JPS6473200A - Coanda system vacuum device - Google Patents
Coanda system vacuum deviceInfo
- Publication number
- JPS6473200A JPS6473200A JP22778587A JP22778587A JPS6473200A JP S6473200 A JPS6473200 A JP S6473200A JP 22778587 A JP22778587 A JP 22778587A JP 22778587 A JP22778587 A JP 22778587A JP S6473200 A JPS6473200 A JP S6473200A
- Authority
- JP
- Japan
- Prior art keywords
- coanda surface
- spray nozzle
- flow passage
- flow
- vacuum device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jet Pumps And Other Pumps (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22778587A JPS6473200A (en) | 1987-09-11 | 1987-09-11 | Coanda system vacuum device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22778587A JPS6473200A (en) | 1987-09-11 | 1987-09-11 | Coanda system vacuum device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6473200A true JPS6473200A (en) | 1989-03-17 |
Family
ID=16866345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22778587A Pending JPS6473200A (en) | 1987-09-11 | 1987-09-11 | Coanda system vacuum device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6473200A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03260405A (ja) * | 1990-03-09 | 1991-11-20 | Mitsui Eng & Shipbuild Co Ltd | コアンダノズル |
JPH04184000A (ja) * | 1990-11-15 | 1992-06-30 | Mitsui Eng & Shipbuild Co Ltd | 圧縮性流体用エジェクタ |
JP2002186242A (ja) * | 2000-12-14 | 2002-06-28 | Nikon Corp | 電磁アクチュエータ装置、ステージ装置、露光装置及びデバイス |
JP2011067886A (ja) * | 2009-09-24 | 2011-04-07 | Disco Abrasive Syst Ltd | 被加工物保持装置 |
-
1987
- 1987-09-11 JP JP22778587A patent/JPS6473200A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03260405A (ja) * | 1990-03-09 | 1991-11-20 | Mitsui Eng & Shipbuild Co Ltd | コアンダノズル |
JPH04184000A (ja) * | 1990-11-15 | 1992-06-30 | Mitsui Eng & Shipbuild Co Ltd | 圧縮性流体用エジェクタ |
JP2002186242A (ja) * | 2000-12-14 | 2002-06-28 | Nikon Corp | 電磁アクチュエータ装置、ステージ装置、露光装置及びデバイス |
JP2011067886A (ja) * | 2009-09-24 | 2011-04-07 | Disco Abrasive Syst Ltd | 被加工物保持装置 |
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