JPH0783151B2 - Laser power supply - Google Patents
Laser power supplyInfo
- Publication number
- JPH0783151B2 JPH0783151B2 JP24768187A JP24768187A JPH0783151B2 JP H0783151 B2 JPH0783151 B2 JP H0783151B2 JP 24768187 A JP24768187 A JP 24768187A JP 24768187 A JP24768187 A JP 24768187A JP H0783151 B2 JPH0783151 B2 JP H0783151B2
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- voltage
- charging
- power supply
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は,例えば炭素ガス・レーザに用いられる繰り返
し充電・放電するコンデンサの充電をするコンデンサ充
電器を含むレーザ電源装置,特に安定化した充電電圧特
性を有するコンデンサ充電器を含むレーザ電源装置に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser power supply device including a capacitor charger for charging a capacitor that is repeatedly charged and discharged used in, for example, a carbon gas laser, and particularly stabilized charging. The present invention relates to a laser power supply device including a capacitor charger having a voltage characteristic.
従来,繰り返し充電・放電するコンデンサの充電をする
コンデンサ充電器を含むレーザ電源装置としては,例え
ば第3図に示すような装置が用いられている。同図にお
いて,充電電源1より限流インピーダンス2を介してコ
ンデンサ3に電荷が蓄積されている。コンデンサ3に
は,互いに直列接続されたスイッチ手段4とレーザ管5
が並列に接続されている。そして駆動回路6よりスイッ
チ手段4にオン信号が供給されると,コンデンサ3に蓄
えられた電荷が放電してレーザ管5に瞬間的に大電流を
流す。Conventionally, for example, a device as shown in FIG. 3 has been used as a laser power supply device including a capacitor charger for repeatedly charging and discharging a capacitor. In the figure, charges are accumulated in a capacitor 3 from a charging power source 1 through a current limiting impedance 2. The capacitor 3 includes a switch means 4 and a laser tube 5 which are connected in series with each other.
Are connected in parallel. When an ON signal is supplied from the drive circuit 6 to the switch means 4, the electric charge stored in the capacitor 3 is discharged and a large current is instantaneously supplied to the laser tube 5.
まず駆動回路6よりアイソレータ7を介してスイッチ手
段4のオンした時刻を検知して積分回路12を作動させ
て,基準電圧をゆっくりと立ち上がらせる。そしてこの
基準電圧を比較器10の一端に接続して,検出回路8から
得られる検出電圧と比較する。比較器10において発生し
た誤差信号を充電電源1の制御端子に供給して,充電電
源1を前記基準電圧に比例した出力が得られるように立
ち上がされて,再びコンデンサ3に電荷を蓄積させるた
めに充電電源1を所定の傾斜で立ち上がらせる。このよ
うにしてコンデンサ3の充電・放電を繰り返して,レー
ザ管に必要な電力を供給している。First, the drive circuit 6 detects the time when the switch means 4 is turned on via the isolator 7, and activates the integration circuit 12 to slowly raise the reference voltage. Then, this reference voltage is connected to one end of the comparator 10 and compared with the detection voltage obtained from the detection circuit 8. The error signal generated in the comparator 10 is supplied to the control terminal of the charging power source 1, the charging power source 1 is started up so as to obtain an output in proportion to the reference voltage, and charges are accumulated in the capacitor 3 again. Therefore, the charging power source 1 is made to rise at a predetermined inclination. In this way, the capacitor 3 is repeatedly charged and discharged to supply the necessary power to the laser tube.
ところがこのように構成された従来のレーザ電源装置に
おいて,スイッチ手段4に流れる電流が数百アンペア乃
至数千アンペアで,電圧が数万ボルトと高エネルギーの
ため,アイソレータ7の絶縁耐圧を大きくする必要があ
る。また,レーザ管側は高電圧,高エネルギーのため単
に絶縁耐圧を大きくしても,アイソレータを介しても雑
音信号として伝達され回路を誤動作させる問題点があっ
た。However, in the conventional laser power supply device configured as described above, since the current flowing through the switch means 4 is several hundred amperes to several thousand amperes and the voltage is tens of thousands of volts, which is high energy, it is necessary to increase the withstand voltage of the isolator 7. There is. Further, since the laser tube side has a high voltage and high energy, there is a problem that even if the withstand voltage is simply increased, it is transmitted as a noise signal through the isolator and the circuit malfunctions.
