JPS6482447A - Ion pump - Google Patents

Ion pump

Info

Publication number
JPS6482447A
JPS6482447A JP23879387A JP23879387A JPS6482447A JP S6482447 A JPS6482447 A JP S6482447A JP 23879387 A JP23879387 A JP 23879387A JP 23879387 A JP23879387 A JP 23879387A JP S6482447 A JPS6482447 A JP S6482447A
Authority
JP
Japan
Prior art keywords
electromagnet
ion pump
pump
magnetic field
anode cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23879387A
Other languages
Japanese (ja)
Inventor
Mikihiko Goshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP23879387A priority Critical patent/JPS6482447A/en
Publication of JPS6482447A publication Critical patent/JPS6482447A/en
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To reduce the size of a pump by installing an electromagnet generating the magnetic field in the direction parallel with an anode cell on the outside of the vacuum container of an ion pump. CONSTITUTION:An electromagnet 12 is installed on the outside of the vacuum container 4 of an ion pump, and a current is fed to an electromagnet coil 10 from an electromagnet power source 14 to generate the magnetic field. The strong magnetic field can be generated by increasing the current through the electromagnet 10 or increasing the number of turns of the coil 10. The minimum operating pressure of the ion pump can be reduced even if the diameter of an anode cell 2 is made smaller than that for a permanent magnet, and the ion pump can be operated at the extremely high vacuum. The diameter of the anode cell 12 can be reduced. The size of the pump can be thereby reduced.
JP23879387A 1987-09-25 1987-09-25 Ion pump Pending JPS6482447A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23879387A JPS6482447A (en) 1987-09-25 1987-09-25 Ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23879387A JPS6482447A (en) 1987-09-25 1987-09-25 Ion pump

Publications (1)

Publication Number Publication Date
JPS6482447A true JPS6482447A (en) 1989-03-28

Family

ID=17035366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23879387A Pending JPS6482447A (en) 1987-09-25 1987-09-25 Ion pump

Country Status (1)

Country Link
JP (1) JPS6482447A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0592953U (en) * 1992-05-13 1993-12-17 日本電子株式会社 Sputter ion pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0592953U (en) * 1992-05-13 1993-12-17 日本電子株式会社 Sputter ion pump

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