JPS648286B2 - - Google Patents
Info
- Publication number
- JPS648286B2 JPS648286B2 JP57006533A JP653382A JPS648286B2 JP S648286 B2 JPS648286 B2 JP S648286B2 JP 57006533 A JP57006533 A JP 57006533A JP 653382 A JP653382 A JP 653382A JP S648286 B2 JPS648286 B2 JP S648286B2
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- movable
- electrodes
- electrode
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 49
- 238000001514 detection method Methods 0.000 claims description 27
- 238000005259 measurement Methods 0.000 claims description 7
- 230000010363 phase shift Effects 0.000 claims description 4
- 238000007493 shaping process Methods 0.000 description 5
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57006533A JPS58123419A (ja) | 1982-01-19 | 1982-01-19 | 変位検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57006533A JPS58123419A (ja) | 1982-01-19 | 1982-01-19 | 変位検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58123419A JPS58123419A (ja) | 1983-07-22 |
JPS648286B2 true JPS648286B2 (enrdf_load_stackoverflow) | 1989-02-13 |
Family
ID=11640989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57006533A Granted JPS58123419A (ja) | 1982-01-19 | 1982-01-19 | 変位検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58123419A (enrdf_load_stackoverflow) |
-
1982
- 1982-01-19 JP JP57006533A patent/JPS58123419A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58123419A (ja) | 1983-07-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4420754A (en) | Measuring device for capacitive determination of the relative position of two with respect to one another moveable parts | |
EP0240020A2 (en) | A capacitance type transducer for measuring positions | |
JPH0535801B2 (enrdf_load_stackoverflow) | ||
KR20010039758A (ko) | 센서 신호 처리 장치 | |
JPS62239019A (ja) | 容量型位置測定トランスデユ−サ | |
JPS648286B2 (enrdf_load_stackoverflow) | ||
EP0241913A2 (en) | Method and circuitry for detecting signals of capacitance type transducers for measuring positions | |
JPS62235503A (ja) | 容量型位置測定トランスデユ−サ | |
US6307366B1 (en) | Object position sensor using magnetic effect device | |
JPH0358447B2 (enrdf_load_stackoverflow) | ||
JPH0435690B2 (enrdf_load_stackoverflow) | ||
US7301348B2 (en) | Electrostatic encoder | |
JPH0435688B2 (enrdf_load_stackoverflow) | ||
JPH0546483B2 (enrdf_load_stackoverflow) | ||
JPH0129409B2 (enrdf_load_stackoverflow) | ||
SU1124178A1 (ru) | Измеритель толщины полимерных пленок | |
JPH0435691B2 (enrdf_load_stackoverflow) | ||
JPS6182112A (ja) | 測長器 | |
JPS60117108A (ja) | 磁性回転センサ | |
RU1813198C (ru) | Дифференциальный емкостной измеритель перемещений | |
SU1578448A1 (ru) | Способ измерени перемещений | |
RU2265800C1 (ru) | Дифференциальный емкостной измеритель перемещений | |
JPH04320901A (ja) | 絶対測定用変位測定装置 | |
JPH0581845B2 (enrdf_load_stackoverflow) | ||
RU43353U1 (ru) | Дифференциальный емкостной измеритель перемещений |