JPS6483915A - Method for controlling magnetically levitating device during lift-off - Google Patents

Method for controlling magnetically levitating device during lift-off

Info

Publication number
JPS6483915A
JPS6483915A JP23794587A JP23794587A JPS6483915A JP S6483915 A JPS6483915 A JP S6483915A JP 23794587 A JP23794587 A JP 23794587A JP 23794587 A JP23794587 A JP 23794587A JP S6483915 A JPS6483915 A JP S6483915A
Authority
JP
Japan
Prior art keywords
gap
value
zero
load
levitating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23794587A
Other languages
Japanese (ja)
Other versions
JP2615666B2 (en
Inventor
Kazumichi Kato
Yutaka Kurita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP23794587A priority Critical patent/JP2615666B2/en
Publication of JPS6483915A publication Critical patent/JPS6483915A/en
Application granted granted Critical
Publication of JP2615666B2 publication Critical patent/JP2615666B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To avoid shock on a levitating body by estimating a gap at the time of lift-off, the load of the levitating body due to the electric current of a coil and further a gap corresponding to zero-power, and generating a gap command value based on these. CONSTITUTION:Displacement of a levitating body is controlled by a deviation between a command from a gap command generator 36 and an actual gap, through a current value to an coefficient element 45 which gives the suction force of an electromagnet and an integral element 44 for zero-power control is connected to it under a condition that a pre-determined gap is formed and current is controlled to become zero so that the load is supported by the suction force of a permanent magnet. In case the levitating body is lifted-off under a condition that the power supply is cut, the value of load is calculated by a load estimating device 50 based on the value of a gap and the value of current and further the value of a gap corresponding to zero-power is estimated by an estimating device 60 and the gap command value from the command generator 36 changes its value so that a switching to the zero-power control is carried out smoothly. Thus, shock and vibration to the levitating body such as a device for conveying wafers, etc., can be avoided.
JP23794587A 1987-09-22 1987-09-22 Control method at lift-off in magnetic levitation device Expired - Fee Related JP2615666B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23794587A JP2615666B2 (en) 1987-09-22 1987-09-22 Control method at lift-off in magnetic levitation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23794587A JP2615666B2 (en) 1987-09-22 1987-09-22 Control method at lift-off in magnetic levitation device

Publications (2)

Publication Number Publication Date
JPS6483915A true JPS6483915A (en) 1989-03-29
JP2615666B2 JP2615666B2 (en) 1997-06-04

Family

ID=17022788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23794587A Expired - Fee Related JP2615666B2 (en) 1987-09-22 1987-09-22 Control method at lift-off in magnetic levitation device

Country Status (1)

Country Link
JP (1) JP2615666B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0572854U (en) * 1991-01-24 1993-10-05 神鋼電機株式会社 Vibration suppression position control device for steel plate
JPH0663573U (en) * 1993-02-10 1994-09-09 鹿島建設株式会社 Hanging type non-vibration carrier
JP2009063004A (en) * 2007-09-04 2009-03-26 Osaka Vacuum Ltd Magnetic bearing system
JP2011125200A (en) * 2009-12-14 2011-06-23 Toshiba Elevator Co Ltd Magnetic levitation device
JP2012125067A (en) * 2010-12-09 2012-06-28 Toshiba Elevator Co Ltd Magnetic levitation apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0572854U (en) * 1991-01-24 1993-10-05 神鋼電機株式会社 Vibration suppression position control device for steel plate
JPH0663573U (en) * 1993-02-10 1994-09-09 鹿島建設株式会社 Hanging type non-vibration carrier
JP2009063004A (en) * 2007-09-04 2009-03-26 Osaka Vacuum Ltd Magnetic bearing system
JP2011125200A (en) * 2009-12-14 2011-06-23 Toshiba Elevator Co Ltd Magnetic levitation device
JP2012125067A (en) * 2010-12-09 2012-06-28 Toshiba Elevator Co Ltd Magnetic levitation apparatus

Also Published As

Publication number Publication date
JP2615666B2 (en) 1997-06-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees