JPS6473716A - Plasma device - Google Patents

Abstract

PURPOSE:To simplify the composition of a plasma producer by eliminating a power supply in a magnetism producer by a method wherein the magnetism producer comprising a permanent magnet and a normally magnetic body is arranged on the side of a plasma leading-out window opposite to a specimen loaded on a specimen base controlling the distribution of plasma led out into a specimen chamber. CONSTITUTION:A microwave leading-in port 1c closed with a quartz glass sheet is provided on the central part of the upper wall in a plasma producing chamber 1 of a plasma producer and then a plasma leading-out window 1d is provided on the position of lower wall corresponding to the central leading-in port 1c while a specimen chamber 3 is arranged facing on the window 1d. Besides, an existing coil 4 is arranged extending over the producing chamber 1 and an end part of a waveguide 2 connected to the chamber 1. Furthermore, a specimen base 5 is arranged on the position corresponding to the window 1d in the specimen chamber 3 while a magnetism producer 6 is arranged on the side opposite to the side of the specimen base 5 loaded with a specimen S. This magnetism producer 6 is composed of a central bar yoke 6a, a circular yoke 6b made of normally magnetic body arranged concentrically around the bar yoke 6a and a bar permanent magnet 6c to eliminate a power supply.