JPS6473200A - Coanda system vacuum device - Google Patents

Coanda system vacuum device

Info

Publication number
JPS6473200A
JPS6473200A JP22778587A JP22778587A JPS6473200A JP S6473200 A JPS6473200 A JP S6473200A JP 22778587 A JP22778587 A JP 22778587A JP 22778587 A JP22778587 A JP 22778587A JP S6473200 A JPS6473200 A JP S6473200A
Authority
JP
Japan
Prior art keywords
coanda surface
spray nozzle
flow passage
flow
vacuum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22778587A
Other languages
English (en)
Inventor
Toshiaki Murata
Koichi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Engineering and Shipbuilding Co Ltd
Original Assignee
Mitsui Engineering and Shipbuilding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Engineering and Shipbuilding Co Ltd filed Critical Mitsui Engineering and Shipbuilding Co Ltd
Priority to JP22778587A priority Critical patent/JPS6473200A/ja
Publication of JPS6473200A publication Critical patent/JPS6473200A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jet Pumps And Other Pumps (AREA)
JP22778587A 1987-09-11 1987-09-11 Coanda system vacuum device Pending JPS6473200A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22778587A JPS6473200A (en) 1987-09-11 1987-09-11 Coanda system vacuum device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22778587A JPS6473200A (en) 1987-09-11 1987-09-11 Coanda system vacuum device

Publications (1)

Publication Number Publication Date
JPS6473200A true JPS6473200A (en) 1989-03-17

Family

ID=16866345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22778587A Pending JPS6473200A (en) 1987-09-11 1987-09-11 Coanda system vacuum device

Country Status (1)

Country Link
JP (1) JPS6473200A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03260405A (ja) * 1990-03-09 1991-11-20 Mitsui Eng & Shipbuild Co Ltd コアンダノズル
JPH04184000A (ja) * 1990-11-15 1992-06-30 Mitsui Eng & Shipbuild Co Ltd 圧縮性流体用エジェクタ
JP2002186242A (ja) * 2000-12-14 2002-06-28 Nikon Corp 電磁アクチュエータ装置、ステージ装置、露光装置及びデバイス
JP2011067886A (ja) * 2009-09-24 2011-04-07 Disco Abrasive Syst Ltd 被加工物保持装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03260405A (ja) * 1990-03-09 1991-11-20 Mitsui Eng & Shipbuild Co Ltd コアンダノズル
JPH04184000A (ja) * 1990-11-15 1992-06-30 Mitsui Eng & Shipbuild Co Ltd 圧縮性流体用エジェクタ
JP2002186242A (ja) * 2000-12-14 2002-06-28 Nikon Corp 電磁アクチュエータ装置、ステージ装置、露光装置及びデバイス
JP2011067886A (ja) * 2009-09-24 2011-04-07 Disco Abrasive Syst Ltd 被加工物保持装置

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