DE69004404D1 - Apparat zur Erzeugung eines Strahlungsbildes. - Google Patents

Apparat zur Erzeugung eines Strahlungsbildes.

Info

Publication number
DE69004404D1
DE69004404D1 DE90121900T DE69004404T DE69004404D1 DE 69004404 D1 DE69004404 D1 DE 69004404D1 DE 90121900 T DE90121900 T DE 90121900T DE 69004404 T DE69004404 T DE 69004404T DE 69004404 D1 DE69004404 D1 DE 69004404D1
Authority
DE
Germany
Prior art keywords
generating
radiation image
radiation
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90121900T
Other languages
English (en)
Other versions
DE69004404T2 (de
Inventor
Motosada Kiri
Susumu Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of DE69004404D1 publication Critical patent/DE69004404D1/de
Application granted granted Critical
Publication of DE69004404T2 publication Critical patent/DE69004404T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914—Measurement of spatial distribution of radiation
    • G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
    • G01T1/2928—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/64—Circuit arrangements for X-ray apparatus incorporating image intensifiers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/32—Transforming X-rays
DE90121900T 1989-11-24 1990-11-15 Apparat zur Erzeugung eines Strahlungsbildes. Expired - Fee Related DE69004404T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1305646A JP2890553B2 (ja) 1989-11-24 1989-11-24 Ｘ線像撮像装置

Publications (2)

Publication Number Publication Date
DE69004404D1 true DE69004404D1 (de) 1993-12-09
DE69004404T2 DE69004404T2 (de) 1994-03-10

Family

ID=17947640

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90121900T Expired - Fee Related DE69004404T2 (de) 1989-11-24 1990-11-15 Apparat zur Erzeugung eines Strahlungsbildes.

Country Status (4)

Country Link
US (1) US5151588A (de)
EP (1) EP0429977B1 (de)
JP (1) JP2890553B2 (de)
DE (1) DE69004404T2 (de)

