JPS6481218A - Soft landing apparatus - Google Patents

Soft landing apparatus

Info

Publication number
JPS6481218A
JPS6481218A JP23791487A JP23791487A JPS6481218A JP S6481218 A JPS6481218 A JP S6481218A JP 23791487 A JP23791487 A JP 23791487A JP 23791487 A JP23791487 A JP 23791487A JP S6481218 A JPS6481218 A JP S6481218A
Authority
JP
Japan
Prior art keywords
travel quantity
motor
travel
actual
comparing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23791487A
Other languages
Japanese (ja)
Inventor
Koichi Hasegawa
Hiroshi Nanami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Electronic Device Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Microelectronics Corp filed Critical Toshiba Corp
Priority to JP23791487A priority Critical patent/JPS6481218A/en
Publication of JPS6481218A publication Critical patent/JPS6481218A/en
Pending legal-status Critical Current

Links

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Abstract

PURPOSE:To prevent the damage of a semiconductor wafer when a sensor is broken, by comparing desired travel quantity of a holding board with actual travel quantity thereof and providing a motor driving control part for stopping a travel motor of the holding board. CONSTITUTION:When the travel quantity from the present position to a position to be traveled of a quartz fork 1 is computed at a part 24 for computing a desired travel quantity and the result is stored in a part 23 for storing the desired travel quantity, a rotation order signal is applied from a part 22 for controlling motor drive to a motor 3 and the quartz fork begins to travel. Then, the actual travel quantity traveled by the quartz fork 1 is computed at a part 19 for computing the actual travel quantity and the computed result is stored at a part 20 for storing the actual travel quantity and it is determined whether the actual travel quantity reaches the desired travel quantity by comparing the desired travel quantity with the actual travel quantity at a comparing and determining part 21. When it attains the desired travel quantity, the rotation to which a stop order signal is applied from the motor driving control part 22 to the motor 3 is stopped and positioning of the quartz fork 1 is completed. As a result, even if the limit sensor 15 in the tube is broken, it is possible to prevent a semiconductor wafer and the like from being damaged.
JP23791487A 1987-09-22 1987-09-22 Soft landing apparatus Pending JPS6481218A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23791487A JPS6481218A (en) 1987-09-22 1987-09-22 Soft landing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23791487A JPS6481218A (en) 1987-09-22 1987-09-22 Soft landing apparatus

Publications (1)

Publication Number Publication Date
JPS6481218A true JPS6481218A (en) 1989-03-27

Family

ID=17022315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23791487A Pending JPS6481218A (en) 1987-09-22 1987-09-22 Soft landing apparatus

Country Status (1)

Country Link
JP (1) JPS6481218A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100325798B1 (en) * 1998-01-14 2002-02-25 한병훈 Benzoquinone derivatives having antithrombotic and antimetastatic properties
JP2015122915A (en) * 2013-12-25 2015-07-02 日立オートモティブシステムズ株式会社 Rotation angle detecting device for synchronous rotary machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100325798B1 (en) * 1998-01-14 2002-02-25 한병훈 Benzoquinone derivatives having antithrombotic and antimetastatic properties
JP2015122915A (en) * 2013-12-25 2015-07-02 日立オートモティブシステムズ株式会社 Rotation angle detecting device for synchronous rotary machine

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