JPS5968200U - 真空排気装置 - Google Patents

真空排気装置

Info

Publication number
JPS5968200U
JPS5968200U JP16503782U JP16503782U JPS5968200U JP S5968200 U JPS5968200 U JP S5968200U JP 16503782 U JP16503782 U JP 16503782U JP 16503782 U JP16503782 U JP 16503782U JP S5968200 U JPS5968200 U JP S5968200U
Authority
JP
Japan
Prior art keywords
signal
vacuum
signals
switch
thermoswitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16503782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS647280Y2 (enrdf_load_stackoverflow
Inventor
森　優治
村山　善美
銭谷　福男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP16503782U priority Critical patent/JPS5968200U/ja
Publication of JPS5968200U publication Critical patent/JPS5968200U/ja
Application granted granted Critical
Publication of JPS647280Y2 publication Critical patent/JPS647280Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP16503782U 1982-10-30 1982-10-30 真空排気装置 Granted JPS5968200U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16503782U JPS5968200U (ja) 1982-10-30 1982-10-30 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16503782U JPS5968200U (ja) 1982-10-30 1982-10-30 真空排気装置

Publications (2)

Publication Number Publication Date
JPS5968200U true JPS5968200U (ja) 1984-05-09
JPS647280Y2 JPS647280Y2 (enrdf_load_stackoverflow) 1989-02-27

Family

ID=30361664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16503782U Granted JPS5968200U (ja) 1982-10-30 1982-10-30 真空排気装置

Country Status (1)

Country Link
JP (1) JPS5968200U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS647280Y2 (enrdf_load_stackoverflow) 1989-02-27

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