Families Citing this family (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0480096B1 (de) * 1990-10-12 1994-07-13 Siemens Aktiengesellschaft Röntgendiagnostikanlage mit einem Röntgenbildverstärker und einem Detektor für die Bildhelligkeit auf dessen Ausgangsschirm
JPH04295978A (ja) * 1991-03-25 1992-10-20 Eastman Kodak Japan Kk 画像読み取り装置
US5221848A (en) * 1992-04-30 1993-06-22 Eastman Kodak Company High dynamic range film digitizer and method of operating the same
EP0629105B1 (de) * 1993-05-21 1999-08-04 Koninklijke Philips Electronics N.V. Röntgenuntersuchungsgerät und Detektionssystem für ein sichtbares Bild für ein Röntgenuntersuchungsgerät
FR2711799B1 (fr) * 1993-10-29 1996-02-02 Stoichita Catalin Système et capteur pour numérisation par balayage des images en rayons X.
US5381014B1 (en) * 1993-12-29 1997-06-10 Du Pont Large area x-ray imager and method of fabrication
US5440139A (en) * 1994-03-02 1995-08-08 Grumman Aerospace Corporation Circuit for optically coupling a cryobenic detector array with processing circuitry and for increasing the dynamic range of detection
US5498880A (en) * 1995-01-12 1996-03-12 E. I. Du Pont De Nemours And Company Image capture panel using a solid state device
US5510623A (en) * 1995-02-24 1996-04-23 Loral Fairchild Corp. Center readout intra-oral image sensor
US5563406A (en) * 1995-03-23 1996-10-08 Northrop Grumman Corporation Optical sensor and a method of operating an optical sensor having an electronic switching circuit
US5796153A (en) * 1995-05-08 1998-08-18 Analogic Corporation Variable-response x-ray detection assemblies and methods of using same
JPH08313640A (ja) * 1995-05-17 1996-11-29 Hitachi Ltd 二次元放射線画像検出器
FR2735632B1 (fr) * 1995-06-14 1997-07-11 Commissariat Energie Atomique Dispositif et procede de numerisation pour detecteurs photosensibles et procede de lecture d'une matrice de detecteurs photoniques
US6205199B1 (en) 1995-06-23 2001-03-20 Science Applications International Corporation Pixel-correlated, digital X-ray imaging system
US5608774A (en) * 1995-06-23 1997-03-04 Science Applications International Corporation Portable, digital X-ray apparatus for producing, storing, and displaying electronic radioscopic images
US6389105B1 (en) 1995-06-23 2002-05-14 Science Applications International Corporation Design and manufacturing approach to the implementation of a microlens-array based scintillation conversion screen
US7289602B1 (en) 1995-06-23 2007-10-30 Science Applications International Corporation Portable, digital X-ray apparatus for producing, storing, and displaying electronic radioscopic images
US6178224B1 (en) 1995-06-23 2001-01-23 Science Applications International Corporation Enhanced X-ray converter screen for X-ray radioscopic systems
US7388205B1 (en) 1995-10-23 2008-06-17 Science Applications International Corporation System and method for target inspection using discrete photon counting and neutron detection
US6507025B1 (en) * 1995-10-23 2003-01-14 Science Applications International Corporation Density detection using real time discrete photon counting for fast moving targets
US7045787B1 (en) * 1995-10-23 2006-05-16 Science Applications International Corporation Density detection using real time discrete photon counting for fast moving targets
US6255654B1 (en) * 1995-10-23 2001-07-03 Science Applications International Corporation Density detection using discrete photon counting
US5693948A (en) * 1995-11-21 1997-12-02 Loral Fairchild Corporation Advanced CCD-based x-ray image sensor system
IL119033A0 (en) 1996-08-07 1996-11-14 Elscint Ltd Multi-slice detector array
GB2318411B (en) * 1996-10-15 1999-03-10 Simage Oy Imaging device for imaging radiation
US6091795A (en) * 1997-10-10 2000-07-18 Analogic Corporation Area detector array for computer tomography scanning system
WO1999030616A1 (en) * 1997-12-16 1999-06-24 Koninklijke Philips Electronics N.V. Computer tomography device
GB2332608B (en) 1997-12-18 2000-09-06 Simage Oy Modular imaging apparatus
EP1040654A1 (de) * 1998-07-23 2000-10-04 Koninklijke Philips Electronics N.V. Röntgenuntersuchungsvorrichtung mit hochauflösendendem bildsensor
US6389102B2 (en) * 1999-09-29 2002-05-14 Jordan Valley Applied Radiation Ltd. X-ray array detector
