JPS647360B2 - - Google Patents
Info
- Publication number
- JPS647360B2 JPS647360B2 JP1866280A JP1866280A JPS647360B2 JP S647360 B2 JPS647360 B2 JP S647360B2 JP 1866280 A JP1866280 A JP 1866280A JP 1866280 A JP1866280 A JP 1866280A JP S647360 B2 JPS647360 B2 JP S647360B2
- Authority
- JP
- Japan
- Prior art keywords
- output
- voltage
- abnormal discharge
- charged particle
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 46
- 230000002159 abnormal effect Effects 0.000 claims description 42
- 239000004065 semiconductor Substances 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 10
- 238000003754 machining Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1866280A JPS56116000A (en) | 1980-02-16 | 1980-02-16 | Charged particle beam machining equipmint |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1866280A JPS56116000A (en) | 1980-02-16 | 1980-02-16 | Charged particle beam machining equipmint |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56116000A JPS56116000A (en) | 1981-09-11 |
| JPS647360B2 true JPS647360B2 (ko) | 1989-02-08 |
Family
ID=11977816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1866280A Granted JPS56116000A (en) | 1980-02-16 | 1980-02-16 | Charged particle beam machining equipmint |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56116000A (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206200A (ja) * | 1985-03-08 | 1986-09-12 | 日新ハイボルテ−ジ株式会社 | 荷電粒子加速装置の放電検出回路 |
| JPH0619972B2 (ja) * | 1985-11-13 | 1994-03-16 | 株式会社日立製作所 | 電子ビ−ム加工機 |
| JP2656542B2 (ja) * | 1988-05-23 | 1997-09-24 | 株式会社日立製作所 | イオンビーム加工装置 |
| JP2848136B2 (ja) * | 1992-05-27 | 1999-01-20 | 日新ハイボルテージ株式会社 | 電子線照射装置用制御方式 |
| US6452196B1 (en) * | 1999-12-20 | 2002-09-17 | Axcelis Technologies, Inc. | Power supply hardening for ion beam systems |
| WO2014171287A1 (ja) * | 2013-04-17 | 2014-10-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1980
- 1980-02-16 JP JP1866280A patent/JPS56116000A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56116000A (en) | 1981-09-11 |
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