本発明は以上のべた問題点を解決すべく, 充電電源と該充電電源からのエネルギーで充電されるコ
ンデンサとレーザ管に直列接続されたスイッチ手段及び
該スイッチ手段をトリガする駆動回路からなるレーザ電
源装置において, 前記スイッチ手段が導通するときに前記充電電源の出力
電圧の検出電圧を波形整形回路を介して積分回路に与え
てその積分動作を開始させて,基準電圧を立ち上がら
せ,該基準電圧にほぼ比例した充電電圧に前記コンデン
サを充電させることを特徴とするレーザ電源装置を提案
するものである。In order to solve the above-mentioned problems, the present invention provides a laser power source including a charging power source, a capacitor charged with energy from the charging power source, switch means connected in series with a laser tube, and a drive circuit for triggering the switch means. In the device, when the switch means is turned on, the detection voltage of the output voltage of the charging power supply is given to an integration circuit via a waveform shaping circuit to start the integration operation to raise the reference voltage and set the reference voltage to the reference voltage. The present invention proposes a laser power supply device characterized in that the capacitor is charged to a charging voltage that is substantially proportional.
本発明は以上のように構成されているので,先ず,充電
電源の出力電圧より波形整形回路を介してレーザ管側の
スイッチ手段の放電時刻毎に積分回路を開始させる。そ
して積分回路の出力として基準電圧を立ち上がらせ,こ
の基準電圧に比例した充電電圧により前記コンデンサを
充電させる。このようにしてレーザ管側のスイッチ手段
の駆動回路より放電時刻検知信号を供給されなくとも,
充電電源側のみ回路構成で積分回路の開始時期を得るこ
とができる。Since the present invention is configured as described above, first, the integrating circuit is started at each discharge time of the switching means on the laser tube side from the output voltage of the charging power source via the waveform shaping circuit. Then, the reference voltage is raised as the output of the integrating circuit, and the capacitor is charged by the charging voltage proportional to the reference voltage. In this way, even if the discharge time detection signal is not supplied from the drive circuit of the switch means on the laser tube side,
The start timing of the integrating circuit can be obtained by the circuit configuration only on the charging power source side.
第1図は本発明のレーザ電源装置のブロック図を示す。
同図において,充電電源1より比較的低インピーダンス
の限流インピーダンス2を介してコンデンサ3に電荷が
蓄積されている。コンデンサ3よりスイッチ手段4を介
してレーザ管5が接続されている。そしてスイッチ手段
4に駆動回路6よりオン信号が供給されると,コンデン
サ3に蓄えられた電荷が放電してレーザ管5に瞬間的に
大電流が流れる。FIG. 1 shows a block diagram of a laser power supply device of the present invention.
In the figure, electric charges are accumulated in the capacitor 3 via the current limiting impedance 2 having a relatively low impedance from the charging power source 1. A laser tube 5 is connected from the condenser 3 via the switch means 4. When an ON signal is supplied to the switch means 4 from the drive circuit 6, the electric charge stored in the capacitor 3 is discharged and a large current instantaneously flows through the laser tube 5.
この時検出回路8の出力電圧は第2図(a)に示すよう
に急激に0になる。すると波形整形回路13の中のコンパ
レータU1の出力電圧は第2図(b)に示すように低レベ
ルから高レベルに変化する。そしてコンデンサC2と抵抗
器R3で構成される微分器により微分されて,波形整形回
路13の出力点(c)には第2図(c)に示すようなパル
ス波形が発生する。一方,基準電圧源11より積分回路12
の中の抵抗器R1を介してコンデンサC1に充電されてい
る。そして波形成形回路13の出力のパルスがトランジス
タQ1のベースに送られて,コンデンサC1の充電電荷が一
旦放電して第2図(d)に示すように低レベルに落ち
て,ここを充電開始点として再びゆっくりと積分回路12
の出力電圧は上昇する。そしてこの積分回路12の出力電
圧を比較器10の一端に接続して,検出回路8から得られ
る検出電圧と比較する。比較器10において発生した誤差
信号を充電電源1の制御端子に供給して,再びコンデン
サ3に電荷を蓄積させるために,充電電源1を前記基準
電圧に比例した出力が得られるように,立ち上がらせ
て,所望のコンデンサ充電特性を得る。このようにして
コンデンサ3の充電・放電を繰り返して,レーザ管に必
要な電力を供給する。At this time, the output voltage of the detection circuit 8 suddenly becomes 0 as shown in FIG. Then, the output voltage of the comparator U1 in the waveform shaping circuit 13 changes from low level to high level as shown in FIG. 2 (b). Then, it is differentiated by the differentiator composed of the capacitor C2 and the resistor R3, and a pulse waveform as shown in FIG. 2 (c) is generated at the output point (c) of the waveform shaping circuit 13. On the other hand, from the reference voltage source 11 to the integration circuit 12
The capacitor C1 is charged through the resistor R1 inside. Then, the pulse of the output of the waveform shaping circuit 13 is sent to the base of the transistor Q1, and the charge of the capacitor C1 is once discharged and drops to a low level as shown in FIG. As the slow integration circuit 12 again
Output voltage rises. Then, the output voltage of the integration circuit 12 is connected to one end of the comparator 10 and compared with the detection voltage obtained from the detection circuit 8. In order to supply the error signal generated in the comparator 10 to the control terminal of the charging power source 1 and store the charge in the capacitor 3 again, the charging power source 1 is turned on so as to obtain an output proportional to the reference voltage. To obtain the desired capacitor charging characteristics. In this way, the capacitor 3 is repeatedly charged and discharged to supply the laser tube with necessary power.
