JPS6487591A - Production of crucible for pulling up semiconductor - Google Patents
Production of crucible for pulling up semiconductorInfo
- Publication number
- JPS6487591A JPS6487591A JP24282287A JP24282287A JPS6487591A JP S6487591 A JPS6487591 A JP S6487591A JP 24282287 A JP24282287 A JP 24282287A JP 24282287 A JP24282287 A JP 24282287A JP S6487591 A JPS6487591 A JP S6487591A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- aln
- coating
- pulling
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24282287A JPS6487591A (en) | 1987-09-29 | 1987-09-29 | Production of crucible for pulling up semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24282287A JPS6487591A (en) | 1987-09-29 | 1987-09-29 | Production of crucible for pulling up semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6487591A true JPS6487591A (en) | 1989-03-31 |
Family
ID=17094809
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24282287A Pending JPS6487591A (en) | 1987-09-29 | 1987-09-29 | Production of crucible for pulling up semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6487591A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6802999B1 (en) * | 2002-06-13 | 2004-10-12 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method of fabricating protective coating for a crucible with the coating having channels formed therein |
-
1987
- 1987-09-29 JP JP24282287A patent/JPS6487591A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6802999B1 (en) * | 2002-06-13 | 2004-10-12 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method of fabricating protective coating for a crucible with the coating having channels formed therein |
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