JPS6482037A - Device of correcting photomask white defect - Google Patents

Device of correcting photomask white defect

Info

Publication number
JPS6482037A
JPS6482037A JP24048887A JP24048887A JPS6482037A JP S6482037 A JPS6482037 A JP S6482037A JP 24048887 A JP24048887 A JP 24048887A JP 24048887 A JP24048887 A JP 24048887A JP S6482037 A JPS6482037 A JP S6482037A
Authority
JP
Japan
Prior art keywords
chrome
white defect
photomask
nearby
carbonyl vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24048887A
Other languages
English (en)
Inventor
Yosuke Kusumi
Yoichi Yoshino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP24048887A priority Critical patent/JPS6482037A/ja
Publication of JPS6482037A publication Critical patent/JPS6482037A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP24048887A 1987-09-25 1987-09-25 Device of correcting photomask white defect Pending JPS6482037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24048887A JPS6482037A (en) 1987-09-25 1987-09-25 Device of correcting photomask white defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24048887A JPS6482037A (en) 1987-09-25 1987-09-25 Device of correcting photomask white defect

Publications (1)

Publication Number Publication Date
JPS6482037A true JPS6482037A (en) 1989-03-28

Family

ID=17060259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24048887A Pending JPS6482037A (en) 1987-09-25 1987-09-25 Device of correcting photomask white defect

Country Status (1)

Country Link
JP (1) JPS6482037A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009020277A (ja) * 2007-07-11 2009-01-29 Omron Laserfront Inc ホトマスクの白欠陥修正方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009020277A (ja) * 2007-07-11 2009-01-29 Omron Laserfront Inc ホトマスクの白欠陥修正方法

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