本発明は以上のように構成さてれいて,レーザ管側のス
イッチ手段の放電時刻を充電器側の回路のみで検出して
いるので,アイソレータが不要となり,高電圧,大電流
のスイッチの作動時のサージ電圧による誤動作や破壊の
原因がなくなる効果を有する。The present invention is configured as described above, and since the discharge time of the switch means on the laser tube side is detected only by the circuit on the charger side, an isolator is not required and a high voltage, large current switch is activated. This has the effect of eliminating the cause of malfunction or destruction due to the surge voltage of.
第1図は本発明のレーザ電源装置のブロック図を示し,
第2図は第1図に示すレーザ電源装置の動作を説明する
ための各部の波形図であり,第3図は従来のレーザ電源
装置のブロック図を示す。 1……充電電源、2……限流インピーダンス 3……コンデンサ 4……スイッチ 5……レーザ管,6……駆動回路 7……アイソレータ,8……検出回路 10……比較器 11……基準電圧源 12……積分回路 13……波形整形回路 C1,C2……コンデンサ R1〜R7……抵抗器 Q1……トランジスタ U1……コンパレータFIG. 1 shows a block diagram of a laser power supply device of the present invention,
FIG. 2 is a waveform diagram of each part for explaining the operation of the laser power supply device shown in FIG. 1, and FIG. 3 is a block diagram of a conventional laser power supply device. 1 ... Charging power source, 2 ... Current limiting impedance 3 ... Capacitor 4 ... Switch 5 ... Laser tube, 6 ... Drive circuit 7 ... Isolator, 8 ... Detection circuit 10 ... Comparator 11 ... Reference Voltage source 12 …… Integrator circuit 13 …… Wave shaping circuit C1, C2 …… Capacitor R1 to R7 …… Resistor Q1 …… Transistor U1 …… Comparator
Claims (1)
充電されるコンデンサとレーザ管に直列接続されたスイ
ッチ手段及び該スイッチ手段をトリガする駆動回路から
なるレーザ電源装置において, 前記スイッチ手段が導通するときに前記充電電源の出力
電圧の検出電圧を波形整計回路を介して積分回路に与え
てその積分動作を開始させて,基準電圧を立ち上がら
せ,該基準電圧にほぼ比例した充電電圧に前記コンデン
サを充電させることを特徴とするレーザ電源装置。1. A laser power supply device comprising a charging power source, a capacitor charged by the energy from the charging power source, a switch means connected in series to a laser tube, and a drive circuit for triggering the switching means. At this time, the detected voltage of the output voltage of the charging power source is applied to the integrating circuit via the waveform rectifying circuit to start the integrating operation, raise the reference voltage, and set the charging voltage to be approximately proportional to the reference voltage. A laser power supply device characterized by charging a capacitor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24768187A JPH0783151B2 (en) | 1987-09-30 | 1987-09-30 | Laser power supply |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24768187A JPH0783151B2 (en) | 1987-09-30 | 1987-09-30 | Laser power supply |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6489578A JPS6489578A (en) | 1989-04-04 |
JPH0783151B2 true JPH0783151B2 (en) | 1995-09-06 |
Family
ID=17167068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24768187A Expired - Lifetime JPH0783151B2 (en) | 1987-09-30 | 1987-09-30 | Laser power supply |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0783151B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9498845B2 (en) | 2007-11-08 | 2016-11-22 | Applied Materials, Inc. | Pulse train annealing method and apparatus |
US20090120924A1 (en) * | 2007-11-08 | 2009-05-14 | Stephen Moffatt | Pulse train annealing method and apparatus |
-
1987
- 1987-09-30 JP JP24768187A patent/JPH0783151B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6489578A (en) | 1989-04-04 |
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