TW475330B (en) * 1999-10-29 2002-02-01 Hewlett Packard Co Photosensor array with multiple different sensor areas
US6292529B1 (en) 1999-12-15 2001-09-18 Analogic Corporation Two-dimensional X-ray detector array for CT applications
US6894812B1 (en) 2000-10-31 2005-05-17 Hewlett-Packard Development Company, L.P. Photosensor assembly with shared structures
US20020085108A1 (en) * 2000-12-29 2002-07-04 Hoffman David M. Reduced complexity interconnect for two dimensional multislice detectors
US7145151B2 (en) * 2000-12-29 2006-12-05 Ge Medical Systems Global Technology Company, Inc. Reduced complexity interconnect for two dimensional multislice detectors
US7088388B2 (en) * 2001-02-08 2006-08-08 Eastman Kodak Company Method and apparatus for calibrating a sensor for highlights and for processing highlights
US6642495B2 (en) * 2001-02-12 2003-11-04 Princeton Scientific Instruments Optical pulse counting imager and system
US7062013B2 (en) * 2001-04-12 2006-06-13 Jordan Valley Applied Radiation Ltd. X-ray reflectometry of thin film layers with enhanced accuracy
US6895075B2 (en) 2003-02-12 2005-05-17 Jordan Valley Applied Radiation Ltd. X-ray reflectometry with small-angle scattering measurement
US6947520B2 (en) 2002-12-06 2005-09-20 Jordan Valley Applied Radiation Ltd. Beam centering and angle calibration for X-ray reflectometry
US7361881B2 (en) * 2002-03-13 2008-04-22 Oy Ajat Ltd Ganged detector pixel, photon/pulse counting radiation imaging device
US6891146B2 (en) * 2002-07-30 2005-05-10 Hewlett-Packard Development Company, L.P. Photosensor assembly with shared charge transfer registers
GB0301183D0 (en) * 2003-01-18 2003-02-19 Rolls Royce Plc Electrostatic sensors
US7035375B2 (en) 2003-11-05 2006-04-25 Jordan Valley Applied Radiation Ltd. X-ray scattering with a polychromatic source
US7110496B1 (en) 2004-07-21 2006-09-19 Science Applications International Corporation Portable system and method for non-intrusive radioscopic imaging
US7068753B2 (en) * 2004-07-30 2006-06-27 Jordan Valley Applied Radiation Ltd. Enhancement of X-ray reflectometry by measurement of diffuse reflections
US7120228B2 (en) * 2004-09-21 2006-10-10 Jordan Valley Applied Radiation Ltd. Combined X-ray reflectometer and diffractometer
US7076024B2 (en) * 2004-12-01 2006-07-11 Jordan Valley Applied Radiation, Ltd. X-ray apparatus with dual monochromators
US7600916B2 (en) * 2004-12-01 2009-10-13 Jordan Valley Semiconductors Ltd. Target alignment for X-ray scattering measurements
US7474732B2 (en) 2004-12-01 2009-01-06 Jordan Valley Applied Radiation Ltd. Calibration of X-ray reflectometry system
US7804934B2 (en) 2004-12-22 2010-09-28 Jordan Valley Semiconductors Ltd. Accurate measurement of layer dimensions using XRF
US20070076842A1 (en) * 2005-09-30 2007-04-05 Tkaczyk John E Adaptable energy discriminating computed tomography system
DE102005049228B4 (de) 2005-10-14 2014-03-27 Siemens Aktiengesellschaft Detektor mit einem Array von Photodioden
JP2007151806A (ja) * 2005-12-05 2007-06-21 Ge Medical Systems Global Technology Co Llc Ｘ線ｃｔ撮像方法およびｘ線ｃｔ装置
KR101374308B1 (ko) * 2005-12-23 2014-03-14 조르단 밸리 세미컨덕터즈 리미티드 Ｘｒｆ를 사용한 층 치수의 정밀 측정법
US7481579B2 (en) * 2006-03-27 2009-01-27 Jordan Valley Applied Radiation Ltd. Overlay metrology using X-rays
JP2007267980A (ja) * 2006-03-31 2007-10-18 National Univ Corp Shizuoka Univ 回転機構のない連続処理型ｘ線ｃｔ装置
US20070274447A1 (en) * 2006-05-15 2007-11-29 Isaac Mazor Automated selection of X-ray reflectometry measurement locations
WO2008010512A1 (fr) * 2006-07-19 2008-01-24 Hitachi Medical Corporation Dispositif ct à rayons x et procédé de réduction du bruit dans une image
US7406153B2 (en) * 2006-08-15 2008-07-29 Jordan Valley Semiconductors Ltd. Control of X-ray beam spot size
IL180482A0 (en) * 2007-01-01 2007-06-03 Jordan Valley Semiconductors Inspection of small features using x - ray fluorescence
IL191154A0 (en) * 2007-05-04 2008-12-29 Gen Electric Photon counting x-ray detector with overrange logic control
DE102007033462A1 (de) 2007-07-18 2009-01-22 Siemens Ag Quantendetektormodul, Quantendetektor, Verfahren zur Ermittlung von Quantenabsorptionsereignissen, Computerprogrammprodukt und Strahlungserfassungseinrichtung
EP2028509A1 (de) * 2007-08-09 2009-02-25 European Organisation for Nuclear Research CERN Strahlungsüberwachungsvorrichtung
