JPS6482037A - Device of correcting photomask white defect - Google Patents

Device of correcting photomask white defect

Info

Publication number
JPS6482037A
JPS6482037A JP24048887A JP24048887A JPS6482037A JP S6482037 A JPS6482037 A JP S6482037A JP 24048887 A JP24048887 A JP 24048887A JP 24048887 A JP24048887 A JP 24048887A JP S6482037 A JPS6482037 A JP S6482037A
Authority
JP
Japan
Prior art keywords
chrome
white defect
photomask
nearby
carbonyl vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24048887A
Other languages
English (en)
Inventor
Yosuke Kusumi
Yoichi Yoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP24048887A priority Critical patent/JPS6482037A/ja
Publication of JPS6482037A publication Critical patent/JPS6482037A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP24048887A 1987-09-25 1987-09-25 Device of correcting photomask white defect Pending JPS6482037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24048887A JPS6482037A (en) 1987-09-25 1987-09-25 Device of correcting photomask white defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24048887A JPS6482037A (en) 1987-09-25 1987-09-25 Device of correcting photomask white defect

Publications (1)

Publication Number Publication Date
JPS6482037A true JPS6482037A (en) 1989-03-28

Family

ID=17060259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24048887A Pending JPS6482037A (en) 1987-09-25 1987-09-25 Device of correcting photomask white defect

Country Status (1)

Country Link
JP (1) JPS6482037A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009020277A (ja) * 2007-07-11 2009-01-29 Omron Laserfront Inc ホトマスクの白欠陥修正方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009020277A (ja) * 2007-07-11 2009-01-29 Omron Laserfront Inc ホトマスクの白欠陥修正方法

Similar Documents

Publication Publication Date Title
TW200706827A (en) Illumination system for material inspection
DE69004404D1 (de) Apparat zur Erzeugung eines Strahlungsbildes.
JPS57182651A (en) Detection apparatus of particle agglomeration pattern
JPS647618A (en) Method and apparatus for exposing semiconductor
JPS57179651A (en) Inspecting device measuring defect of mouth section of glass vessel
JPS6482037A (en) Device of correcting photomask white defect
JPS53117978A (en) Automatic mask appearance inspection apparatus
DE68906100D1 (de) Apparat zur korrektur des dunkelsignals eines bildsensors.
JPH03255946A (ja) 検反装置
JPS5764153A (en) Bottle inspecting device
JPS5282396A (en) Printing and inspecting apparatus of bar code
JPS526526A (en) Noctovisible indicator needle for the exposure meter
NO953933L (no) Fremgangsmåte og apparat for prosesstyring
JPS5254483A (en) Method of inspecting photo mask patterns, etc.
JPS5754322A (en) Inspecting method for photomask
JPS57153443A (en) Discriminator for easiness of test
JPS55140230A (en) Pattern-correcting device
JPS5517460A (en) Inspection method for bottle
JPS52146685A (en) Inspecting apparatus of glass bottle etc.
JPH11339155A (ja) 煙感知器の搬送方法
DE59509215D1 (de) Verwendung eines Festbetts und Verfahren zur Rückhaltung von Polychlordibenzodioxinen und Polychlordibenzofuranen
JPS53135629A (en) Correcting device for emulsion photo-mask
JPS5740926A (en) Device for projection and exposure
JPS56125742A (en) Method for correcting photomask pattern defect
SE8701906D0 (sv) Forfarande och anordning for projicering av ett indikeringsmerke pa ett avsynat foremal