JPS6482588A - Method of controlling reflectivity of reflective film - Google Patents
Method of controlling reflectivity of reflective filmInfo
- Publication number
- JPS6482588A JPS6482588A JP24180487A JP24180487A JPS6482588A JP S6482588 A JPS6482588 A JP S6482588A JP 24180487 A JP24180487 A JP 24180487A JP 24180487 A JP24180487 A JP 24180487A JP S6482588 A JPS6482588 A JP S6482588A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- change
- reflectivity
- reflective film
- quantum efficiency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Lasers (AREA)
Abstract
PURPOSE:To control precisely the reflectivity of a reflective film of semiconductor laser, by monitoring the laser light output from the end surface of a semiconductor laser not irradiated with a deposition beam, with a monitor, and measuring the change of threshold current or the change of external differential quantum efficiency of the semiconductor laser. CONSTITUTION:Since an end surface reflectivity Rv changes according to the change of thickness and refractive index of a reflective film, the reflectivity can be precisely measured, by monitoring the threshold current and the external differential quantum efficiency, with a photo diode 4. In practice, however, the temperature of a semiconductor laser 3 rises as the result of irradiation of a vapor-deposition beam (a), and the values of threshold current and external differential quantum efficiency change. Therefore a shielding plate 6 with a hole through which the vicinity of outputting part of lased light b1 of the semiconductor laser 3 is irradiated with the vapor-deposition beam (a) is arranged, in the front of the semiconductor laser 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24180487A JPS6482588A (en) | 1987-09-24 | 1987-09-24 | Method of controlling reflectivity of reflective film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24180487A JPS6482588A (en) | 1987-09-24 | 1987-09-24 | Method of controlling reflectivity of reflective film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6482588A true JPS6482588A (en) | 1989-03-28 |
Family
ID=17079755
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24180487A Pending JPS6482588A (en) | 1987-09-24 | 1987-09-24 | Method of controlling reflectivity of reflective film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6482588A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6869483B2 (en) * | 1998-03-21 | 2005-03-22 | Joachim Sacher | Coating process and apparatus |
-
1987
- 1987-09-24 JP JP24180487A patent/JPS6482588A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6869483B2 (en) * | 1998-03-21 | 2005-03-22 | Joachim Sacher | Coating process and apparatus |
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