JPS647250Y2 - - Google Patents

Info

Publication number
JPS647250Y2
JPS647250Y2 JP1982162963U JP16296382U JPS647250Y2 JP S647250 Y2 JPS647250 Y2 JP S647250Y2 JP 1982162963 U JP1982162963 U JP 1982162963U JP 16296382 U JP16296382 U JP 16296382U JP S647250 Y2 JPS647250 Y2 JP S647250Y2
Authority
JP
Japan
Prior art keywords
evacuation
mesh
high vacuum
sample chamber
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982162963U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5967590U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16296382U priority Critical patent/JPS5967590U/ja
Publication of JPS5967590U publication Critical patent/JPS5967590U/ja
Application granted granted Critical
Publication of JPS647250Y2 publication Critical patent/JPS647250Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP16296382U 1982-10-27 1982-10-27 高真空排気装置 Granted JPS5967590U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16296382U JPS5967590U (ja) 1982-10-27 1982-10-27 高真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16296382U JPS5967590U (ja) 1982-10-27 1982-10-27 高真空排気装置

Publications (2)

Publication Number Publication Date
JPS5967590U JPS5967590U (ja) 1984-05-08
JPS647250Y2 true JPS647250Y2 (enrdf_load_html_response) 1989-02-27

Family

ID=30357708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16296382U Granted JPS5967590U (ja) 1982-10-27 1982-10-27 高真空排気装置

Country Status (1)

Country Link
JP (1) JPS5967590U (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5529269B2 (enrdf_load_html_response) * 1974-05-20 1980-08-02

Also Published As

Publication number Publication date
JPS5967590U (ja) 1984-05-08

Similar Documents

Publication Publication Date Title
JPS647250Y2 (enrdf_load_html_response)
US3368523A (en) Laminar flow work station
JPH1154400A (ja) 荷電ビーム描画装置及び方法
JPS5653324A (en) Exhaust mechanism for smoke generated from cooking oil and the like
WO2007107034A1 (fr) Structure d'aspiration d'appoint, et procédé correspondant
JPS59133365A (ja) 真空装置
JPH0717377Y2 (ja) 真空装置
JPH0137729Y2 (enrdf_load_html_response)
JPS6236737B2 (enrdf_load_html_response)
JPS62154752A (ja) ウエハ−ス吸着器
JPH0451861Y2 (enrdf_load_html_response)
JPH0250071A (ja) 真空オーブン装置
JPS6380148A (ja) 排気装置用二重構造フ−ド
JP2967795B2 (ja) 半導体製造装置
JPH0438516Y2 (enrdf_load_html_response)
JPH04366338A (ja) クリーンベンチ
JPS6034279Y2 (ja) 無塵室装置
JPS63299036A (ja) 真空装置
JPS6436888A (en) Door for clean room, etc.
JPS6332934Y2 (enrdf_load_html_response)
JPH05106886A (ja) クリーンルーム空調設備
JPS54157385A (en) Dust collecting device
JPH02215978A (ja) 真空処理装置
JPS5849038Y2 (ja) 循環流下式乾燥機における集塵装置
JPH0548330U (ja) クリーンベンチ