US7680243B2 (en) * 2007-09-06 2010-03-16 Jordan Valley Semiconductors Ltd. X-ray measurement of properties of nano-particles
US7732785B2 (en) * 2007-11-20 2010-06-08 Battelle Energy Alliance, Llc Radiation analysis devices, radiation analysis methods, and articles of manufacture
FR2938936B1 (fr) * 2008-11-25 2016-01-15 Sopro Dispositif d'acquisition d'images multifonction
US8314394B1 (en) 2009-11-04 2012-11-20 Science Applications International Corporation System and method for three-dimensional imaging using scattering from annihilation coincidence photons
US8243878B2 (en) * 2010-01-07 2012-08-14 Jordan Valley Semiconductors Ltd. High-resolution X-ray diffraction measurement with enhanced sensitivity
US8687766B2 (en) 2010-07-13 2014-04-01 Jordan Valley Semiconductors Ltd. Enhancing accuracy of fast high-resolution X-ray diffractometry
US8357903B2 (en) * 2010-10-19 2013-01-22 Kabushiki Kaisha Toshiba Segmented detector array
US8437450B2 (en) 2010-12-02 2013-05-07 Jordan Valley Semiconductors Ltd. Fast measurement of X-ray diffraction from tilted layers
DE102011076358B4 (de) * 2011-05-24 2016-11-03 Siemens Healthcare Gmbh Computertomographiesystem mit integrierenden und zählenden Detektorelementen
US8781070B2 (en) 2011-08-11 2014-07-15 Jordan Valley Semiconductors Ltd. Detection of wafer-edge defects
KR101973221B1 (ko) 2011-09-07 2019-04-26 라피스캔 시스템스, 인코포레이티드 적하목록 데이터를 이미징/검출 프로세싱에 통합시키는 x-선 검사시스템
US9390984B2 (en) 2011-10-11 2016-07-12 Bruker Jv Israel Ltd. X-ray inspection of bumps on a semiconductor substrate
JP5823813B2 (ja) * 2011-10-19 2015-11-25 浜松ホトニクス株式会社 放射線検出器
JP5995491B2 (ja) * 2012-04-06 2016-09-21 株式会社日立製作所 Ｘ線ｃｔ装置
US9036065B1 (en) 2012-08-16 2015-05-19 Rambus Inc. Shared-counter image sensor
US9389192B2 (en) 2013-03-24 2016-07-12 Bruker Jv Israel Ltd. Estimation of XRF intensity from an array of micro-bumps
WO2014203783A1 (ja) * 2013-06-20 2014-12-24 株式会社東芝 Ｘ線ｃｔ装置及び医用画像診断装置
US9551677B2 (en) 2014-01-21 2017-01-24 Bruker Jv Israel Ltd. Angle calibration for grazing-incidence X-ray fluorescence (GIXRF)
US9632043B2 (en) 2014-05-13 2017-04-25 Bruker Jv Israel Ltd. Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF
US9726624B2 (en) 2014-06-18 2017-08-08 Bruker Jv Israel Ltd. Using multiple sources/detectors for high-throughput X-ray topography measurement
CN107076862B (zh) * 2014-10-16 2019-04-26 株式会社日立制作所 射线检测器、射线摄像装置、计算机断层摄影装置以及射线检测方法
US9829448B2 (en) 2014-10-30 2017-11-28 Bruker Jv Israel Ltd. Measurement of small features using XRF
GB2564038B (en) 2016-02-22 2021-11-10 Rapiscan Systems Inc Systems and methods for detecting threats and contraband in cargo
GB2548352A (en) * 2016-03-14 2017-09-20 Kromek Ltd Detector
US10222489B2 (en) * 2017-03-13 2019-03-05 General Electric Company Pixel-design for use in a radiation detector
JP7179479B2 (ja) * 2017-04-13 2022-11-29 キヤノンメディカルシステムズ株式会社 Ｘ線ｃｔ装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4383327A (en) * 1980-12-01 1983-05-10 University Of Utah Radiographic systems employing multi-linear arrays of electronic radiation detectors
JPS6018070A (ja) * 1983-07-11 1985-01-30 Sharp Corp 二次元画像読取素子
JPH0640077B2 (ja) * 1983-10-12 1994-05-25 松下電器産業株式会社 放射線受像方法
EP0159840B1 (de) * 1984-04-14 1990-11-07 British Aerospace Public Limited Company Strahlungsdetektoranordnung
NL8502569A (nl) * 1985-09-20 1987-04-16 Philips Nv Roentgenonderzoekapparaat met een locaal opgedeelde hulpdetector.
US4804854A (en) * 1987-02-16 1989-02-14 Shimadzu Corporation Low-noise arrayed sensor radiation image detecting system wherein each sensor connects to a buffer circuit
FR2613831B1 (fr) * 1987-04-10 1993-09-17 Trt Telecom Radio Electr Procede pour ameliorer les performances d'une mosaique de detecteurs dont tous les elements n'ont pas le meme champ de vue
DE3877960D1 (de) * 1988-10-05 1993-03-11 Siemens Ag Roentgendiagnostikanlage mit einem detektor fuer die mittlere bildhelligkeit.

Also Published As

Publication number Publication date
US5151588A (en) 1992-09-29
EP0429977A2 (de) 1991-06-05
EP0429977B1 (de) 1993-11-03
JPH03165291A (ja) 1991-07-17
DE69004404T2 (de) 1994-03-10
EP0429977A3 (en) 1991-12-04
JP2890553B2 (ja) 1999-05-17

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