JPS647280Y2 - - Google Patents
Info
- Publication number
- JPS647280Y2 JPS647280Y2 JP16503782U JP16503782U JPS647280Y2 JP S647280 Y2 JPS647280 Y2 JP S647280Y2 JP 16503782 U JP16503782 U JP 16503782U JP 16503782 U JP16503782 U JP 16503782U JP S647280 Y2 JPS647280 Y2 JP S647280Y2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- vacuum
- switch
- signals
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 28
- 239000000498 cooling water Substances 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004453 electron probe microanalysis Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16503782U JPS5968200U (ja) | 1982-10-30 | 1982-10-30 | 真空排気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16503782U JPS5968200U (ja) | 1982-10-30 | 1982-10-30 | 真空排気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5968200U JPS5968200U (ja) | 1984-05-09 |
| JPS647280Y2 true JPS647280Y2 (enrdf_load_stackoverflow) | 1989-02-27 |
Family
ID=30361664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16503782U Granted JPS5968200U (ja) | 1982-10-30 | 1982-10-30 | 真空排気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5968200U (enrdf_load_stackoverflow) |
-
1982
- 1982-10-30 JP JP16503782U patent/JPS5968200U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5968200U (ja) | 1984-05-09 |
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