JP JP24768187A patent/JPH0783151B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016149573A (en) * | 2007-11-08 | 2016-08-18 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Pulse train annealing method and apparatus |
US11040415B2 (en) | 2007-11-08 | 2021-06-22 | Applied Materials, Inc. | Pulse train annealing method and apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0783151B2 (en) | 1995-09-06 |
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